• Journal of the Semiconductor & Display Technology
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• v.20 no.3
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• pp.103-107
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• 2021

In this paper, a capacitive water level sensor for boilers was developed. In order to accurately monitor the water level in a high-temperature boiler that generates a lot of precipitates, the occurrence of precipitates on the surface of the water level sensor should be small, and a sensor capable of measuring even if the sensor surface is somewhat contaminated is required. The capacitive water level sensor has a structure in which one of the two electrodes is insulated with Teflon coating, and the stainless steel package of the water level sensor is brought into contact with the water tank so that the entire water tank becomes another electrode of the water level sensor. A C-V converter that converts the capacitance change of the capacitive water level sensor into a voltage change was developed and integrated with the water level sensor to minimize noise. The performance of the developed capacitive water level sensor was evaluated through measurement.

• Tribology and Lubricants
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• v.10 no.4
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• pp.27-32
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• 1994

The capacitive type transducers measure the displacement of rotating shaft using the voltage difference which is formed between the sensor plates and rotor so that the measured signal is not affected by the magnetic field generated by the magnetic bearing. In this paper, the capacitive transducers are embedded inside of the magnetic bearing. In order to verify the support characteristics of the capacitance sensor-magnetic bearing system, we experimented and analyzed the magnetic bearing-rotating shaft system up to 12,000 rpm. The magnetic bearing system proposed in this paper, successfully supports the rotating shaft and we can remain the maximum displacement below $5 \mu m$ at 12,000 rpm.

• Journal of Mechanical Science and Technology
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• v.15 no.9
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• pp.1268-1273
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• 2001

To successfully establish the ELID-grinding, it is important to properly select the electrolytic condition according to grinding conditions. Currently, the selection of electrolytic condition is mainly dependent on the operators experience, which is one of difficulties preventing the successful application of ELID technique. In this study, an in-process measurement system of the insulating layer using two gap sensors-a capacitance type and an eddy current type-are developed and the change of the thickness of insulating layer during ELID grinding is detected. Evaluation experiments show the possibility to control the electrolytic condition through the in-process measurement of the layer status.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1233-1235
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• 1994

In this work, polyimide thin films fabricated by the electrophoretic deposition are investigated as a humidity sensing material. Capacitance and impedance are measured with increasing relative humidity to find the nature of the film. From the results, the polyimide humidity sensor is not classified impedance change type but capacitance change type and appear more sensitive in the region of higher humidity than that of lower humidity.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.477-477
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• 2000

A multifunctional sensor is designed to measure viscosity, cleanness, temperature and capacitance of engine oil to make a clear decision on its condition. The simple structure helps easy fabrication and low cost while measuring four parameters by one sensor. The operation is described theoretically and is supported by experimental data. A fuzzy based algorithm to fuse the four kinds of data from multi-functional sensor in order to make a decision on the best time to change the oil is proposed.

• Journal of Sensor Science and Technology
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• v.19 no.1
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• pp.1-7
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• 2010

Electrostatic capacitance measurement method in a fine hose was proposed, in which two ring-type electrodes were disposed on the hose in the direction of fluid flow instead of the conventional face-to-face electrodes. With the proposed electrode structure, we realized a Ringer's solution exhaustion detector for an IV(invasive vein) injection set. On a 4 mm-diameter hose of IV set, we disposed two ring-type electrodes of 10 mm width at a distance of 5 mm each other and obtained 0.72 pF and 2.51 pF for air and 10 % dextrose Ringer's solution in the hose, respectively. The capacitance between the two electrodes varied with the hose-wraparound coverage of electrode as well as the width of electrode and the distance between the electrodes. For hose-wraparound electrode coverage of 75 %, the capacitance varied from 0.62 pF to 1.98 pF with the Ringer's solution level between the two electrodes. A charge amplifier converted the capacitance. variation into electric signal and a comparator was used to detect whether Ringer's solution was exhausted or not. The result was delivered to a host using a RF transmitter with 320 MHz carrier frequency.

• Tribology and Lubricants
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• v.29 no.2
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• pp.77-84
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• 2013

A small engine-oil-deterioration detection sensor was developed and installed at the tip of a dipstick gage. The sensor part was manufactured using printed circuit board (PCB) manufacturing technology. A set of sensor covers was installed in order to protect the sensor and realize good signal stability. The small engine-oil-deterioration detection sensor system comprised a dual sensor having etched copper electrodes coated with gold and ceramic, a flexible PCB (FPCB) acting as electric wire, and a dummy PCB with only a lock connector. The sensor can easily be installed by insertion through the guide tube of a dipstick gage. Thus, a driver can easily handle it without further installation equipment. The sensor can determine the level of deterioration in the engine oil by estimating the corresponding dielectric constant of the engine oil.

• Journal of Sensor Science and Technology
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• v.2 no.1
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• pp.19-27
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• 1993

Capacitive pressure sensor for low pressure measurements has been fabricated by using $n^{+}$ epitaxial layer electrochemical etching stop and glass-to-silicon electrostatic bonding technique. The sensor had hybrid configuration of a sensor chip, which consists of sensor capacitor and reference capacitor, and two output signal detection IC chips. A fabricated sensor, with a $1.0{\times}1.0 mm^{2}$ square size and a $10{\mu}m$ thick flat diaphragm, showed a 7.1 pF zero pressure capacitance, and 5.2 % F.S, sensitivity in 10 KPa pressure range. By using a capacitance to voltage converter, the thermal zero shift of 0.051 %F.S./$^{\circ}C$ and the thermal sensitivity shift of 0.12 %F.S./$^{\circ}C$ for temperature range of $5{\sim}45^{\circ}C$ were obtained.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.2087-2089
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• 2004

Capacitive pressure sensor는 Piezo type sensor에 비해 온도의 영향이 적어 공업계측, 전기용품 등 그 용도가 다양하여 폭넓게 사용되어지고 있지만, 측정값의 비선형성이 존재하여 측정값에 대한 신뢰도가 떨어지는 단점이 있다. 본 연구에서는 기존 capacitive pressure sensor의 비선형적 output을 개선하기 위한 방법으로 touch mode capacitive pressure sensor를 제안하였다. 또한, 실제 Device제작에 앞서 FEM 해석을 수행하였다. 2mm X 2mm 크기의 diaphragm, $25{\mu}m$의 두께, $20{\mu}m$의 gap을 갖는 Sensor를 Simulation하였으며 설계 변수를 추출하여 각각의 설계변수에 대한 해석을 실시하였다. 그 결과 15.2psi${\sim}$31psi의 영역에서 8.58pF${\sim}$54.31pF의 capacitance가 선형적으로 나타나는 sensor임을 확인하였다.

• Transactions of the Korean Society of Automotive Engineers
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• v.13 no.5
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• pp.121-126
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• 2005

This paper describes the attributes, performance and development status of a high performance capacitive torque sensor intended for use in a electric power steering (EPS) system. The EPS system is composed of torque sensor, ECU, motor, gears and etc. Among the elements, torque sensor in the steering column is one of the core technologies. The new capacitive torque sensor in this paper is developed differently from working principle and mechanical structure compare to extant torque sensors in market and patent. Based on the result of numerical analysis, a experimental equipment is made which is composed of a test jig and a capacitive sensor and validity of numerical analysis and feasibility of the torque sensor are verified.