• Coupled systems mechanics
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• v.2 no.3
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• pp.215-230
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• 2013

This paper investigates the pull-in instability of functionally graded poly-SiGe micro-beams under the combined electrostatic and intermolecular forces and temperature change. The exponential distribution model and Voigt model are used to analyze the functionally graded materials (FGMs). Principle of virtual work is used to derive the nonlinear governing differential equation which is then solved using differential quadrature method (DQM). A parametric study is conducted to show the significant effects of material composition, geometric nonlinearity, temperature change and intermolecular Casimir force.