• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.2
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• pp.62-66
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• 2004

This paper investigated the characteristics of a newly developed high density hollow cathode plasma (HCP) system and its application for the etching of silicon wafers. We used SF$_{6}$ and $O_2$ gases in the HCP dry etch process. Silicon etch rate of $0.5\mu\textrm{m}$/min was achieved with $SF_6$$O_2$plasma conditions having a total gas pressure of 50mTorr, and RF power of 100 W. This paper presents surface etching characteristics on a crystalline silicon wafer and large area cast type multicrystlline silicon wafer. The results of this experiment can be used for various display systems such as thin film growth and etching for TFT-LCDs, emitter tip formations for FEDs, and bright plasma discharge for PDP applications.s.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.1083-1088
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• 2004

Zinc air batteries obtain their energy density advantage over the other batteries by utilizing ambient oxygen as the cathode materials, and reusing cathode as recycled form. And specific capacity of zinc powder is as high as 820mAh/g. Our research team succeeded in producing 2.4 Ah class zinc air battery for cellular phone application. In this paper we had studied performance of cathode according to various factors and demonstrated the performance of 2.4 Ah class zinc air battery for cellular phone application.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.9
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• pp.751-757
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• 2000

The r.f. power effect for Pt doping is investigated on structural and electrochemical properties of amorphous vanadium oxide(V$_2$O$_{5}$) film, grown by direct current (d.c.) magnetron sputtering. Room temperature charge-discharge measurements based on a half-cell with a constant current clearly indicated that the Pt doping could improve the cyclibility of V$_2$O$_{5}$ cathode film. Using glancing angle x-ray diffraction(GXRD) and high-resolution transmission electron microscopy (HRTEM) analysis, we found that the Pt doping with 10W r.f. power induces more random amorphous structure than undoped V$_2$O$_{5}$ film. As the r.f. power of Pt target increases. large amount of Pt atoms incorporates into the amorphous V$_2$O$_{5}$ film and makes $\alpha$-PtO$_2$microcrystalline phase in the amorphous V$_2$O$_{5}$ matrix. These results suggest that the semiconducting $\alpha$-PtO$_2$ microcrystalline phase in amorphous matrix lead to a drastically faded cyclibility of 50W Pt doped V$_2$O$_{5}$ cathode film. Possible explanations are given to describe the Pt doping effect on cyclibillity of the amorphous V$_2$O$_{5}$ cathode film battery. film battery.

• Journal of Korean Society on Water Environment
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• v.28 no.6
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• pp.917-922
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• 2012

In order to improve applicability of a microbial fuel cell the laboratory-scaled study has been performed by adopting an air-cathode MFC system with high concentrated anaerobic slugies in this study. The concentrations of microbes are grouped into three types, Type A (TS 1.7%), Type B (TS 1.1%) and Type C (TS 0.51%). The open circuit voltage $(V_{oc})$ characteristics showed that the medium microbes concentration of 1.10% (Type B) kept a constant voltage of 1.0 V for 150 hours, which showed the longest time among three types (Type A and Type C). The discharge charge curves for a closed circuit with $500 \Omega$ also showed that Type B generated a stable discharge voltage of 0.8 V for a longer time as in the open circuit voltage case. This could be explained by the relatively large amount of the attached microbes. Under the $V_{oc}$condition the COD removal efficiency of Type B was found to be low for a long time, but those of Type A and C were found to be high for a short period of time. Therefore, the suspended microbes could decrease the coulombic efficiency. It was concluded that the high $V_{oc}$ was caused by low COD and the $V_{oc}$ became low after the COD removal. The COD reduction resulted in an unstable and low working voltage. From the polarization characteristics Type A was found to show the highest power density of $193\;mW/m^2$ with a fill factor of 0.127 due to the relatively high remaining COD even after the MFC reaction.

• Korean Chemical Engineering Research
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• v.60 no.4
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• pp.550-556
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• 2022

The performance of enzymatic fuel cells that convert chemical energy contained in various organic molecules such as sugar, alcohol, organic acids, and amino acids into electrical energy is greatly affected by the cathode as well as the anode. This study aimed to develop a laccase-based cathode with high performance. An enzyme composite composed of an laccase, redox mediator, and carbon nanotubes was immobilized on the surface of electrode in multiple layers, and the effect of the number of layers and the presence or absence of carbon nanotubes on electrode performance was investigated. As the number of layers of the enzyme-mediator (Lac-(PVI-Os-dCl)) on the electrode surface increased, the amount of reduction current generated at the electrode increased. The enzyme-carbon nanotube-mediator composite electrode (Lac-SWCNTs-(PVI-Os-dCl)) generated a current 1.7 times greater than that of the Lac-(PVI-Os-dCl). It was found that the largest amount of current (10.1±0.1 µA) was generated in the electrode composed of two layers of Lac-(PVI-Os-dCl) and two layers of Lac-SWCNTs-(PVI-Os-dCl) in the evaluation of electrodes with different ratio of Lac-SWCNTs-(PVI-Os-dCl) and Lac-(PVI-Os-dCl). The maximum power density of the cell using the cathode composed of a single layer of Lac-(PVI-Os-dCl) and the cell using the optimized cathode were 0.46±0.05 and 1.23±0.04 µW/cm², respectively. In this study, it was demonstrated that the performance of cathode and the enzymatic fuel cell using the same can be improved by optimizing the layers of composites composed of laccase, redox mediator, and carbon nanotubes on the electrode surface.

• Journal of the Semiconductor & Display Technology
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• v.2 no.3
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• pp.19-23
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• 2003

Extended unbalanced magnetron sputtering system based on the cylindrical magnetron with a rotating cathode was developed. The unbalanced configuration of magnetic field was realized by means of additional lines of permanent magnets, placed along both sides of a 89 mm outer diameter and 600 mm long cylindrical cathode. The performance of the unbalanced magnetron was assessed in terms of the ion current density and the ion-to-atom ratio incident at the substrate. Furthermore, the paper presents the comparison of the internal plasma parameters, such as the electron temperature, electron density, plasma and floating potentials, measured by a Langmuir probe in various positions from the cathode, for conventional and unbalanced constructions of the cylindrical magnetron. The plasma density and ion current density are about 3-5 times higher than those of conventional one, in the unbalanced magnetron in a 0.24 Pa Ar atmosphere with a DC cathode power of 3 kW.

• Transactions on Electrical and Electronic Materials
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• v.4 no.5
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• pp.10-14
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• 2003

A low-cost, large area, random, maskless texturing scheme independent of crystal orientation is expected to have significant impact on terrestrial photovoltaic technology. We investigated silicon surface microstructures formed by reactive ion etching (R IE) in Multi-Hollow cathode system. Desirable texturing effect has been achieved when radio-frequency (rf) power of about 20 Watt per one hollow cathode glow is applied for our RF Multi -Hollow cathode system. The black silicon etched surface shows almost zero reflectance in the visible region as well as in near IR region. The etched silicon surface is covered by columnar microstructures with diameters from 50 to 100 nm and depth of about 500 nm. We have successfully achieved 11.7 % efficiency of mono-crystalline silicon solar cell and 10.2 % for multi-crystalline silicon solar cell.

• Journal of the Korean institute of surface engineering
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• v.56 no.4
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• pp.259-264
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• 2023

As the demand for lithium-ion batteries, a key power source in electric vehicles and energy storage systems, continues to increase for achieving global carbon neutrality, there is a growing concern about the environmental impact of disposing of spent batteries. Extensive research is underway to develop efficient recycling methods. While hydrometallurgy and pyrometallurgy methods are commonly used to recover valuable metals from spent cathode materials, they have drawbacks including hazardous waste and complex processes. Hence, alternative recycling methods that are environmentally friendly are being explored. However, recycling spent cathode materials still remains complex and energy-intensive. This study focuses on a novel approach called solid-state synthesis, which aims at regenerating the performance of spent cathode materials. The method offers a simpler process and reduces energy consumption. Optimal heat treatment conditions were identified based on experimental results, contributing to the development of sustainable recycling technologies for lithium-ion batteries.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.6
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• pp.399-406
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• 2014

Thermal batteries are used for military power sources that require robustness and long storage life such as missiles and torpedoes. $FeS_2$ powder is currently used for cathode materials because of its high specific energy density, environmental non-toxicity and low cost. However, large particle size of conventional $FeS_2$ has been deterred its possible application for higher power thermal batteries. In order to improve the power density, high energy ball milling of $FeS_2$ has been introduced to crush the micron-sized $FeS_2$. Discharge characteristics of the single cells fabricated with nano-materials and conventional $FeS_2$ powder were evaluated.

• Journal of the Korean institute of surface engineering
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• v.41 no.6
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• pp.274-278
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• 2008

3-dimensional numerical analysis for a rectangular magnetron cathode model is done to predict cooling characteristics of high power sputtering system for ZnO deposition. It includes cooling channel design, heat transfer analysis of a target, bonding layer and backing plate. In order to model erosion profiles of a target, ion current density distribution from 3D Monte Carlo simulation is used to distribute total sputtering power to 5 discrete regions. At 3 kW of sputtering power and cooling water flow of 1 liter/min at $10^{\circ}C$, the maximum surface temperature was $45.8^{\circ}C$ for a flat new target and $156^{\circ}C$ for a target eroded by 1/3 of its thickness, respectively.