• Journal of the Semiconductor & Display Technology
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• v.19 no.4
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• pp.28-33
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• 2020

Plasma etching process employs high density plasma to create surface chemistry and physical reactions, by which to remove material. Plasma chamber includes silicon-based materials such as a focus ring and gas distribution plate. Focus ring needs to be replaced after a short period. For this reason, there is a need to find materials resistant to erosion by plasma. The developed chemical vapor deposition processing to produce silicon carbide parts with high purity has also supported its widespread use in the plasma etch process. Silicon carbide maintains mechanical strength at high temperature, it have been use to chamber parts for plasma. Recently, besides the structural aspects of silicon carbide, its electrical conductivity and possibly its enhanced life time under high density plasma with less generation of contamination particles are drawing attention for use in applications such as upper electrode or focus rings, which have been made of silicon for a long time. However, especially for high purity silicon carbide focus ring, which has usually been made by the chemical vapor deposition method, there has been no study about quality improvement. The goal of this study is to reduce surface roughness and depth of damage by diamond tool grit size and tool dressing of diamond tools for precise dimensional assurance of focus rings.

• Bulletin of the Korean Chemical Society
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• v.12 no.2
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• pp.193-196
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• 1991

The $^{13}C-NMR$ shifts of a series of para-substituted $8-aryl-tricyclo[3.2.1.0^{2,7}]oct-8-yl$ and $9-aryl-tricyclo[3.3.1.0^{2,8}]-non-9-yl$ cations were measured in $FSO_3H/SO_2ClF\ at\-90^{\circ}$ in order to examine whether the ${\rho}^{C^+}$ values can be used as a measure of the geometric influence on the charge delocalization resulting from ${\rho}$ conjugation in rigid tricyclopropylcarbinyl cations. Plot of the ${\Delta}{\delta}^{C+} shifts against the ${\sigma}^{C+}$ constants revealed excellent linear correlation. The 8-aryl tricyclooctyl systems yielded a ${\rho}^{C+}$ value of -5.00 with r = 0.9962. Previous investigation of the 9-aryl-tricyclononyl systems gave a correlation coefficient of r = 0.9948 with a slope of ${\rho}^{C+}$ = -4.95. A fair parallelism exists between the results of $^{19}F-NMR $ studies and the change of ${\rho}^{C+}$ value in these cations. Consequently, it is established that the ${\rho}^{C+}$ value can be used to explain the mechanism of charge stabilization of the rigid cyclopropylcarbinyl cation such as tricyclo $[3.2.1.0^{2,7}]oct-8-yl$ cation.

• Korean Journal of Environmental Agriculture
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• v.34 no.4
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• pp.282-287
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• 2015

BACKGROUND: The current study was carried out to investigate Cd, Hg, Pb and As contaminations in 222 commercial medicinal plants and to estimate the potential health risk through dietary intake of commercial medicinal plants in Korea.METHODS AND RESULTS: The Cd, Hg, Pb, and As in medicinal plants were analyzed by ICP/MS and mercury analyzer.The potential health risk was estimated using risk assessment tools. Total amount of Cd in medicinal plants with 29% samples exceeded the standard limit legislated in 'Pharmaceutical Affairs Act' while all plant samples were lower than the standard limit value for As, Hg, and Pb. However, when applying the standard limit for root vegetable (fresh weight) in the Food Sanitation Act, four samples exceeded the standard limit of Pb. For health risk assessment, the values of cancer risk probability were 0.3~5.9×10^-7which were less than the acceptable cancer risk of 10^-6~10^-4for regulatory purpose. Also, Hazard quotientvalues were lower than 1.0.CONCLUSION: Therefore, these results demonstrated that human exposure to Cd, Hg, Pb, and As through dietary intake of commercial medicinal plants might notcause adverse health effects although some medicinal plants were higher than the standard limit values for Cd and Pb.

• Korean Chemical Engineering Research
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• v.46 no.6
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• pp.1095-1099
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• 2008

In this study, we investigated that hydrate formation and phase behavior of the $THF+H_2$ binary clathrate hydrates. In order to confirm the binary clathrate hydrate formation we employed the Raman and NMR spectroscopies that are known to be quite powerful tools, particularly for examining the cage occupancy pattern of guest molecules. In addition, we traced the P-T profiles from clathrate hydrate formation and dissociation process, which made it possible for the resulting phase equilibrium boundary to be clearly established. In the binary clathrate hydrate matrix we further identified that the relatively large THF molecules can only occupy the large $5^{12}6^4$ cavities, while the small $H_2$ molecules are entrapped in the empty $5^{12}$ cavities in structure-II, making the hydrate to be stable above 273 K even at relatively low pressure condition. Considering that pure $H_2$ hydrate can be produced at the extreme pressures higher that 1,000 bar, we can conclude that the water-soluble second guest inclusion induces $H_2$ storage and transportation to be readily achievable under much milder conditions.

• Asian-Australasian Journal of Animal Sciences
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• v.16 no.4
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• pp.596-608
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• 2003

Weaning is a complex phase when the mammal suffers the action of different stressors that contribute to negatively affect the efficiency of the intestinal mucosa and of the whole local integrated system, that acts as barrier against any nocuous agent. The components of this barrier are mechanical, chemical, and bacteriological; immunological and not. The development of contact with a saprophyte microflora and the maintenance of feed intake after the interruption of motherly nutrition are essential for the maturation of an equilibrated local immune function and for a functional integrity of villi. Opportunities and limits of some dietary strategies that can contribute to reduce negative effects of weaning on health and performance are discussed. Knowledges on the possible mechanism of action of probiotics are upgraded, particularly for their supposed role in the balance between different immune functions (effectory/regulatory). Some tools to control pathogen microflora are reviewed (acids, herbs, immunoglobulin sources) and practical feeding systems are proposed.

• Applied Microscopy
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• v.45 no.1
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• pp.23-31
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• 2015

Dark field (DF) transmission electron microscopy image has become a popular characterization method for two-dimensional material, graphene, since it can visualize grain structure and multilayer islands, and further provide structural information such as crystal orientation relations, defects, etc. unlike other imaging tools. Here we present microstructure of graphene, particularly, using DF imaging. High-angle grain boundary formation wass observed in heat-treated chemical vapor deposition-grown graphene on the Si substrate using patch-quilted DF imaging processing, which is supposed to occur by strain around multilayer islands. Upon the crystal orientation between layers the multilayer islands were categorized into the oriented one and the twisted one, and their local structure were compared. In addition information from each diffraction spot in selected area diffraction pattern was summarized.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.27-33
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• 2004

Electro-theological fluid is recently used for the micro polishing of 3-dimensional micro-aspherical lens. It's also used for polishing small area defects on the wide flat wafer. Since ER fluid shows a behavior of viscosity changing under certain electric fields. micro polishing efficiency may be enhanced for certain cases. In this paper, a perfluorinated carbonyl fluoride oil based ER fluids was used to improve surface polishing rate and submicron-scale accuracy. As the polishing electrodes, micro size cylindrical tools had been used for maximizing the electric field. An experimental device, which was applied for micro polishing a number of wafers of 4inches in size and other workpiece. was made on a precision polishing system. It consisted of a steel electrode. a wafer fixture. l0㎃ current and DC 5㎸ power supply unit, and a controller unit. From the Experiments. the ER fluid is applicable for micro polishing of small parts.

• Journal of Fashion Business
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• v.20 no.6
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• pp.66-78
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• 2016

Hygroscopic knitted cotton fabric was found to spontaneously absorb water showing a significantly wide concentration gradient in the absorption direction. A semi-empirical diffusion model was introduced to describe how the wicking behavior compared to the classical capillary model (Washburn's equation), which has been widely used in the textiles industry. The capillary sorption curve and the permeability coefficient, which are key variables for the model equations, were measured using an electronic balance. The concentration profile as a function of the wicking distance and the elapsed time was derived, based on the diffusion model. From the concentration profile, the wicking distance detectable by the human eye or a digital camera with the aid of an image-analysis system, could be described realistically as a function of the time. The classical capillary model could be modified by introducing the tortuous correction factor to match the diffusion model. Wicking models and data-processing techniques in the work could provide useful tools for objectively evaluating the textile's wicking performances.

• Proceedings of the Korean Operations and Management Science Society Conference
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• 2005.05a
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• pp.990-997
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• 2005

Many products, such as gasoline, polymer plastics, alloys, and ceramics are manufactured by mixing two or more ingredients or components. When we are to develop new mixture products, we must deal with a long list of potentially important component variables. This paper introduces some design methods for many mixture variables and some analysis tools for screening important variables out of the many candidate variables. The results of this paper will be helpful to engineers who work in the research and development sector of chemical, polymer, alloys, and electro-material industries.

• Transactions of Materials Processing
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• v.19 no.3
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• pp.191-196
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• 2010

Tungsten-carbide as typical difficult-to-cut material has excellent mechanical properties such as high thermal resistivity, mechanical strength and chemical durability. However, it is next to impossible for tungsten-carbide to be fabricated the needed parts by cutting process. In this study, for establishing the micro fabrication method of tungsten-carbide for micro injection or compression molding core, the investigation on micro cutting characteristics of tungsten-carbide green part which is made by powder injection molding process and easy to cut relatively was performed. For this, micro endmilling experiments of tungsten-carbide green part were performed according to various cutting conditions. Finally, the wear trend of micro endmill and the appearance of micro rib according to feed-rate and cutting depth per step were analyzed through SEM images of micro cutting feature and microscope images of micro tools.