• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.346-347
• /
• 2012

최근 화석연료 대체 에너지원으로서 자동차용으로 연구 개발 및 응용되고 있는 고분자 전해질 연료전지(PEMFC: Proton exchange membrane fuel cells)에서 분리판(Bipolar Plate)은 스택 전체 무게의 80%, 스택 가격의 60% 정도로 가장 높은 비중을 차지한다. 분리판은 연료와 산화제를 공급해주는 통로 및 전지 운전 중에 생성된 물을 제거하는 통로 역할과 anode, cathode로서 전극 역할을 통해 스택 전력을 형성하는 핵심 기능과 전지와 전지 사이의 지지대 역할을 한다. 따라서 분리판은 전기전도성, 내부식성 및 기계적 특성이 우수해야함은 물론이고, 얇고 가벼우며 가공성이 뛰어나야 한다. 현재 가장 많이 사용되고 있는 금속 분리판 소재 중 스테인리스 스틸은 전기적, 기계적 특성 및 내부식성이 우수한 반면, 가격이 비싸고, 중량이 무거운 단점이 있다. 따라서 본 연구에서는 DC 반응성 마그네트론 스퍼터링법으로 전기적, 기계적 특성 및 내부 식성이 우수한 TiN, TiCN 박막을 스테인리스에 비해 중량이 1/3, 소재 단가가 1/4인 알루미늄 기판 위에 증착하여 박막 물성을 평가하였다. DC Power는 400 W, 기판과 타겟 사이의 거리는100 mm, 공정 압력은 0.5 Pa로 고정하였고, 3 inch의 지름과 순도 99.95%를 갖는 티타늄 타겟을 사용하였다. 공정 가스는 Ar을 주입하였으며, 질소와 탄소의 공급원으로는 질소($N_2$)와 메탄($CH_4$) 가스를 사용하여 챔버 내 주입혼합가스의 전체 유량을 50 sccm으로 고정시켰다. 증착된 박막의 전기적, 기계적 특성을 측정하였고, X-ray diffraction (XRD), Scanning electron microscope (SEM)을 이용하여 박막의 미세구조 및 표면 상태를 확인하였다. 또한, 내부식 특성을 평가하기 위해 potentiostatic, potentiodynamic 법을 이용하여 박막의 부식저항을 측정하였다. 증착된 TiN 박막의 경우 질소 함량의 증가에 따라 박막 증착속도는 감소하는 경향을 보였다. 이는 타겟 부근의 질소 라디칼 비율이 증가함에 따라 질화반응이 촉진된 것으로 생각된다. 또한, 증착된 TiN과 TiCN 박막은 반응성 질소 유량과 탄소 유량에 따라 각각 다른 미세구조를 가지는 것을 확인하였다. TiN과 TiCN은 NaCl형의 면심입방격자(FCC)로 같은 구조이며, 격자상수가 비슷하여 전율고용되어 TiCN을 형성하고, 탄소와 질소의 비에 따라 전기적 기계적 특성이 달라짐을 확인하였다.

• 한국신재생에너지학회:학술대회논문집
• /
• 2010.06a
• /
• pp.252.1-252.1
• /
• 2010

These studies convert to useful electricity from swine wastewater and to treat this wastewater. In order to operate the microbial fuel cell(MFC) for the swine wastewater, the anode volume of MFCs was scaled up with 5L in the vacant condition. Graphite felts and low-priced mesh stainless-less as electrode had mixed up and packed into the anode compartment. The meshed stainless-less electrode could also be acted the collector of electron produced by microorganisms in anode. For a cathode compartment, graphite felt loaded Pt/C catalyst was used. Graphite felt electrode embedded in the anode compartment was punched holds at regular intervals to prevent occurred the channeling phenomenon. The sources of seeding on microbial fuel cell was used a mixture of swine wastewater and anaerobic digestion sludge(1:1). It was enriched within 6 days. Swine wastewater was fed with 53.26 ml/min flow rate. The MFCs produced a current of about 17 mA stably used swine wastewater with $3,167{\pm}80mg/L$. The maximum power density and current density was 680 $mW/m^3$ and 3,770 $mA/m^3$, respectively. From these results it is showed that treatment of swine wastewater synchronizes with electricity generation using modified low priced microbial fuel cell.

• Journal of the Korean Institute of Gas
• /
• v.20 no.5
• /
• pp.34-39
• /
• 2016

This study is experimentally investigated brown gas generative properties with the changes of cell areas, a electrolyte concentration and ampere current for the developments of small brown gas generation equipments usable in diesel cars. Electrolysis reactors have been manufactured as SMT30, SMT50, SMT50-1, SMT70, SMT90, respectively on various surface areas and different positions anode and cathode. Thus, the brown gas generative properties on reactors tended to increase as surface area increase, and show differences in different electrode positions. However, the effect on electrolyte concentration had increased with a decreasing electrolyte concentration of NAOH 3~1‰, and the brown gas generative properties on ampere of SMT30, SMT50, SMT50-1, SMT70, SMT90 have shown to be $0.74{\ell}/10min$, $1.0{\ell}/10min$, $1.10,{\ell}/10min$, $0.97{\ell}/10min$, $1.13{\ell}/10min$.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2004.08a
• /
• pp.1058-1061
• /
• 2004

Recently, According to companies of TFT LCD are making large sized products more and more. In the vortex of Products with a monitor and LCD TV is applied in a technique of a high viewing angle(FFS, IPS, VA). Also, as a high luminance, high speed response time, high degree of a color purity, and so on are continuing to develop a high performance, it is necessary to improve a specific character of high luminance that apply to LCD TV as a LCD BLU. Because a LCD panel for TV usually has a lower resolution that compare to a monitor, the structure of present backlight system can't put out its power even though it has a merit in transmission. Therefore, the examination of improvement about the high luminance direct typed BLU for LCD TV that presupposes several uses of CCFL(Cold Cathode Fluorescent Lamp) or EEFL(External Electrode Fluorescent Lamp)is actively being progressed. Although it is necessary to increase the number of lamps for applying high performance by the direct type, in this case, because we can design the character of luminance for adoption of high performance. We can satisfy with a level of luminance for LCD TV. Accordingly, we analyzed a change of the number of CCFL, mechanical and optical character to produce the direct typed backlight in 32inches spec. Consequently, we achieved luminance of 6597nit,which was including polarization film, and secured the standard for LCD TV.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.06a
• /
• pp.64-64
• /
• 2009

Atomic force microscopy (AFM) fabrication of oxide patterns is an attractive technique for nanoscale patterns and related device structures, SiC exhibits good performance in high-power, high-frequency, and high-temperature conditions that is comparable to the performance of Si. The AFM fabrication of oxide patterns on SiC is important for electronic applications. However, there has not been much reported investigations on oxidation of SiC using AFM. We achieved the local oxidation of 4H-SiC using the high loading force of ~100 nN, although the oxidation of SiC is generally difficult mainly due to the physical hardness and chemical inactivity. All the experiments were performed using atomic force microscopy (S.I.S. GmbH, Germany) with a Pt/Ir-coated Si tip at ~40% humidity and room temperature. The spring constant and resonance frequency of the tip were around ~3 N/m and ~70 kHz. We fabricated oxide patterns on n-type 4H-SiC ($\sim10^{19}/cm^3$) and n-type Si ($\sim1.9\times10^{16}/cm^3$). In summary, we demonstrated that the oxide patterns can be obtained over the electric field of ${\sim}\times10^7 V/cm$ and the high loading force using the tip as a cathode. The electric field transports the oxyanions (OH-) to the positively biased surface.

• Journal of the Korean Electrochemical Society
• /
• v.8 no.4
• /
• pp.181-185
• /
• 2005

Lithium cobalt oxide thin film cathode, having thickness of $2.9{\mu}m$ with area of $4cm^2$, was deposited on platinum patterned alumina substrate by radio frequency magnetron sputtering. Li/Co molar ratio, which is an important factor for battery performance, was measured as a function of argon working pressure and applied R.F. power. Constant current charge and discharge performances were characterized with high rate discharge and cycling behavior. Using AC impedance analysis, internal resistance of the thin film battery was measured and simulated by proposed equivalent circuit model.

• Journal of Electrochemical Science and Technology
• /
• v.6 no.3
• /
• pp.95-105
• /
• 2015

In the present work, Carbon supported Pt₁₀₀, Pt₈₀Sn₂₀, Pt₈₀Ni₂₀ and Pt₈₀Sn₁₀Ni₁₀ electrocatalysts with different atomic ratios were prepared by ethylene glycol-reduction method to study the electro-oxidation of ethanol in membraneless fuel cell. The electrocatalysts were characterized in terms of structure, morphology and composition by using XRD, TEM and EDX techniques. Transmission electron microscopy measurements revealed a decrease in the mean particle size of the catalysts for the ternary compositions. The electrocatalytic activities of Pt₁₀₀/C, Pt₈₀Sn₂₀/C, Pt₈₀Ni₂₀/C and Pt₈₀Sn₁₀Ni₁₀/C catalysts for ethanol oxidation in an acid medium were investigated by cyclic voltammetry (CV) and chronoamperometry (CA). The electrochemical results showed that addition of Ni to Pt/C and Pt-Sn/C catalysts significantly shifted the onset of ethanol and CO oxidations toward lower potentials. The single membraneless ethanol fuel cell performances of the Pt₈₀Sn₁₀Ni₁₀/C, Pt₈₀Sn₂₀/C and Pt₈₀Ni₂₀/C anode catalysts were evaluated at room temperature. Among the catalysts investigated, the power density obtained for Pt₈₀Sn₁₀Ni₁₀/C (37.77 mW/cm² ) catalyst was higher than that of Pt₈₀Sn₂₀/C (22.89 mW/cm² ) and Pt₈₀Ni₂₀/C (16.77 mW/ cm² ), using 1.0 M ethanol + 0.5 M H₂SO₄ as anode feed and 0.1 M sodium percarbonate + 0.5 M H₂SO₄ as cathode feed.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.22 no.7
• /
• pp.595-601
• /
• 2009

For the silicon oxide $(SiO_x)$ films prepared by using the facing target sputtering (FTS) apparatus that was manufactured to enhance the preciseness of the fabricated thin-film and sputtering yield rate by forming a higher-density plasma in the electrical discharge space for using it as a thin-film passivation system for flexible organic light emitting devices (FOLEDs). The deposition characteristics were investigated under various process conditions, such as array of the cathode magnets, oxygen concentration$(O_2/Ar+O_2)$ introduced during deposition, and variations of distance between two targets and working pressure. We report that the optimum conditions for our FTS apparatus for the deposition of the $SiO_x$ films are as follows: $d_{TS}\;and\;d_{TT}$ are 90mm and 120mm, respectively and the maximum deposition rate is obtained under a gas pressure of 2 mTorr with an oxygen concentration of 3.3%. Under this optimum conditions, it was found that the $SiO_x$ film was grown with a very high deposition rate of $250{\AA}$/min by rf-power of $4.4W/cm^2$, which was significantly enhanced as compared with a deposition rate (${\sim}55{\AA})$/min) of the conventional sputtering system. We also reported that the FTS system is a suitable method for the high speed and the low temperature deposition, the plasma free deposition, and the mass-production.

• 한국신재생에너지학회:학술대회논문집
• /
• 2011.05a
• /
• pp.89.1-89.1
• /
• 2011

According to green growth's policy, green-home dissemination's projects are promoting. Among them, stationary fuel cell systems are receiving attention due to high efficiency and clear energy. But it need absolutely to develop cost down technologies and improve system durability for commercialization of the fuel cell system. To achieve this objectives, in 2009, the Korean Government and "Korea Institute of Energy Technology Evaluation and Planning(KETEP)" launched into the strategic development project of BOP technology for practical applications and commercializations of stationary fuel cell systems, named "Technology Development on Cost Reduction of BOP Components for 1kW Stationary Fuel Cell Systems to Promote Green-Home Dissemination Project". This paper introduces a summary of improved BOP performances that has been achieved through the 2nd year development precesses(2010.06~2011.05) base on 1st year development precesses(2009.06~2010.05). The major elements for fuel cell systems are cathode air blowers, burner air blowers, preferential oxidation air blowers, fuel blowers, cooling water pumps, reformer water pumps, heat recovery pumps, mass flow meters, electrical valves, safety valves and a low-voltage inverter. Key targets of those elements are the reduction of cost, power consumption and noise. Invert's key targets are development the low -voltage technologies in order to reduce the number of unit cell in fuel cell system's stack.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.02a
• /
• pp.254-254
• /
• 2013

마그네트론 스퍼터링은 그 단순한 구조로 인하여 신뢰성과 확장성이 높은 기술이다, 이로 인해 DLC, ITO 등의 산업 분야에서 많이 사용하는 박막 공정 기술이다. 하지만 인듐과 같은 희토류 금속의 가격이 최근 상승함에 따라 나타난 낮은 타겟 효율성의 문제와 낮은 파워 밀도로 인한 기판의 추가적인 bias 추가에 따른 비용상승, 그리고 reactive 스퍼터링 시 낮은 증착률 등의 문제점들 또한 존재한다. 이러한 단점들을 해결하기 위해 많은 연구들이 이루어 졌으며, 높은 파워 밀도를 위해 High power Impulse Plasma Magnetron Sputtering (HIPIMS) 기술과 타겟 사용률을 높이기 위한 High Target Utilization Sputtering (HITUS) 등의 기술 등이 개발되었다. 본 연구에서는 직류 전원을 사용한 High density Plasma Sputtering System (HIPASS)이라 명하는 고밀도 원거리 플라즈마 소스를 이용한 스퍼터링 이용해 증착한 박막의 특성을 연구 하였다. Hollow cathode discharge에서 발생한 고밀도 플라즈마가 외부 유도 자장 코일에 의하여 타겟 표면까지 도달하게 되며, 스퍼터링 타겟의 고전압 bias에 의해 플라즈마 이온들이 가속이 이루어져 스퍼터링 공정이 이루어 지게 된다. 본 연구의 공정에서 타겟 사용 효율은 최대 90%까지 이며, 원거리 플라즈마 소스에서의 이온으로 스퍼터링을 실시함으로 인해 스퍼터링 전압과 전류의 독립적인 조절이 가능 하다. 본 연구에서 HIPASS을 이용하여 기판에 추가적인 전압 인가 없이 Ti 타겟과 아르곤/질소 혼합가스를 사용하여 TiN 박막을 증착 하였다. TiN의 증착률은 약 44 nm/min였으며, 이 박막의 XRD 분석 결과 TiN (111), (200), (220) 면들이 관찰이 되었다. 높은 스퍼터링 입자 에너지에서 증착 된 TiN 박막에서 우선적으로 나타나는(200)과 (220) 면들이, 본 실험에서는 기판에 추가적인 전압인가 없이도 우선방위 성장을 보였다. 이 박막의 micro-hardness 측정 결과 약 34.7 GPa이며, 이는 UBM 이나 HIPIMS에서 보여주는 결과에 준하거나 그 이상의 수치이다. 이와 같은 결과는 본 연구에서 사용한 HIPASS 증착 공정이 높은 스퍼터링 입자 에너지를 가지기에 고밀도의 TiN 박막이 증착 된 결과로 볼 수 있다.