• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.219.1-219.1
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• 2014

전자소자 산업의 미세화 및 대형화에 따라 플라즈마 밀도, 전위, 온도, 균일도 등 과 같은 플라즈마 특성을 제어하는 것은 차세대 플라즈마 장치 개발에 있어 매우 중요한 요소라고 할 수 있다. 특히, 급격한 소자의 미세화에 따라 플라즈마 공정을 통해 발생할 수 있는 damage는 큰 issue가 되어 왔고, 많은 연구자들은 이를 해결하기 위해서 다각적인 노력을 진행해 왔다. 그중 높은 전자 온도는 높은 전자 에너지에 의해 공정 중 소자를 손상 시키는 주된 원인이라고 보고되고 있으며, 이에 대한 제어기술은 매우 중요하다고 할 수 있다. 본 연구에서는 서로 다른 두 개의 내/외측으로 나뉘어진 나선형 모양의 ICP 안테나를 이용 하여 연구를 진행하였다. 내측의 안테나에는 2 MHz를 연결 하였으며, 외측의 안테나에는 13.56 MHz를 연결 하였으며, 내/외측 안테나에 각각 pulse mode로 입력전력을 인가해 줌으로써 플라즈마의 특성을 관찰하였다. Pulse / CW (Continuous Wave) mode에 있어서 전자온도의 측정을 위해 emissive probe 를 이용하여 plasma potential과 floating potential을 측정하였으며, 이를 통하여 전자온도를 계산하여 구할 수 있었다. Duty ratio 및 pulsing frequency의 변화에 따른 전자온도의 변화를 확인 할 수 있었으며, 그에 따른 플라즈마 균일도를 ion saturation current를 측정함으로써 관찰할 수 있었다. 실제 식각 공정에 있어서 Pulsing 조건에 따른 식각 특성을 관찰하기 위해, SiO2, ACL (Amorphous Carbon Layer)에 대해 식각을 진행하였으며, 식각 메커니즘 분석을 위해 이온에너지 분포의 변화를 PSM (Plasma Sampling Mass-spectroscopy)을 이용하여 측정하였다.

• Korean Journal of Oriental Medicine
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• v.2 no.1
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• pp.454-484
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• 1996

There are many factors to evoke pain, for example cold, heat, seven emotion, digestion, fatigue, venemous worms, deficiency of blood etc., and its pathogenesis is complicated. Treatments for pain in oriental medicine are as follows. 1. Pharmacotherapy is a method to treat pain by different effects of herbal medicine, for example, regulating vital energy, activating blood circulation, eliminating phlegm, and dispelling the cold evil etc. 2. Acupuncture and moxibustion therapy is a kind of external application, it has a distinct effect in relieving pain. Recently its operation method has been more developed, so new acupuncture therapies are used in clinics. There are electroacupuncture, auricular acupuncture and injection of drugs at an acupuncture points etc. 3. Oriental physiotherapy is a treatment method to stimulate acupuncture points and meridians. (1) Hot pack, Paraffin bath, Microwave, Ultrasound, Short wave, Infra-red etc. are used to treat cold syndrome by dispersing cold by warming the channels. (2) E.S.T., I.C.T., T.E.N.S., S.S.P., cupping treatment etc. are used to treat disorders of vital energy. (3) Health ion, Carbon, T.D.P., etc are used to treat conic and deficiency syndrome.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.116.2-116.2
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• 2017

DLC (Diamond like carbon) 박막을 전극 재료로 활용하기 위해서는 높은 전기 저항과 금속성 기판에 대한 낮은 접착력을 극복해야 한다. 본 연구에서는 PECVD에 의해 합성 된 DLC/Ti 전극의 아크 중간층, 질소 도핑, 증착 및 열처리 온도가 접착 강도와 전기적 및 전기 화학적 특성에 주는 영향을 체계적으로 조사 하였다. 그 결과, arc ion plating (AIP) 법에 의해 증착 된 Ti/TiC 중간층의 도입은 스크래치 테스트와 전기화학적 싸이클 테스트에서 향상된 접착 강도 및 수명을 가져온다는 것을 확인 하였다. 그리고 arc 중간층에서의 arc droplet은 DLC 박막의 표면적을 넓혀 전기 화학적 활성도를 높이는 긍정적인 역할을 하였다. 소량의 질소 도핑은 DLC 막의 비저항을 크게 낮춰주었고, 전기화학적 활성도를 증가시켰다. 증착 온도가 높을수록 DLC 막의 sp2/sp3 비율이 증가하였고, 이에 따라 비저항은 감소하였으며 전기 화학적 활성도는 증가하였다. 반면, 가장 높은 전기화학적 전위창은 $300^{\circ}C$ 에서 얻어졌으며 더 높은 온도에서 감소하였다. 열처리 온도를 높일수록 비저항의 감소 및 전기 화학적 활성도가 증가한 반면, 전기화학적 전위창은 지속적으로 감소하였고, 높은 열처리 온도에서는 DLC 전극의 수명이 줄어드는 것을 확인 하였다.

• Analytical Science and Technology
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• v.24 no.3
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• pp.219-224
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• 2011

Voltammetric analysis of Cl(I) ion was performed using a metal gold (Au) electrode (AE) and a carbon nanotube electrode (CNTE). After the examination, the AE was found to have more sensitively detected Cl(I) than CNTE. The optimum analytical conditions for the cyclic voltammetry (CV) and the square wave (SW) stripping voltammetry were performed using AE. The detection limit of $6.5\;{\mu}g/L$ Cl(I) was attained. The developed techniques were compared with the common Cl meter and applied to water systems.

• International Journal of Precision Engineering and Manufacturing
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• v.5 no.4
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• pp.5-13
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• 2004

This study explains the effects of lubricant and surface treatment on the life of hot forging dies. The thermal load and thermal softening, that occur when there is contact between the hotter billet and the cooler dies in hot forging, cause wear, thermal cracking and fatigue, and plastic deformation. Because the cooling effect and low friction are essential to the long life of dies, the proper selection of lubricant and surface treatment is very important in hot forging process. The two main factors that decide friction and heat transfer conditions are lubricant and surface treatment, which are directly related to friction factor and surface heat transfer coefficient. Experiments were performed for obtaining the friction factors and the surface heat transfer coefficients in different lubricants and surface treatments. For lubrication, oil-base and water-base graphite lubricants were used, and ion-nitride and carbon-nitride were used as surface treatment conditions. The methods for estimating die service life that are suggested in this study were applied to a finisher die during the hot forging of an automobile part. The new techniques developed in this study for estimating die service life can be used to develop more feasible ways to improve die service life in the hot forging process.

• Mass Spectrometry Letters
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• v.2 no.2
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• pp.41-44
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• 2011

Molecular compositions of two types of heavy oil were studied using positive atmospheric pressure photoionization (APPI) Fourier transform ion cyclotron resonance mass spectrometry (FT-ICR MS). Vacuum gas oil (VGO) was generated from vacuum distillation of atmospheric residual oil (AR), and slurry oil (SLO) was generated from catalytic cracking of AR. These heavy oils have similar boiling point ranges in the range of 210-$650^{\circ}C$, but they showed different mass ranges and double-bond equivalent (DBE) distributions. Using DBE and carbon number distributions, aromatic ring distributions, and the extent of alkyl side chains were estimated. In addition to the main aromatic hydrocarbon compounds, those containing sulfur, nitrogen, and oxygen heteroatoms were identified using simple sample preparation and ultra-high mass resolution FT-ICR MS analysis. VGO is primarily composed of mono- and di-aromatic hydrocarbons as well as sulfur-containing hydrocarbons, whereas SLO contained mainly polyaromatic hydrocarbons and sulfur-containing hydrocarbons. Both heavy oils contain polyaromatic nitrogen components. SLO inludes shorter aromatic alkyl side chains than VGO. This study demonstrates that APPI FT-ICR MS is useful for molecular composition characterization of petroleum heavy oils obtained from different refining processes.

• KSTLE International Journal
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• v.1 no.1
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• pp.12-20
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• 2000

Nano-wear and friction of carbon overcoated laser-textured and mechanically-textured computer hard disk were characterised after contact start/stop (CSS) wear test. Various analytical and mechanical testing techniques were employed to study the changes in topography, roughness, chemical elements, mechanical properties and friction characteristics of the coating arising from the contact start/stop wear test These techniques include: the atomic force microscopy (AFM), the continuous nano-indentation test, the nano-scratch test, the time-of-flight secondary ion mass spectroscopy (TOF-SIMS) and the auger electron spectroscopy (AES). It was shown that the surface roughness of the laser-textured (LT) bump and mechanically textured (MT) Bone was reduced approximately am and 7nm, respectively, after the CSS wear test. The elastic modulus and hardness values increased after the CSS test, indicating straining hardening of the top coating layer, A critical load was also identified fer adhesion failure between the magnetic layer and the Ni-P layer, The TOF-SIMS analysis also revealed some reduction in the intensity of C and $C_2$$F_59$, confirming the wear of lubricant elements on the coating surface.

• Proceedings of the Membrane Society of Korea Conference
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• 1996.06a
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• pp.121-147
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• 1996

Since 1980, the water quality of ultra-pure water has been rapidly improved, and presently ultra-pore water producing equipment for 64Mbit is in operation. Table 1 shows the degree of integration of DRM and required water quality exlmple. The requirements of the ultra-pure water for 64Mbit are resistivity: 18.2 MQ/cm or higher, number of particulates: 1 pc/ml or less (0.05 $\mu$m or larger). bacteria count: 0.1 pc/l or less. TOC (Total Organic Carbon, index of organic snbstance) : 1ppb or less, dissolved oxygen: 5ppb or less, silica: 0.5ppb or less, heavy metal ions: 5ppb or less. The effect of metals on the silicon wafer has been well known, and recently it has been reported that the existence of organic substance in ultra-pure water is closely related to the device defect, drawing attention. It is reported that if organic substance sticks to the natural oxidation film, the oxide film remaims on the organic substance attachment in the hydrofluoric acid treatment (removal of natural oxidation film). The organic substance forms film on the silicon wafer, and harmful elements such as metals and N.P.S., components contained in the organic substance and the bad effect due to the generatinn of silicon carbide cannot be forgotten. In order to remove various impurities in raw water, many technological develoments (membrane, ion exchange, TOC removal, piping material, microanalysis, etc.) have been made with ultra-pure water producing equipment and put to practical use. In this paper, technologies put to practical use in recent ultra-pure vater producing equimeut are introduced.

• Korean Journal of Materials Research
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• v.7 no.1
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• pp.8-14
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• 1997

DLC막은 여러가지 기술적인 응용에 매우 기대된느 재료이다. 탄화수소 가스의 플라즈마 분해에 의해 증착되는 DLC 막은 높은 경도, 화학적 안정성, 높은 전기 저항성, 적외선 영역의 투과성 등의 여러가지 우수한 성질을 지니고 있다. 그러나 이들막은 높은 내부응력으로 인하여 실제 응용에 상당한 제약을 받고 있다. 본 연구에서는 rf PECVD 법에 의해 합성된 다이아몬드상 탄소막을 보조가스 첨가에 따른 영향에 대하여 조사하였다. 수소가스를 첨가하여 합성된 DLC막의 잔류응력 거동은 낮은 이온 에너지 (V$_{b}$ $P^{1}$2/-20Volt/m Torr)에서 최대 잔류응력이 발생되지만, 질소 가스를 첨가시키면 높은 이온(V$_{b}$ P$_{1}$2/->70Volt/m Torr)에너지 영역에서 잔류응력의 감소가 나타났다. 수소 량이 증가하면 ion bombardment와 식각 작용을 하고, 질소의 경우 막의 표면 스퍼터링 현상이 발생되었다. 보조가스 첨가에 따라 S$P^{3}$net work구조의 생성과 소멸의 결합 구조를 형성하여, 보조가스 첨가는 DLC막의 잔류응력 거동에 영향을 미치는 것을 알 수 있었다. 이온 에너지에 따른막의 비저항은 막 합성 공정 조건에 관계없이 $10^{6}$-$10^{7}$ Ωm 의 범위에서 분포하고 있는 것으로 조사되었다. 이는 메탄가스(rf PECVD)로 합성된 DLC막의 비저항과 거의 일치하는 것으로 나타났다.

• Transactions of the Korean Society of Automotive Engineers
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• v.19 no.5
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• pp.7-13
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• 2011

The climate change due to the increased consumption with fossil fuel and rise of the oil price have been serious global issues. Automobile industry consumes 30% of the oil every year and causes air pollution and global warming by the exhaust emissions and carbon dioxide ($CO_2$). The demand of two-wheeled vehicle increases every year due to the parking and traffic problem caused by the increased automobiles in the urban area. Approximately 50,000,000 two-wheeled vehicles were produced in 2008. The development and sales of the hybrid two-wheeled vehicle industry become active due to its increased market demands. In this paper, the change of the motor and battery efficiency, driving distance, hill climbing ability with the change of the motor capacity was analyzed. Simulation of the peculiarities in urban driving schedule(World-wide Motorcycle Test Cycle(WMTC), Manhattan driving schedule), constant speed(10 km/h, 35 km/h) of small electronic two-wheeled vehicle was also carried out. Through the simulation result, appropriate capacities of the motor and battery for urban driving was acquired.