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Evaluation of 12nm Ti Layer for Low Temperature Cu-Cu Bonding (저온 Cu-Cu본딩을 위한 12nm 티타늄 박막 특성 분석)

  • Park, Seungmin;Kim, Yoonho;Kim, Sarah Eunkyung
    • Journal of the Microelectronics and Packaging Society
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    • v.28 no.3
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    • pp.9-15
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    • 2021
  • Miniaturization of semiconductor devices has recently faced a physical limitation. To overcome this, 3D packaging in which semiconductor devices are vertically stacked has been actively developed. 3D packaging requires three unit processes of TSV, wafer grinding, and bonding, and among these, copper bonding is becoming very important for high performance and fine-pitch in 3D packaging. In this study, the effects of Ti nanolayer on the antioxidation of copper surface and low-temperature Cu bonding was investigated. The diffusion rate of Ti into Cu is faster than Cu into Ti in the temperature ranging from room temperature to 200℃, which shows that the titanium nanolayer can be effective for low-temperature copper bonding. The 12nm-thick titanium layer was uniformly deposited on the copper surface, and the surface roughness (Rq) was lowered from 4.1 nm to 3.2 nm. Cu bonding using Ti nanolayer was carried out at 200℃ for 1 hour, and then annealing at the same temperature and time. The average shear strength measured after bonding was 13.2 MPa.

Development of Voltammetric Nanobio-incorporated Analytical Method for Protein Biomarker Specific to Early Diagnosis of Lung Cancer (폐암 조기 진단을 위한 단백질 바이오마커 측정용 전압-전류법 기반의 나노바이오 분석법 개발)

  • Li, Jingjing;Si, Yunpei;Nde, Dieudonne Tanue;Lee, Hye Jin
    • Applied Chemistry for Engineering
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    • v.32 no.4
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    • pp.461-466
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    • 2021
  • In this article, a portable and cost-effective voltammetric biosensor with nanoparticles was developed for the measurements of heterogeneous nuclear ribonucleoprotein A1 protein (hnRNP A1) biomarker which can potentially be used for lung cancer diagnosis. Gold nanoparticles were first electrodeposited onto screen printed carbon electrode (SPCE) followed by immobilizing a single stranded DNA aptamer specific to hnRNP A1 onto the electrode surface. Ethanolamine was also used when immobilizing DNA aptamer on the surface to prevent signals from non-specific adsorption events. Sequential injection of hnRNP A1 biomarker and anti-hnRNP A1 conjugated with alkaline phosphatase (ALP) onto the aptamer chip surface allows to form the sandwich complex of DNA aptamer/hnRNP A1/ALP-anti-hnRNP A1 on the electrode surface which further reacted with 4-aminophenyl phosphate (APP). The electrocatalytic reaction of the enzyme, ALP, and the substrate, APP, resulting in the oxidative current response changes at -0.05 and -0.17 V (vs. Ag/AgCl) against the hnRNP A1 concentration was measured using cyclic and differential pulse voltammetry, respectively. The Au nanoparticles-integrated voltammetric biosensor was applied to analyze human normal serum solutions possibly suggesting potential applicability for lung cancer diagnosis.

Transient Liquid Phase Sinter Bonding with Tin-Nickel Micro-sized Powders for EV Power Module Applications (주석-니켈 마이크로 분말을 이용한 EV 전력모듈용 천이액상 소결 접합)

  • Yoon, Jeong-Won;Jeong, So-Eun
    • Journal of the Microelectronics and Packaging Society
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    • v.28 no.2
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    • pp.71-79
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    • 2021
  • In this study, we have successfully fabricated the Sn-Ni paste and evaluated the bonding properties for high-temperature endurable EV (Electric Vehicle) power module applications. From evaluating of the micro-structural changes in the TLPS (Transient Liquid Phase Sintering) joints with Sn and Ni contents in the Sn-Ni pastes, a lack of Ni powders and Ni particle agglomerations by Ni surplus were observed in the Sn-20Ni and Sn-50Ni joints (in wt.%), respectively. In contrast, relatively dense microstructures are observed in the Sn-30Ni and Sn-40Ni TLPS joints. From differential scanning calorimetry (DSC) thermal analysis results of the fabricated Sn-Ni paste and TLPS bonded joints, we confirmed that the complete reactions of Sn with Ni to form Ni-Sn intermetallic compounds (IMCs) at bonding temperatures occurred, and there is no remaining Sn in the joints after TLPS bonding. In addition, the interfacial reactions and IMC phase changes of the Sn-30Ni joints under various bonding temperatures were reported, and their mechanical shear strength were investigated. The TLPS bonded joints were mainly composed of residual Ni particles and Ni3Sn4 intermetallic phase. The average shear strength tended to increase with increasing bonding temperature. Our results indicated a high shear strength value of approximately 30 MPa at a bonding temperature of 270 ℃ and a bonding time of 30 min.

Iterative Precision Geometric Correction for High-Resolution Satellite Images (고해상도 위성영상의 반복 정밀 기하보정)

  • Son, Jong-Hwan;Yoon, Wansang;Kim, Taejung;Rhee, Sooahm
    • Korean Journal of Remote Sensing
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    • v.37 no.3
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    • pp.431-447
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    • 2021
  • Recently, the use of high-resolution satellites is increasing in many areas. In order to supply useful satellite images stably, it is necessary to establish automatic precision geometric correction technic. Geometric correction is the process that corrected geometric errors of satellite imagery based on the GCP (Ground Control Point), which is correspondence point between accurate ground coordinates and image coordinates. Therefore, in the automatic geometric correction process, it is the key to acquire high-quality GCPs automatically. In this paper, we proposed iterative precision geometry correction method. we constructed an image pyramid and repeatedly performed GCP chip matching, outlier detection, and precision sensor modeling in each layer of the image pyramid. Through this method, we were able to acquire high-quality GCPs automatically. we then improved the performance of geometric correction of high-resolution satellite images. To analyze the performance of the proposed method, we used KOMPSAT-3 and 3A Level 1R 8 scenes. As a result of the experiment, the proposed method showed the geometric correction accuracy of 1.5 pixels on average and a maximum of 2 pixels.

Optical Properties of the Eu2+ Doped Li2SrSiO4-αNα (Li2SrSiO4-αNα에 첨가된 Eu2+의 광학적 특성)

  • Namkhai, Purevdulam;Kim, Taeyoung;Woo, Hyun-Joo;Jang, Kiwan;Jeong, Jung Hyun
    • New Physics: Sae Mulli
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    • v.68 no.11
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    • pp.1196-1202
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    • 2018
  • $Li_2Sr_{1-x}Eu_xSiO_{4-{\alpha}}N_{\alpha}$ ($Li_2SrSiO_{4-{\alpha}}N_{\alpha}:Eu^{2+}$) phosphors were synthesized by using a solid state reaction (SSR) method with submicron $Si_3N_4$ and nano $Si_3N_4$ powders as the sources of Si and N, and the optical properties of those phosphors were studied. The studied phosphors showed efficient excitation characteristics over the broad range from 230 to 530 nm. Also, They showed broad emission spectra covering a range from 500 to 700 nm, with a peak at 568 nm, which was shifted longer wavelength by 18 nm as compared with that of commercial $YAG:Ce^{3+}$. Combined with a 450 nm blue LED chip, the results support the application of the $Li_2SrSiO_{4-{\alpha}}N_{\alpha}:Eu^{2+}$ phosphor as a luminescent material for a white-light source thaat is warmer than the commercial $YAG:Ce^{3+}$ white-light source. In addition, the $Li_2SrSiO_{4-{\alpha}}N_{\alpha}$ phosphors prepared from a submicron $Si_3N_4$ powder was found to emit a previously unreported self-activated luminescence in $Li_2SrSiO_{4-{\alpha}}N_{\alpha}$.

Enhanced and Practical Alignment Method for Differential Power Analysis (차분 전력 분석 공격을 위한 향상되고 실제적인 신호 정렬 방법)

  • Park, Jea-Hoon;Moon, Sang-Jae;Ha, Jae-Cheol;Lee, Hoon-Jae
    • Journal of the Korea Institute of Information Security & Cryptology
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    • v.18 no.5
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    • pp.93-101
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    • 2008
  • Side channel attacks are well known as one of the most powerful physical attacks against low-power cryptographic devices and do not take into account of the target's theoretical security. As an important succeeding factor in side channel attacks (specifically in DPAs), exact time-axis alignment methods are used to overcome misalignments caused by trigger jittering, noise and even some countermeasures intentionally applied to defend against side channel attacks such as random clock generation. However, the currently existing alignment methods consider only on the position of signals on time-axis, which is ineffective for certain countermeasures based on time-axis misalignments. This paper proposes a new signal alignment method based on interpolation and decimation techniques. Our proposal can align the size as well as the signals' position on time-axis. The validity of our proposed method is then evaluated experimentally with a smart card chip, and the results demonstrated that the proposed method is more efficient than the existing alignment methods.

A Study on the Improvement of Tool's Life by Applying DLC Sacrificial Layer on Nitride Hard Coated Drill Tools (드릴공구의 이종질화막상 DLC 희생층 적용을 통한 공구 수명 개선 연구)

  • Kang, Yong-Jin;Kim, Do Hyun;Jang, Young-Jun;Kim, Jongkuk
    • Journal of the Korean institute of surface engineering
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    • v.53 no.6
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    • pp.271-279
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    • 2020
  • Non-ferrous metals, widely used in the mechanical industry, are difficult to machine, particularly by drilling and tapping. Since non-ferrous metals have a strong tendency to adhere to the cutting tool, the tool life is greatly deteriorated. Diamond-like carbon (DLC) is one of the promising candidates to improve the performance and life of cutting tool due to their low frictional property. In this study, a sacrificial DLC layer is applied on the hard nitride coated drill tool to improve the durability. The DLC coatings are fabricated by controlling the acceleration voltage of the linear ion source in the range of 0.6~1.8 kV. As a result, the optimized hardness(20 GPa) and wear resistance(1.4 x 10-8 ㎣/N·m) were obtained at the 1.4 kV. Then, the optimized DLC coating is applied as an sacrificial layer on the hard nitride coating to evaluate the performance and life of cutting tool. The Vickers hardness of the composite coatings were similar to those of the nitride coatings (AlCrN, AlTiSiN), but the friction coefficients were significantly reduced to 0.13 compared to 0.63 of nitride coatings. The drilling test were performed on S55C plate using a drilling machine at rotation speed of 2,500 rpm and penetration rate of 0.25 m/rev. The result showed that the wear width of the composite coated drills were 200 % lower than those of the AlCrN, AlTiSiN coated drills. In addition, the cutting forces of the composite coated drills were 13 and 15 % lower than that of AlCrN, AlTiSiN coated drills, respectively, as it reduced the aluminum clogging. Finally, the application of the DLC sacrificial layer prevents initial chipping through its low friction property and improves drilling quality with efficient chip removal.

Design of Single Power CMOS Beta Ray Sensor Reducing Capacitive Coupling Noise (커패시터 커플링 노이즈를 줄인 단일 전원 CMOS 베타선 센서 회로 설계)

  • Jin, HongZhou;Cha, JinSol;Hwang, ChangYoon;Lee, DongHyeon;Salman, R.M.;Park, Kyunghwan;Kim, Jongbum;Ha, PanBong;Kim, YoungHee
    • The Journal of Korea Institute of Information, Electronics, and Communication Technology
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    • v.14 no.4
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    • pp.338-347
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    • 2021
  • In this paper, the beta-ray sensor circuit used in the true random number generator was designed using DB HiTek's 0.18㎛ CMOS process. The CSA circuit proposed a circuit having a function of selecting a PMOS feedback resistor and an NMOS feedback resistor, and a function of selecting a feedback capacitor of 50fF and 100fF. And for the pulse shaper circuit, a CR-RC2 pulse shaper circuit using a non-inverting amplifier was used. Since the OPAMP circuit used in this paper uses single power instead of dual power, we proposed a circuit in which the resistor of the CR circuit and one node of the capacitor of the RC circuit are connected to VCOM instead of GND. And since the output signal of the pulse shaper does not increase monotonically, even if the output signal of the comparator circuit generates multiple consecutive pulses, the monostable multivibrator circuit is used to prevent signal distortion. In addition, the CSA input terminal, VIN, and the beta-ray sensor output terminal are placed on the top and bottom of the silicon chip to reduce capacitive coupling noise between PCB traces.

Growth Characteristics and Yields According to EC Concentrations and Substrates in Paprika (파프리카 수경재배 시 EC 농도와 배지에 따른 생육 및 수량 특성)

  • Hong, Youngsin;Lee, Jaesu;Baek, Jeonghyun;Lee, Sanggyu;Chung, Sunok
    • Journal of Environmental Science International
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    • v.30 no.8
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    • pp.605-612
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    • 2021
  • Supply electrical conductivity (EC) concentration of the nutrition solution is an important factor in the absorption of nutrients by plants and the management of the root zone, as it can control the vegetative/reproductive growth of a plant. Paprika usually undergoes its reproductive and vegetative growth simultaneously. Therefore, ensuring proper growth of the plant leads to increased yield of paprika. In this study, growth characteristics of paprika were examined according to the EC concentration of a coir and a rockwool substrate. The supply EC was 1.0, 2.0, and 4.0 mS·cm-1 applied at the initial stages of the growth using the rockwool (commonly used by paprika farmers) and the coir substrate with a chip and dust ratio of 50:50 and 70:30. For up to 16 weeks of paprika growth, EC concentrations of 1.0 and 2.0 mS·cm-1 were found to have a greater effect on the growth than EC at 4.0 mS·cm-1. The normality (marketable) rate of fruit, the soluble solid content, and paprika growth showed that the coir was generally better than the rockwool regardless of the supply EC concentration. The values of the yield per plant at an EC concentration of 4.0 mS·cm-1 was mostly similar at 1.6 kg (coir 50:50), 1.5 kg (coir 70:30) and 1.5 kg (rockwool), but the yield of the rockwool was 88%, which was lower than 98% and 94% yield of the coir substrate. Therefore, this concludes that coir substrate is more effective than rockwool at improving paprika productivity. The results also suggest that the use of coir substrate for paprika has many benefits in terms of reducing production costs and preventing environmental destruction during post-processing.

Non-conductive Film Effect on Ni-Sn Intermetallic Compounds Growth Kinetics of Cu/Ni/Sn-2.5Ag Microbump during Annealing and Current Stressing (열처리 및 전류인가 조건에서 Cu/Ni/Sn-2.5Ag 미세범프의 Ni-Sn 금속간화합물 성장 거동에 미치는 비전도성 필름의 영향 분석)

  • Kim, Gahui;Ryu, Hyodong;Kwon, Woobin;Son, Kirak;Park, Young-Bae
    • Journal of the Microelectronics and Packaging Society
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    • v.29 no.2
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    • pp.81-89
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    • 2022
  • The in-situ electromigration(EM) and annealing test were performed at 110, 130, and 150℃ with a current density of 1.3×105 A/cm2 conditions to investigate the effect of non-conductive film (NCF) on growth kinetics of intermetallic compound (IMC) in Cu/Ni/Sn-2.5Ag microbump. As a result, the activation energy of the Ni3Sn4 IMC growth in the annealing and EM conditions according to the NCF application was about 0.52 eV, and there was no significant difference. This is because the growth rate of Ni-Sn IMC is much slower than that of Cu-Sn IMC, and the growth behavior of Ni-Sn IMC increases linearly with the square root of time, so it has the same reaction mechanism dominated by diffusion. In addition, there is no difference in the activation energy of the Ni3Sn4 IMC growth because the EM resistance effect of the back stress according to the NCF application is not large.