• Journal of the Semiconductor & Display Technology
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• v.8 no.4
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• pp.83-88
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• 2009

In this paper TRIZ was used to solve noise and dust reduction related to cable carrier chain system. On modern machines in a clean room, the contradictions arose due to increase noise and dust for the high speed were eliminated with 40 principles and seperation rules. As the results, the sound pressure level of the new carrier chain system was reduced to below 40 dB(A), and cleanroom classifications was satisfied with ISO class 4. In these successful results, TRIZ showed its usefulness in solving the design problems even with severe constraints.