• 제목/요약/키워드: Chamber Structure

검색결과 569건 처리시간 0.026초

Prevention of P-i Interface Contamination Using In-situ Plasma Process in Single-chamber VHF-PECVD Process for a-Si:H Solar Cells

  • Han, Seung-Hee;Jeon, Jun-Hong;Choi, Jin-Young;Park, Won-Woong
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.204-205
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    • 2011
  • In thin film silicon solar cells, p-i-n structure is adopted instead of p/n junction structure as in wafer-based Si solar cells. PECVD is a most widely used thin film deposition process for a-Si:H or ${\mu}c$-Si:H solar cells. For best performance of thin film silicon solar cell, the dopant profiles at p/i and i/n interfaces need to be as sharp as possible. The sharpness of dopant profiles can easily achieved when using multi-chamber PECVD equipment, in which each layer is deposited in separate chamber. However, in a single-chamber PECVD system, doped and intrinsic layers are deposited in one plasma chamber, which inevitably impedes sharp dopant profiles at the interfaces due to the contamination from previous deposition process. The cross-contamination between layers is a serious drawback of a single-chamber PECVD system in spite of the advantage of lower initial investment cost for the equipment. In order to resolve the cross-contamination problem in single-chamber PECVD systems, flushing method of the chamber with NH3 gas or water vapor after doped layer deposition process has been used. In this study, a new plasma process to solve the cross-contamination problem in a single-chamber PECVD system was suggested. A single-chamber VHF-PECVD system was used for superstrate type p-i-n a-Si:H solar cell manufacturing on Asahi-type U FTO glass. A 80 MHz and 20 watts of pulsed RF power was applied to the parallel plate RF cathode at the frequency of 10 kHz and 80% duty ratio. A mixture gas of Ar, H2 and SiH4 was used for i-layer deposition and the deposition pressure was 0.4 Torr. For p and n layer deposition, B2H6 and PH3 was used as doping gas, respectively. The deposition temperature was $250^{\circ}C$ and the total p-i-n layer thickness was about $3500{\AA}$. In order to remove the deposited B inside of the vacuum chamber during p-layer deposition, a high pulsed RF power of about 80 W was applied right after p-layer deposition without SiH4 gas, which is followed by i-layer and n-layer deposition. Finally, Ag was deposited as top electrode. The best initial solar cell efficiency of 9.5 % for test cell area of 0.2 $cm^2$ could be achieved by applying the in-situ plasma cleaning method. The dependence on RF power and treatment time was investigated along with the SIMS analysis of the p-i interface for boron profiles.

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소형 잔향실을 이용한 동력 분산형 고속철도 차량의 투과손실 측정 (Transmission Loss Estimation of HST using a Small Scale Reverberation Chamber)

  • 김태민;손창훈;김정태;김정수
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2010년도 추계학술대회 논문집
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    • pp.302-307
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    • 2010
  • Development of light-weight high speed train (HST) based on distributed motor control with the top speed of 350 km/hr has engendered a need for abatement of the interior noise of the train cabin. The development of noise abatement measures is crucial at the design stage of the train car since the noise transmission characteristics of the car structure directly influences the cabin interior noise. Since the transmission loss measurement using the entire car structure is often not feasible, especially at the initial stages of the train development, investigation of transmission characteristics using small-scale reverberation chamber can furnish useful alternative source of predicting the noise level. In the present study, white noise is generated at source and transmission loss estimated by performing measurement of a specimen in a scaled reverberation chamber. Comparison of measured values with the previously derived numerical values show good agreement in the overall trend but appreciable quantitative differences still remain.

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Slot 코팅 공정에서 Non-Newtonian 유체의 코팅 균일성을 위한 최적 다이 설계 (An Optimal Die Design for the Coating Uniformity of Non-Newtonian Liquids in Slot Coating Process)

  • 이시형;고현정;심서훈;정현욱;현재천
    • Korean Chemical Engineering Research
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    • 제49권3호
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    • pp.314-319
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    • 2011
  • 본 연구에서는 전산유체모사기인 Fluent를 활용하여 slot 다이 내부에서 Newtonian과 non-Newtonian 코팅액의 동적 거동을 고찰함으로써 최적 다이 설계를 위한 방법론을 구축하고자 하였다. 다이 출구에서 코팅액의 속도분포를 일정하게 하기 위해 chamber 구조를 변화시킴으로써 최적 하이브리드 다이의 설계가 가능하였다. 특히, non-Newtonian 유체의 경우, 전단담화 정도와 chamber의 coat-hanger 최적 길이의 상관관계를 도출하였다.

다중챔버 단일주사기: 설계, 성능 평가 (A Multi-chambered Single Autoinjector: Design and Performance Assesment)

  • 안서연;이근우;권태근;김동연
    • 한국군사과학기술학회지
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    • 제20권2호
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    • pp.170-180
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    • 2017
  • An autoinjector allows a single use medical device serving for automatic intramuscular injection to deliver a dose of a particular emergency drug through an intuitive activation mechanism. By design and structure, autoinjectors are easy to use and are intended for self-administration by patients or untrained personnel. Depending on the number of drugs filled in the cartridge, autoinjectors are divided by one-chamber type and multi-chamber type. Most autoinjectors may have a special structure including spring-loading syringes and needle which is specially designed to ensure strength due to the necessity of penetration through layers of clothing. The purpose of this study was to introduce the design technology of autoinjector of multi-chamber type that could be released into the two drugs sequentially. Additionally, we verified performance of the prototype developed by applying the design.

고압 축소형 재생냉각형 연소기 개발 (Development of High Pressure Sub-scale Regeneratively Cooled Combustion Chambers)

  • 김종규;이광진;서성현;한영민;최환석
    • 한국추진공학회지
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    • 제13권6호
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    • pp.8-16
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    • 2009
  • 고압 축소형 연소기의 개발에 관하여 기술하였다. 헤드부와 챔버부가 분리형인 연소기와 일체형 재생냉각 방식의 연소기 등 총 4기의 연소기가 개발되었다. 축소형 연소기의 연소 압력은 70 bar이고, 추진제 유량은 5.1~9.1 kg/s이다. 연소성능의 향상을 위해 추진제 유량, 분사기의 recess 수 등을 변화시켰고, 이를 연소시험을 통해 확인하였다. 또한 실물형 연소기에 적용할 재생냉각 채널과 막냉각의 설계 및 제작 기술을 본 축소형 연소기에 적용, 검증하였다.

치수강(齒髓腔)과 치관외면(齒冠外面)과의 최단거리(最短距離)에 관(關)한 실측연구(實測硏究) (A STUDY ON MEASUREMENT OF MINIMAL DISTANCE BETWEEN PULP CHAMBER AND CORONAL SURFACE)

  • 김영해
    • Restorative Dentistry and Endodontics
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    • 제14권2호
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    • pp.1-4
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    • 1989
  • To determine the thickness of coronal hard structure the minimal distance between pupal surface and outer surface of crown was measured by means of Bowley gauge on extracted first molars. Upper(28 teeth) and lower(24 teeth) were carefully collected from 30-39 years of age and male. The teeth were split mesio-distally through central pit. On the split surface various part which are deeply related in cavity preparation were measured (schematic drawing). The results were as follows: A : Distance from mesio-cervical enamel to pulp chamber surface. upper $2.63{\pm}0.19$(mm) Lower $2.18{\pm}0.27$(um) B : Distance from mesial chamber ceiling to mesial surface upper $2.75{\pm}0.34$ Lower $2.62{\pm}0.31$ C : Distance from mesial chamber ceiling to occlusal surface upper $3.82{\pm}0.51$ Lower $3.49{\pm}0.50$ D : Distance from distal chamber ceiling to occlusal surface upper $4.28{\pm}0.69$ Lower $3.90{\pm}0.52$ E : Distance from distal chamber ceiling to distal surface upper $2.79{\pm}0.45$ Lower $2.41{\pm}0.40$ F : Distance from disto cervical enamel to pulp chamber surface upper $2.49{\pm}0.24$ Lower $2.39{\pm}0.25$.

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급 확대부를 갖는 실린더 챔버 내부 유동의 큰 척도 난류 보텍스 구조에 관한 연구 (Large-Scale Turbulent Vortical Structure Inside a Sudden Expansion Cylinder Chamber)

  • 성형진;고상철
    • 대한기계학회논문집B
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    • 제25권7호
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    • pp.905-914
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    • 2001
  • A large eddy simulation(LES) is performed for turbulent flow around a bluff body inside a sudden expansion cylinder chamber, a configuration which resembles a premixed gas turbine combustor. To promote turbulent mixing and to accommodate flame stability, a flame holder is installed inside the combustion chamber. The Smagorinsky model is employed and the calculated Reynolds number is 5,000 based on the bulk velocity and the diameter of the inlet pipe. The simulation code is constructed by using a general coordinate system based on the physical contravariant velocity components. The predicted turbulent statistics are evaluated by comparing them with the laser-doppler velocimetry (LDV) measurement data. The agreement of LES with the experimental data is shown to be satisfactory. Emphasis is placed on the time-dependent evolutions of turbulent vortical structure behind the flame holder. The numerical flow visualizations depict the behavior of large-scale vortices. The turbulent mixing process behind the flame holder is analyzed by visualizing the sectional views of vortical structure.

고온초전도테이프 제작을 위한 YSZ 박막의 고속증착방법 (High speed deposition technique of YSZ film for the superconducting tape)

  • 김호섭;석동기;정준기;고락길;하홍수;송규정;염도준;박찬
    • 한국초전도ㆍ저온공학회논문지
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    • 제6권3호
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    • pp.27-32
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    • 2004
  • High temperature superconducting coated conductor has a structure of /< superconducting layer>//. The buffer layer consists of multi layer, and the architecture most widely used in RABiTS approach is CeO$_2$(cap layer)/YSZ(diffusion barrier layer)/CeO$_2$(seed layer). Evaporation technique is used for the CeO$_2$ layer and DC reactive sputtering technique is used for the YSZ layer, A chamber was set up specially for DC reactive sputtering, Detailed features are as following. A separator divided the chamber into two halves a sputtering chamber and a reaction chamber. The argon gas for sputtering target elements flows out of the cap of sputtering gun, and water vapor for reaction with depositing species spouts near the substrate. Turbo pump is connected with reaction chamber. High speed deposition of YSZ film could be achieved in the chamber. Detailed deposition conditions (temperature and partial pressure of reaction gas) were investigated for the rapid growth of high quality YSZ film.

파일럿 집광로봇 박스형 압력보상용기 구조설계식 (Structural Design Equation for a Box-shape Pressure Compensated Chamber of Pilot Mining Robot)

  • 이민욱;홍섭;임우철;이태희;최종수
    • 한국해양공학회지
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    • 제26권6호
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    • pp.66-73
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    • 2012
  • A pressure compensated chamber of a pilot mining robot isolates and protects an electrical-electronic system from the ambient highly pressured water. Since the inner pressure of the chamber is compensated with outer water pressure using hydraulic oil and pressure compensator, there exists a pressure difference, less than 1 bar, between outer and inner surface. The structural safety of the chamber is obtained relatively easier than the canister type which inner pressure is kept as the atmospheric pressure. However, due to the adoption of box shape for space efficiency and usage of the transparent engineering plastic viewport for checking inner circumstance, the viewport can be largely deformed. This large deformation can cause an additional tensile force, called the prying force, to the bolt-flange connection parts of the viewport. In this paper, we suggest the structural design equation considering the prying action for designing the structure of a box-shape pressure compensated chamber.

Micro-imaging techniques for evaluation of plastic microfluidic chip

  • Kim, Jung-Kyung;Hyunwoo Bang;Lee, Yongku;Chanil Chung;Yoo, Jung-Yul;Yang, Sang-Sik;Kim, Jin-Seung;Park, Sekwang;Chang, Jun-Keun
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제1권4호
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    • pp.239-247
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    • 2001
  • The Fluorescence-Activated Cell Sorter (FACS) is a well-established instrument used for identifying, enumerating, classifying and sorting cells by their physical and optical characteristics. For a miniaturized FACS device, a disposable plastic microchip has been developed which has a hydrodynamic focusing chamber using soft lithography. As the characteristics of the spatially confined sample stream have an effect on sample throughput, detection efficiency, and the accuracy of cell sorting, systematic fluid dynamic studies are required. Flow visualization is conducted with a laser scanning confocal microscopy (LSCM), and three-dimensional flow structure of the focused sample stream is reconstructed from 2D slices acquired at $1\mutextrm{m}$ intervals in depth. It was observed that the flow structure in the focusing chamber is skewed by unsymmetrical velocity profile arising from trapezoidal cross section of the microchannel. For a quantitative analysis of a microscopic flow structure, Confocal Micro-PIV system has been developed to evaluate the accelerated flow field in the focusing chamber. This study proposes a method which defines the depth of the measurement volume using a detection pinhole. The trajectories of red blood cells (RBCs) and their interactions with surrounding flow field in the squeezed sample stream are evaluated to find optimal shape of the focusing chamber and fluid manipulation scheme for stable cell transporting, efficient detection, and sorting

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