• Title/Summary/Keyword: CD structure

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Structural, Optical and Photoconductive Properties of Chemically Deposited Nanocrystalline CdS Thin Films

  • Park, Wug-Dong
    • Transactions on Electrical and Electronic Materials
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    • v.12 no.4
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    • pp.164-168
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    • 2011
  • Nanocrystalline cadmium sulphide (CdS) thin films were prepared using chemical bath deposition (CBD), and the structural, optical and photoconductive properties were investigated. The crystal structure of CdS thin film was studied by X-ray diffraction. The crystallite size, dislocation density and lattice constant of CBD CdS thin films were investigated. The dislocation density of CdS thin films initially decreases with increasing film thickness, and it is nearly constant over the thickness of 2,500 ${\AA}$. The dislocation density decreases with increasing the crystallite size. The Urbach energies of CdS thin films are obtained by fitting the optical absorption coefficient. The optical band gap of CdS thin films increases and finally saturates with increasing the lattice constant. The Urbach energy and optical band gap of the 2,900 A-thick CdS thin film prepared for 60 minutes are 0.24 eV and 2.83 eV, respectively. The activation energies of the 2,900 ${\AA}$-thick CdS thin film at low and high temperature regions were 14 meV and 31 meV, respectively. It is considered that these activation energies correspond to donor levels associated with shallow traps or surface states of CdS thin film. Also, the value of ${\gamma}$ was obtained from the light transfer characteristic of CdS thin film. The value of ${\gamma}$ for the 2,900 A-thick CdS thin film was 1 at 10 V, and it saturates with increasing the applied voltage.

ZnTe:O/CdS/ZnO intermediate band solar cells grown on ITO/glass substrate by pulsed laser deposition

  • Lee, Kyoung Su;Oh, Gyujin;Kim, Eun Kyu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.197.2-197.2
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    • 2015
  • Low-cost, high efficiency solar cells are tremendous interests for the realization of a renewable and clean energy source. ZnTe based solar cells have a possibility of high efficiency with formation of an intermediated energy band structure by impurity doping. In this work, the ZnTe:O/CdS/ZnO structure was fabricated by pulsed laser deposition (PLD) technique. A pulsed (10 Hz) Nd:YAG laser operating at a wavelength of 266 nm was used to produce a plasma plume from an ablated a ZnTe target, whose density of laser energy was 4.5 J/cm2. The base pressure of the chamber was kept at a pressure of approximately $4{\times}10-7Torr$. ZnO thin film with thickness of 100 nm was grown on to ITO/glass, and then CdS and ZnTe:O thin film were grown on ZnO thin film. Thickness of CdS and ZnTe:O were 50 nm and 500 nm, respectively. During deposition of ZnTe:O films, O2 gas was introduced from 1 to 20 mTorr. For fabricating ZnTe:O/CdS/ZnO solar cells, Au metal was deposited on the ITO film and ZnTe:O by thermal evaporation method. From the fabricated ZnTe:O/CdS/ZnO solar cell, current-voltage characteristics was measured by using HP 4156-a semiconductor parameter analyzer. Finally, solar cell performance was measured using an Air Mass 1.5 Global (AM 1.5 G) solar simulator with an irradiation intensity of 100 mW cm-2.

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Mixed Defect Structure and Hole Conductivity of the System Lanthanum Sesquioxide-Cadmium Oxide (산화란탄-산화카드뮴계의 혼합 결함구조 및 Hole 전도도)

  • Kim, Keu-Hong;Kim, Don;Choi, Jae-Shi
    • Journal of the Korean Chemical Society
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    • v.31 no.3
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    • pp.225-230
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    • 1987
  • Electrical conductivity of $CdO-La_2O_3$ system containing 0.8mol% of CdO was measured from 500 to $900^{\circ}C$ at oxygen partial pressures of $10^{-7}\;to\;10^{-1}$ atm. Plots of log ${\sigma}$ vs. 1/T at constant $PO_2$ are found to be linear and the activation energy appears to be 0.97eV. The log ${\sigma}$vs. log $PO_2$ is found to be linear at oxygen pressures of $10^{-7}\;to\;10^{-1}$ atm and $500{\sim}900^{\circ}C$. The conductivity dependence on $PO_2$ at the above temperature range is given by ${\sigma}\;{\alpha}\;PO_2^{1/4}$. The defect structure in this system is believed to be complex, i.e., ${V_{La}}^{'''}$ and $V\"{o}$. The interpretations of conductivity dependences on temperature and $PO_2$ are presented and conduction mechanism is proposed to explain the data.

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A Monochromatic X-Ray CT Using a CdTe Array Detector with Variable Spatial Resolution

  • Tokumori, Kenji;Toyofuku, Fukai;Kanda, Shigenobu;Ohki, Masafumi;Higashida, Yoshiharu;Hyodo, Kazuyuki;Ando, Masami;Uyama, Chikao
    • Proceedings of the Korean Society of Medical Physics Conference
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    • 2002.09a
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    • pp.411-414
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    • 2002
  • The CdTe semiconductor detector has a higher detection efficiency for x-rays and $\square$amma rays and a wider energy band gap compared with Si and Ge semiconductor detectors. Therefore, the size of the detector element can be made small, and can be operated at room temperature. The interaction between a CdTe detector and incident x-rays is mainly photoelectric absorption in the photon energy range of up to 100 keV. In this energy range, Compton effects are almost negligible. We have developed a 256 channel CdTe array detector system for monochromatic x-ray CT using synchrotron radiation. The CdTe array detector system, the element size of which is 1.98 mm (h) x 1.98 mm (w) x 0.5 mm (t), was operated in photon counting mode. In order to improve the spatial resolution, we tilted the CdTe array detector against the incident parallel monochromatic x-ray beam. The experiments were performed at the BL20B2 experimental hutch in SPring-8. The energy of incident monochromatic x-rays was set at 55 keV. Phantom measurements were performed at the detector angle of 0, 30 and 45 degrees against the incident parallel monochromatic x-rays. The linear attenuation coefficients were calculated from the reconstructed CT images. By increasing the detector angle, the spatial resolutions were improved. There was no significant difference between the linear attenuation coefficients which were corrected by the detector angle. It was found that this method was useful for improving the spatial resolution in a parallel monochromatic x-ray CT system.

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The electrical and optical properties of semiconductor CdTe films (반도체 CdTe 박막의 전기 광학적 특성)

  • 박국상;김선옥;이기암
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.5 no.1
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    • pp.78-86
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    • 1995
  • Abstract We have investigated the structure and the conductivity of the CdTe films evaporated on the glass substrates by Electron Beam Evaporator (EBE) technique. The structure is observed to be polycrystalline whose phase is mainly hexagonal phase with some cubic phase. Dark electric conductivity is of the order of $1-^{-8} {\Omega}^{-1} cm^{-1}$ and slightly increased by annealing for an hour at $300^{\circ}C$. Activation energy calculated from the electrical conductivity which varies with increasing temperature is 1.446 eV in the case of room temperature substrates. The values of optical band gap are 1.52 eV in direct transition whereas 1.44 eV in indirect. The photoconductivity of the films is of the order of $1-^{-8} {\Omega}^{-1} cm^{-1}$ and the peak energy is about 600 nm in the room temperature. The photoconductivity starts to increase at 850 nm, which is close to 1.446 eV, the activation energy of CdTe polycrystal films.

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Refilled mask structure for Minimizing Shadowing Effect on EUV Lithography

  • Ahn, Jin-Ho;Shin, Hyun-Duck;Jeong, Chang-Young
    • Journal of the Semiconductor & Display Technology
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    • v.9 no.4
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    • pp.13-18
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    • 2010
  • Extreme ultraviolet (EUV) lithography using 13.5 nm wavelengths is expected to be adopted as a mass production technology for 32 nm half pitch and below. One of the new issues introduced by EUV lithography is the shadowing effect. Mask shadowing is a unique phenomenon caused by using mirror-based mask with an oblique incident angle of light. This results in a horizontal-vertical (H-V) biasing effect and ellipticity in the contact hole pattern. To minimize the shadowing effect, a refilled mask is an available option. The concept of refilled mask structure can be implemented by partial etching into the multilayer and then refilling the trench with an absorber material. The simulations were carried out to confirm the possibility of application of refilled mask in 32 nm line-and-space pattern under the condition of preproduction tool. The effect of sidewall angle in refilled mask is evaluated on image contrast and critical dimension (CD) on the wafer. We also simulated the effect of refilled absorber thickness on aerial image, H-V CD bias, and overlapping process window. Finally, we concluded that the refilled absorber thickness for minimizing shadowing effect should be thinner than etched depth.

Growth and Properties of the $Cd_{1-x}Zn_xS$ Thin Film by Co-evaporation (동시증착에 의한 $Cd_{1-x}Zn_xS$ 박막제작 및 특성에 관한 연구)

  • Lee, J.H.;Lee, H.Y.;Song, W.C.;Park, Y.K.;Shin, S.H.;Shin, J.H.;Park, K.J.
    • Proceedings of the KIEE Conference
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    • 1997.07d
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    • pp.1283-1285
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    • 1997
  • In this paper, structural, optical and electrical properties of $Cd_{1-x}Zn_xS$ thin films prepared by co-evaporation method were studied. The crystal structure of $Cd_{1-x}Zn_xS$ films deposited at a substrate temperature of $150^{\circ}C$ was hexagonal with the c axis aligned perpendicular to the substrate. As increasing composition parameter x, the intensity of (002) peak decreased, which means poor crystalline and decreasing of preferential orientation. The optical bandgap of $Cd_{1-x}Zn_xS$ films varies from 2.41eV for CdS to 3.48eV for ZnS with x. The resistivity of the $Cd_{1-x}Zn_xS$ films increased with x.

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Enzymatic Synthesis of Cyclodextrin in an Heterogeneous Enzyme Reaction System Containing Insoluble Extruded Starch (Extrusion 전분을 기질로 한 불균일상 효소반응계에서의 Cyclodextrin 효소합성)

  • 이용현;박동찬
    • Microbiology and Biotechnology Letters
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    • v.19 no.5
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    • pp.514-520
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    • 1991
  • Direct synthesis of cyclodextrin (CD) from extruded insoluble corn starch without liquefaction procedure using cyclodextrin glucanotransferase (CGTase) was carried out. Increased CD production rate and yield were achieved in heterogeneous enzyme reaction system containing extruded corn starch compared with those of conventional system employing liquefied or partially cyclized starch. At extruded starch concentration of 100 g/l the CD concentration and conversion yield were reached up to 54 g/l and 0.54, respectively. High purity of $\alpha \beta \gamma$-CDs without accumulation of undesirable malto-oligosaccharides was produced, furthermore, the residual extruded starch was easily separated by centrifugation from reaction mixture, whlch will facilitate the purification procedure. Granular structure of extruded starch was observed by SEM to investigate enzyme reaction mechanism. Supplemental addition of $\alpha$-amylase enhanced slightly the initial CD production rate, but it decomposed produced CD at the late stage. Various! extruded raw starches, such as, corn, rice, and barley were also suitable substrates for CD production.

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