Effects of annealing under oxygen atmosphere of PZT thin films on LTCC substrates
(LTCC 기판위에 성장시킨 PZT 박막의 열처리시 $O_2$ 가 미치는 영향)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2010.06a
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- pp.205-205
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- 2010