• Title/Summary/Keyword: Chamber Structure

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Fabrication and Properties of MFSFET′s Using $BaMgF_4$/Si Structures for Non-volatile Memory ($BaMgF_4$/Si 구조를 이용한 비휘발성 메모리용 MFSFET의 제작 및 특성)

  • 이상우;김광호
    • Electrical & Electronic Materials
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    • v.10 no.10
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    • pp.1029-1033
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    • 1997
  • A prototype MFSFET using ferroelectric fluoride BaMgF$_4$as a gate insulator has been successfully fabricated with the help of 2 sheets of metal mask. The fluoride film was deposited in an ultrai-high vacuum system at a substrate temperature of below 30$0^{\circ}C$ and an in-situ post-deposition annealing was conducted for 20 seconds at $650^{\circ}C$ in the same chamber. The interface state density of the BaMgF$_4$/Si(100) interface calculated by a MFS capacitor fabricated on the same wafer was about 8$\times$10$^{10}$ /cm$^2$.eV. The I$_{D}$-V$_{G}$ characteristics of the MFSFET show a hysteresis loop due to the ferroelectric nature of the BaMgF$_4$film. It is also demonstrated that the I$_{D}$ can be controlled by the “write” plus which was applied before the measurements even at the same “read”gate voltage.ltage.

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Properties of SiOCH Thin Film Bonding Mode by BTMSM/O2 Flow Rates (BTMSM/O2 유량변화에 따른 SiOCH 박막 결합모드의 2차원 상관관계 특성)

  • Kim, Jong-Wook;Hwang, Chang-Su;Kim, Hong-Bae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.4
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    • pp.354-361
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    • 2008
  • The dielectric characteristics of low-k interlayer dielectric materials was fabricated by plasma enhanced chemical vapor deposition (PECVD). BTMSM precursor was evaporated and introduced with the flow rates from 16 sccm to 25 sccm by 1sccm step in the constant flow rate of 60 sccm $O_2$ in process chamber. Manufactured samples are analyzed components by measuring FT/IR absorption lines. Decomposition each Microscopic structures through two-dimensional correlation analysis about mechanisms for the formation of SiOCH in $SiOCH_3$, Si-O-Si and Si-$CH_3$ bonding group and analyzed correlation between the micro-structure of each group. It is a tendency that seems to be growing of Si-O-Ci(C) bonding group and narrowing of Si-O-$CH_3$ bonding group relative to the increasing flow-rate BTMSM. The order of changing sensitivity about changes of flow-rate in Si-O-Si(C) bonding group is cross link mode$(1050cm^{-1})$ $\rightarrow$ open link mode$(1100cm^{-1})\rightarrow$ cage link mode $(1140cm^{-1})$.

A Study on the Spray, Combustion, and Exhaust Emission Characteristics of Dimethyl-ether (DME) by Experiment and Numerical Analysis (Dimethyl-ether (DME) 연료의 분무, 연소 및 배기 특성에 관한 실험 및 수치해석적 연구)

  • Park, Su-Han;Kim, Hyung-Jun;Lee, Chang-Sik
    • Journal of ILASS-Korea
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    • v.15 no.1
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    • pp.31-37
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    • 2010
  • The aim of this work is to investigate the spray and combustion characteristics of dimethyl-ether (DME) at various injection conditions. The spray characteristics such as spray tip penetration and spray cone angle were experimentally studied from the spray images which obtained from the spray visualization system. Combustion and emissions characteristics were numerically investigated by using KIVA-3V code coupled with Chemkin chemistry solver. From these results, it revealed that DME spray had a shorter spray tip penetration and wider spray cone angle than that of diesel spray due to the low density, low surface tension, and fast evaporation characteristics. At the constant heating value condition, DME fuel showed higher peak combustion pressure and earlier ignition timing, because of high cetane number and superior evaporation characteristics. In addition, the combustion of DME exhausted more $NO_x$ emission and lower HC emission due to the active combustion reaction in the combustion chamber. The result shows that DME had a little soot emission due to its molecular structure characteristics with no direct connection between carbons.

Design and Implementation of Dual Band Modified Biconical Antenna for Wireless LAN

  • Oh Jong Dae;Son Ji Myoung;Yang Woon Geun
    • Proceedings of the IEEK Conference
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    • summer
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    • pp.181-184
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    • 2004
  • In this paper, we propose the dual band(2.4GHz and 5GHz) antenna for access point of WLAN(Wireless Local Area Network) which has similar radiation patterns for each band. Simulation results by using HFSS(High Frequency Structure Simulator) for the proposed antenna are presented. The electrical characteristics of the proposed antenna are measured with HP 8510C network analyzer and included. And radiation patterns are measured with rectangular anechoic far field antenna chamber. Measured results show that $S_{11}$ is less than - 14dB and VSWR(Voltage Standing Wave Ratio) is less than 1.5 for all frequency bands of interest. The measured maximum gain for elevation pattern at 2.40GHz is about 2.46dBi at $theta=-78^{\circ}$ and maximum gain for 5.825GHz is about 2.70dBi at $theta=-80^{\circ}.$ And the implemented antenna has good radiation pattern characteristic, therefore, we expect that the implemented dual band antenna is applicable for access point of WLAN.

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An Inspection of Stability for Annealing SiOCH Thin Flim (SiOCH 박막의 열처리에 대한 안정성 검토)

  • Park, Yong-Heon;Kim, Min-Seok;Hwang, Chang-Su;Kim, Hong-Bae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.1
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    • pp.41-46
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    • 2009
  • The low dielectric SiOCH films were deposited on p-type Si(100) substrates through the dissociation of BTMSM $(((CH_3)_3Si)_2CH_2)$ precursors with oxygen gas by using PECVD method. BTMSM precursor was introduced with the flow rates from 42 to 60 sccm by 2 sccm step into reaction chamber but with the constant flow rate of 60 sccm $O_2$. SiOCH thin films were annealed at $450^{\circ}C$ for 30 minutes. The electrical property of SiOCH thin films was studied by MIS, Al/SiOCH/p-Si(100), structure. Annealed samples showed large reduction of the maximum capacitance yielding low dielectric constant owing to reductions of surface charge density. After exposure at room temperature and atmospheric pressure, dielectric constant of SiOCH films was totally increased. However, annealed SiOCH thin films were more stable than as-deposited SiOCH thin films for natural oxidation.

Pilot Spray Characteristics of Piezo type Injectors for High Pressure Injection (고압 분사용 Piezo 인젝터의 Pilot 분무특성)

  • Bae, J.W.;Kim, H.N.;Lee, J.W.;Kang, K.Y.;Ryu, J.I.
    • Proceedings of the KSME Conference
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    • 2004.04a
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    • pp.2076-2081
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    • 2004
  • Future exhaust gas limits for diesel-driven passenger cars will force the automotive industry to significantly improve the performance of engine. Since modern common-rail injection systems deliver more degrees of freedom referring to the injection process, again the optimization of the injection process could offer a possibility to meet the exhaust gas limits. This study describes the characteristic the pilot spray structure of piezo-driven injector for a passenger car common-rail system to be applicable multiple injection caused by fast response rather than solenoid-driven injector. The piezo-driven injector is prototype injector with same needle chamber of solenoid injector and the solenoid-driven one is commercial injector. The pilot spray characteristic such as spray tip penetration, spray speed, spray angle were obtained by spray images, which is measured by the Mie scattering method with optical system for high-speed temporal photography. It was found that piezo-driven injector effected electric change as important factor and showed faster response than solenoid-driven injector.

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Ultrasonic Processing of Polymer Foam (고분자 포움의 초음파 가공)

  • 변성광;윤재륜
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.13 no.4
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    • pp.618-624
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    • 1989
  • Ultrasonically induced bubble formation in thermoplastic matrix was investigated experimentally and theoretically. polystyrene was saturated with nitrogen under the pressure of 0.2 to 3.45 MPa in a pressure chamber, followed by pressure release and ultrasonic bubble nucleation. Zinc stearate was added to polystyrene as the nucleating agent to induce heterogeneous nucleation. Various mixture of low density polyethylene and polyethylene wax was also saturated with the gas. The foamed specimens with or without ultrasonically induced bubble nucleation was modeled by modifying the classical nucleation theory. The rate of ultrasonic nucleation was predicted for homogeneous and heterogeneous nucleation at a conical cavity. This study showed that the heterogeneous and heterogeneous nucleation at a conical cavity. This study showed that the heterogeneous nucleation must be employed for ultrasonic production of bubbles in a viscous fluid and the homogeneous nucleation for ultrasonic production of bubbles in a low viscosity fluid.

Preparation of Alginate-fibroin Beads with Diverse Structures (다양한 구조를 가진 알긴산-피브로인 비드 제조)

  • Lee, Jin-Sil;Lee, Shin-Young;Hur, Won
    • KSBB Journal
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    • v.26 no.5
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    • pp.422-426
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    • 2011
  • Alginate bead has been supplemented with various polymers to control permeability and to enhance mechanical strength. In this report, fibroin-reinforced alginate hydrogel was prepared, in which spatial localization of fibroin molecules was investigated. Confocal laser scanning microscopy revealed that fibroin molecules formed a fibrous network in the alginate-fibroin beads, which was expected to enhance mechanical strength as same as in many composite materials. Uniaxial compression test showed that fibroin-reinforced alginate beads had increased mechanical strength only after methanol treatment that caused ${\beta}$-sheet formation among fibroin molecules. Simultaneous curing and dialysis of alginate beads were carried out to remove excesscalcium but to retain fibroin in the dialysis chamber, which fabricated beads without internal fibrous fluorescent stains. Fibroin molecules were only found beneath the surface of the beads. The fibroin-diffused shell was further processed to form a thick wall after drying or was mobilizedto the centre of the bead by methanol treatment. Accordingly, the structure analyses provide processing methods of fibroin to form a wall or center clumps, which could be applied to design controlled delivery device.

Influence of Residual Oxygen on the growth of AlN Thin Films with Substrate Temperature (기판 온도 변화에 따른 AlN 박막 성장에 잔류 산소가 미치는 영향)

  • Kim, Byoung-Kyun;Lee, Eul-Tack;Kim, Eung-Kwon;Jeong, Seok-Won;Roh, Yong-Han
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.5
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    • pp.463-467
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    • 2008
  • Aluminum nitride (AlN) thin films have been deposited on Au electrodes by using reactive RF magnetron sputtering method in a gas mixture of Ar and $N_2$ at different substrate temperature. It was found that substrate temperature was varied in the range up to $400^{\circ}C$, highly c-axis oriented film can be obtained at $300^{\circ}C$ with full width at half maximum (FWHM) $3.1^{\circ}$. Increase in surface roughness from 3.8 nm to 5.9 nm found to be associated with increase in grain size, with substrate temperature; however, the AlN film fabricated at $400^{\circ}C$ exhibited a granular type of structure with non-uniform grains. The Al 2p and N 1s peak in the X-ray photoelectron spectroscopy (XPS) spectrum confirmed the formation of Al-N bonds. The XPS spectrum also indicated the presence of oxynitrides and oxides, resulting from the presence of residual oxygen in the vacuum chamber. It is concluded that the AlN film deposited at substrate temperature of $300^{\circ}C$ exhibited the most desirable properties for the application of high-frequency surface acoustic devices.

Study of New Light Source with Nano Carbon Material (나노카본을 이용한 조명용 신광원에 관한 연구)

  • Kim, Kwang-Bok;Kim, Yong-Won;Jung, Han-Gi;Song, Yoon-Ho
    • Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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    • 2006.05a
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    • pp.31-34
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    • 2006
  • The characteristic of carbon nano fiber (CNF) as electron emitters was described. Carbon nano fiber (CNF) of herringbone was prepared by thermal chemical vapor deposition(CVD), mixed with binders and conductive materials, and then were formed by screen-printing process. In order to increase effectively field emissions, the surface treatment of rubbing & peel-off was applied to the printed CNF emitters on cathode electrode. The measurements of field emission properties were carried out by using a diode structure inline vacuum chamber. CNF of herringbone type showed good emission properties that a turn on field was as low as $2.5V/{\mu}m$ and current density was as large as $0.15mA/cm^2$ of $4.5V/{\mu}m$ with electric field. After the vacuum packaged panel of 5-inch in diagonal, the measured white brightness was as high as $7000cd/m^2$ at 1900V of anode and 700V of gate voltage.

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