• Title/Summary/Keyword: Chemical characterization

Search Result 2,951, Processing Time 0.034 seconds

Characterization of Ultra Low-k SiOC(H) Film Deposited by Plasma-Enhanced Chemical Vapor Deposition (PECVD)

  • Kim, Sang-Yong
    • Transactions on Electrical and Electronic Materials
    • /
    • v.13 no.2
    • /
    • pp.69-72
    • /
    • 2012

  • In this study, deposition of low-dielectric constant SiOC(H) films by conventional plasma-enhanced chemical vapor deposition (PECVD) were investigated through various characterization techniques. The results show that, with an increase in the plasma power density, the relative dielectric constant (k) of the deposited films decreases whereas the refractive index increases. This is mainly due to the incorporation of organic molecules with $CH_3$ group into the Si-O-Si cage structure. It is as confirmed by FT-IR measurements in which the absorption peak at 1,129 $cm^{-1}$ corresponding to Si-O-Si cage structure increases with power plasma density. Electrical characterization reveals that even after fast thermal annealing process, the leakage current density of the deposited films is in the order of $10^{-11}$ A/cm at 1.5 MV/cm. The reliability of the SiOC(H) film is also further characterized by using BTS test.

  • https://doi.org/10.4313/TEEM.2012.13.2.69 인용 PDF KSCI

Characterization of polymer inclusion membrane containing Aliquat 336 as a carrier

  • Manzak, Aynur;Yildiz, Yasemin;Tutkun, Osman
    • Membrane and Water Treatment
    • /
    • v.6 no.2
    • /
    • pp.95-102
    • /
    • 2015

  • The presented research is about characterization of Cellulose Triacetate (CTA) based Polymer Inclusion Membranes (PIMs) which incorporated the commercial extractant Aliquat 336, Tributylphosphate (TBP) as modifier and 2-Nitro Phenyl Pentyl Ether (NPPE) as plasticizer, for the preparation of the membranes. Chemical and physical characteristics of the synthesized membranes especially membrane thickness and side difference effects were investigated. Different surface structures and membrane thickness affect the extraction efficiency of membranes. Membrane extraction experiments were studied where the glass-facing surface of the membranes placed next to feed phase and the air-facing surface to stripping phase. The membrane was characterized by means of AFM, FT-IR and SEM.

  • https://doi.org/10.12989/mwt.2015.6.2.095 인용 KSCI