• Journal of the Semiconductor & Display Technology
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• v.21 no.1
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• pp.119-126
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• 2022

MAS-based glass, which has been studied to replace the ceramic material used in the plasma etching chamber, has problems such as forming and processing due to its high melting temperature. To solve this problem, in this study, fluoride was added to the existing MAS-based glass to increase the workability in the glass manufacturing and to improve the chemical resistance to CF₄/Ar/O₂ plasma gas. Through RAMAN analysis, the structural change of the glass according to the addition of fluoride was observed. In addition, it was confirmed that high-temperature viscosity and thermal properties decreased as the fluoride content increased and plasma resistance was maintained, it showed an excellent etching rate of up to 11 times compared to quartz glass.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2020.11a
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• pp.98-99
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• 2020

This study is aim to assess mechanical properties which is highly related to structural safe and durability of 100MPa high strength concrete mixed with amorphous metallic fiber. All specimens were heated with low velocity heating rate(1℃/min.), residual compressive strength and residual flexural strength was evaluated. The specimens were cooled down to room temperature after heating. As a result, in the case of 100MPa high-strength concrete, the residual compressive strength enhancing effect of amorphous metallic fiber has showed with the mix proportion of fiber. In addition, residual flexural strength showed more regular pattern before 300℃ then residual compressive strength, but simillar decreasing behavior was shown after 300℃ like residual compressive strength. Further study about fiber pull-out behavior and fiber mechanical, chemical property change due to temperature is needed.

• Journal of the Korean Chemical Society
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• v.51 no.2
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• pp.129-135
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• 2007

The critical micelle concentrations (CMC) and the counter ion binding constants (B) in a micellar state of the mixed surfactant systems of Tetradecyltrimethylammonium bromide (TTAB) with Polyoxyethylene(23) lauryl ether (Brij 35) in water were determined as a function of α1 (the overall mole fraction of TTAB) by the use of electric conductivity method and surface tensiometer method from 15 oC to 35 oC. Values of thermodynamic parameters (ΔGom, ΔHom, and ΔSom) for the micellization of TTAB/Brij 35 mixtures were calculated and analyzed from the temperature dependence of CMC values. The results say that the measured values of ΔGom are all negative at the whole measured condition but the values of ΔSom and ΔHom are positive or negative, depending on the measured temperature and α1.

• Korean Chemical Engineering Research
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• v.50 no.1
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• pp.72-75
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• 2012

In our experiments, strain-free nanowires(NWs) were dispersed on to the substrate, followed by e-beam lithography(EBL) to fabricate single nanowire ultraviolet(UV) sensor devices. Focused-ion beam(FIB), micro-Raman spectroscopy and photoluminescence were employed to characterize the structural and optical properties of AlGaN/GaN NWs. Also, I-V characteristics were obtained under both dark condition and UV lamp to demonstrate AlGaN/GaN NW-based UV sensors. The conductance of a single AlGaN/GaN UV sensor was 9.0 ${\mu}S$(under dark condition) and 9.5 ${\mu}S$ (under UV lamp), respectively. The currents were enhanced by excess carriers under UV lamp. Fast saturation and decay time were demonstrated by the cycled processes between UV lamp and dark condition. Therefore, we believe that AlGaN/GaN NWs have a great potential for UV sensor applications.

• Carbon letters
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• v.11 no.4
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• pp.293-297
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• 2010

To investigate new potential application of a clay material for C/C composites, illite added C/C composites were prepared with various illite contents. The improvement of filler effect by illite size reduction was also investigated using wet ballmilling by evaluating illite/phenolic resin infiltration using bulk density and porosity measurements, chemical structural changes of the composites using XRD, and thermal oxidation stability in air of the composites using TGA. The size reduction of illite resulted in narrower particle size distribution and improved illite infiltration into carbon preform. And the resultant C/C composites prepared with illite had even more improved thermal oxidation stability in air, showing more increased IDTs up to $100^{\circ}C$, compared to those of the C/C composites with pristine illite, due to the SiC formation through carbothermal reduction between illite and carbon materials. The illite induced delay in oxidation of the illite-C/C composites was also observed and the delayed oxidation behavior was attributed to the layered structure of illite, which improved illite/phenol resin infiltration. Therefore, the potential use of illite as filler to improve oxidation stability of C/C composite can be promising. And the size reduction of illite can improve its effect on the desired properties of illite-C/C composites even more.

• Korean Journal of Materials Research
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• v.27 no.7
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• pp.392-397
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• 2017

Fluorine-doped tin oxide (FTO) coated NiCrAl alloy foam is fabricated using ultrasonic spray pyrolysis deposition (USPD). To confirm the influence of the FTO layer on the NiCrAl alloy foam, we investigated the structural, chemical, and morphological properties and chemical resistance by using USPD to adjust the FTO coating time (12, 18, and 24 min). As a result, when an FTO layer was coated for 24 min on NiCrAl alloy foam, it was found to have an enhanced chemical resistance compared to those of the other samples. This improvement in the chemical resistance of using USPD NiAlCr alloy foam can be the result of the existence of an FTO layer, which can act as a protection layer between the NiAlCr alloy foam and the electrolyte and also the result of the increased thickness of the FTO layer, which enhances the diffusion length of the metal ion.

• Journal of Powder Materials
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• v.26 no.4
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• pp.282-289
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• 2019

Ti has received considerable attention for aerospace, vehicle, and semiconductor industry applications because of its acid-resistant nature, low density, and high mechanical strength. A common precursor used for preparing Ti materials is $TiCl_4$. To prepare high-purity $TiCl_4$, a process based on the removal of $VOCl_3$ has been widely applied. However, $VOCl_3$ removal by distillation and condensation is difficult because of the similar physical properties of $TiCl_4$ and $VOCl_3$. To circumvent this problem, in this study, we have developed a process for $VOCl_3$ removal using Cu powder and mineral oil as purifying agents. The effects of reaction time and temperature, and ratio of purifying agents on the $VOCl_3$ removal efficiency are investigated by chemical and structural measurements. Clear $TiCl_4$ is obtained after the removal of $VOCl_3$. Notably, complete removal of $VOCl_3$ is achieved with 2.0 wt% of mineral oil. Moreover, the refined $TiCl_4$ is used as a precursor for the synthesis of Ti powder. Ti powder is fabricated by a thermal reduction process at $1,100^{\circ}C$ using an $H_2-Ar$ gas mixture. The average size of the Ti powder particles is in the range of $1-3{\mu}m$.

• Korean Journal of Materials Research
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• v.29 no.5
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• pp.328-335
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• 2019

Nb-doped $TiO_2$(NTO) coated NiCrAl alloy foam for hydrogen production is prepared using ultrasonic spray pyrolysis deposition(USPD) method. To optimize the size and distribution of NTO particles based on good physical and chemical stability, we synthesize particles by adjusting the weight ratio of the Nb precursor solution(5 wt%, 10 wt% and 15 wt%). The morphological, chemical bonding, and structural properties of the NTO coated NiCrAl alloy foam are investigated by X-ray diffraction(XRD), X-ray photo-electron spectroscopy(XPS), and Field-Emission Scanning Electron Microscopy(FESEM). As a result, the samples of controlled Nb weight ratio exhibit a common diffraction pattern at ${\sim}25.3^{\circ}$, corresponding to the(101) plane, and have chemical bonding(O-Nb=O) at 534 eV. The NTO particles with the optimum weight ratio of N (10 wt%) show a uniform distribution with a size of ~18.2-21.0 nm. In addition, they exhibit the highest corrosion resistance even in the electrochemical stability estimation. As a result, the introduction of NTO coated NiCrAl alloy foam by USPD improves the chemical stability of the NiCrAl alloy foam by protecting the direct electrochemical reaction between the foam and the electrolyte. Thus, the optimized NTO coating can be proposed for excellent protection of NiCrAl alloy foam for hydrocarbon-based steam methane reforming(SMR).

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1818-1820
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• 1999

This paper presents direct ${\mu}c$-Si:H thin film growth on the glass substrates using RPCVD system (remote plasma chemical vapor deposition) in low temperature. Hydrogenated micro-crystalline silicon deposited by RPCVD system in low temperature is very useful material for photovoltaic devices, sensor applications, and TFTs (thin film transistors). Varying the deposition conditions such as substrate temperature, gas flow rate, reactive gas ratio $(SiH_4/H_2)$, total chamber pressure, and rf power, we deposited ${\mu}c$-Si:H thin films on the glass substrates (Corning glass 1737). And then we measured the structural and electrical properties of the films.

• 한국신재생에너지학회:학술대회논문집
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• 2010.06a
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• pp.229.1-229.1
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• 2010

We investigated the effect of chemical acid treatments on hydrogen storage behaviors of the ordered mesoporous carbons (MCs). The surface functional groups and specific elements of the MCs were characterized with Fourier Transform Infrared (FT-IR) spectrometry and X-ray photoelectron spectroscopy (XPS). Also, the changes in the surface functional groups of the MCs were quantitatively detected by Boehm's titration method. The structural properties of the MCs were investigated using X-ray diffraction (XRD). The hydrogen adsorption capacity of the MCs was evaluated by means of adsorption isotherms at 77 K/1 bar. The formation of surface functional groups by the acidic treatments could influence on the hydrogen storage capacity of the MCs.