• Particle and aerosol research
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• v.9 no.3
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• pp.149-161
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• 2013

Experiments on photochemical reactions of purified air alone in an indoor smog chamber were carried out after flushing Teflon bags with purified air for many hours in order to check the level of contamination on the chamber wall. Ozone concentrations were linearly increased from <4 ppb up to about 8 ppb with irradiation time for four hours. Outgassing of NOx from the chamber wall was found to be less than 1 ppb. New ultrafine particles were formed and grown up to about 70 nm during the photochemical reactions, and then total number and mass concentrations of particles were increased from <10 particles/$cm^3$ up to about 4,000 particles/$cm^3$ and $1.3{\mu}g/m^3$, respectively. The wall conditions of these Teflon bags flushed with purified air might not severly affect the chamber experimental results for photochemical reactions of polluted urban ambient air. The difference of gaseous species between two chambers was 2.4 ppb of ozone at most, indicating that the wall cleaning performance of two chambers was nearly similar.

• Journal of the Korean Institute of Gas
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• v.15 no.3
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• pp.74-78
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• 2011

$BF_3$ gas has been used for semiconductor manufacturing process and applied in plasma etching, chemical vapor deposition, chamber cleaning processes etc,. $BF_3$ provides Boron and acts as a p-type doping in electrode in semiconductor. In this study, we investigate thermaldecomposition of alkali-boron complexes and suggest a simple way to produce $BF_3$ from $NaBF_4$ and $KBF_4$.

• Journal of the Korean Society of Combustion
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• v.18 no.1
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• pp.21-26
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• 2013

In the Shell coal gasification process, the syngas produced in a gasifier passes through a syngas cooler for steam production and temperature control for gas cleaning. Fly slag present in the syngas may cause major operational problems such as erosion, slagging, and corrosion, especially in the upper part of the syngas cooler (gas reversal chamber, GRC). This study investigates the flow, heat transfer and particle behaviors in the GRC for a 300 MWe IGCC process using computational fluid dynamics. Three operational loads of 100%, 75% and 50% were considered. The gas and particle flows directly impinged on the wall opposite to the syngas inlet, which may lead to erosion of the membrane wall. The heat transfer to the wall was mainly by convection which was larger on the side wall at the inlet level due to the expansion of the cross-section. In the evaporator below the GRC, the particles were concentrated more on the outer channels, which needs to be considered for alleviation of fouling and blockage.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.204-205
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• 2011

In thin film silicon solar cells, p-i-n structure is adopted instead of p/n junction structure as in wafer-based Si solar cells. PECVD is a most widely used thin film deposition process for a-Si:H or ${\mu}c$-Si:H solar cells. For best performance of thin film silicon solar cell, the dopant profiles at p/i and i/n interfaces need to be as sharp as possible. The sharpness of dopant profiles can easily achieved when using multi-chamber PECVD equipment, in which each layer is deposited in separate chamber. However, in a single-chamber PECVD system, doped and intrinsic layers are deposited in one plasma chamber, which inevitably impedes sharp dopant profiles at the interfaces due to the contamination from previous deposition process. The cross-contamination between layers is a serious drawback of a single-chamber PECVD system in spite of the advantage of lower initial investment cost for the equipment. In order to resolve the cross-contamination problem in single-chamber PECVD systems, flushing method of the chamber with NH3 gas or water vapor after doped layer deposition process has been used. In this study, a new plasma process to solve the cross-contamination problem in a single-chamber PECVD system was suggested. A single-chamber VHF-PECVD system was used for superstrate type p-i-n a-Si:H solar cell manufacturing on Asahi-type U FTO glass. A 80 MHz and 20 watts of pulsed RF power was applied to the parallel plate RF cathode at the frequency of 10 kHz and 80% duty ratio. A mixture gas of Ar, H2 and SiH4 was used for i-layer deposition and the deposition pressure was 0.4 Torr. For p and n layer deposition, B2H6 and PH3 was used as doping gas, respectively. The deposition temperature was $250^{\circ}C$ and the total p-i-n layer thickness was about $3500{\AA}$. In order to remove the deposited B inside of the vacuum chamber during p-layer deposition, a high pulsed RF power of about 80 W was applied right after p-layer deposition without SiH4 gas, which is followed by i-layer and n-layer deposition. Finally, Ag was deposited as top electrode. The best initial solar cell efficiency of 9.5 % for test cell area of 0.2 $cm^2$ could be achieved by applying the in-situ plasma cleaning method. The dependence on RF power and treatment time was investigated along with the SIMS analysis of the p-i interface for boron profiles.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.20 no.3
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• pp.135-140
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• 2020

Since the process gas that is essential in the semiconductor process is a harmful gas, it is an essential task to solve it in an environmentally friendly manner. Currently, the cleaning technology used in the semiconductor process is mostly a wet cleaning based on hydrogen peroxide developed in the 1970s, and the SC-1 cleaning liquid for removing particles on the surface uses a mixture of ammonia and hydrogen peroxide. Therefore, environmental problems are caused, and economic problems caused by excessive water use are also serious. For this reason, the products developed through this study are used to decompose the process harmful gas from the chamber outlet into a harmless gas before entering the vacuum pump, or by incineration and the gaseous components are deposited on the pump. I want to solve the problem. In this paper, CPS (Confined Plasma Source) is proposed to save environment and improve productivity by replacing harmful gases (N2, CF4, SF6⋯., Etc) which are indispensable in semi-contamination process with innocuous gases or incineration with plasma, to study.

• Transactions of the Korean Society of Automotive Engineers
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• v.22 no.4
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• pp.10-19
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• 2014

Despite the movement of safe traffic by the Korean government to reduce deaths in traffic accidents, the casualties increase year by year. In particular, more and more accidents and casualties are reported from car collisions from the back of the vehicles parked for managing traffic accidents on the road, cleaning main roads and medial strips, repairing roads. In order to response to these accidents, the government should take protective measures for road users. In the last decade, seventy-one cases have been reported to occur during highway repair and maintenance. As a result, eight persons were killed and seventy-six were injured, showing the high death rate of 11.3 percent. Therefore, it seems urgent to take some actions against it. The United States and European countries legislate that vehicles of road repair and maintenance should be mandatorily equipped with shock absorber at the back. Korea, however, does not have such legislative measures, which are needed at this time to protect workers on the road. This study compares the performance of the traditional shock absorber for road maintenance vehicles with that of the rear safety guard using air bag, manufactured in accordance with related laws in Korea. Based on the results of the 60km/h rear collision test, this paper proposes improvements in related laws and regulations in an attempt to reduce casualties.

• Proceedings of the KIPE Conference
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• 2003.07a
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• pp.260-263
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• 2003

When ICP(Inductive Coupled Plasma type etching and wafer manufacturing is being processed in semiconductor process, a noxious gas in PFC and CFC system is generated. Gas cleaning dry scrubber is to remove this noxious gas. This paper describes a power source device, 2MHz switching frequency class 2kW RF Generator, used as a main power source of the gas cleaning dry scrubber. The power stage of DC/DC converter is consist of full bridge type converter with 100kHz switching frequency Power amplifier is push pull type inverter with 2MHz switching frequency, and transmission line transformer. The adequacy of the circuit type and the reliability of generating plasma in various load conditions are verified through 50$\Omega$ dummy load and chamber experiments result.

• Journal of Environmental Health Sciences
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• v.32 no.5 s.92
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• pp.478-484
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• 2006

There was no significant difference in the CADR (Clean Air Delivery Rate) between physical aerosols, NaCl and smoke, and biological aerosols, airborne MS2 virus and P. fluorescens, which implicate that the hybrid-type of air purifier, applying the unipolar ion emission and the radiant catalytic ionization, imposed identical reduction effect on both physical aerosol and bioaerosol. Ventilation decreases the efficiency of air cleaning by unipolar ionization because high ventilation diminishes the particle concentration reduction effect. The particle removal efficiency decreases with increase in the chamber volume because of the augmented ion diffusion and higher ion wall loss rate. Particle size affects the efficiency of air ionization. The efficiency is high for particles with very small diameter because reduction of charge increases with particle size. If there is no increasing supply of ions, the efficiency of air cleaning by unipolar ionization increases with respect to initial concentration of particles because of the large space charge effect at high particle concentration and amplified electric field.

• Journal of the Korean Solar Energy Society
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• v.35 no.1
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• pp.21-28
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• 2015

A small washer powered directly and solely by thermal radiation was constructed and tested to explore the feasibility of using solar energy or other types of thermal radiation for washing and cleaning. In principle, TA (ThermoAcoustic) washers have the benefits of simpler design and operation and fewer energy conversion processes, thus should be more energy efficient and cost less than electric washing/cleaning systems. The prototype TA converter we constructed could sustain itself with consistent fluid oscillations for more than 20 minutes when powered by either concentrated solar radiation or an IR (infrared) heater. The frequencies of water oscillations in the wash chamber ranged from 2.6 to 3.6 Hz. The overall conversion efficiency was lower than the typical efficiencies of TA engines. Change in water temperature had little effect on the oscillatory flow in the TA washer due to its low efficiency. On the other hand higher water temperatures enhanced grease removal considerably in our tests. Methods for measuring the overall conversion efficiency, frictional loss, and grease removal of the TA washing system we designed were developed and discussed.

• The Journal of Korean Institute of Information Technology
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• v.16 no.11
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• pp.43-49
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• 2018

Computer simulation was performed using the SIMION program to develop an electron gun for MCP cleaning. The target, MCP, is located 180mm from the source of the electron gun, and the diameter of the MCP is approximately 20mm. Therefore, we tried to find the condition that the beam diameter of electrons reaching the MCP is to be 20mm using four variables such as E, ${\phi}$, d1, d2, where the E is the energy of the electron reaching the MCP, the ${\phi}$ is the diameter of the extractor, and the d1 and the d2 are the distance from the electron source to the end of the extractor tube, and to the wall of chamber, respectively. As a result of simulation, we figuried out that the E and the d2 have little effect on the beam diameter. On the other hand, we also found that the beam diameters were very sensitive to the d1 and varied relatively large with respect to the ${\phi}$, and the d1 was the secondary order function of the ${\phi}$. Therefore we found that this function will allow us to design electron guns that are suitable for the purposes of this study.