• 한국세라믹학회지
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• 제36권5호
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• pp.465-470
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• 1999

Sensing properties of $\alpha$-Fe2O3 thin film to reducing gases such as CHx and CO were systematically examined after deposition on Al2O3 substrate by PECVD(Plasma Enhanced Chemical Vapor Deposition)technique. Microstructure of deposited $\alpha$-Fe2O3 thin film showed the porous island structure. This specimen was annealed at 450, 550, $650^{\circ}C$ to enhance the gas sensing properties and investigated in terms of CO and C4H10 concentration from 500ppm to 3,000 ppm at operating temperature of 35$0^{\circ}C$ The gas sensitivity(%) to C4H10 measured at the operating temperature of 35$0^{\circ}C$ was 98.24 (highest sensitivity) 69.51 to CO and 2% to CH4 respectviely.

• 센서학회지
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• 제18권1호
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• pp.72-76
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• 2009

The sensing system was designed and fabricated to investigate the ferment environment of soybeans. $NH_3$ gas was saturated after about 7 h and $CO_2$ gas was reached the peak after about 8 h in the inoculation of Bacillus subtilis. However, times that $CO_2$ gas and $NH_3$ gas were reached maximum value without Bacillus subtilis were about 15 h and 18 h, respectively. The sample that inoculated Bacillus subtils had deeper taste than one without it. We found that the peak time of $CO_2$ gas means the starting time of fermentation. If we control the operating time after the start of fermentation, it is expected to make a suitable Chungkukjang to individual preference.

• 한국재료학회지
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• 제24권3호
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• pp.152-158
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• 2014

We report the effect of the fabric of the surface microstructure on the CO gas sensing properties of $SnO_2$ thin films deposited on self-assembled Au nanodots ($SnO_2$/Au) that were formed on $SiO_2/Si$ substrates. We characterized structural and morphological properties, comparing them to those of $SnO_2$ thin films deposited directly onto $SiO_2/Si$ substrates. We observed a significant enhancement of CO gas sensing properties in the $SnO_2$/Au gas sensors, specifically exhibiting a high maximum response at $200^{\circ}C$ and quite a low detection limit of 1 ppm level in dry air. In particular, the response of the $SnO_2/Au$ gas sensor was found to reach the maximum value of 32.5 at $200^{\circ}C$, which is roughly 27 times higher than the response (~1.2) of the $SnO_2$ gas sensor obtained at the same operating temperature of $200^{\circ}C$. Furthermore, the $SnO_2/Au$ gas sensors displayed very fast response and recovery behaviors. The observed enhancement in the CO gas sensing properties of the $SnO_2/Au$ sensors is mainly ascribed to the formation of a nanostructured morphology in the active $SnO_2$ layer having a high specific surface-reaction area by the insertion of a nanodot form of Au nucleation layer.

• 센서학회지
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• 제29권2호
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• pp.112-117
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• 2020

Xylene is a hazardous volatile organic compound that should be precisely measured to monitor indoor air quality. However, the selective and sensitive detection of ppm-level xylene using oxide-semiconductor gas sensors remains a challenge. In this study, pure and Cr-doped Co₃O₄ nanoparticles (NPs) were prepared using flame spray pyrolysis, and their gas-sensing characteristics to 5-ppm xylene at 250 ℃ were investigated. The 4 at% Cr-doped Co₃O₄ NPs exhibited a high gas response to 5-ppm xylene (resistance ratio to gas and air = 39.1) and negligible cross-responses to other representative and ubiquitous indoor pollutants such as ethanol, benzene, formaldehyde, carbon monoxide, and ammonia. In this paper, the enhancement of the gas response and selectivity of Co₃O₄ NPs to xylene by Cr doping was discussed in relation to the catalytic promotion of the gas-sensing reaction. This sensor can be used to monitor indoor xylene.

• 대한전자공학회논문지
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• 제26권11호
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• pp.1631-1636
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• 1989

A space charge model for semiconductor reduced gas sensors has been roposed and applied to gas sensing mechanism. SnO2-x and SnO2-x/Pt thin film were deposited by vacuum evaporating method. And Hall effect and gas sensitivity characteristics of these sensors were measured. From the space charge model and carrier concentration, the number of the adsorbed gas atom on the solid surface was calculated quantitatively. The gas sensing model was compared with CO gas sensitivities of the fabricated thin film gas sensors.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.549-550
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• 2010

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.821-825
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• 2002

ZnO thick films by Sol-Gel processing were investigated electrics, optics and the sensing characteristics of CO gas. Using the znic acetate dihydrate and acetylaceton (AcAc) as a chelating agent, stable ZnO sol was synthesized. ZnO phase was crystallized through the heat-treatment at $70^{\circ}C$ for 4hrs and influenced the sensing characteristics of the electrics and CO gas by uniform particle distributions not related particle size. The samples on the alumina substrate by thick films were investigated the properties of electrics and the effect of sensing. The sensitivity was so excellent in the sample of the heat-treatment at $600^{\circ}C$ for 12hrs and good in the heat-treatment for 1hrs generally. Crystallization and volatilization of organic materials according to the change of heating treatment temperature of thick films were analyzed by TG-DTA, XRD and mirostructure of thick films were observed by SEM.

• 한국전기전자재료학회논문지
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• 제11권4호
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• pp.288-292
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• 1998

In this paper, we fabricated $SnO_2$ composite ceramics doped with 0~20mol% $SnO_2$ of bulk type to investigate the CO and $H_2$ gas sensitivity in various composition, temperature, and concentration of CO and $H_2$ gas. At the temperature range from $100^{\circ}C\sim425^{\circ}C$, the measured 1000ppm and 250ppm CO gas sensitivities of $SiO_2-SnO_2$composite ceramics were about 1.0~7.6 and 1.0~5.6, respectively. These values were about 1.0~1.5 times larger than pure $SnO_2$. The maximum 1000ppm CO gas sensitivity of $SiO_2-SnO_2$composites were measured around $325^{\circ}C$. At the temperature range from $270^{\circ}C\sim380^{\circ}C$, the 1000ppm and 500ppm $H_2$gas sensitivities of $SiO_2-SnO_2$ composites were about 2.9~21.2 and 2.1~11.3, respectively. Also the maximum 1000, 500 ppm $H_2$ gas sensitivities of samples were measured around.

• Carbon letters
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• 제24권
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• pp.36-40
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• 2017

Polyacrylonitrile/pitch nanofibers were prepared by electrospinning as a precursor for a gas sensor material. Pitch nanofibers were properly fabricated by incorporating polyacrylonitrile as an electrospinning supplement component. Polyacrylonitrile/pitch nanofibers were activated with steam at various temperatures followed by subsequent carbonization to make carbon nanofibers with a highly conductive graphitic structure. Steam activation was effective in facilitating gas adsorption onto the carbon nanofibers due to the increased surface area. The carbon nanofibers activated at $800^{\circ}C$ had a larger surface area and a lower micro pore fraction resulting in a higher variation in electrical resistance for improved CO gas sensing properties.

• 한국산학기술학회논문지
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• 제6권4호
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• pp.325-330
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• 2005

대기중의 일산화탄소 가스 농도를 측정하기 위한 마이크로 가스센서를 MEMS 공정을 이용하여 제작하였다. $SnO_2$ 가스 감응물질을 작동온도까지 가열하기 위하여 마이크로 히터를 설치하였다. 마이크로 히터에서 발생한 열이 효율적으로 감응물질에만 전달되고 실리콘 베이스로 누설되는 것을 최소화하기 위하여 마이크로 히터와 전극을 레버형으로 만들어 다리처럼 공중에 뜨게 하였으며, 이 위에 감응물질을 올려놓았다. 마이크로 가스센서의 열전달 현상을 상용 열유동 해석 전용 프로그램인 FLUENT를 이용하여 해석하였다. 해석 결과 실리콘웨이퍼 베이스의 온도가 거의 상온에 가까워 마이크로 히터에서 발생한 열이 가스 감응물질을 효과적으로 가열하여서 가스 감응물질의 열적 고립상태를 유지하고 있는 것을 알 수 있었다. 또한 감응물질을 작동온도까지 가열하기 위하여 마이크로 히터에 가하여야 하는 전류의 양을 예측할 수 있었다.