• Journal of Sensor Science and Technology
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• v.28 no.5
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• pp.271-276
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• 2019

Pure and 0.5, 1, 2, 5, and 10 at% of Mo-doped $Co_3O_4$ yolk-shell spheres were synthesized by ultrasonic spray pyrolysis of droplets containing Co nitrate, ammonium molybdate, and sucrose and their gas sensing characteristics to 5 ppm trimethylamine (TMA), ethanol, p-xylene, toluene, ammonia, carbon monoxide, and benzene were measured at $225-325^{\circ}C$. The sensor using pure $Co_3O_4$ yolk-shell spheres showed the highest response to p-xylene and very low response to TMA at $250^{\circ}C$, while the doping of Mo into $Co_3O_4$ tended to increase the overall responses of gas sensors. In particular, the sensor using 5 at% Mo-doped $Co_3O_4$ yolk-shell spheres exhibited the high response to TMA with low cross-responses to other interfering gases. The high response and selectivity of Mo-doped $Co_3O_4$ yolk-shell spheres to TMA are attributed to the electronic sensitization by higher valent Mo doping and acid-base interaction between TMA and Mo components.

• ETRI Journal
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• v.34 no.5
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• pp.713-718
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• 2012

Sensor nodes in ubiquitous sensor networks require autonomous replacement of deteriorated gas sensors with reserved sensors, which has led us to develop an encapsulation technique to avoid poisoning the reserved sensors and an autonomous activation technique to replace a deteriorated sensor with a reserved sensor. Encapsulations of $In_2O_3$ nanoparticles with poly(ethylene-co-vinyl alcohol) (EVOH) or polyvinylidene difluoride (PVDF) as gas barrier layers are reported. The EVOH or PVDF films are used for an encapsulation of $In_2O_3$ as a sensing material and are effective in blocking $In_2O_3$ from contacting formaldehyde (HCHO) gas. The activation process of $In_2O_3$ by removing the EVOH through heating is effective. However, the thermal decomposition of the PVDF affects the property of the $In_2O_3$ in terms of the gas reactivity. The response of the sensor to HCHO gas after removing the EVOH is 26%, which is not significantly different with the response of 28% in a reference sample that was not treated at all. We believe that the selection of gas barrier materials for the encapsulation and activation of $In_2O_3$ should be considered because of the ill effect the byproduct of thermal decomposition has on the sensing materials and other thermal properties of the barrier materials.

• Journal of the Korean Ceramic Society
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• v.36 no.12
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• pp.1322-1326
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• 1999

In2O3 thick film gas sensor for detecting NOx gas of high concentration was fabricated by a screen printing technique. This work focussed on investigation of the change of sensitivity to NOx gas with firing temperatures of sensing layer and on improvement of the sensitivity by adding catalysts such as Al,. Ru, and SnO2 The cross sensitivites of sensor to CO, H2, CH4 and i-C4H10 gases were also examined under NO2 gas concentration of 200ppm Pure In2O3 gas sensor prepared at a firing temperature of 50$0^{\circ}C$ showed a maximum sensitivity to NOx gas at the operating temperature of 40$0^{\circ}C$ Al(0.004 wt%)-In2O3 sensor largely improved the sensitivities to both NO2 and NO gas and showed a superior selectivity compared with other gas sensors.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1555-1557
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• 2004

The Pt-doped $SnO_2$ thin film for CO sensor applications obtained by RF sputtering from a target of the same compound in an Ar-$O_2$ atmosphere. Pt-SnO2-SiC Schottky diode detection of CO gas Cause the remarkable change in electrical resistivity of the semiconductor. the good gas sensitivity is shown when annealing condition is 600$^{\circ}C$, 1hr in RTP and detected temperature is 350$^{\circ}C$.

• Journal of Institute of Control, Robotics and Systems
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• v.13 no.7
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• pp.616-623
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• 2007

A dual micro gas sensor array was fabricated using nano sized $SnO_2$ thin films which had good sensitivities to CO and combustible gases, or $H_2S$ gas for air quality sensors in automobile. The already existed air quality sensor detects oxidizing gases and reducing gases, the air quality sensor(AQS), located near the fresh air inlet detected the harmful gases, the fresh air inlet door/ventilation flap was closed to reduce the amount of pollution entering the vehicle cabin through HVAC(heating, ventilating, and air conditioning) system. In this study, to make $SnO_2$ thin film AQS sensor, thin tin metal layer between 1000 and $2000{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2$, $SnO_2$(pt) and $SnO_2$(+CuO) were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2$(+Pt) and $SnO_2$(CuO) showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.562-564
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• 2002

In recent years, environments of our globe has been getting worse as a result of rapid growth of socioeconomic activities. The global environmental issues of acid rain, green house effect and ozone depletion are caused by various chemical pollutants, emitted from industries, automobiles and home. Most of these pollutants are produced by combustion processes. CO2 as a chief criminal of the greenhouse effect is a main combustion product of fossil fuels. Development of solid-state electrochemical devices for detecting CO2 is demonstrated based on various combination of solid electrolytes and auxiliary sensing materials. The object of this research is to develop various sensor performance for solid electrolyte gas sensor, and to test gas sensor performance manufactured. So we try to present a guidance for developing potential type gas sensor. We concentrated on development of manufacturing process and performance test.

• Journal of Sensor Science and Technology
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• v.17 no.5
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• pp.361-368
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• 2008

Nanosized $SnO_2$ particles were synthesized by homogeneous precipitation method using tin chloride ($SnCl_4{\cdot}5H_{2}O$) and urea ($CO(NH_2)_2$). The powders were heated at $500^{\circ}C$ and $600^{\circ}C$ for 2h. The crystal structure, microstructure, thermal behavior, specific surface area were analyzed using XRD, FE-SEM, TGA and BET, respectively. The initial resistance and the $H_2$ sensing properties were measured as a function of ${Sb_2}{O_3}$ and Pd doping concentrations. The resistance was decreased with the addition of ${Sb_2}{O_3}$ and the sensitivity for $H_2$ gas was increased with the addition of Pd. Thus, the optimum $H_2$ gas sensing property was obtained in the 0.25.mol% ${Sb_2}{O_3}$ and 1.w% added $SnO_2$ powders.

• Korean Journal of Materials Research
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• v.23 no.6
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• pp.299-303
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• 2013

In this study, a micro gas sensor for $NO_x$ was fabricated using a microelectromechanical system (MEMS) technology and sol-gel process. The membrane and micro heater of the sensor platform were fabricated by a standard MEMS and CMOS technology with minor changes. The sensing electrode and micro heater were designed to have a co-planar structure with a Pt thin film layer. The size of the gas sensor device was about $2mm{\times}2mm$. Indium oxide as a sensing material for the $NO_x$ gas was synthesized by a sol-gel process. The particle size of synthesized $In_2O_3$ was identified as about 50 nm by field emission scanning electron microscopy (FE-SEM). The maximum gas sensitivity of indium oxide, as measured in terms of the relative resistance ($R_s=R_{gas}/R_{air}$), occurred at $300^{\circ}C$ with a value of 8.0 at 1 ppm $NO_2$ gas. The response and recovery times were within 60 seconds and 2 min, respectively. The sensing properties of the $NO_2$ gas showed good linear behavior with an increase of gas concentration. This study confirms that a MEMS-based gas sensor is a potential candidate as an automobile gas sensor with many advantages: small dimension, high sensitivity, short response time and low power consumption.

• Korean Journal of Materials Research
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• v.8 no.4
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• pp.312-316
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• 1998

ZnO- TiO$_2$, and Sn0$_2$ - Ti0$_2$ ceramic composites doped with TiO$_2$ were prepared and their electrical and 1000ppm CO gas sensing properties were investigated. The phases of samples were analyzed by XRD, and the microsturctures of the fractured surface of samples were observed by SEM. A carbon monoxide gas sensitivity was de¬fined as the ratio of the resistance in dry air atmosphere(R$drt air$) to the resistance in 1000ppm CO gas atmosphere(R$_co$) The CO gas sensitivity of Smol% Ti0$_2$-added ZnO decreased about 1.7 times compared to that of pure ZnO. On the other hand, the maximum CO gas sensitivity of Ti0$_2$-added SnO$_2$ increased about 2.5 times compared to that of pure SnO$_2$. Therefore, the CO gas sensitivies of SnO$_2$-TiO$_2$ composite were better than those of ZnO- Ti0$_2$ and the temper¬ature range showing the maximum sensitivity for Sn0$_2$-TiO$_2$ composite was lower than that for ZnO- Ti0$_2$.

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1756-1758
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• 1999

As new gas sensing material with high cata activity for NO decomposition and for CO oxid $LaFeO_3$ thin films with different thicknesses fabricated by the R.F. magnetron sputtering m on an $Al_2O_3$ substrates with Ag electrodes. The sensing characteristics of the $LaFeO_3$ thin films studied as a function of annealing temperature film thickness. The thin film annealed at showed the highest sensitivity of 110% for CO 60% for NO.