• 제목/요약/키워드: Ceramic layer structure

검색결과 250건 처리시간 0.022초

나노구조를 응용한 AlN 성장 방법 및 특성 (High Quality AlN Layer Regrown on AlN Nanostructure by Hydride Vapor Phase Epitaxy)

  • 손호기;김진원;임태영;이미재;김진호;전대우;황종희;오해곤;최영준;이혜용
    • 한국전기전자재료학회논문지
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    • 제28권11호
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    • pp.711-714
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    • 2015
  • In this paper, high quality AlN layers were regrown on AlN nanopillar structure with $SiO_2$-dots by HVPE. Surface morphology of AlN layer regrown exhibited flatter than a conventional AlN template. The laterally overgrown AlN regions would consist of a continuous well coalesced layer with lower dislocation density than in the template because of the dislocation blocking and dislocation bending effects. Moreover, result of Raman spectroscopy suggest that the AlN nanopillar structure with $SiO_2$-dots relieves the strain in the AlN layer regrown by HVPE.

세라믹 정형 가공을 위한 성형기 개발 (Development of Thermal Imprint System for Net-Shape Manufacturing of Multi-layer Ceramic Structure)

  • 박철규;임성한;홍주표;이종길;윤성만;고장혁
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2008년도 추계학술대회 논문집
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    • pp.401-404
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    • 2008
  • In the present investigation, a high precision thermal imprint system for micro ceramic products was developed and the net-shape manufacturing of multi-layer ceramic reflector for LED (Light Emitting Diode) was conducted with a precision metal die. Workpiece used in the present investigation were the multi-layer laminated ceramic sheets with pre-punched holes. The cavity with arbitrary angle was formed on the circular and rectangular holes of the ceramic sheets. During the imprinting process, the ambient temperature of the imprint system was kept over the transition temperature of the ceramic sheet and then rapidly cooled. The results in this paper show that the present method can be successfully applied to the fabrication of very small size hole array for ceramic reflector in a one step operation.

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적층형 세라믹 액츄에이터의 세라믹-전극간 계면이 전기적 특성에 미치는 영향에 대한 연구 (Effect of Ceramic-Electrode Interface on the Electrical Properties of Multilayer Ceramic Actuators)

  • 하문수;정순종;송재성;이재신
    • 한국전기전자재료학회논문지
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    • 제15권10호
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    • pp.896-901
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    • 2002
  • The polarization and strain behavior of multilayer ceramic actuators fabricated by tape casting using a PNN-PZT ceramics were investigated in association with electrode size and internal layer number. Spontaneous polarization and strain decreased with increasing electrode size. In addition, the increase of internal layer number brought reduced spontaneous polarization and increased the field-induced strain. Because the actuators structure is designed to stack ceramic layer and electrode layer alternatively, the ceramic-electrode interfaces may act as a resistance to motion of domain wall. To analyze the effect of ceramic-electrode interface, the diffraction intensity ratio of (002) to (200) planes was calculated from X-ray diffraction patterns of samples subjected to a voltage of 200 V. The diffraction intensity ratio of (002) to (200) planes was decreased with increasing electrode size and internal layer number. The diffraction intensity ratio and straining behavior analyses indicate that the Polarization and strain were affected by the amount of 90°domain decreasing with increasing electrode size and internal layer number. Consequently, the change of polarization and displacement with respect to electrode size and layer number is likely to be caused by readiness of the domain wall movement around the interface.

세라믹 그린시트의 미세 비아홀 펀칭 공정 연구 (A study on micro punching process of ceramic green sheet)

  • 신승용;주병윤;임성한;오수익
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2003년도 추계학술대회논문집
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    • pp.101-106
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    • 2003
  • Recent electronic equipment becomes smaller, more functional, and more complex. According to these trends, LTCC(low temperature co-fired ceramic) has been emerged as a promising technology in packaging industry. It consists of multi-layer ceramic sheet, and the circuit has 3D structure. In this technology via hole formation plays an important role because it provides an electric path for the packaging interconnection network. Therefore via hole quality is very important for ensuring performance of LTCC product. Via holes are formed on the green sheet that consists of ceramic(before sintering) layer and PET(polyethylene Terephthalate) one. In this paper we found the correlation between hole quality and process condition such as ceramic thickness, and tool size. The shear behavior of double layer sheet by micro hole punching which is different from that of single layer one was also discussed.

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미세 비아홀 펀칭 공정 중 이종 재료 두께에 따른 버 생성 (Thickness Effect of Double Layered Sheet on Burr Formation during Micro-Via Hole Punching Process)

  • 신승용;임성한;주병윤;오수익
    • 소성∙가공
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    • 제13권1호
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    • pp.65-71
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    • 2004
  • Recent electronic equipment becomes smaller, more functional, and more complex. According to these trends, LTCC(low temperature co-fired ceramic) has been emerged as a promising technology in packaging industry. It consists of multi-layer ceramic sheet, and the circuit has 3D structure. In this technology via hole formation plays an important role because it provides an electric path for the packaging interconnection network. Therefore via hole qualify is very important for ensuring performance of LTCC product. Via holes are formed on the green sheet that consists of ceramic(before sintering) layer and PET(polyethylene terephthalate) one. In this paper we found the correlation between hole quality and process condition such as PET thickness and ceramic thickness. The shear behavior of double layer sheet by micro hole punching which is different from that of single layer one was also discussed.

곡면 커버 글라스용 금형 코팅을 위한 CVD-SiC 기반 세라믹 복합체의 두께에 따른 특성 연구 (Thickness Dependence of CVD-SiC-Based Composite Ceramic for the Mold of the Curved Cover Glass)

  • 김경호;정성민;이명현;배시영
    • 한국표면공학회지
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    • 제52권6호
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    • pp.310-315
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    • 2019
  • The use of a silicon carbide (SiC)-based composite ceramic layer for the mold of a curved cover glass was demonstrated. The stress of SiC/VDR/graphite-based mold structure was evaluated via finite element analysis. The results revealed that the maximum tensile stress primarly occured at the edge region. Moreover, the stress can be reduced by employing a relatively thick SiC coating layer and, therefore, layers of various thicknesses were deposited by means of chemical vapor deposition. During growth of the layer, the orientation of the facets comprising the SiC grain became dominant with additional intense SiC(220) and SiC(004). However, the roughness of the SiC layer increased with increasing thickness of the layer and. Hence, the thickness of the SiC layer needs to be adjusted by values lower than the tolerance band of the curved cover glass mold.

치밀층으로 코팅된 다공성 엔지니어링 세라믹스에서의 접촉응력에 의한 균열 거동 (Cracking Behavior Under Contact Stress in Densely Coated Porous Engineering Ceramics)

  • 김상겸;김태우;김도경;이기성
    • 한국세라믹학회지
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    • 제42권8호
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    • pp.554-560
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    • 2005
  • The engineering ceramic needs the properties of high strength, hardness, corrosion-resistance and heat-resistance in order to withstand thermal shock or applied nonuniform stresses without failure. The densely coated porous ceramics can be used for machine component, electromagnetic component, bio-system component and energy-system component by their high-performances from superior coating properties and light-weight characteristics due to the structure including pore by itself. In this study we controlled the porosity of silica and alumina, $8.2\~25.4\%$ and $23.4\~36.0\%$, respectively, by the control of sintering temperature and starting powder size. We made bilayer structures, consisting of a transparent glass coating layer bonded to a thick substrate of different porous ceramics by a thin layer of epoxy adhesive, facilitated observations of crack initiation and propagation. The elastic modulus mismatch could be controlled using different porous ceramics as the substrate layer. Then we applied 150 N force using WC sphere with a radius of 3.18 mm by Hertzian indentation. As a result, the crack initiation in the coating layer was delayed at lower porosity in the substrate layer, and the damage in the coating layer was relatively smaller at the bilayer structure coated on higher elastic substrate.

잉크젯 프린팅을 이용한 연속 조성 세라믹 화합물 구조체 형성 (Additive Manufacturing of Various Ceramic Composition Using Inkjet Printing Process)

  • 박재현;최정훈;황광택;김진호
    • 한국재료학회지
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    • 제30권11호
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    • pp.627-635
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    • 2020
  • 3D printing technology is a processing technology in which 3D structures are formed by fabricating multiple 2D layers of materials based on 3D designed digital data and stacking them layer by layer. Although layers are stacked using inkjet printing to release various materials, it is still rare for research to successfully form a product as an additive manufacture of multi-materials. In this study, dispersion conditions are optimized by adding a dispersant to an acrylic monomer suitable for inkjet printing using Co3O4 and Al2O3. 3D structures having continuous composition composed of a different ceramic material are manufactured by printing using two UV curable ceramic inks whose optimization is advanced. After the heat treatment, the produced structure is checked for the formation and color of the desired crystals by comparing the crystalline analysis according to the characteristics of each part of the structure with ceramic pigments made by solid phase synthesis method.

다층 기공구조를 갖는 다공성 반응소결 탄화규소 다공체 제조 (Fabrication of Porous Reaction Bonded Silicon Carbide with Multi-Layered Pore Structures)

  • 조경선;김규미;박상환
    • 한국세라믹학회지
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    • 제46권5호
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    • pp.534-539
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    • 2009
  • Reaction Bonded Silicon Carbide(RBSC) has been used for engineering ceramics due to low-temperature fabrication and near-net shape products with excellent structural properties such as thermal shock resistance, corrosion resistance and mechanical strength. Recently, attempts have been made to develop hot gas filter with gradient pore structure by RBSC to overcome weakness of commercial clay-bonded SiC filter such as low fracture toughness and low reliability. In this study a fabrication process of porous RBSC with multi-layer pore structure with gradient pore size was developed. The support layer of the RBSC with multi-layer pore structure was fabricated by conventional Si infiltration process. The intermediate and filter layers consisted of phenolic resin and fine SiC powder were prepared by dip-coating of the support RBSC in slurry of SiC and phenol resin. The temperature of $1550^{\circ}C$ to make Si left in RBSC support layer infiltrate into dip-coated layer to produce SiC by reacting with pyro-carbon from phenol resin.

Effect of Porous Substrate on the Strength of Asymmetric Structure

  • Kim, Chul;Park, Sang Hyun;Kim, Taewoo;Lee, Kee Sung
    • 한국세라믹학회지
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    • 제52권6호
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    • pp.417-422
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    • 2015
  • In this study, we investigate the effect of porous $Al_2O_3$ substrate on the strengths of asymmetric structures after we prepare such a structure consisting of a dense $Li_2ZrO_3$ top layer and porous $Al_2O_3$ substrate layer. The porosity and elastic modulus of the substrate layer are controlled by sintering temperature, which has three values of 1150, 1250 and $1350^{\circ}C$. The porosity is controlled in the range of ~ 30-50 vol%, elastic modulus is ~80-120 GPa and elastic mismatch $E_s/E_c$ is ~ 0.6-1.0. Indentation stress-strain curves are obtained and analyzed to evaluate the yield stress of the asymmetric structure by concentrated local loading of WC balls. Conventional flexural strengths are also obtained to evaluate the strength of the asymmetric structure. The results indicate that the local yield strength of the asymmetric structure has mid-values between the top and the substrate layer; however, the flexural strength of the asymmetric structure are mainly influenced by elastic modulus and strength of the substrate.