• 제목/요약/키워드: Carbon/carbon-based materials

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Decrease of Global Warming Effect During Dry Etching of Silicon Nitride Layer Using C3F6O/O2 Chemistries

  • Kim, Il-Jin;Moon, Hock-Key;Lee, Jung-Hun;Jung, Jae-Wook;Cho, Sang-Hyun;Lee, Nae-Eung
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.459-459
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    • 2012
  • Recently, the discharge of global warming gases in dry etching process of TFT-LCD display industry is a serious issue because perfluorocarbon compound (PFC) gas causes global warming effects. PFCs including CF4, C2F6, C3F8, CHF3, NF3 and SF6 are widely used as etching and cleaning gases. In particular, the SF6 gas is chemically stable compounds. However, these gases have large global warming potential (GWP100 = 24,900) and lifetime (3,200). In this work, we chose C3F6O gas which has a very low GWP (GWP100 = <100) and lifetime (< 1) as a replacement gas. This study investigated the effects of the gas flow ratio of C3F6O/O2 and process pressure in dual-frequency capacitively coupled plasma (CCP) etcher on global warming effects. Also, we compared global warming effects of C3F6O gas with those of SF6 gas during dry etching of a patterned positive type photo-resist/silicon nitride/glass substrate. The etch rate measurements and emission of by-products were analyzed by scanning electron Microscopy (SEM; HITACI, S-3500H) and Fourier transform infrared spectroscopy (FT-IR; MIDAC, I2000), respectively. Calculation of MMTCE (million metric ton carbon equivalents) based on the emitted by-products were performed during etching by controlling various process parameters. The evaluation procedure and results will be discussed in detail.

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발전소용 이중보온용 강관의 홈부식(Grooving Corrosion)에 의한 파손 분석 (The Failure Analysis of Double Pipe for Insulation Used Power Plant by Grooving Corrosion)

  • 함종오;박기덕;박성진;선일식
    • 한국신뢰성학회지:신뢰성응용연구
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    • 제15권3호
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    • pp.197-206
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    • 2015
  • Failure analysis of pre-insulated pipe (SPPS 380, 400A) transporting high temperature water ($95{\sim}110^{\circ}C$) for a plant was carried out. The damaged area (${\Phi}5mm$) of pre-insulated pipe was found only on welds. The chemical composition of damaged pipe meets specification of carbon steel pipes for pressure service (KS D 3562). As results of microstructure analysis, crack propagated from outer to inside after pitting corrosion occurred on the outside surface. The non-metallic inclusion existed on the end of crack. And the non-metallic inclusion continuously and linearly formed along with the bond line of welds. Based on SEM-EDS analysis, the nonmetallic inclusions have higher Manganese (Mn) and Oxygen (O) content but sulfur (S) was not detected. As results of water quality analysis, hydrogen ion concentration and minerals like Fe, Mg, Si were in low level. But the content of dissolved oxygen (11.2 ppm) was slightly higher than that of standard. It seems that the cause of damaged pipe is grooving corrosion due to MnO inclusion formed on bond line and corrosion took place nearby welds.

유기 태양전지의 개발 현황과 기술 과제 (Technical Tasks and Development Current Status of Organic Solar Cells)

  • 장지근;박병민;임성규;장호정
    • 한국재료학회지
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    • 제24권8호
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    • pp.434-442
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    • 2014
  • Serious environmental problems have been caused by the greenhouse effect due to carbon dioxide($CO_2$) or nitrogen oxides($NO_x$) generated by the use of fossil fuels, including oil and liquefied natural gas. Many countries, including our own, the United States, those of the European Union and other developed countries around the world; have shown growing interest in clean energy, and have been concentrating on the development of new energy-saving materials and devices. Typical non-fossil-fuel sources include solar cells, wind power, tidal power, nuclear power, and fuel cells. In particular, organic solar cells(OSCs) have relatively low power-conversion efficiency(PCE) in comparison with inorganic(silicon) based solar cells, compound semiconductor solar cells and the CIGS [$Cu(In_{1-x}Ga_x)Se_2$] thin film solar cells. Recently, organic cell efficiencies greater than 10 % have been obtained by means of the development of new organic semiconducting materials, which feature improvements in crystalline properties, as well as in the quantum-dot nano-structure of the active layers. In this paper, a brief overview of solar cells in general is presented. In particular, the current development status of the next-generation OSCs including their operation principle, device-manufacturing processes, and improvements in the PCE are described.

고강도 인바계 합금의 열팽창 및 인장 특성에 미치는 바나듐과 탄소 원소 첨가 영향 (Effects of V and C additions on the Thermal Expansion and Tensile Properties of a High Strength Invar Base Alloy)

  • 윤애천;윤신천;하태권;송진화;이기안
    • 소성∙가공
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    • 제24권1호
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    • pp.44-51
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    • 2015
  • The current study seeks to examine the effects of V and C additions on the mechanical and low thermal expansion properties of a high strength invar base alloy. The base alloy (Fe-36%Ni-0.9%Co-2.75%Mo-0.7Cr-0.23Mn-0.17Si-0.3%C, wt.%) contains $Mo_2C$ carbides, which form as the main precipitate. In contrast, alloys with additions of 0.4%V+0.3%C (alloy A) or 0.4%V+0.45%C (alloy B) contain $Mo_2C$+[V, Mo]C carbides. The average thermal expansion coefficients of these high strength invar based alloys were measured in the range of $5.16{\sim}5.43{\mu}m/m{\cdot}^{\circ}C$ for temperatures of $15{\sim}230^{\circ}C$. Moreover, alloy B showed lower thermal expansion coefficient than the other alloys in this temperature range. For the mechanical properties, the [V, Mo]C improved hardness and strengths(Y.S. and T.S.) of the high strength invar base alloy. T.S.(tensile strength) and Y.S.(yield strength) of hot forged alloy B specimen were measured at 844.6MPa and 518.0MPa, respectively. The tensile fractography of alloy B exhibited a ductile transgranular fracture mode and voids were initiated between the [V, Mo]C particles and the matrix. Superior properties of high strength and low thermal expansion coefficient can be obtained by [V, Mo]C precipitation in alloy B with the addition of 0.4%V and 0.45%C.

NTIS (National Science & Technology Information Service) Data (디스플레이 분야)와 소재산업R&D 사례분석을 통한 소재기술 경쟁력 향상에 관한 연구 (Study on Enhancement of Material Technology Competitiveness through NTIS (National Science & Technology Information Service) Data (Display Field) and Material Industry R & D Case Analysis)

  • 우창화
    • 반도체디스플레이기술학회지
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    • 제18권3호
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    • pp.77-81
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    • 2019
  • Recently, Korea has been making efforts at the government level to overcome the national crisis that Japan's dependency on technology in the semiconductor and display materials sectors has also escaped due to export regulations on three materials carried out by Japan. Therefore, based on the data of the National Science & Technology Information Service (NTIS) operated by the government, we analyze the trend of R & D investment in the display field, thereby improving R & D to improve material technology competitiveness in the future. Let's examine the implications of investment. A total of 5 years of new research and development investment in the field of display was invested as basic research fund for 25%, 15% for applied research, and 53% for development research. In terms of development cost and development period, the basic research showed that the amount of money and the development period were shorter than that of applied research. In other words, the basic research accounted for 25% of the R & D investment and the average R & D period was only 3.2 years. As we can see from the recent development of H fiber carbon fiber, which was recently developed and entered full-scale production, we were able to succeed because of the benefits of government support for 10 years while giving the same material title differently. In order to escape from Japan's technological dependence on semiconductor and display materials in Korea, As such, basic research in the field of materials is only possible when long-term research is conducted.

Corrosion Cost and Corrosion Map of Korea - Based on the Data from 2005 to 2010

  • Kim, Y.S.;Lim, H.K.;Kim, J.J.;Hwang, W.S.;Park, Y.S.
    • Corrosion Science and Technology
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    • 제10권2호
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    • pp.52-59
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    • 2011
  • Corrosion of metallic materials occurs by the reaction with corrosive environment such as atmosphere, marine, soil, urban, high temperature etc. In general, reduction of thickness and cracking and degradation are resulted from corrosion. Corrosion in all industrial facilities and infrastructure causes large economic losses as well as a large number of accidents. Economic loss by corrosion has been reported to be nearly 1-6% of GNP or GDP. In order to reduce corrosion damage of industrial facilities, corrosion map as well as a systematic investigation of the loss of corrosion in each industrial sector is needed. The Corrosion Science Society of Korea in collaboration with 15 universities and institutes has started to survey on the cost of corrosion and corrosion map of Korea since 2005. This work presents the results of the survey on cost of corrosion by Uhlig, Hoar, and input-output methods, and the evaluation of atmospheric corrosion rate of carbon steel, weathering steel, galvanized steel, copper, and aluminum in Korea. The total corrosion cost was estimated in terms of the percentage of the GDP of industry sectors and the total GDP of Korea. According to the result of Input/output method, corrosion cost of Korea was calculated as 2.9% to GDP (2005). Time of wetness was shown to be categories 3 to 4 in all exposure areas. A definite seasonal difference was observed in Korea. In summer and fall, time of wetness was higher than in other seasons. Because of short exposure period (12 months), significant corrosion trends depending upon materials and exposure corrosion environments were not revealed even though increased mass loss and decreased corrosion rate by exposure time.

일메나이트 중 철의 선택적 염화와 선광된 TiO2의 추가 염화반응에 대한 글로벌 피팅함수 (Global Fitting Functions for Kinetics of Fe-Selective Chlorination in Ilmenite and Successive Chlorination of Beneficiated TiO2)

  • 정동규;원용선;김용하;정은진;송덕용
    • 한국재료학회지
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    • 제29권7호
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    • pp.412-424
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    • 2019
  • Global fitting functions for Fe-selective chlorination in ilmenite($FeTiO_2$) and successive chlorination of beneficiated $TiO_2$ are proposed and validated based on a comparison with experimental data collected from the literature. The Fe-selective chlorination reaction is expressed by the unreacted shrinking core model, which covers the diffusion-controlling step of chlorinated Fe gas that escapes through porous materials of beneficiated $TiO_2$ formed by Fe-selective chlorination, and the chemical reaction-controlling step of the surface reaction of unreacted solid ilmenite. The fitting function is applied for both chemical controlling steps of the unreacted shrinking core model. The validation shows that our fitting function is quite effective to fit with experimental data by minimum and maximum values of determination coefficients of $R^2$ as low as 0.9698 and 0.9988, respectively, for operating parameters such as temperature, $Cl_2$ pressure, carbon ratio and particle size that change comprehensively. The global fitting functions proposed in this study are expressed simply as exponential functions of chlorination rate(X) vs. time(t), and each of them are validated by a single equation for various reaction conditions. There is therefore a certain practical merit for the optimal process design and performance analysis for field engineers of chlorination reactions of ilmenite and $TiO_2$.

Impact of Temperature and Alkalinity on Nitrogen Removal in the Start-up Period of Partial Nitrification in a Sequence Batch Reactor

  • Nguyen Van Tuyen;Tran Hung Thuan;Chu Xuan, Quang;Nhat Minh Dang
    • 공업화학
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    • 제34권5호
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    • pp.541-547
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    • 2023
  • The effect of temperature and influent alkalinity/ammonia (K/A) ratio on the start-up of the partial nitrification (PN) process for an activated sludge-based domestic wastewater treatment was studied. Two different sequence batch reactors (SBR) were operated at 26 ℃ and 32 ℃. The relationship between temperature and the concentration of free ammonia (FA) and free acid nitrite (FNA) was investigated. A stable PN process was achieved in the 32 ℃ reactor when the influent ammonium concentration was lower than 150 mg-N/L. In contrast, the PN process in the 26 ℃ reactor had a higher nitrite accumulation rate (NAR) and ammonium removal efficiency (ARE) when the influent ammonia concentration was increased to more than 150 mg-N/L. Then three different ranges of the K/A ratio were applied to an SBR reactor. In the K/A range of 2.48~1.65, the SBR reactor achieved the highest NAR ratio (75.78%). This ratio helps to achieve the appropriate level of alkalinity to maintain a stable pH and provide a sufficient amount of inorganic carbon source for the activity of microorganisms. At the same time, FA and FNA values also reached the threshold to inhibit nitrite-oxidizing bacteria (NOB) without a significant effect on ammonia-oxidizing bacteria (AOB). Results showed that the control of temperature and K/A ratio during the start-up period may be important in establishing a stable and steady PN process for the treatment of domestic wastewater.

생활폐기물 특성 분석 및 소각시설의 CO2 배출량 평가 (Property Analysis of Municipal Solid Waste and Estimation of CO2 Emissions from Waste Incinerators)

  • 김병순;김신도;김창환;이태정
    • 한국대기환경학회지
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    • 제26권6호
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    • pp.657-665
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    • 2010
  • Carbon dioxide ($CO_2$) is known to be a major greenhouse gas partially emitted from waste combustion facilities. According to the greenhouse gas emission inventory in Korea, the quantity of the gas emitted from waste sector in 2005 represents approximately 2.5 percent of all domestic greenhouse gas emission. Currently, the emission rate of greenhouse gas from the waste sector is relatively constant partly because of both the reduced waste disposal in landfills and the increased amounts of waste materials for recycling. However, the greenhouse gas emission rate in waste sectors is anticipated to continually increase, mainly due to increased incineration of solid waste. The objective of this study was to analyze the property of Municipal Solid Waste (MSW) and estimate $CO_2$ emissions from domestic MSW incineration facilities. The $CO_2$ emission rates obtained from the facilities were surveyed, along with other two methods, including Tier 2a based on 2006 IPCC Guideline default emission factor and Tier 3 based on facility specific value. The $CO_2$ emission rates were calculated by using $CO_2$ concentrations and gas flows measured from the stacks. Other parameters such as waste composition, dry matter content, carbon content, oxidation coefficient of waste were included for the calculation. The $CO_2$ average emission rate by the Tier 2a was 34,545 ton/y, while Tier 3 was 31,066 ton/y. Based on this study, we conclude that Tier 2a was overestimated by 11.2 percent for the $CO_2$ emission observed by Tier 3. Further study is still needed to determine accurate $CO_2$ emission rates from municipal solid waste incineration facilities and other various combustion facilities by obtaining country-specific emission factor, rather than relying on IPCC default emission factor.

폐플라스틱 복합필름 기반 콘크리트용 골재의 표면 개질 (Surface Modification of Recycled Plastic Film-Based Aggregates for Use in Concrete)

  • 김태훈;이제욱;홍진용
    • 한국건설순환자원학회논문집
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    • 제9권3호
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    • pp.295-302
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    • 2021
  • 본 연구에서는 폐복합필름 기반 콘크리트용 골재와 시멘트 기재 간의 친화성 향상을 위한 골재표면 개질 연구를 수행하였다. 표면 개질은 산소 대기압 플라즈마 방법을 사용하였으며, 표면처리에 따른 골재표면 특성을 접촉각 측정기를 이용하여 관찰하였다. 그 결과 플라즈마 표면처리에 따른 접촉각은 처리시간과 반비례 관계를 가지며 104.5°에서 44.0°까지 감소하는 것을 확인하였으며, 플라즈마 처리 후 대기 중에 보관된 골재의 접촉각은 시간이 경과함에 따라 다시 증가하는 것을 알 수 있었다. 플라즈마 처리된 골재의 접촉각 감소는 X-ray 광전자 분광법 및 적외선 분광법 결과로부터 골재표면에 친수성 산소 작용기가 형성되었기 때문으로 판단되었다. 결과적으로, RF power 100W, O2 flow rate 15sccm, Ar flow rate 4sccm, 30초 동안 표면처리를 한 골재의 경우 가장 좋은 친수성 및 젖음성을 관찰할 수 있었으며, 산소 대기압 플라즈마는 골재와 시멘트 기재 간의 결합력을 증가시킬 수 있는 하나의 효과적인 방법임을 알 수 있었다.