• Nuclear Engineering and Technology
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• v.33 no.4
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• pp.355-364
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• 2001

In order to evaluate and finally optimize the vitrification condition for combustible dry active waste (DAW), dust and gas generation characteristics were investigated for PE, cellulose, and mixed waste Tests were conducted by varying the operation variables such as melter configuration, excess oxygen amount, and waste feeding rate. Results showed that dust generation characteristics were affected by the operation parameters and the melter＇s configuration is the dominant one. For all tested DAWs, dust generation was reduced by increasing the waste feeding rate and the excessive oxygen amount in the melter. Among waste types, dust amount was decreased by the order of mixed wastes, PE, and cellulose. Other parameters such as temperature variation and operation time have also affected the dust generation. The optimum condition for the DAW vitrification was determined as the melter＇s configuration equipped for minimizing the waste dispersion with 20 kg/h of waste feeding rate and 100% of excessive oxygen supply. CO gas concentration in the off-gas was immediately influenced by the combustion state in the melter, but showed similar trend as the dust generation. For the NOx production during the vitrification process, thermal NOx, which is generated from the Post Combustion Chamber (PCC), rather than fuel NOx was assumed to be dominant. The gas cleaning of efficiencies of the PCC, wet scrubber, and Selective Catalytic Reduction system (SCR) were found to be high enough to keep the concentration of pollutants (CO, NOx, SOx, HCI) in the stack below their relevant emission limits.

• Korean Chemical Engineering Research
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• v.49 no.4
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• pp.485-490
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• 2011

Tetrafluoromethane($CF_4$) has been used as etching and chamber cleaning gases for semiconductor manufacturing processes. These gases need to be removed efficiently because of their strong absorption of infrared radiation and long atmospheric lifetime which causes the global warming effect. We have developed a waterjet gliding arc plasma system in which plasma is combined with waterjet and investigated optimum operating conditions for efficient $CF_4$ destruction through enlarging discharge region and producing large amount of OH radicals. The operating conditions are waterjet flow rate, initial $CF_4$ concentration, total gas flow rate, specific energy input. Through the parametric studies, the highest $CF_4$ destruction of 97% was achieved at 2.2% $CF_4$, 7.2 kJ/L SEI, 9 L/min total gas flow rate and 25.5 mL/min waterjet flow rate.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.115-115
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• 2000

Wide band gap을 갖는 III-V족 반도체인 GaN는 파란색에서 자외선영역에 이르는 발광소자용으로, 그리고 최근에는 전자소자로도 가장 유망한 반도체 중의 하나이다. 하지만 격자상수가 일치하는 적당한 기판이 존재하지 않아 성장된 GaN 박막 내에는 많은 결함들이 존재하게 된다. 일반적으로 가장 널리 쓰이는 기판은 사파이어 기판이 주로 이용되고 있는데 사파이어는 GaN와 격자상수 불일치가 16%에 이르므로 고품질의 GaN 박막을 성장시키기 위해서는 격자상수 불일치를 어느 정도 완화시키면서 초기성장과정의 컨트롤이 매우 중요하다. 이러한 방법들로는 GaN박막 성장 전에 사파이어 기판 질화처리를 하거나 buffer 층을 도입하는 것인데, 이에 관한 많은 연구들이 보고되고 있다. 하지만 각각 두 공정에 관한 연구는 많이 되어 있지만 두 공정사이를 연결해 주는 공정처리법에 관한 연구는 보고되고 있지 않다. 따라서 본 연구에서는 사파이어기판 질화처리를 한 후 buffer 층을 성장시키기 전까지 chamer 내부의 분위기 가스가 GaN 박막성장 거동에 어떤 영향을 주는지에 관해 연구하였다. 질화처리 후 chamber 내부의 분위기 가스가 GaN 박막 성장 거동에 미치는 영향을 연구하기 위하여 두 개의 시편 A,B를 준비하였다. 시편 A는 먼저 사파이어 기판을 유기용매를 이용하여 cleaning 한 후 장비에 장입되었다. 수소분위기하에서 10nsrks 104$0^{\circ}C$에서 가열한 후 30초간 암모니아 유속을 900sccm으로 유지하며 사파이어 기판 질화처리를 수행하였다. GaN buffer 층을 성장하기 위하여 104$0^{\circ}C$에서 56$0^{\circ}C$로 온도를 내리는 과정중 질화처리를 위하여 흘려주었던 암모니아 유속을 차단한 채 수소분위기에서만 온도를 내렸다. 56$0^{\circ}C$에서 GaN buffer 층을 300 성장시킨 후 102$0^{\circ}C$의 고온에서 2$\mu\textrm{m}$ 두께로 GaN 박막을 성장하였다. 시편 B는 질화처리 후 단계부터 GaN 박막성장 단계에 이르기까지 AFM을 이용하여 두 시편의 성장거동을 비교 분석하였다. 두 시편의 표면을 관찰한 결과 시편 A는 2차원적 성장을 하며 매우 매끄러운 표면을 갖는데 반해, 시편 B는 3차원적 성장을 하며 매우 거친 표면을 보였다. 또한 두 시편 A, B를 XRD, PL, Hal 측정으로 분석한 결과 시편 A가 시편 B보다 우수한 구조적, 광학적, 전기적 특성을 보였다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.17 no.6
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• pp.199-206
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• 2016

The aim of this study was to establish the optimal conditions to design a shoe rack that could effectively sterilize and deodorize shoes contaminated by various bacteria. The manufacture and evaluation of a shoe rock was conducted for one year from October 2014 to September 2015. The antibacterial efficacies were evaluated using Escherichia coli and Staphylococcus aureus by JIS Z 2801:2010. The deodorization efficiency was identified by the standard method for deodorization efficiency evaluation of an indoor air cleaner established by Korea Air Cleaning Association, SPS-KACA002-132:2006. The results showed that antibacterial evaluation showed more than 99.9% of the sterilization effects on Escherichia coli and Staphylococcus aureus after exposure to ultraviolet (UV) light for 30 seconds. The average deodorization efficiency for the test gases was 42.5%. The temperature in the shoes and in the shoe rack was lower than $40^{\circ}C$ and $25^{\circ}C$, respectively, when the UV lamp was turned on for 5 minutes and off for 25 minutes repeatedly. This was controlled by turning the UV lamp on and off to maintain the appropriate temperature in the shoes. In conclusion, the real deodorization efficiency is expected to be higher than the measured value because the internal volume of the shoe rack was smaller than the test chamber used to measure the deodorization efficiency. The deodorization effect could be increased further by the sterilization of bacteria causing bad odors in shoes. Further studies will be needed to determine the temperature deviations within the shoe rack to provide constant conditions.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.31 no.6
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• pp.276-281
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• 2021

In order to manufacture a semiconductor circuit, etching, cleaning, and deposition processes are repeated. During these processes, the inside of the processing chamber is exposed to corrosive plasma. Therefore, the coating of the inner wall of the semiconductor equipment with a plasma-resistant material has been attempted to minimize the etching of the coating and particle contaminant generation. In this study, we synthesized yttrium oxyfluoride (YOF) powder by a solid-state reaction using Y₂O₃ and YF₃ as raw materials. Mixing ratio of the Y₂O₃ and YF₃ was varied from 1.0:1.0 to 1.0:1.6. Effects of the mixing ratio on crystal structure and microstructure of the synthesized YOF powder were investigated using XRD and FE-SEM. The synthesized YOF powder was successfully applied to plasma spray coating process on Al substrate.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.33 no.4
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• pp.153-157
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• 2023

In order to manufacture a semiconductor circuit, etching, cleaning, and deposition processes are repeated. During these processes, the inside of the processing chamber is exposed to corrosive plasma. Therefore, the coating of the inner wall of the semiconductor equipment with a plasma-resistant material has been attempted to minimize the etching of the coating and particle contaminant generation. In this study, we mixed AlF₃ powder with the solid-state reacted yttrium oxyfluoride (YOF) in order to increase plasma-etching resistance of the plasma spray coated YOF layer. Effects of the mixing ratio of AlF₃ with YOF powder on crystal structure, microstructure and chemical composition were investigated using XRD and FE-SEM. The plasma-etching ratios of the plasma-spray coated layers were calculated and correlation with AlF₃ mixing ratio was analyzed.

• Journal of the Korean Institute of Landscape Architecture
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• v.35 no.6
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• pp.29-36
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• 2008

This study examined the de-icing agents' stresses on Pinus strobus and Pinus thunbergii by chlorophyll fluorescence analysis. The assumption of this study was that photosynthetic efficiency was changed by de-icing agents applied onto highways in winter by altering the concentration of the de-icier, types of de-icer and leaf surface coating liquid application. The practical purpose of this study was to investigate the de-icing gents stresses on Pinus strobus by the highway area where de-icing agents were used frequently and to discover out minimizing stratages to prevent further damages. or this simulation study, a sample plot was established in Bogae-myeon, Anseong, Gyeonggi-do and Pinus strobus and Pinus thunbergii were planted for the examination in April, 2005. Five types of de-icing agents - NaCl, $CaCl_2$, T product(NS40:low cWoride de-icer type), NaCl+$CaCl_2$ and T product+$CaCl_2$ - were selected and the their concentration was altered to 0%, 5%, and 9%. Five types of de-icing agents were applied to both trees treated by a leaf surface coating liquid and trees not treated by leaf surface coating liquid. For the fluorescence analysis, the leaf surface coating liquid, which was diluted by 10 times, was sprkinkled onto the two tree species three days prior to gathering samples. Sample leaves from the two tree species were gathered at 10 o'clock in the morning of mid-August, 2006 and brought to the laboratory within three hours to be dipped in different concentrations (0%, 5%, or 9%) of the five de-icing agents for two minutes. Then the eaves were placed on the filter paper dipped in each solution on a petri dish, sealed with polyethylene film and kept in a growth chamber at $22^{\circ}C$ for 72 hours. Out of the growth chamber, the leaves were treated with a chorophyll fluorescence reaction analyzer for 30 minutes to measure the initial light acceptance rate(Fo), maximum light acceptance ate(Fv/Fm), light acceptance usage(F' q/F' m) and optical electron delivery coefficient(qP). As a result, Pinus strobus' initial light acceptance rate(Fo) decreased as T product and NaCl increased in concentration, and $Cal_2$ did not reduce much with the eaf surface coating liquid application. Maximum light acceptance rate(Fv/Fm) and light acceptance usage(F' q/F' m) decreased sharply as T product and NaCl increased in concentration and NaCl+$CaCl_2$ and T product+$CaCl_2$ did not reduce much with leaf surface coating liquid application. Optical electrons delivery coefficient (qP) decreased as T product increased in concentration on trees without the leaf surface coating liquid application and all other de-icing agents did not show much reduction. As for Pinus thunbergii, the initial light acceptance rate(Fo) decreased as T product increased in concentration, but the maximum light acceptance rate(Fv/Fm) was not reduced much by changes in concentration. light acceptance usage(F' q/F' m) decreased as NaCl increased in concentration and optical electron delivery coefficient(qP) decreased as NaCl increased in concentration in both with and without leaf surface coating liquid application. In conclusion, it was possible to plant Pinus strobus if spraying leaf surface coating liquid or cleaning deicing salt to prevent the damage caused by deicing agents was more economical than replacing the trees. If not, it was better to plant Pinus thunbergii. Another way to decrease the deicing gents stresses of landscape plants would be planting the trees further away from the roads even though it might take longer period to display its planting functions.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.20 no.6
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• pp.427-446
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• 2008

A review on the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 2006 has been accomplished. Focus has been put on current status of research in the aspect of heating, cooling, ventilation, sanitation and building environments. The conclusions are as follows. (1) The research trends of fluid engineering have been surveyed as groups of general fluid flow, fluid machinery and piping, etc. New research topics include micro heat exchanger and siphon cooling device using nano-fluid. Traditional CFD and flow visualization methods were still popular and widely used in research and development. Studies about diffusers and compressors were performed in fluid machinery. Characteristics of flow and heat transfer and piping optimization were studied in piping systems. (2) The papers on heat transfer have been categorized into heat transfer characteristics, heat exchangers, heat pipes, and two-phase heat transfer. The topics on heat transfer characteristics in general include thermal transport in a cryo-chamber, a LCD panel, a dryer, and heat generating electronics. Heat exchangers investigated include pin-tube type, plate type, ventilation air-to-air type, and heat transfer enhancing tubes. The research on a reversible loop heat pipe, the influence of NCG charging mass on heat transport capacity, and the chilling start-up characteristics in a heat pipe were reported. In two-phase heat transfer area, the studies on frost growth, ice slurry formation and liquid spray cooling were presented. The studies on the boiling of R-290 and the application of carbon nanotubes to enhance boiling were noticeable in this research area. (3) Many studies on refrigeration and air conditioning systems were presented on the practical issues of the performance and reliability enhancement. The air conditioning system with multi indoor units caught attention in several research works. The issues on the refrigerant charge and the control algorithm were treated. The systems with alternative refrigerants were also studied. Carbon dioxide, hydrocarbons and their mixtures were considered and the heat transfer correlations were proposed. (4) Due to high oil prices, energy consumption have been attentioned in mechanical building systems. Research works have been reviewed in this field by grouping into the research on heat and cold sources, air conditioning and cleaning research, ventilation and fire research including tunnel ventilation, and piping system research. The papers involve the promotion of efficient or effective use of energy, which helps to save energy and results in reduced environmental pollution and operating cost. (5) Studies on indoor air quality took a great portion in the field of building environments. Various other subjects such as indoor thermal comfort were also investigated through computer simulation, case study, and field experiment. Studies on energy include not only optimization study and economic analysis of building equipments but also usability of renewable energy in geothermal and solar systems.