• Journal of the Korean Institute of Telematics and Electronics A
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• v.30A no.7
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• pp.82-88
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• 1993

This paper describes fabrication of relative type capacitive pressure sensor to be in great demand for many fields. The fabricated sensor consists of two parts` a sensing diaphragm and a pyrox glass cover. The sensor size is 4.5${\times}3.4mm$^{2})$ and 400$\mu$m thick. To improve the nonlinearity, this sensor is designed a rectangular silicon diaphragm with a center boss structure, and in order to improve the temperature characteristics of the sensor in a packaging process, the sensing element is mounted on the pyrex glass support. Some suggestions toward the design and fabrication of improved sensors have been presented. The zero pressure capacitance, Co of sensor is 26.57pF, and the change of capacitance, ${\Delta}$C is 1.55pF from 0Kgf/Cm$^{2}$ to 1Kgf/Cm$^{2}$ at room temperature. The nonlinearity of the sensor output with center boss diaphragm is 1.29%F.S., and thermal zero shift and thermal sensitivity shift is less than 1.43%F.S./$^{\circ}C$and 0.14% F.S./$^{\circ}C$, respectively.

• Advances in aircraft and spacecraft science
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• v.5 no.4
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• pp.499-513
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• 2018

One of the major problems in glass fiber reinforced epoxy (GFRE) composite pipes is the durability under water absorption. This condition is generally recognized to cause degradations in strength and mechanical properties. Therefore, there is a need for an intelligent system for detecting the absorption rate and computing the mass of water absorption (M%) as a function of absorption time (t). The present work represents a new non-destructive evaluation (NDE) technique for detecting the water absorption rate by evaluating the dielectric properties of glass fiber and epoxy resin composite pipes subjected to internal hydrostatic pressure at room temperature. The variation in the dielectric signatures is employed to design an electrical capacitance sensor (ECS) with high sensitivity to detect such defects. ECS consists of twelve electrodes mounted on the outer surface of the pipe. Radius-electrode ratio is defined as the ratio of inner and outer radius of pipe. A finite element (FE) simulation model is developed to measure the capacitance values and node potential distribution of ECS electrodes on the basis of water absorption rate in the pipe material as a function of absorption time. The arrangements for positioning12-electrode sensor parameters such as capacitance, capacitance change and change rate of capacitance are analyzed by ANSYS and MATLAB to plot the mass of water absorption curve against absorption time (t). An analytical model based on a Fickian diffusion model is conducted to predict the saturation level of water absorption ($M_S$) from the obtained mass of water absorption curve. The FE results are in excellent agreement with the analytical results and experimental results available in the literature, thus, validating the accuracy and reliability of the proposed expert system.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1872-1874
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• 2001

This paper presents an implantable telemetry LC resonance-type pressure sensor to measure the cerebral ventricle pressure. The sensor consists of an inductor and a capacitor. The LC resonant circuit consists of the sensor and an external antenna coil that are coupled magnetically. The resonance frequency of the circuit decreases as the applied pressure increases the capacitance of the sensor. The sensor is designed in consideration of the biocompatibility and long lifetime for continuous monitoring of the ventricle pressure. The sensor is simple to fabricate and small in comparison with others reported previously. The inductor is fabricated by electroplating and the variable capacitor is constructed with a flexible p+ diaphragm. Also, the deflection of the diaphragm, the variation of the capacitance and the resonance frequency are analyzed and calculated.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.89-94
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• 2001

A cylindrical capacitance-type spindle displacement sensor was designed and tested in the hard turning as a way to develop a sensor that can estimate cutting forces without using a tool dynamometer. The displacement sensor was installed between the face of spindle cover and the chucking element, and measured pure radial motion of the spindle. Ceramic inserts and tool steel workpieceof 65 Rc were used during the hard turning tests. The signals from the sensor showed the same pattern of cutting force variations as those from the tool dynamometer. The research results showed that the developed sensor could be utilized as an effective and cheap on-line sensing device to estimate cutting forces.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.7
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• pp.1563-1572
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• 1995

The on-line cure monitoring during the cure process of fiber reinforced resin matrix composite material is important for the better quality and productivity. Among several cure monitoring methods, the dielectrometry that uses electrodes as its sensor is known to be the most promising method. In this study, the sensitivity of the dielectric sensor for the on-line cure monitoring was analyzed by finite element method and compared to the experimental results. Using the analytical results, the equation for the capacitance of the sensor was derived. Also, the optimal sensor design method was suggested after analyzing several different sensor shapes.

• Journal of the Korean Applied Science and Technology
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• v.28 no.1
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• pp.95-101
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• 2011

We estimated on the stability of W/O type emulsified fuel using by capacitance sensor, so it concluded the following conclusions. For the first 24 hours, prepared emulsified fuel reveals phase separation ratio of 5%, maintains stable status which verifies the stability of emulsified fuel. Adding more water increases the phase separation ratio rapidly, and adding more surfactant displays stable emulsification. Adding water causes larger size of water droplet diameter, and adding surfactant mixture causes smaller size of water droplet diameter. In conclusion, the size of W/O type emulsified fuel water droplet diameter is directly related to the volume of surfactant, and density of water droplet diameter changes thedistribution according to water contents.

• Proceedings of the KIEE Conference
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• 2008.10b
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• pp.125-126
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• 2008

A differential capacitance deviation-to-time converter for interfacing position sensor is presented. It consists of triaxial position sensor, six comparators, six current mirrors, and control logic. The prototype differential capacitance deviation-to-time interval converter has been simulated using Chartered $0.35-{\mu}m$ CMOS parameters. The simulation results show that the maximum conversion time of the converter is $350{\mu}s$ and the linearity error is less than ${\pm}0.00l5%$.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.1014-1016
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• 1998

A capacitance-type humidity sensor using porous silicon layer is developed. The unique property of this sensor is a structure which has electrodes on the surface of the wafer like a general IC device. To do this. the sensor was fabricated using process such as localized formation of porous silicon, oxidation of porous silicon layer, and etching of oxidized porous silicon layer. The measurement of humidity-sensing ability was done for two type of sensors using porous silicon layer formed in 25 and 35% HF solutions, respectively. As the result, the former sensors showed larger value and variation of capacitance for the relative humidity.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.10a
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• pp.560-564
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• 1999

Burr sensing for burr size measurement and deburring process control is one of the essential elements in an automated deburring procedure. This paper presents the implementation of capacitance sensing and acoustic emission (AE) to deburring. The first application is the "on-line" measurement of burrs using a capacitance sensor. A non-contact capacitance gauging sensor is attached to an ultra precision milling machine which was used as a positioning system. The setup is used to measure burr profiles along machined workpiece edges. The proposed scheme is shown to be accurate, easy to setup, and with minor modifications, readily applicable to automatic deburring processes. As the second example, AE signals were sampled and analyzed for the sensor feedback of a precision deburring process - laser deburring -. The results, such as the sensitivity of AE signals to burr shapes and edge detection capability show a clear correlation between physical process parameters and the AE signals. A subsequent control strategy for deburring automation is also briefly discussed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.05b
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• pp.25-28
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• 2000

A capacitance-type humidity sensors in which porous silicon layer is used as humidity-sensing material was developed. This sensors was fabricated monolithically to be compatible with the typical IC process technology except for the formation of porous silicon layer. As the sensors is made as a mesa structure, the correct measurement of capacitance is expected because it can remove the effect of the parasitic capacitance from the bottom layer and another junctions. To do this, the sensor was fabricated using process steps such as localized formation of porous silicon, oxidation of porous silicon layer and etching of oxidized porous silicon layer. From completed sensors, capacitance response was measured on the relative humidity of 25 to 95% at room temperature. As the result the measured capacitance showed the increase over 300% at the low frequency of 120Hz, and showed little dependence on the temperature between 10 to $40^{\circ}C$.