• Title/Summary/Keyword: Check pattern

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Development of Hard Mask Strip Inspection System for Semiconductor Wafer Manufacturing Process (반도체 전공정의 하드마스크 스트립 검사시스템 개발)

  • Lee, Jonghwan;Jung, Seong Wook;Kim, Min Je
    • Journal of the Semiconductor & Display Technology
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    • v.19 no.3
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    • pp.55-60
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    • 2020
  • The hard mask photo-resist strip inspection system for the semiconductor wafer manufacturing process inspects the position of the circuit pattern formed on the wafer by measuring the distance from the edge of the wafer to the strip processing area. After that, it is an inspection system that enables you to check the process status in real time. Process defects can be significantly reduced by applying a tester that has not been applied to the existing wafer strip process, edge etching process, and wafer ashing process. In addition, it is a technology for localizing semiconductor process inspection equipment that can analyze the outer diameter of the wafer and the state of pattern formation, which can secure process stability and improve wafer edge yield.

Back-Propagation Algorithm through Omitting Redundant Learning (중복 학습 방지에 의한 역전파 학습 알고리듬)

  • 백준호;김유신;손경식
    • Journal of the Korean Institute of Telematics and Electronics B
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    • v.29B no.9
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    • pp.68-75
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    • 1992
  • In this paper the back-propagation algorithm through omitting redundant learning has been proposed to improve learning speed. The proposed algorithm has been applied to XOR, Parity check and pattern recognition of hand-written numbers. The decrease of the number of patterns to be learned has been confirmed as learning proceeds even in early learning stage. The learning speed in pattern recognition of hand-written numbers is improved more than 2 times in various cases of hidden neuron numbers. It is observed that the improvement of learning speed becomes better as the number of patterns and the number of hidden numbers increase. The recognition rate of the proposed algorithm is nearly the same as that conventional method.

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Detection of MIsfired Engine Cylinder by Using Directional Power Spectra of Vibration Signals (진동 신호의 방향 파워 스펙트럼을 이용한 엔진의 실화 실린더 탐지)

  • 한윤식;한우섭;이종원
    • Transactions of the Korean Society of Automotive Engineers
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    • v.1 no.2
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    • pp.49-59
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    • 1993
  • A new signal processing technique is applied to four-cylinder spark and compression ignition engines for the diagnosis of power faults inside the cylinders. This technique utilizes two-sided directional power spectra(예S) of complex vibration signals measured from engine blocks as the patterns for engine cylinder power faults. The dPSs feature that they give not only the frequency contents but also the directivity of the engine block motion. For the automatic detection/diagnosis of cylinder power faults, pattern recognition method using multi-layer neural networks is employed. Experimental results show that the sucess rate for diagnosis of cylinder power faults using dPSs is higher than that using the conventional one-sided power spectra. The proposed technique is also tested to check the robustness to the sensor position and the engine rotational speed.

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Performance Test of A Reverse-Annular Type Combustor (TS2) for APU (보조동력장치용 환형 역류형 연소기 (TS2) 성능 시험)

  • Ko, Young-Sung;Han, Yeoung-Min;Lee, Kang-Yeop;Yang, Soo-Seok;Lee, Dae-Sung
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.26 no.6
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    • pp.805-810
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    • 2002
  • Development of a small gas-turbine combustor for 100㎾ class APU(Auxiliary Power Unit) has been performed. This combustor is a reverse-annular type and has a tangential swiller in the liner head to improve the fuel/air mixing and flame stability. Three main and three pilot fuel injectors of the simplex pressure-swirl type are used. The performance target at the design condition includes a turbine inlet temperature of l170k, a combustion efficiency of 99%, a pattern factor of 30%, and an engine durability of 3000 hours. Under developing the combustor, we conducted the performance test of our first prototype(TS1) with some variants. As a result of the test, the performance targets of the combustor are satisfied except that the pattern factor is about 4% higher than the target value. Therefore, the second prototype(TS2) was redesigned and the performance test was conducted with the critical focus on the pattern factor and the exit mean temperature. We adopted TS2 four variants to check the improvement of the pattern factor. As a result, the pattern factors of several variants were satisfied with the performance target. Finally, the TS2A variant was chosen as a final combustor fur our APU model.

Study on Ductile Machining Technology for Manufacturing Nano-Patterns on Single Crystal Silicon through Quantitative Analysis of Thrust Force (배분력의 정량적인 분석을 통한 단결정실리콘의 나노패턴 연성가공법 연구)

  • Choi, Dae-Hee;Jeon, Eun-chae;Yoon, Min-Ah;Kim, Kwang-Seop;Je, Tae-Jin;Jeong, Jun-Ho
    • Journal of the Korean Society for Precision Engineering
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    • v.33 no.1
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    • pp.11-16
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    • 2016
  • Lithography techniques are generally used to manufacture nano-patterns on silicon, however, it is difficult to make a V-shaped pattern using these techniques. Although silicon is a brittle material, it can be treated as a ductile material if mechanically machined at extremely low force scale. The manufacturing technique of nano-patterns on single crystal silicon using a mechanical method was developed in this study. First, the linear pattern was machined on the silicon with increasing thrust force. Then, the correlation between measured cutting force and machined pattern was analyzed. Based on the analysis, the critical thrust force was quantitatively determined, and then the silicon was machined at a force lower than the critical thrust force. The machined pattern was observed using SEM and AFM to check for the occurrence of brittle fractures. Finally, the sharp V-shaped nano-pattern was manufactured on the single crystal silicon.

A Study on Electric Power Monitoring System per Appliance (기기별 전력 모니터링 시스템 개발에 관한 연구)

  • Park, Sung-Wook;Kim, Jong-Shick;Lim, Su-Jin;HwangBo, Sea-Hee;Son, Joon-Ik;Lee, In-Yong;Wang, Bo-Hyeun
    • Journal of the Korean Institute of Intelligent Systems
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    • v.20 no.5
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    • pp.638-644
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    • 2010
  • This paper presents ideas of service scenarios for home residents using electric power monitoring system per appliance, the implementation of the monitoring system, and analysis of acquired electric power usage pattern. By acquiring and analyzing electric power usage pattern, home residents can get information of power usage pattern of every legacy (non-Demand Response-ready) appliance. Further they can get pieces of recommendation how to reduce energy consumption, intelligent standby power blocking service, and alarming service to abnormality of appliances. In order to check the feasibility of the ideas, a system that can acquire electric power pattern per appliance is implemented, and electric power pattern of some appliances are stored to a database and it was analyzed to show if auto-identification of a type of a device is possible, which is a basic required function for the scenarios presented.

A Progressive Automated-Process Planning and Die Design and Working System for Blanking or Piercing and Bending of Sheet Metal Product (박판제품의 블랭킹 및 피어싱과 굽힘 가공을 위한 순차이송용 공정 및 금형 설계와 가공자동화 시스템)

  • Choe, Jae-Chan;Kim, Chul
    • Transactions of Materials Processing
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    • v.7 no.3
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    • pp.246-259
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    • 1998
  • This paper describes a research work of developing a computer-aided design and manufacturing of irregular shaped sheet metal product for blanking or piercing and bending operations. An approach to the system is based on the knowledge-based rules. Knowledge for the system is formulated from plasticity theories experimental results and the empirical knowledge of field experts, This system has been written in AutoLISp on the AutoCAD and in customer tool kit on the SmartCAM with a personal computer and is composed of nine modules which are input and shape treatment, flat pattern-layout, pro-processor module. Based on the knowledge-based rules, the system is designed by considering several factors, such as material and thickness of product complexities of blank geometry and punch profile sheet metal to give flat pattern and automatically account for the adjustment of bending allowances to match tooling requirements by checking dimensions and generating NC data automatically according to drawings of die-layout module. Results carried out in each module will provide efficiencies to the designer and the manufacturer of blanking or piercing and bending die in this field.

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Data Acquisition of Thin-wall Injection Molding Cavity with Micro Pattern (미세 패턴을 가진 박판 사출 성형에서의 금형내 압력 온도 측정 및 분석)

  • Hwang E.J.;Yoo Y.E.;Jae T.J.;Choi D.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1601-1604
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    • 2005
  • The demand increasing of optical applications like as display devices derives interest for fabrication process. The product s development is apt to fabricate numerous thin and wide surfaces with micro pattern. Naturally that needs injection molding fabrication for the mass production. In existing manufacturing, the product quality is controlled by input fabrication condition from the outside. That can be called as a try and error method and not fundamentally solve the troubles; imperfect replication, war page, short shot, etc. To understand the cause and bring a solution, it is needed that check of changing in the cavity. This study can catch them. Data acquisition system about temperature and pressure distribution is settled and can get some data. From this research, other studies related with DAQ in cavity can start on the easier step.

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Application of Multi-Agent Transport Simulation for Urban Road Network Operation in Incident Case (유고상황 시 MatSIM을 활용한 도시부 도로네트워크 운영 분석)

  • Kim, Joo-Young;Yu, Yeon-Seung;Lee, Seung-Jae;Hu, Hye-Jung;Sung, Jung-Gon
    • International Journal of Highway Engineering
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    • v.14 no.4
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    • pp.163-173
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    • 2012
  • PURPOSES : The purpose of this study is to check the possibilities of traffic pattern analysis using MatSIM for urban road network operation in incident case. METHODS : One of the stochastic dynamic models is MatSIM. MatSIM is a transportation simulation tool based on stochastic dynamic model and activity based model. It is an open source software developed by IVT, ETH zurich, Switzerland. In MatSIM, various scenario comparison analyses are possible and analyses results are expressed using the visualizer which shows individual vehicle movements and traffic patterns. In this study, trip distribution in 24-hour, traffic volume, and travel speed using MatSIM are similar to those of measured values. Therefore, results of MatSIM are reasonable comparing with measured values. Traffic patterns are changed according to incident from change of individual behavior. RESULTS : The simulation results and the actual measured values are similar. The simulation results show reasonable ranges which can be used for traffic pattern analysis. CONCLUSIONS : The change of traffic pattern including trip distribution, traffic volumes and speeds according to various incident scenarios can be used for traffic control policy decision to provide effective operation of urban road network.

Comparative gait characteristics of infant and adults (유아와 성인의 보행 특성 비교)

  • Chang, Y.H.;Yang, G.T.;Im, S.H.;Mun, M.S.;Lee, K.O.;Kim, M.Y.
    • Proceedings of the KOSOMBE Conference
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    • v.1998 no.11
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    • pp.86-87
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    • 1998
  • To understand the developmental process of the gait pattern from infancy to the adult, a gait analysis for a 14 months female infant has been performed for ten weeks. The gait parameters has been measured every other week since the week when she was able to walk without aid. The infant gait data at the tenth week of the test shows a similar pattern to the adult gait in many aspects including initial knee flexion, initial ankle dorsiflexion, the push-off pattern, etc. There is not a significant change in the hip flexion angle from week to week from the two weeks after the test started. To check the individuality in the collected data, more infant subjects are being tested presently.

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