• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.35 no.11
• /
• pp.1147-1156
• /
• 2011

A contact-type area-varying capacitive displacement sensor, or CLECDiS, can measure displacements over millimeter ranges with nanometer resolution. However, a small changes in the contact condition due to the surface profile or friction, which are inherent characteristics of contact-type sensors, lead to significant distortion of the output signal. Therefore, ensuring reliable contact conditions during CLECDiS measurements is the most important area to be improved in their actual use. Herein, in order to design an instrument for ensuring reliable contact conditions, the contact condition is analyzed by characterizing the signal distortion, observing the pressure distribution between the contacting surfaces, and measuring the motional errors of the sensor using a laser Doppler vibrometer (LDV). The manufactured instrument enables a CLECDiS to be used in an ultraprecise positioning system with improved reliability.

• Journal of Sensor Science and Technology
• /
• v.2 no.1
• /
• pp.19-27
• /
• 1993

Capacitive pressure sensor for low pressure measurements has been fabricated by using $n^{+}$ epitaxial layer electrochemical etching stop and glass-to-silicon electrostatic bonding technique. The sensor had hybrid configuration of a sensor chip, which consists of sensor capacitor and reference capacitor, and two output signal detection IC chips. A fabricated sensor, with a $1.0{\times}1.0 mm^{2}$ square size and a $10{\mu}m$ thick flat diaphragm, showed a 7.1 pF zero pressure capacitance, and 5.2 % F.S, sensitivity in 10 KPa pressure range. By using a capacitance to voltage converter, the thermal zero shift of 0.051 %F.S./$^{\circ}C$ and the thermal sensitivity shift of 0.12 %F.S./$^{\circ}C$ for temperature range of $5{\sim}45^{\circ}C$ were obtained.

• Journal of Korea Multimedia Society
• /
• v.22 no.11
• /
• pp.1280-1287
• /
• 2019

For developing a wireless implantable device to monitoring the artery variation in real-time. The concept of a special vessel variation measurement capacitive sensor is presented in this paper. The sensor consists of two part; main sensor to measuring the arterial variation, and reference sensor is used to improve the accuracy of the capacitance value variation. Before sensor manufacture, a model of the sensor attached on the artery was designed in 3D to conduct in the FEA simulation to validate the validity and feasibility of the idea. The artery model was designed as layered structures and made of collagenous soft tissues with intima inside, followed by the media and the adventitia. Also, a grease layer was designed in the inner of the arterial wall to imitate the clogged arteries. The simulation was divided into two parts; sensor performance test by changing the diameter of the grease layer, and arterial wall tension test by changing the blood pressure. As the simulation results, the capacitance value measured by the proposed sensor is decreased follow the diameter of the grease increased. Also, large elastic deformation of the arterial wall since changing the blood pressure has been observed.

• Journal of Sensor Science and Technology
• /
• v.23 no.6
• /
• pp.409-415
• /
• 2014

We had presented an inductive type intraocular pressure sensor (L-sensor) in previous work. The distance between a micro coil and a ferrite on the membrane was modulated by pressure, and as a result the inductance and resonant frequency were changed. However, L-sensor has some problems to implant in eyes. First problem is low sensitivity. When L-sensor was implanted in rabbit's eyes, resonant frequency of L-sensor was very hard to detect. Second problem is biocompatibility. Size of L-sensor is $6{\times}7{\times}1.2mm$. When L-sensor was implanted in the eyes, it caused the inflammation. Therefore, this study suggests an inductive and capacitive type IOP sensor (LCsensor). The sensitivity of the LC-sensor 27.3 kHz/mmHg under 60mmHg. It is much larger than 14 kHz/mmHg of the L-sensor. And the size of LC-sensor is 47% smaller than L-sensor. After 2 weeks from the implantation of LC-sensor into rabbit eyes, we measured the changes of resonant frequency of LC-sensor according to increased IOP by Balanced Salt Solution (BSS) injection. As a result, the sensitivity of LC-sensor in in vivo test is 25 kHz/mmHg. That is similar to the sensitivity of in vitro test.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2006.06a
• /
• pp.350-351
• /
• 2006

Thick film mechanical sensors can be categorized into four main areas piezoresistive, piezoelectric, capacitive and mechanic tube. In this areas, the thick film strain gage is the earliest example of a primary sensing element based on the substrates. The latest thick film sensor is used various pastes that have been specifically developed for pressure sensor application. Some elastic materials exhibit a change in bulk resistivity when they are subjected to displacement by an applied pressure. This property is referred to as piezoresistivity and is a major factor influencing the sensitivity of a piezoresistive strain gage. The effect of thick film resistors was first noticed in the early 1970, as described by Holmes in his paper in 1973.

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.39 no.9
• /
• pp.62-71
• /
• 2002

An intergral C-V converter is proposed to solve the nonlinearity problem of capacitive pressure sensors. The integral C-V converter consists of a switched-capacitor integrator and a switched-capacitor differential amplifier. It converts the sensor capacitance change which is inversely proportional to an applied pressure into a linear voltage output. Various PSPICE simulations prove that the convertor has excellent characteristics, such as low nonlinearity less than 0.01%/FS and low sensitivity to parallel offset capacitance and parasitic capacitance for the displacement range of sensor diaphragm set to 0 ${\sim}$ 90% of the initial distance between the electrodes in the simulation. We also show that the offset compensation and the gain trimming are easily achieved with the integral C-V converter.

• Journal of Practical Engineering Education
• /
• v.6 no.2
• /
• pp.105-110
• /
• 2014

In this work, mechanical characteristics of titanium diaphragm have been studied as a potential robust substrate and a diaphragm material for automotive tire pressure sensor. Lamination process techniques combined with traditional micromachining processes have been adopted as suitable fabrication technologies. To illustrate these principles, capacitive pressure sensors based on titanium diaphragm have been designed, fabricated and characterized. The fabrication process for micromachined titanium devices keeps the membrane and substrate being at the environment of 20 MPa pressure and $200^{\circ}C$ for a half hour and then subsequently cooled to $24^{\circ}C$. Each sensor uses a stainless steel substrate, a laminated titanium film as a suspended movable plate and a fixed, surface micromachined back electrode of electroplated nickel. The finite element method is adopted to investigate residual stresses formed in the process. Besides, out-of-plane deflections are calculated under pressures on the diaphragm. The sensitivity of the fabricated device is $9.45ppm\;kPa^{-1}$ with a net capacitance change of 0.18 pF over a range 0-210 kPa.

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.42 no.11
• /
• pp.1-8
• /
• 2005

In this paper, we present design and prototyping of a low-cost, integrated multi-functional micro health sensor chip that can be used or embedded in widely consumer devices, such as cell phone and PDA, for monitoring environmental condition including air pressure, temperature and humidity. This research's scope includes basic individual sensor study, architecture for integrating sensors on a chip, fabrication process compatibility and test/evaluation of prototype sensors. The results show that the integrated TPH sensor has good characteristics of ${\pm}\;1\%FS$ of linearity and hysteresis for pressure sensor and temperature sensor and of ${\pm}\;5\%FS$ of linearity and hysteresis But if we use 3rd order approximation for humidity sensor, full scale error becomes much smaller and this will be one of our future study.

• Journal of the KSME
• /
• v.33 no.6
• /
• pp.515-522
• /
• 1993

센서는 자연현상을 감지하는 소자로 계측 및 제어시스템의 구성요소로 이용되며, 센서를 이용 하여 Closed-loop System의 구성을 가능케 하며, 지능화된 시스템을 구현 할 수 있다. 센서는 압력, 유량, 온도, 자장, 광 등을 측정하는 물리적 센서, pH, 이온, 산소 등의 구성물을 감지하는 화학센서, 인체의 혈당량, 뇌의 상태, 냄새 등을 측정하는 바이오 센서로 대별될 수 있다. 이중 물리적 센서는 기계적 시스템에 많이 이용되며, 특히 압력, 유량센서는 자동차에 있어서 엔진의 Manifold, 엔진오일, 브레이크 오일, 타이어, 연료 등의 상태를 측정하는데 사용되고 있다. 예를 들어 1980년대에는 미국 Ford와 Motorola사가 공동으로 반도체공정 기술을 이용한 용량 형(capacitive) 압력센서를 개발하여 엔진의 컨트롤시스템에 이용하였다. 이러한 압력센서는 1988년에 15억불의 매출을 기록하였으며, 1955년에는 30억불로 늘어날 전망으로 있어 가장 많이 사용되는 센서로 각광을 받고 있다. 이글에서 압력센서의 원리 및 종류에 대하여 알아보고, 마 이크로머시닝 기술 등의 제작방법과 이의 응용에 대하여 논의하려 한다.

• Journal of Advanced Marine Engineering and Technology
• /
• v.34 no.6
• /
• pp.864-870
• /
• 2010

Air embolism can be a lethal complication of surgical procedures during which venous pressure at the site of surgery is sub-atmospheric or air is forced under pressure into a body cavity. To solve the problem, we developed the air detector using relative dielectric constant change, which is expected to be used broadly in industrial circles. We designed air detection system with air control equipment, detection circuit and LabVIEW system for air sensing. In experiments with a mock system, the proposed system showed a signal difference depending on the amount of air in the Tygon tube of the mock system.