• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.87-88
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• 2007

반도체 소자가 초고집적화 되어감에 따라 반도체 공정에서 선폭은 줄어들고 박막은 다층화 되어가고 있다. 이와 같은 제조 공정 하에서는 Si 기판과 금속 박막간의 확산이 커다란 문제로 부각되어 왔다. 특히 Cu는 높은 확산성에 의하여 Si 기판과 접합에서 많은 확산에 의한 문제가 발생하게 되며, 또한 선폭이 줄어듦에 따라 고열이 발생하여 실리콘으로 spiking이 발생하게 된다. 이러한 확산을 방지하기 위하여 이 논문에서는 Tungsten - Carbon - Nitrogen (W-C-N)에 Boron (B)을 첨가하였고, Boron 타겟 power을 조절하여 다양한 조성을 가지는 W-B-C-N 확산방지막을 제작하여 각 조성에 따른 증착률을 조서하였고 $1000^{\circ}C$까지 열처리하여 그 비저항을 측정하여 각 특성을 확인하였다.

• 한국전기전자재료학회논문지
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• 제20권11호
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• pp.943-947
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• 2007

The effect of hydrogen and oxygen plasma treatments on the structural properties of carbon nanotube(CNT) has been systematically investigated. As the plasma power was increased, nano particles were appeared at the surface of CNTs. At high plasma power(300 Watt), the structure of CNT was changed from nanotube type to nano particles. However, in case of hydrogen plasma treatment, there was no change in microstructure of CNT. From the Raman analysis, the crystallinity of CNT was deteriorated by the plasma treatment, regardless of gas types.

• 한국전기전자재료학회논문지
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• 제24권3호
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• pp.245-249
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• 2011

Carbon nanotubes (CNTs) have been significantly used for the field emitters for display applications. However, the lifetime of CNT emitters which are formed by screen printing technique is not guaranteed yet, because the constituents in CNT paste affect the lifetime of CNTs. The CNT pastes for screen printing are normally composed of organic vehicles (nitro cellulose, ethyl cellulose, etc) and additives (glass frits, indium tin oxide (ITO), etc) with CNTs. In this study, the effects of constituents in CNT pastes on the lifetime and emission characteristics of CNTs were investigated by thermal and electrical analysis. Use of glass frits worsened the lifetime and electron emission of CNTs. However, an addition of ITO to CNT paste rather improved the lifetime of CNTs. Degradation of CNTs was small when nitro cellulose was used in CNT paste as an organic vehicle.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2023년도 봄 학술논문 발표대회
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• pp.185-186
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• 2023

Recently, a lot of nano-scale material technology development and research have been conducted in construction fields to improve the compressive strength and durability of cement-based Composites. There are some studies that have confirmed the properties and application effects of cement-based complex using each nanomaterial, but development and research using both materials are relatively limited. This study sought to confirm the effect of multi-wall carbon nanotubes (MWCNT) and nanosilica, which are representative construction nanomaterials, on the compressive strength, voids, and microstructure formation of cement. The purpose was to produce a cement composite by changing the mixing rate of the two nanomaterials, and to find the optimal mixing amount considering its mechanical and rheological properties.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.136-141
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• 2007

This paper introduces an artificial neuron which is a nano composite continuous sensor. The continuous nano sensor is fabricated as a thin and narrow polymer film sensor that is made of carbon nanotubes composites with a PMMA or a silicone matrix. The sensor can be embedded onto a structure like a neuron in a human body and it can detect deteriorations of the structure. The electrochemical impedance and dynamic strain response of the neuron change due to deterioration of the structure where the sensor is located. A network of the long nano sensor can form a structural neural system to provide large area coverage and an assurance of the operational health of a structure without the need for actuators and complex wave propagation analyses that are used with other methods. The artificial neuron is expected to effectively detect damage in large complex structures including composite helicopter blades and composite aircraft and vehicles.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.244-244
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• 2009

Carbon nanotubes (CNTs) have excellent electrical, chemical stability, mechanical and thermal properties. In this paper, networks of Multi-walled carbon nanotube (MWCNT) materials were investigated as transparent electrode. Sensor films were fabricated by air spray method using the multi-walled CNTs solution on glass substrates. The film that was sprayed with the MWCNT dispersion for 60 sec, was 300nm thick. And the electric resistivity and the light transmittance rate are $2{\times}10^2{\Omega}cm$ and 60%, respectively.

• 한국지진공학회:학술대회논문집
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• 한국지진공학회 2006년도 학술발표회 논문집
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• pp.613-619
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• 2006

This paper introduces a new structural health monitoring using a nano sensor. The sensor is made of nano smart composite material based on carbon nanotubes. The nano sensor is fabricated as a thin and narrow polymer film sensor that is bonded or deposited onto a structure. The electrochemical impedance and dynamic strain response of the neuron change due to deterioration of the structure where the sensor is located. A network of the long nano sensorcan form a structural neural system to provide large area coverage and an assurance of the operational health of a structure without the need for actuators and complex wave propagation analyses that are used with other methods.

• 전기학회논문지
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• 제63권2호
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• pp.319-324
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• 2014

The wafer carrier is made of PP, PC, PE resin which have excellent heat and chemical resistance and electrical properties. However, particle generation has become a problem due to static electricity generated in the carrier. Some conductive material such as carbon black (CB) and carbon fiber (CF) are added for the purpose of anti-static, however, additional for motility and particle contamination problems due to high carbon content occurs. In this paper, the electrical characteristics and workability are observed and compared by adding low Carbon Nono Tube(CNT) to each PP, PC and PE resin to solve the problem.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2012년도 춘계학술발표회 논문집
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• pp.229-230
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• 2012

Platinum (Pt) has been commonly used as a counter electrode material in dye-sensitized solar cells, because it has high catalytic activity and electric conductivity as well as chemical inertness with iodide electrolyte. However, Pt is too expensive to be commercialized. Therefore, in the present study, carbon black counter electrode with Pt and carbon nano tube (CNT) was investigated. The power conversion efficiency with Pt added carbon black electrode was lower than hat of pure Pt electrode which was 6.47 %. By adding 3 wt% Pt to the carbon black counter electrode, the power conversion efficiency was maximized at 5.88 %. On them, additional adding of 1 wt % CNT, the power conversion efficiency (${\eta}$)wasincreasedupto6.21%. The reason of power conversion efficiency improvement with a proper amount of Pt and CNT was examined by comparing the impedance properties measured using EIS.

• Korean Chemical Engineering Research
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• 제56권6호
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• pp.798-803
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• 2018

Si을 리튬이온전지 음극활물질로 사용하기 위해 입도를 $0.5{\mu}m$ 보다 작은 크기로 제어하였고 표면에 탄소를 약 10 nm 두께로 코팅하였다. 그 위에 탄소섬유를 50~150 wt% 양으로 성장시키고 다시 한 번 탄소코팅을 진행하였다. 이렇게 만들어진 Si 합성물질은 전기전도성을 높이기 위한 공정으로 이종 금속을 혼합하였으며 수명 특성을 개선하기 위해 흑연과 복합화하였다. 실험 변수에 따른 재료들의 물리화학적 특성을 XRD, SEM 및 TEM을 사용하여 측정하였고 코인셀을 제조하여 전기화학적 특성을 평가하였다. Si/PC (Pyrolytic Carbon)/CNF (Carbon Nano Fiber)보다 Si/PC/CNF/PC가 전체적으로 Si 함량이 줄어 방전용량은 상대적으로 낮게 나타났지만 전지평가에서 중요한 수명특성에서는 좋은 결과를 보여주었다. 0.2 C rate에서 $1512mA\;h\;g^{-1}$의 초기 방전 용량과 78%의 초기 효율을 나타내었고 10 싸이클에서 94%의 용량 보존율을 보여주었다.