• Title/Summary/Keyword: Catalytic chemical vapor deposition

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Characterization of Single-walled Carbon Nanotubes Synthesized by Water-assisted Catalytic Chemical Vapor Deposition

  • Lee, Yeon-Ja;Kim, Bawl;Yu, Zhao;Lee, Cheol-Jin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.381-381
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    • 2011
  • The influence of the water vapor on the growth of single-walled carbon nanotubes (SWCNTs) was investigated. SWCNTs were synthesized by catalytic chemical vapor deposition of acetylene over Fe-Mo/MgO catalyst with injection of water vapor. The morphologies and structures of the water-assisted SWCNTs were investigated according to the growth conditions such as water vapor concentrations, flow rate of the gas, furnace temperature, and growth time. Water-assisted SWCNTs exhibited large bundle morphological features with well-alignment of each CNT, while SWCNTs synthesized in the absence of water vapor showed entangled CNT with the random orientation. We also found that the diameter of the SWCNT bundle could be controlled by the growth condition. In our optimal growth condition, the product yield and the purity were 300 wt. % and 75%, which were 7.5 and 2.5 times higher than those of SWCNTs synthesized without water vapor, respectively. More detail discussion will be offered at the poster presentation.

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Growth of Highly Purified Carbon Nanotubes by Thermal Chemical Vapor Deposition (열화학기상증착법에 의한 고순도 탄소나노튜브의 성장)

  • Yu, Jae-Geun;Park, Jeong-Hun;Kim, Dae-Un;Lee, Cheol-Jin;Son, Gwon-Hui;Sin, Dong-Hyeok;Mun, In-Gi
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.49 no.12
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    • pp.649-653
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    • 2000
  • We have grown carbon nanotubes by thermal chemical vapor deposition of $C_{2}H_{2}$ on catalytic metal deposited on silicon oxide substrates. Highly purified carbon nanotubes are uniformly grown on a large area of the silicon oxide substrates. It is observed that surface modification of catalytic metals deposited on substrates by either etching with dipping in a HF solution and/or $NH_{3}$ pretreatment is a crucial step for the nanotube growth prior to the reaction of $C_{2}H_{2}$ gas. The diameters of carbon naotubes could be controlled by applying the different catalytic metals.

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Inductively-Coupled Plasma Chemical Vapor Growth Characteristics of Graphene Depending on Various Metal Substrates (다양한 금속 기판재료에 따른 그래핀의 유도결합 플라즈마 화학기상 성장 특성)

  • Kim, Dong-Ok;Trung, Tran Nam;Kim, Eui-Tae
    • Korean Journal of Materials Research
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    • v.24 no.12
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    • pp.694-699
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    • 2014
  • We report the chemical vapor deposition growth characteristics of graphene on various catalytic metal substrates such as Ni, Fe, Ag, Au, and Pt. 50-nm-thick metal films were deposited on $SiO_2/Si$ substrates using dc magnetron sputtering. Graphene was synthesized on the metal/$SiO_2$/Si substrates with $CH_4$ gas (1 SCCM) diluted in mixed gases of 10% $H_2$ and 90 % Ar (99 SCCM) using inductively-coupled plasma chemical vapor deposition (ICP-CVD). The highest quality of graphene film was achieved on Ni and Fe substrates at $900^{\circ}C$ and 500 W of ICP power. Ni substrate seemed to be the best catalytic material among the tested materials for graphene growth because it required the lowest growth temperature ($600^{\circ}C$) as well as showing a low ICP power of 200W. Graphene films were successfully grown on Ag, Au, and Pt substrates as well. Graphene was formed on Pt substrate within 2 sec, while graphene film was achieved on Ni substrate over a period of 5 min of growth. These results can be understood as showing the direct CVD growth of graphene with a highly efficient catalytic reaction on the Pt surface.

Synthesis and Characterization of Carbon nanofibers on Co and Cu Catalysts by Chemical Vapor Deposition

  • Park, Eun-Sil;Kim, Jong-Won;Lee, Chang-Seop
    • Bulletin of the Korean Chemical Society
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    • v.35 no.6
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    • pp.1687-1691
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    • 2014
  • This study reports on the synthesis of carbon nanofibers via chemical vapor deposition using Co and Cu as catalysts. In order to investigate the suitability of their catalytic activity for the growth of nanofibers, we prepared catalysts for the synthesis of carbon nanofibers with Cobalt nitrate and Copper nitrate, and found the optimum concentration of each respective catalyst. Then we made them react with Aluminum nitrate and Ammonium Molybdate to form precipitates. The precipitates were dried at a temperature of $110^{\circ}C$ in order to be prepared into catalyst powder. The catalyst was sparsely and thinly spread on a quartz tube boat to grow carbon nanofibers via thermal chemical vapor deposition. The characteristics of the synthesized carbon nanofibers were analyzed through SEM, EDS, XRD, Raman, XPS, and TG/DTA, and the specific surface area was measured via BET. Consequently, the characteristics of the synthesized carbon nanofibers were greatly influenced by the concentration ratio of metal catalysts. In particular, uniform carbon nanofibers of 27 nm in diameter grew when the concentration ratio of Co and Cu was 6:4 at $700^{\circ}C$ of calcination temperature; carbon nanofibers synthesized under such conditions showed the best crystallizability, compared to carbon nanofibers synthesized with metal catalysts under different concentration ratios, and revealed 1.26 high amorphicity as well as $292m^2g^{-1}$ high specific surface area.

Characteristics of Carbon Nanotube with Synthetic Conditions in Catalytic Chemical Vapor Deposition (촉매 화학 기상 증착법의 제조 조건에 따른 탄소 나노튜브의 특성)

  • Kim, Hyeon-Jin;Lee, Im-Ryeol
    • Korean Journal of Materials Research
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    • v.12 no.6
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    • pp.458-463
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    • 2002
  • Carbon nanotubes were synthesized at various conditions using Ni-catalytic thermal chemical vapor deposition method and their characteristic properties were investigated by SEM, TEM and Raman spectroscopy. Carbon nanotubes were formed on very fine Ni-catalytic particles. The carbon nanotubes synthesized by thermal decomposition of acetylene at $700^{\circ}C$ had a coiled shape, while those synthesized at $850^{\circ}C$ showed a curved and Y-shape having a bamboo-like morphology. It was found that the carbon nanotube was also made on the fine Ni-catalytic particles formed on the surface of 100~400nm sized large ones after pretreatment with $NH_3$.ber composites show the high dielectric constant and large conduction loss which is increased with anisotropy of fiber arrangement. It is, therefore, proposed that the glass and carbon fiber composites can be used as the impedance transformer (surface layer) and microwave reflector, respectively. By inserting the foam core or honeycomb core (which can be treated as an air layer) between glass and carbon fiber composites, microwave absorption above 10 dB (90% absorbance) in 4-12 GHz can be obtained. The proposed fiber composites laminates with sandwitch structure have high potential as lightweight and high strength microwave absorbers.

Selective Vapor-Phase Deposition of Conductive Poly(3,4-ethylenedioxythiophene) Thin Films on Patterned FeCl3 Formed by Microcontact Printing

  • Lee, Bo H.;Cho, Yeon H.;Shin, Hyun-Jung;Kim, Jin-Yeol;Lee, Jae-gab;Lee, Hai-won ;Sung, Myung M.
    • Bulletin of the Korean Chemical Society
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    • v.27 no.10
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    • pp.1633-1637
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    • 2006
  • We demonstrate a selective vapor-phase deposition of conductive poly(3,4-ethylenedioxythiophene) (PEDOT) thin films on patterned $FeCl_3$. The PEDOT thin films were grown on various substrates by using the vapor-phase polymerization of ethylenedioxythiophene (EDOT) with $FeCl_3$ catalytic layers at 325 K. The selective deposition of the PEDOT thin films using vapor-phase polymerization was accomplished with patterned $FeCl_3$ layers as templates. Microcontact printing was done to prepare patterned $FeCl_3$ on polyethyleneterephthalate (PET) substrates. The selective vapor-phase deposition is based on the fact that the PEDOT thin films are selectively deposited only on the regions exposing $FeCl_3$ of the PET substrates, because the EDOT monomer can be polymerized only in the presence of oxidants, such as $FeCl_3$, Fe($CIO_4$), and iron(II) salts of organic acids/inorganic acids containing organic radicals.

Chemical Vapor Deposition Using Ethylene Gas toward Low Temperature Growth of Single-Walled Carbon Nanotubes

  • Jo, Sung-Il;Jeong, Goo-Hwan
    • Applied Science and Convergence Technology
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    • v.24 no.6
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    • pp.262-267
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    • 2015
  • We demonstrate the growth of single-walled carbon nanotubes (SWNTs) using ethylene-based chemical vapor deposition (CVD) and ferritin-induced catalytic particles toward growth temperature reduction. We first optimized the gas composition of $H_2$ and $C_2H_4$ at 500 and 30 sccm, respectively. On a planar $SiO_2$ substrate, high density SWNTs were grown at a minimum temperature of $760^{\circ}C$. In the case of growth using nanoporous templates, many suspended SWNTs were also observed from the samples grown at $760^{\circ}C$; low values of $I_D/I_G$ in the Raman spectra were also obtained. This means that the temperature of $760^{\circ}C$ is sufficient for SWNT growth in ethylene-based CVD and that ethylene is more effective that methane for low temperature growth. Our results provide a recipe for low temperature growth of SWNT; such growth is crucial for SWNT-based applications.

Catalytic synthesis and properties of β-Ga2O3 nanowires by metal organic chemical vapor deposition (MOCVD를 이용한 금속 촉매 종류에 따른 β-Ga2O3 나노 와이어의 제작과 특성)

  • Lee, Seunghyun;Lee, Seoyoung;Jeong, Yongho;Lee, Hyojong;Ahn, Hyungsoo;Yang, Min
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.27 no.1
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    • pp.1-8
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    • 2017
  • Catalytic synthesis and properties of ${\beta}-Ga_2O_3$ nanowires grown by metal organic chemical vapor deposition are reported. Au, Ni and Cu catalysts were suitable for the growth of $Ga_2O_3$ nanowires under our experimental conditions. The $Ga_2O_3$ nanowires grown by using Au, Ni and Cu catalysts showed different growth rates and morphologies in each case. We found the $Ga_2O_3$ nanowires were grown by the Vapor-Solid (VS) process when Ni was used as a catalyst while the Vapor-Liquid-Solid (VLS) was a dominant process in case of Au and Cu catalysts. Also, we found nanowires showed different optical properties depend on catalytic metals. On the other hand, for the cases of Ti, Sn and Ag catalysts, nanowires could not be obtained under the same condition of Au, Cu and Ni catalytic synthesis. We found that these results are related to the different characteristics of each catalyst, such as, melting points and phase diagrams with gallium metal.