• Korean Journal of Optics and Photonics
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• v.14 no.5
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• pp.504-508
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• 2003

We present a new point-diffraction interferometer, which has been devised for the three-dimensional profile measurement of light scattering rough surfaces. The interferometer system has multiple sources of two-point-diffraction and a CCD camera composed of an array of two-dimensional photodetectors. Each diffraction source is an independent two-point-diffraction interferometer made of a pair of single-mode optical fibers, which are housed in a ceramic ferrule to emit two spherical wave fronts by means of diffraction at their free ends. The two spherical wave fronts then interfere with each other and subsequently generate a unique fringe pattern on the test surface. A He-Ne source provides coherent light to the two fibers through a 2${\times}$l optical coupler, and one of the fibers is elongated by use of a piezoelectric tube to produce phase shifting. The xyz coordinates of the target surface are determined by fitting the measured phase data into a global model of multilateration. Measurement has been performed for the warpage inspection of chip scale packages (CSPs) that are tape-mounted on ball grid arrays (BGAs) and backside profile of a silicon wafer in the middle of integrated-circuit fabrication process. When a diagonal profile is measured across the wafer, the maximum discrepancy turns out to be 5.6 ${\mu}{\textrm}{m}$ with a standard deviation of 1.5 ${\mu}{\textrm}{m}$.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.20 no.10
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• pp.1050-1060
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• 2009

In this paper, a X-Band T/R-module for SAR(Synthetic Aperture Radar) systems based on active phased array antennas is designed and fabricated. The T/R modules have a and width of more than 800 MHz centered at X-Band and support dual, switched polarizations. The output power of the module is 7 watts over a wide bandwidth. The noise figure is as low as 3.9 dB. Phase and amplitude are controlled by a 6-bit phase shifter and a 6-bit digital attenuator, respectively. Further the fabricated T/R module has est and calibration port with directional coupler and power divider. Highly integrated T/R module is achieved by using LTCC(Low Temperature Co-fired Ceramic) multiple layer substrate. RMS gain error is less than 0.8 dB max. in Rx mode, and RMS phase error is less than $4^{\circ}$ max. in Rx/Tx phase under all operating frequency band, or the T/R module meet the required electrical performance m test. This structure an be applied to active phase array SAR Antennas.