• Journal of the Korean Society for Heat Treatment
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• v.3 no.1
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• pp.1-7
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• 1990

To investigate the influence of r.f. power and electrode distance on the TiN deposition, TiN films were deposited onto STC3, STD11 steel and Si-wafer from gas mixtures of $TiC_4/N_2/H_2$ using the radio frequency plasma assisted chemical vapor deposition. The crystallinity of TiN film could be improved by the increase of r.f. power and the decrease of electrode distance. The TiN coated layer contains chlorine, its content were decreased with increasing r.f. power as well as decreasing electrode distance. And the thickness of deposited TiN was largely affected by r.f. power and electrode distance. The hardness of deposited TiN reached a maximum value of about Hv 2,000.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2000.04a
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• pp.87-96
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• 2000

The properties of polyimide for interlayer dielectric applications are investigated during plasma etching of aluminum on it. Chlorine-based plasma generally used for aluminum etching results in an increase in the (dielectric constant of polyimide, while $SF_6$ plasma exhibits a high polyimide etch rate and a reducing effect of the dielectric constant. The leakage current of polyimide is significantly suppressed after plasma exposure. An optimal combination of Al etch with $Cl_6$ plasma and polyimide etch with $SF_6$ plasma is expected to be a good tool for realizing multilevel metallization structures.

• Journal of the Korean Society of Combustion
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• v.3 no.2
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• pp.41-50
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• 1998

Numerical simulations of nonpremixed $CH_4/C_2HCl_3$(Trichloroethylene, TCE)/Air flames are conducted at atmospheric pressure in order to understand the effect of hydrocabon bound chlorine on methane/air flames. A chemical kinetic mechanism is employed, the adopted scheme involving 48 gas-phase species and 445 elementray reaction steps containing 223 backward reactions. The calculated temperature, velocity, and critical strain rate are compared with the experiments for the flame (16.1% TCE by Vol.) estabilished at a strain rate of $175s^{-1}$. Whereas there is overall good agreement between predictions and the measurements, it appears that the critical strain rate is higher than measured, and some areas of further refinement in the kinetic mechanism are required.

• Journal of the Korean Society for Heat Treatment
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• v.6 no.4
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• pp.223-229
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• 1993

Extensive reseach has been performed on the process condition-micro structure-stress relations of TiN film. The various proposed models are mainly base on physical vapor deposition processes. Especially the study on the micro-structure and deposition condition has not been sufficient in TiN deposited by PECVD. In this study, therefore, we discussed the morphological changes of TiN films by PECVD with different temperature and pressure, and compared it with the structure zone model. We could find out that the oxygen and chlorine contents and the texture coefficient increased with deposition temperature, and the morphology of TiN transformed from Zone 1 to Zone T, but deposition pressure didn't remarkly affected.

• Biotechnology and Bioprocess Engineering:BBE
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• v.7 no.1
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• pp.31-37
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• 2002

This paper was investigated to clarify the possibility of a biodegradation of materials adsorbed on different porous granular-activated carbons (GACs) such as coal-& coconut-based GAC. Total organic carbon, humic substance and ammonia were used to compare their removal efficiencies. The objective of this study is to determine the adsorption capacity of bioregenerated GAC. When raw water reacted with chloride, the yield of THMs increased as a function of the input amount of chloride. The formation of trihalomethanes (THMs) was investigated in water treated with chlorine when humic acid was used as THM precursor. As the input amount of chloride in raw water increased by two or five-fold to remove the $NH_3$, the chloroform of the THMs significantly increased also five or ten-fold. It was found that the chloroform was significantly removed by the treatment of biological activated carbon (BAG) in comparison with the ozone treatment, and the removal efficiency of THMs in coal-typed GAC was $10-30\%$ better than coconut-typed GAC due to the biological degradation on the surface of the activated carbons.

• Food Science and Preservation
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• v.3 no.1
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• pp.1-5
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• 1996

Salted Chinese cabbage were dipped in solutions of CaCl2 (0.1%, 0.5%, 1.0%), Ca-lactate (0.5%) alone, or with chlorine (NaOCl 200ppm) and stored at 3 or 23$^{\circ}C$ to determine the effects of calcium (Ca) on storage quality. pH change and microbial growth of salted cabbage were reduced in CaCl2 of 0.1% and 1.0% more than in the water-dipped control but better than in NaOCl treatment at two temperatures. Storage quality of salted cabvage was not affected by Ca contents or Ca with Cl treatment.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.7
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• pp.517-521
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• 1998

After etching Al-Cu alloy films using $SiCl_4/Cl_2/He/CHF_3$ plasma, a corrosion phenomenon on the metal surface has been studied with XPS(X-ray pheotoelectron spectroscopy) and SEM (Scanning electron microscopy). In Al-Cu alloy system, the corrosion occurs rapidly on the etched surface by residual chlorine atoms. To prevent the corrosion, $CHF_3$ plasma treatment subsequent to the etch has been carried put. A passivation layer is formed by fluorine-related compounds on the etched Al-Cu surface after $CHF_3$ treatment, and the layer suppresses effectively the corrosion on the surface as the $CHF_3$treatment in the pressure of 300m Torr.

• Journal of the Korean Chemical Society
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• v.48 no.6
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• pp.609-615
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• 2004

Alkoxyallylthiopyridazine derivatives which exhibit superior effect for the treatment of hepatic diseases were synthesized from maleic anhydrides. The reaction of maleic anhydrides with hydrazine monohydrate in aq HCl at reflux afforded dihydroxypyridazines, which were transformed to dichloropyridazines with phosphorus oxychloride. The substitution of the first chlorine atom in dichloropyridazines proceeded selectively with alcoholic sodium alkoxides in THF to afford alkoxychloropyridazines, which were converted to alkoxyallylthiopyridazines with lithium 2-propene-1-thiolate in high yields.

• Journal of Environmental Health Sciences
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• v.23 no.4
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• pp.67-72
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• 1997

To evaluate the effectiveness of water treatment using nanofiltration, ultrafiltration, and microfiltration systems, tapwater contaminated by bacteria and nitrate nitrogen was filtered, and then the rates of removal for many kinds of contaminants were comp.ared and investigated. The rates of turbidity removal by these systems are around 80% all of them. However, nanofiltration system is the most effective as hardness removal is 80%, suspended solids 90%, total residual chlorine 90% and nitrate nitrogen 69%. Among nanofiltration, ultrafiltration and microfiltration systems, nanofiltration system is the most stable in flow rate of permeate. Comparing hollow and spiral type of ultrafiltration, microfiltration each, spiral type is more stable than hollow type owing to rinsing effect of brine. The values of pH in ultrafiltration and microfiltration systems are between 7, 0 and 7.5, and that of nanofiltration system is low to 6.2-7.0. The effectiveness of heterotrophic bacteria removal is the most excellent in the nanofiltration system.

• Journal of Environmental Health Sciences
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• v.33 no.1 s.94
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• pp.43-48
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• 2007

This study investigated the effects of pH, alkalinity, and chlorine ion which are important water quality impact factors to the corrosion in the simulated distribution system where the copper pipe is affixed. The result shows that pitting index was increased as the alkalinity and chloride ion increase in the distilled water, but there was no relation to pH. Actually the uniform corrosion rate was decreased as the pH increase with the laboratory tap water. In conclusion, it is necessary to control the pH which stands above minimum 7.5 to prevent pitting corrosion in the copper pipe. Consequently, comprehensive research about the effect of lime soda($Ca(OH)_2$) which was used as a coagulation additive in the water treatment plant to pipe corrosion must be accomplished additionally.