• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.9
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• pp.77-86
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• 1998

A two-chip humidity sensor system has been developed which consists of a capacitive sense element die and a CMOS interface chip. The sense element was fabricated using thin polyimide films on (100) silicon substrate and showed excellent linearity(0.72%FS), low hysteresis (<3%) and low temperature coefficient(-0.0285 ~-0.0542pF/K) over a wide range of relative humidity and temperature. The capacitance-relative humidity characteristic exhibited a drift of 2~3% after 9 weeks of exposure to 4$0^{\circ}C$/90%RH. The signal-conditioning circuitry was fabricated using an 1.2- ${\mu}{\textrm}{m}$, one poly double metal CMOS process. The measured output voltage of the sensor system was directly proportional to relative humidity and showed good agreement with theory.

• Journal of Biosystems Engineering
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• v.28 no.4
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• pp.369-376
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• 2003

This study was conducted to develop a precision measurement method of water content in soil (find sand and silty sand) using dual RF impedance changes. The electrically stable perpendicular plate capacitive sensor was fabricated and utilized to sense the water content in soil. Crystal oscillators of 5 and 20 MHz and related circuits were designed to detect the capacitance changes of a perpendicular plate capacitive sensor with soil samples at various volumetric water contents. A multiple regression model for volumetric water content having dual oscillation frequency changes at 5 and 20 MHz as independent variables resulted in coefficient of determination of 0.963 and standard error calibration of 0.030 cm$^3$/cm$^3$ for calibration and coefficient of determination of 0.966, standard error of prediction of 0.027 cm$^3$/cm$^3$ and bias of 0.001 cm$^3$/cm$^3$ for prediction.

• Journal of Biomedical Engineering Research
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• v.29 no.3
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• pp.239-248
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• 2008

In this study, a new method using a capacitive sensor and an adaptive filter was proposed to deal with artifacts contaminating an oscillation signal in oscilometric blood pressure measurement. The proposed method makes use of a variation of the capacitance between an electrode fixed to a cuff and an external object to detect artifacts caused by the external object bumping into the cuff. The proposed method utilizes the adaptive filter based on linear prediction to remove the detected artifacts. The conventional method using linear interpolation and the proposed method using the adaptive filter were applied to three types of the artifact-contaminated oscillation signals(no overlap, non-consecutive overlap, and consecutive overlap between artifacts and oscillations) to compare them in terms of the artifact reduction performance. The proposed method was more robust than the conventional method in the case of consecutive overlap between artifacts and oscillations. The proposed method could be useful for measuring blood pressure in such a noisy environment that the subject is being transported.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.32 no.2
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• pp.93-99
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• 2019

A pressure sensor is a device that converts an applied physical pressure into an electrical signal. Such sensors have a range of applications depending on the pressure level, from low to high pressure. Sensors that use physical pressure, when compared to those operating under air pressure, are not widely applied as they are inefficient. To solve this problem, graphene oxide, which exhibits good mechanical and electrical characteristics, was used to increase the efficiency of these pressure sensors. Graphene oxide has properties that control the movement of charges within the dielectric. Exploiting these properties, we evaluated the change in electrical characteristics when pressure was applied according to the ratio and thickness of the oxidation graph added to the pressure sensor.

• JSTS:Journal of Semiconductor Technology and Science
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• v.12 no.3
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• pp.278-285
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• 2012

A digital readout IC for capacitive sensors is presented. Digital capacitance readout circuits suffer from static capacitance of sensors, especially single-ended sensors, and require large passive elements to cancel such DC offset signal. For this reason, to maximize a dynamic range with a small die area, the proposed circuit features digital filters having a coarse and fine compensation steps. Moreover, by employing switched-capacitor circuit for the front-end, correlated double sampling (CDS) technique can be adopted to minimize low-frequency device noise. The proposed circuit targeted 8-kHz signal bandwidth and oversampling ratio (OSR) of 64, thus a $3^{rd}$-order ${\Delta}{\Sigma}$ modulator operating at 1 MH was used for pulse-density-modulated (PDM) output. The proposed IC was designed in a 0.18-${\mu}m$ CMOS mixed-mode process, and occupied $0.86{\times}1.33mm^2$. The measurement results shows suppressed DC power under about -30 dBFS with minimized device flicker noise.

• Journal of Advanced Navigation Technology
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• v.18 no.1
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• pp.56-66
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• 2014

In this paper, the solar cell need the characteristic interpreting because the solar cell changes greatly according to the isolation, temperature and load in the photovoltaic development. Moreover, to get many energy in photovoltaic development need the position tracking of the sun according to the environment change and it is necessary to control the output of solar cells up to the time. Simulation and composed microprocessor and sensor chip an power conversion system with boost converter to experiment results are performed to prove the analysis of the converter operation, and to show the possibility of energy harvesting and photovoltaic development need the position tracking small capacitance, the boost rate of boost converter was similar to 167 percent.

• Tribology and Lubricants
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• v.11 no.5
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• pp.40-46
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• 1995

This study concerns the design and development of the non-vibrating capacitance probe which could be used as a non-contact sensor for tribological wear. This device detects surface charge through temporal variation in the work function of a material. Experiments are performed to demonstrate the operation of the probe on a roating aluminum shaft. The reference electrode of the probe, made of lead, is placed adjacent (< 1.25-mm distance) to the shaft. Both surfaces which are electrically connected, form a capacitor. An artificial spatial variation in the work function is imposed on the shaft surface by coating a segment along the shaft circumference with a colloidal silver paint. As the shaft rotates, the reference electode senses changing contact potential difference with the shaft surface, owing to compositional variation. Temporal variation in the contact potential difference induces a current through the electrical connection. This current is amplified and converted to a voltage signal by an electoronic circuit with an operational amplifier. The magnitude of the signal decreases asymptotically with the electrode-shaft distance and increases linearly with the rotational frequency. These results are consistent with the theoretical model. Potential applications of the probe on wear monitoring are proposed.

• Journal of the Korean Vacuum Society
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• v.12 no.3
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• pp.151-156
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• 2003

Two capacitance diaphragm gauges(CDG) and two resonance silicon gauges(RSG) were calibrated using an ultrasonic interferometer as a national low vacuum standard in KRISS. The CDG has superior pressure resolution and is rugged as well as resistant to over-pressure because of all-metal inner components. Meanwhile, the RSG is a new type of MEMS sensor that has excellent calibration stability and is resistant to mechanical shocks. The calibration uncertainties were analyzed according to the ISO procedures. Results showed that the maximum difference of the expanded uncertainties was $9\times10^{-3}$Pa at the generated pressure of 100 Pa for the two different types. It is remarkable that the RSG can be used as a transfer standard at low vacuum since their accuracies were found to be within 0.5 %.

• Polymer(Korea)
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• v.30 no.3
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• pp.207-209
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• 2006

We fabricated a capacitive-type humidity sensor using poly (p-phenylene ether sulfone: PES) as a humidity sensitive layer. The PES was dissolved in m-cresol $(CH_3C_6H_4OH)$ and spin-coated on ITO-coated glass substrate. Gold was deposited by sputtering as a water-permeable upper electrode. The capacitance of the sensor was inversely proportional to sensing film thicknesses and showed an excellent linearity of less than 1% in the humidity range of 20 to 90%. The sensor haying a $1.4{\mu}m$ sensing layer showed a hysteresis of 1.3% and a good sensitivity of 1.14 at 20 kHz.

• Korean Journal of Materials Research
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• v.21 no.8
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• pp.468-475
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• 2011

[ $LaMeO_3$ ](Me = Cr, Co) powders were prepared using the polymeric precursor method. The effects of the chelating agent and the polymeric additive on the synthesis of the $LaMeO_3$ perovskite were studied. The samples were synthesized using ethylene glycol (EG) as the solvent, acetyl acetone (AcAc) as the chelating agent, and polyvinylpyrrolidone (PVP) as the polymer additive. The thermal decomposition behavior of the precursor powder was characterized using a thermal analysis (TG-DTA). The crystallization and particle sizes of the $LaMeO_3$ powders were investigated via powder X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), and particle size analyzer, respectively. The as-prepared precursor primarily has $LaMeO_3$ at the optimum condition, i.e. for a molar ratio of both metal-source (a : a) : EG (80a : 80a) : AcAc (8a) inclusive of 1 wt% PVP. When the as-prepared precursor was calcined at $700^{\circ}C$, only a single phase was observed to correspond with the orthorhombic structure of $LaCrO_3$ and the rhombohedral structure of $LaCoO_3$. A solid-electrolyte impedance-metric sensor device composed of $Li_{1.5}Al_{0.5}Ti_{1.5}(PO_4)_3$ as a transducer and $LaMeO_3$ as a receptor has been systematically investigated for the detection of NOx in the range of 20 to 250 ppm at $400^{\circ}C$. The sensor responses were able to divide the component between resistance and capacitance. The impedance-metric sensor for the NO showed higher sensitivity compared with $NO_2$. The responses of the impedance-metric sensor device showed dependence on each value of the NOx concentration.