• Title/Summary/Keyword: Chemical vapor synthesis

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Catalytic synthesis and properties of β-Ga2O3 nanowires by metal organic chemical vapor deposition (MOCVD를 이용한 금속 촉매 종류에 따른 β-Ga2O3 나노 와이어의 제작과 특성)

  • Lee, Seunghyun;Lee, Seoyoung;Jeong, Yongho;Lee, Hyojong;Ahn, Hyungsoo;Yang, Min
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.27 no.1
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    • pp.1-8
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    • 2017
  • Catalytic synthesis and properties of ${\beta}-Ga_2O_3$ nanowires grown by metal organic chemical vapor deposition are reported. Au, Ni and Cu catalysts were suitable for the growth of $Ga_2O_3$ nanowires under our experimental conditions. The $Ga_2O_3$ nanowires grown by using Au, Ni and Cu catalysts showed different growth rates and morphologies in each case. We found the $Ga_2O_3$ nanowires were grown by the Vapor-Solid (VS) process when Ni was used as a catalyst while the Vapor-Liquid-Solid (VLS) was a dominant process in case of Au and Cu catalysts. Also, we found nanowires showed different optical properties depend on catalytic metals. On the other hand, for the cases of Ti, Sn and Ag catalysts, nanowires could not be obtained under the same condition of Au, Cu and Ni catalytic synthesis. We found that these results are related to the different characteristics of each catalyst, such as, melting points and phase diagrams with gallium metal.

Synthesis of Graphene on Hexagonal Boron Nitride by Low Pressure Chemical Vapor

  • Han, Jae-Hyun;Yeo, Jong-Souk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.391-392
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    • 2012
  • Graphene is a perfectly two-dimensional (2D) atomic crystal which consists of sp2 bonded carbon atoms like a honeycomb lattice. With its unique structure, graphene provides outstanding electrical, mechanical, and optical properties, thus enabling wide variety of applications including a strong potential to extend the technology beyond the conventional Si based electronic materials. Currently, the widespread application for electrostatically switchable devices is limited by its characteristic of zero-energy gap and complex process in its synthesis. Several groups have investigated nanoribbon, strained, or nanomeshed graphenes to induce a band gap. Among various techniques to synthesize graphene, chemical vapor deposition (CVD) is suited to make relatively large scale growth of graphene layers. Direct growth of graphene on hexagonal boron nitride (h-BN) using CVD has gained much attention as the atomically smooth surface, relatively small lattice mismatch (~1.7%) of h-BN provides good quality graphene with high mobility. In addition, induced band gap of graphene on h-BN has been demonstrated to a meaningful value about ~0.5 eV.[1] In this paper, we report the synthesis of grpahene / h-BN bilayer in a chemical vapor deposition (CVD) process by controlling the gas flux ratio and deposition rate with temperature. The h-BN (99.99%) substrate, pure Ar as carrier gas, and $CH_4$ are used to grow graphene. The number of graphene layer grown on the h-BN tends to be proportional to growth time and $CH_4$ gas flow rate. Epitaxially grown graphene on h-BN are characterized by scanning electron microscopy, atomic force microscopy, and Raman spectroscopy.

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Synthesis of Vertically Aligned Single-Walled Carbon Nanotubes by Thermal Chemical Vapor Deposition (열 화학기상증착법을 이용한 수직 정렬된 단일벽 탄소나노튜브의 합성)

  • Jang, Sung-Won;Song, Woo-Seok;Kim, Yoo-Seok;Kim, Sung-Hwan;Park, Sang-Eun;Park, Chong-Yun
    • Journal of the Korean Vacuum Society
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    • v.21 no.2
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    • pp.113-119
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    • 2012
  • Carbon nanotubes have emerged as a promising material for multifaceted applications, such as composited nanofiber, field effect transistors, field emitters, gas sensors due to their extraordinary electrical and physical properties. In particular, synthesis of vertically aligned carbon nanotubes with a high aspect ratio has recently attracted attention for many applications. However, mass production of high-quality single-walled carbon nanotubes is still remain elusive. In this study, an effect of chemical vapor deposition conditions, including catalyst thickness, feedstock flow rate, and growth temperature, on synthesis of carbon nanotube was systematically investigated.

Vapor Deposition Techniques for Synthesis of Two-Dimensional Transition Metal Dichalcogenides

  • Song, Jeong-Gyu;Park, Kyunam;Park, Jusang;Kim, Hyungjun
    • Applied Microscopy
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    • v.45 no.3
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    • pp.119-125
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    • 2015
  • Two-dimensional (2D) transition metal dichalcogenides (TMDCs) have attracted significant attention due to their unique and exotic properties attributed to their low dimensionality. In particular, semiconducting 2D TMDCs such as $MoS_2$, $WS_2$, $MoSe_2$, and $WSe_2$ have been demonstrated to be feasible for various advanced electronic and optical applications. In these regards, process to synthesize high quality 2D TMDCs layers with high reliability, wafer-scale uniformity, controllable layer number and excellent electronic properties is essential in order to use 2D TMDCs in practical applications. Vapor deposition techniques, such as physical vapor deposition, chemical vapor deposition and atomic layer deposition, could be promising processes to produce high quality 2D TMDCs due to high purity, thickness controllability and thickness uniformity. In this article, we briefly review recent research trend on vapor deposition techniques to synthesize 2D TMDCs.

Fabrication of Nanostructured WC/Co Alloy by Chemical Processes

  • Kim, Byoung-Kee;Ha, Gook-Hyun
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09a
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    • pp.346-347
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    • 2006
  • New manufacturing processes, such as thermochemical, mechanochemical and chemical vapor condensation processes have been developed to obtain nanostructured WC/Co materials. Nanoscale size WC/Co composite powders of near 100-150nm can be synthesizes by thermochemical and mechanochemical processes using water soluble precursors. Non-agglomerated and nano sized WC powder can be synthesized by the chemical vapor condensation process using metallorganic precursors as starting materials. In this paper, the scientific and technical issues on synthesis and consolidation of nanostructured WC/Co alloys produced by new chemical processes are introduced.

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Synthesis of TiO2 Nanowires by Metallorganic Chemical Vapor Deposition (유기금속 화학기상증착법을 이용한 TiO2 나노선 제조)

  • Heo, Hun-Hoe;Nguyen, Thi Quynh Hoa;Lim, Jae-Kyun;Kim, Gil-Moo;Kim, Eui-Tae
    • Korean Journal of Materials Research
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    • v.20 no.12
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    • pp.686-690
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    • 2010
  • $TiO_2$ nanowires were self-catalytically synthesized on bare Si(100) substrates using metallorganic chemical vapor deposition. The nanowire formation was critically affected by growth temperature. The $TiO_2$ nanowires were grown at a high density on Si(100) at $510^{\circ}C$, which is near the complete decomposition temperature ($527^{\circ}C$) of the Ti precursor $(Ti(O-iPr)_2(dpm)_2)$. At $470^{\circ}C$, only very thin (< $0.1{\mu}m$) $TiO_2$ film was formed because the Ti precursor was not completely decomposed. When growth temperature was increased to $550^{\circ}C$ and $670^{\circ}C$, the nanowire formation was also significantly suppressed. A vaporsolid (V-S) growth mechanism excluding a liquid phase appeared to control the nanowire formation. The $TiO_2$ nanowire growth seemed to be activated by carbon, which was supplied by decomposition of the Ti precursor. The $TiO_2$ nanowire density was increased with increased growth pressure in the range of 1.2 to 10 torr. In addition, the nanowire formation was enhanced by using Au and Pt catalysts, which seem to act as catalysts for oxidation. The nanowires consisted of well-aligned ~20-30 nm size rutile and anatase nanocrystallines. This MOCVD synthesis technique is unique and efficient to self-catalytically grow $TiO_2$ nanowires, which hold significant promise for various photocatalysis and solar cell applications.

Nanocarbon synthesis using plant oil and differential responses to various parameters optimized using the Taguchi method

  • Tripathi, Suman;Sharon, Maheshwar;Maldar, N.N.;Shukla, Jayashri;Sharon, Madhuri
    • Carbon letters
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    • v.14 no.4
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    • pp.210-217
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    • 2013
  • The synthesis of carbon nanomaterials (CNMs) by a chemical vapor deposition method using three different plant oils as precursors is presented. Because there are four parameters involved in the synthesis of CNM (i.e., the precursor, reaction temperature of the furnace, catalysts, and the carrier gas), each having three variables, it was decided to use the Taguchi optimization method with the 'the larger the better' concept. The best parameter regarding the yield of carbon varied for each type of precursor oil. It was a temperature of $900^{\circ}C$ + Ni as a catalyst for neem oil; $700^{\circ}C$ + Co for karanja oil and $500^{\circ}C$ + Zn as a catalyst for castor oil. The morphology of the nanocarbon produced was also impacted by different parameters. Neem oil and castor oil produced carbon nanotube (CNT) at $900^{\circ}C$; at lower temperatures, sphere-like structures developed. In contrast, karanja oil produced CNTs at all the assessed temperatures. X-ray diffraction and Raman diffraction analyses confirmed that the nanocarbon (both carbon nano beads and CNTs) produced were graphitic in nature.