• Proceedings of the KIEE Conference
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• 2001.07b
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• pp.708-710
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• 2001

In this paper, back commutation phenomena for iron chute chamber in AC low testing. For this experimental we used high speed camera and carried out with same prospective currents up to 10kA RMS. Hybrid arc quenching chambers which are composed with iron plate and insulating materials tested for reducing back commutation phenomena in interrupting process. It is shows that hybrid chambers which are various narrow slot path width reduces back commutation. As a result, a new type arc quenching chamber is to force the arc rapidly into a narrow insulating slot with iron plate. By this means the arc is lengthened and squeezed between insulating walls. Using this model, the behavior of the arc squeezed in the hybrid chamber and characteristics of arc voltage are also investigated.

• Journal of the Semiconductor & Display Technology
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• v.19 no.4
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• pp.18-21
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• 2020

Undetected wafer slip during the lift pin-down motion in semiconductor equipment may affect the center to edge variation, wafer warpage, and pattern misalignment in plasma equipment. Direct measuring of the amount of wafer slip inside the plasma process chamber is not feasible because of the hardware space limitation inside the plasma chamber. In this paper, we demonstrated a practice for the wafer lift pin-up and down motions with respect to the gear ratio, operating voltage, and pulse width modulation to maintain accurate wafer position using remote control linear servo motor with an experimentally designed chamber mockup. We noticed that the pin moving velocity and gear ratio are the most influencing parameters to be control, and the step-wised position control algorithm showed the most suitable for the reduction of wafer slip.

• Journal of electromagnetic engineering and science
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• v.18 no.1
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• pp.7-12
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• 2018

This article proposes an ultrahigh frequency band radio frequency identification (RFID) tag antenna for drug runout management that can be used in hospitals. The RFID tag antenna is designed to function as a sensor that alerts drug runout when a drug inside a drip chamber is completely consumed but does not work when a drug remains inside a drop chamber. A previously proposed 915 MHz dipole antenna, is too large to be attached to the drip chamber of a feeding bag. Moreover, the length of the dipole (L) should be increased for conjugate matching with an RFID chip. Therefore, the dipole antenna is downsized so that it can be attached to the drip chamber through a fine meander line structure coupling with a corrugate meander line. A transparent cover is added to enhance the grip force between the designed antenna and the drip chamber and to enable detachment. The dimensions of the completed antenna structure attachable to a drip chamber are 32.59 mm (height) and 13.5 mm (width). The gain reduction due to the decreased antenna length is enhanced. The fabricated antenna shows an average omni-directional read range of 10.65 m on a horizontal plane and has the function of sensing the presence of a drug.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.04a
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• pp.29-32
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• 2008

In this study, acoustic diffusers were designed as to the ISO method, which measured the random-incidence scattering coefficient of surfaces in a diffuse field. The diffusers which were made of GFRG (Glass Fiber Reinforced Gypsum), consisted of the cubes with different height and width. The height was from 50 to 250 mm and the maximum height was at the center of the diffusers to provide the early reflections. The surfaces were irregularly designed in order to add the lateral reflections. The scattering coefficient of the diffusers was measured in a 1;10 reverberation chamber, but the absorption coefficient was measured in a real scale reverberation chamber. The result of the scattering coefficient was compared to the hemisphere diffusers and the absorption coefficient was compared to ISO 354 data. To validate the measurement results, the scattering coefficient of the diffusers will be measured in a real scale reverberation chamber.

• Journal of the Korean Society for Marine Environment & Energy
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• v.10 no.3
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• pp.173-180
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• 2007

Oscillating wave amplitude in a bottom-mounted OWC chamber designed for wave energy converter is investigated by applying characteristic wave conditions in Korean coastal water. The effects of shape parameters of OWC chamber in a view of wave energy absorbing capability are analyzed. Both experimental and numerical approaches are adopted and their results are compared to optimize the shape parameters which can result in a maximum power production under given wave distribution. The experiment was carried out in a wave flume under 2-D assumption of OWC chamber. The numerical scheme employed a hybrid Green integral equation which adopts the Rankine Green function inside chamber to take account of fluctuating air pressure, while it uses the Kelvin Green function in outer domain. Air duct diameter, chamber width, and submerged depths of front skirt and back wall of chamber changes the magnitude and peak frequency of wave absorption significantly.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.05a
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• pp.96-102
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• 2001

High intensity vibro-acoustic testing is the appropriate method for flight qualification testing of space flight vehicle which must ensure the acoustic environment of launch. Growing demand for satellites and launch vehicles in korea has resulted in a recent increase in the demand for high intensity vibro-acoustic test facility. The test facility is designed to provide an acoustic environment of 152 ㏈( re 20 ${\mu}$Pa) overall sound pressure level over the band width of 30 Hz to 10,000 Hz in the reverberant chamber. The reverberant chamber has a volume of 1,000 ㎥ with interior dimensions of 8.7m${\times}$l0m${\times}$12m, which can accommodate not only satellites but also launch vehicle payload fairing. Korea Aerospace Research Institute and Korean industries have been carrying out the development of the reverberant chamber and auxiliary devices, such as automatic control system, monitoring/safety device, and jet nozzle, etc. This paper presents the detailed description of High Intensity Acoustic Chamber of KARI, which will be the first and unique testing facility in Korea.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.319-319
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• 2012

현재 폭넓게 이용되고 있는 STI (Shallow Trench Isolation) 공정에서 active edge 부분에 발생하는 기생 transistor의 subthreshold hump 특성을 제어하는 연구가 활발히 이루어지고 있다. 일반적으로 STI 공정을 이용하는 MOSFET에서 active edge 부분의 얇게 형성된 gate oxide, sharp한 active edge 형성, STI gap-fill 공정 중에 생기는 channel dopant out-diffusion은 subthreshold hump 특성의 주된 요인이다. 이와 같은 문제점을 해결하기 위해 active edge rounding process와 channel dopant compensation의 implantation을 이용하여 subthresold hump 특성 개선을 연구하였다. 본 연구는 STI 공정에 필요한 wafer와 phosphorus를 함유한 wafer를 한 chamber 안에서 auto-doping하는 방법을 이용하여 subthresold hump 특성을 구현하였다. phosphorus를 함유한 wafer에서 빠져나온 phosphorus가 STI 공정중인 wafer로 침투하여, active edge 부분의 channel dopant인 boron 농도를 상대적으로 낮춰 active edge 부분의 가 감소하고 leakage current를 증가시킨다. transistor의 channel length, gate width이고, wafer#No가 클수록 phosphorous를 함유한 wafer까지의 거리는 가까워진다. wafer #01은 hump 특성이 없고, wafer#20은 에서 심한 subthreshold hump 특성을 보였다. channel length 고정, gate width를 ~으로 가변하여 width에 따른 영향을 실험하였다. active 부분에 대한 SCM image로 확인된 phosphorus에 의한 active edge 부분의 boron 농도 감소와 gate width vs curve에서 확인된 phosphorus에 의한 감소가 narrow width로 갈수록 커짐을 확인하였다.

• Journal of Ocean Engineering and Technology
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• v.24 no.1
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• pp.60-67
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• 2010

Recently, there has been an increase in the construction of various types of coastal structures for efficient wave dissipation, seawater exchange, and so on. Among these, a perforated slit caisson has been widely used to reduce the reflected wave energy and the wave pressure on the structure. Therefore, many studies on the wave force on a caisson, as well as the wave reflection from it, have been carried out with laboratory experiments and numerical analyses, considering it as a 2-D problem. However, because a structure like a perforated slit caisson has a variable 3-D shape, waves forces should be considered as a 3-D problem. Therefore, in this paper, a fully-nonlinear 3-D numerical model (LES-WASS-3D) is proposed to examine the reflection characteristics of a perforated slit caisson with two chambers. The numerical model, LES-WASS-3D, was verified in a 3-D wave field by a comparison with existing experimental data for wave reflection coefficients. Then, using the numerical results, the reflection from a perforated slit caisson with two chambers was examined in relation to wave steepness, chamber width, and the shape/porosity of perforated slit.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.26 no.5
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• pp.335-341
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• 2014

Physical experiments were carried out to measure the wave force on the vertical walls of perforated breakwater considering several phases of a wave acting on the breakwater. The maximum horizontal wave force acting on each vertical wall was compared between single and double chamber caisson breakwater. The experimental data in this study showed that the total horizontal wave force for double chamber caisson was 9.6% smaller on average than that for single chamber caisson when the total chamber width was the same for both caissons. Such reduction of the wave force is due to the dissipation of wave energy at the porous middle wall, which is located between the porous front wall and non-porous rear wall.

• Journal of the Korean Society of Propulsion Engineers
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• v.2 no.3
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• pp.54-61
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• 1998

A numerical simulation is attempted for the regenerative cooling heat transfer processes of the liquid propellant rocket engine. The heat transfer from the combustion gases to the thrust chamber wall is called gas side heat transfer. This heat is conducted radially to the coolant through the carbon deposit and metallic wall of thrust chamber Finally, this heat is convected away by the coolant flowing along the passages in the thrust chamber. The equivalence of these three heat fluxes of the above processes is utilized to determine the coolant side wall temperature, gas side wall temperature and the heat flux. When the number and shape(width, height) of coolant passages, the shape(size) of thrust chamber, oxidant and fuel properties, coolant properties, oxidant/fuel mixture ratio, coolant inlet temperature, the thickness of carbon deposit formed along the thrust chamber wall during combustion are given, reasonable radial direction temperature distributions and heat fluxes along the thrust chamber axis are obtained.