• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.448-448
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• 2010

Magnetic random access memory (MRAM) has made a prominent progress in memory performance and has brought a bright prospect for the next generation nonvolatile memory technologies due to its excellent advantages. Dry etching process of magnetic thin films is one of the important issues for the magnetic devices such as magnetic tunneling junctions (MTJs) based MRAM. CoFeB is a well-known soft ferromagnetic material, of particular interest for magnetic tunnel junctions (MTJs) and other devices based on tunneling magneto-resistance (TMR), such as spin-transfer-torque MRAM. One particular example is the CoFeB - MgO - CoFeB system, which has already been integrated in MRAM. In all of these applications, knowledge of control over the etching properties of CoFeB is crucial. Recently, transferring the pattern by using milling is a commonly used, although the redeposition of back-sputtered etch products on the sidewalls and the low etch rate of this method are main disadvantages. So the other method which has reported about much higher etch rates of >$50{\AA}/s$ for magnetic multi-layer structures using $Cl_2$/Ar plasmas is proposed. However, the chlorinated etch residues on the sidewalls of the etched features tend to severely corrode the magnetic material. Besides avoiding corrosion, during etching facets format the sidewalls of the mask due to physical sputtering of the mask material. Therefore, in this work, magnetic material such as CoFeB was etched in an ICP etching system using the gases which can be expected to form volatile metallo-organic compounds. As the gases, carbon monoxide (CO) and ammonia ($NH_3$) were used as etching gases to form carbonyl volatiles, and the etched features of CoFeB thin films under by Ta masking material were observed with electron microscopy to confirm etched resolution. And the etch conditions such as bias power, gas combination flow, process pressure, and source power were varied to find out and control the properties of magnetic layer during the process.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.393-394
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• 2008

Carbon nanotubes are attractive nano-structured materials because of their remarkable electronic, physical, chemical properties. Due to these reasons, application researches of CNTs are actively processed on the display, the electronic element, the nano-diode fields and the semiconductor element. Today, The major issue of semiconductor technique are via and interconnects. CNTs are used to make via and interconnects because of high electric currents density and high heat transfer. Control of the orientation of grown CNTs is very important thing for making via and interconnects. Via are horizontal growth of CNTs and interconnects are vertical growth of CNTs. This research is based on the experiment using control of gas flow directions and DC bias. Scanning Electron Microscope (SEM) was used to check this experiment.

• Advances in nano research
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• v.15 no.6
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• pp.551-565
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• 2023

Coupled porous curved beams, due to their low weight and high flexibility, have many applications in engineering. This study investigates the vibration behavior of coupled porous curved beams in different boundary conditions. The system consists of two curved beams connected by a mid-layer of elastic springs. These beams are made of various materials, such as homogenous steel foam, and composite materials with PMMA (polymethyl methacrylate) and SWCNT (single-walled carbon nanotube) used as the matrix and nanofillers, respectively. To obtain equivalent material properties, the role of mixture (RoM) was employed, followed by the implementation of the porosity function. The system's governing equations were obtained by employing FSDT and Hamilton's law. To investigate thermal vibration, temperature was implemented as a load in the governing equations. The GDQ method was used to solve these equations. To demonstrate the applicability of the GDQ method in calculating the frequencies of the system and the correctness of the developed program, a validation study was conducted. After validation, numerous examples were presented to investigate the behavior of single and coupled curved beams in various material properties and boundary conditions. The results indicate that the frequencies of the curved beams and the system depend highly on the amount of porosity (n) and the distribution pattern. The system frequencies decreased with an increase in the porosity coefficient. The stiffness of the springs had no effect on the first mode frequency but increased frequencies of other modes in a specific range. The frequencies of the system decreased with an increase in environmental temperature.

• The Journal of Information Technology
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• v.10 no.2
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• pp.37-45
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• 2007

The multiple-ability which the structure and the physical properties which the carbon or scull tube are unique show the applicability is superior in the plane indication element which is an indispensability of information communications apparatus, the stubbornness memory element, 2nd change of air and the rough copy dosage [khay] plaque seater, the hydrogen store material and the chemical sensor back and it has the possibility which will pass over the limit which the element of existing has. from the present paper it compared in the steel and only 10 the boat it did and it analyzed against an energy storage space voluntary application and developmental apply the carbon or scull tube trend in order about under researching the effective energy storage element it could be appeared, the technique of the strong carbon nano tube. 1. The hazard which embodies the energy storage element which uses the carbon or scull tube it follows in the function which stands and CNT of the structure which is various is necessary. 2. CNT fabrications of each one must precede possible not only must be each Cabinet conference circumstances quality gain and loss. 3. The structural control of syntheses, length controls, diameter controls and the metal - CNT junction control backs of quality CNT must precede. Applies the hereafter carbon or the scull tube in the various element with the primary preceding base technique for the structural plan technique of the carbon or scull tube to be certainly established, it does, secondarily the various element functional control technique which uses the carbon or scull tube is researched and will do.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.32 no.3
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• pp.219-222
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• 2019

In this study, we fabricated plate-type shunt resistors with thermal stability by parallelly connecting metal alloy plates with positive temperature coefficient of resistance (TCR) and carbon nanotube (CNT) plates with negative TCR. The metal alloy plates, which were prepared by alloying Cu and Mn with a composition of 91 wt% of Cu and 9 wt% of Mn, showed around $800ppm/^{\circ}C$ of TCR, and the CNT plates prepared from the CNT solution by using the vacuum filtration method showed around $-800ppm/^{\circ}C$ of TCR. The shunt resistor that was fabricated by stacking metal alloy plates and CNT plates in this work showed about $46.93ppm/^{\circ}C$ of TCR. Therefore, we conclude that a shunt resistor with low TCR can be realized by simply adjusting the TCR of the metal alloy only, because the TCR of the CNT plate has an identical value.

• Composites Research
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• v.35 no.1
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• pp.1-7
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• 2022

The activated carbon is a very good choice for using as supercapacitor electrode materials. Herein, the flower of Shorea robusta, a bio-waste material was successfully used to synthesize the activated carbons for application as supercapacitor electrode materials. The activated carbon was synthesized through chemical activation process followed by thermal treatment at 700℃ in presence of N₂ atmosphere using KOH, ZnCl₂ and H₃PO₄ as the activating agents. The physicochemical analyses demonstrate that the obtained activated carbons are graphitic in nature and the degree of disorder of the graphitic carbons is changed with the activating agents. The activated carbon obtained from Shorea robusta flower (ACSF-K) electrode shows the specific capacitance of ~610 F g^-1 at 2 A g^-1 current density, which is higher than ACSF-Z (560 F g^-1) and ACSF-H (470 F g^-1) electrode material under the identical current density. The synthesized graphitic carbons also demonstrated good rate capability and high electrochemical stability as supercapacitor electrode.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.220-223
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• 2005

The rapid prototyping (RP) technology has been advanced for various applications such as verification of design, functional test. However, many RP machines still have low accuracy and limitation of applications for various materials. In this research, a hybrid RP system was developed to improve precision of micro parts. This hybrid system consists of deposition and material removal process by mechanical micro machining to fabricate nano composites using photo-curable polymer resin with various nano particles. In this work, using hybrid RP process with Multi-Walled Carbon Nano Tube (MWCNT) and hydroxyapatite, micro parts were fabricated. The precision of parts was evaluated based on the original CAD design, and to see the effect of nano particles on mechanical properties, tensile strength was measured. From the results of experiments, it was confirmed that the part made by hybrid process had higher precision, and the addition of nano particles improved mechanical properties.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.465-466
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• 2006

A single-wall carbon nanotube (SWCNT) has been studied as a material of Nano-Eletro-Mechanical-System (NEMS) device together with various nanowires. In order for oscillation of a multi-wall carbon nanotube (MWCNT) or a single-walled carbon nanotube (SWCNT) on plane surface, it needs suspension of a CNT across trench electrodes. So we propose fabrication method of a MWCNT resonator using dielectrophoresis and show successful results of suspeneded MWNT. Thin electrodes with large gaps could not suspend small diameter MWNT but thicker electrodes could. Thin MWNT could be suspended only when the electrode gap was reduced.

• Korea-Australia Rheology Journal
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• v.17 no.2
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• pp.41-45
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• 2005

As an effort to explore the effective use of carbon nanotubes as a reinforcing material for advanced nano-composites with polymer matrices, multi-walled carbon nanotubes (MWNTs) were successfully incorporated into polystyrene (PS) via in-situ bulk polymerization. Various experimental techniques revealed that the covalent bonds formed between PS radicals and acid-treated carbon nanotubes are favorable resulting in an effective load transfer. The enhanced storage modulus of the nanocomposites suggests a strong possibility for the potential use in industrial applications.

• Transactions on Electrical and Electronic Materials
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• v.3 no.1
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• pp.23-29
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• 2002

The electronic properties of Carbon Nanotube(CNT) are currently the focus of considerable interest. In this paper, the electronic properties of finite length effect in CNT for the carbon nano-scale device is presented. To Calculate the electronic properties of CNT, Empirical potential method (the extended Brenner potential for C-Si-H) for carbon and Tight Binding molecular dynamic (TBMD) simulation are used. As a result of study, we have known that the value of the band gap decreases with increasing the length of the tube. The energy band gap of (6,6) armchair CNT have the ranges between 0.3 eV and 2.5 eV. Also, our results are in agreements with the result of the other computational techniques.