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A Comparative Study of the Effect of Two Analgesic Administration Methods on Post Operative Pain (수술환자에 었어서 마약성 진통제의 자가투여 방법과 근육주사 방법의 효과에 대한 비교연구)

  • 이정화
    • Journal of Korean Academy of Nursing
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    • v.27 no.2
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    • pp.401-410
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    • 1997
  • An acute pain is the common experience following surgery. Pain is a most miserable experience in person and most preoperative patients have fear o! postoperative pain. In nursing, it is very important to understand and relieve the pain of post oprative patients as much as possible. This study was designed to compare the descriptive patterns of pain between group of Patient Controlled Analgesia and group of traditional Muscular Injection in surgcal patients. This information can be utilited as data of understanding nursing care and treatment planning for pain in surgical patients. The subjects in this study were 45 post-hysterectomy patients in Gynecology ward in C. N. U. H., in Taejon. Data was collected from May 12 to June 27. 1996. The instrumants used for this study were subjective Visual Analog Scale, Objedive nonverbal pain scale composed of Facial Apperance. Vocal Sound Change, and Sweating score. and the Melzack's Mcgill pain Qusetionaire. nine Items of Developmental Pain Intensity Scale by Lee En Ok. Analysis of data was done by using S. P. S. S. percentage, t-test, x²-test. ANOVA, and Repeated measure ANOVA. Results were obtained as follows. 1. Hypothesis 1 : There was very highly statistically significant difference in subjective self-report pain score(Visual Analog Scale) between PCA Group and IM Group(P=0.0001). 2. Hypothesis 2 : There was very highly statistically significant difference in muscle strength score (Visual Analog Scale) between PCA Group and IM group(P0.0001). 3. Hypothesis 3 : There was very highly statistically significant difference in facial appearance score between PCA Group and IM group(P=0.0001). 4. Hypothesis 4 : There was very highly statistically significance difference in vocal sound change score between PCA Group and IM group(P=0.0001). 5. Hypothesis 5 : There was no statistically significant difference sweating scores between PCA group and IM group(F=2.50, P=0.1220). But, postoperation time of 12, 24 was statistically difference between two groups(P=0.0001). So, it was partially supported. 6. Hypothesis 6 : There was very highly statistically significant difference in vocabulary pain score between PCA Group and IM group. 7. Hypothesis 7 : There was very highly statistically significant difference in amounts of total analgesic between PCA Group and IM group. There was very highly statistically significant difference in Visual Analog Pain Score, Facial Appearance Score, Vocal Sound Change Score, Vocabulary Score, amounts of total analgesic between PCA group and IM group. So, It is verified to asses of postoperative pain with VAS, Checklist of facia appearance, vocal sound change, and sweating, and Vocabulary Scale.

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Diagnosis and Treatment of Hirschsprung's Disease in Korea - Current Status of 1992 - -A Survey f or Surgeon's Preference among the Members of the Korean Association of Pediatric Surgeons in 1992- (Hirschsprung's Disease의 진단과 치료 : 1992년도 현황 -대한소아외과학회 회원대상 선호도 설문조사-)

  • Yeo, S.Y.;Kim, S.Y.;Kim, W.K.;Kim, I.K.;Kim, J.E.;Park, K.W.;Park, W.H.;Park, J.S.;Song, Y.T.;Oh, S.M.;Lee, D.S.;M.D., Lee;Lee, S.C.;Chang, S.I.;Chung, S.Y.;Chung, E.S.;Jung, P.M.;Joo, J.S.;Choi, K.J.;Choi, S.O.;Choi, S.H.;Huh, Y.S.;Hwang, E.H.
    • Advances in pediatric surgery
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    • v.2 no.1
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    • pp.33-41
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    • 1996
  • This report present the result of the national survey of pediatric surgeons' preferences on diagnosis and treatment of Hirschsprung's disease(HD) carried out in 1993. The questionnaires were sent to twenty-seven members of the Korean Association of Pediatric Surgeons (KAPS) working in twenty-four institutions. The questionnaires were designed to determine the individual surgeon's preference for the methods of diagnosis and treatment of the disease. Twenty-three pediatric surgeons from twenty institutions returned completed forms. The total number of patients diagnosed with HD in 1992 was 190 in this group. The estimated incidence of HD was 1/3,900. The most important symptom was delayed meconium passing and the most preferred diagnostic procedure was barium study. Anorectal manometric examination was carried out by 13 pediatric surgeons and 19 confirmed the diagnosis before operation by rectal biopsy, 12 with full-thickness biopsy and 7 with suction. Frozen section biopsy during operation was done by 22 surgeons. Eight surgeons did one stage operation if the age of the patient is suitable. Definitive operation was usually done at the age of 6 to 11 months. The most preferred operation was Duhamel procedure done by 19. Enterocolitis was the most serious complication of HD. Most of patients had normal continence within 6 to 12 months after operation. The follow-up period was less than 6 years in 16 surgeons. The results were presented at the 9th annual meeting of KAPS in June of 1993. This is the first national survey of HD and it can provide guidelines of diagnosis and treatment of Hirschprung's disease even though it is not a detailed study of patient data.

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Development of Automatic System to Measure Transmitted Ultrasonic Speed of Raw Ginseng (수삼의 초음파 전달속도 계측 자동화 시스템 개발)

  • 서동현;김기대;강호양;김찬수;이현동
    • Proceedings of the Korean Society for Agricultural Machinery Conference
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    • 2002.02a
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    • pp.592-599
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    • 2002
  • 본 연구에서는 수삼의 가공전 선별을 위해 현장에서 편리하게 사용할 수 있는 초음파 전달 속도 계측 자동화 시스템을 개발하여 그 성능을 평가하고자 하였으며 결과를 요약하면 다음과 같다. 1. 개발된 시스템은 제어용 컴퓨터, 시스템 구동 및 탐촉자 이동 장치, 하중 변환장치, 초음파 발생 및 송수신 장치 등으로 구성되었다. 2. 제어 및 계측용 프로그램은 압축력, 측정 대상물의 크기, 초음파 전달 시간을 순차적으로 계측하여 초음파 전달 속도를 계산하는 알고리즘을 개발하였으며, Visual Basic 6.0으로 작성되었다. 모터의 작동, A/D 변환, RS232C 통신 등과 관련된 부분은 각각의 모듈화된 함수로서 구동하고자 하였다. 3. 개발된 시스템의 속도와 거리별 이동 거리별 오차를 측정한 결과 0∼0.04mm 범위를 나타내었다. 이 값은 시스템의 허용오차인 0.17mm 오차보다는 현저히 작은 값이었고 15mm/s와 30mm/s의 이동 속도에서 모두 비슷한 크기의 오차값을 나타내었다. 4. 개발된 시스템의 속도별 반복정밀도 실험 결과 측정위치에서의 반복에 의한 정지 위치 오차는 전 구간에서 0.02mm 이내로 나타났고, 이동 평판의 이동속도가 15mm/s였을 경우에는 이동 회수 30회, 이동 거리 60mm일 때 최대 편차 0.019mm를 나타냈으며 이동속도가 30mm/s일 경우에는 이동 회수 40회, 이동거리 20mm에서 0.02mm의 최대 편차를 나타내었다. 5. 5개의 알루미늄 조각의 크기를 시스템으로 측정한 결과 측정값의 최대 편차는 0.08mm였다. 이 값은 시스템의 허용오차인 0.17mm의 50% 수준으로 시스템은 대상물의 크기 측정에 적당하다고 사료되었다. 6. 절단된 수삼의 초음파 전달속도는 평균 396.4m/s였다.를 축열재로 사용할 경우 재생기를 반으로 나누어서 가열부 쪽에 철선을, 냉각부 쪽에 철망을 삽입한 것이 반대로 삽입한 것보다 재생기 양단의 온도차는 높게 나타났고, 재생기 양단의 압력 차는 낮게 나타났다. 재생기 축열재로서 철망-철선을 사용할 경우 철선-철망 ø1.2-150이 전열 표면적은 작으나 재생기 양단의 온도차가 가장 큰 것으로 나타났으며 재생기 양단의 압력 차는 가장 낮게 나타나 공시 철망- 철선 혼합 축열재중 가장 우수함을 알 수 있다. 4. 철망사이에 철선을 삽입한 축열재의 경우, 철망사이에 삽입한 철선의 직경이 큰 것이 철선의 직경이 작은 것보다 재생기의 양단의 온도차가 높게 나타났고 재생기 양단의 압력차는 작게 나타났다. 그러므로 철망사이에 철선을 삽입한 것 중 성능이 우수한 것은 150-ø2. 0-150으로 나타났다. 5. 실험한 재생기 축열재들 중에서 성능이 우수한 것들을 비교한 결과, 복합 철선 ø1.2-1 50이 가장 성능이 좋은 것으로 나타났다.적외선.열풍 복합건조방법이 높게 나타나 이것은 곡물 표면에 원적외선 방사에의한 복사열이 전달되어 열장해를 받았기 때문으로 판단되며, 금후 더 연구하여 적정 열풍온도 및 방사체 크기를 구명해야 할 것이다.으로 보여진다 따라서 옻나무 유래 F는 포유동물의 생식기능에 중요하게 작용하는 것으로 사료된다.된다.정량 분석한 결과이다. 시편의 조성은 33.6 at% U, 66.4 at% O의 결과를 얻었다. 산화물 핵연료의 표면 관찰 및 정량 분석 시험시 시편 표면을 전도성 물질로 증착시키지 않고, Silver Paint 에 시편을 접착하는 방법으로도 만족한 시험 결과를 얻을 수 있었다.째, 회복기 중에 일어나는 입자들의 유입은 자기폭풍의 지속시간을 연장시키는 경향을 보이며 큰 자기폭풍일수

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A Study on Labor Saving in Paddy Rice Cultivation (논벼재배에 있어서의 노동력 절감에 관한 연구)

  • Young-Chul Chang
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.11
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    • pp.81-97
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    • 1972
  • Experiments and investigations were done basically and practically for the purpose of labor saving in paddy rice cultivation especially on Homizil i.e. hoeing and herbicide, 1969. 8 concrete tanks were established on the open base of Keon Kuk University for comparison of percolation, dissolved oxygen and yield test of rice in the paddy plot of tank. The dimension of the bottom of each tank is square meter. Each of the 4 of the 8 tanks is 21cm in height and each of the remaining 4 tanks is 36cm. Each tank has a system that comprises 2 sets of tubes, each of which has 20 holes of 5mm in diameter scattered every side and is covered with nylon cloth taking water in the tank. One set consists of 4 P.V.C tubes. The first set is situated 8cm below the top of the tank and the second set is located at bottom layer inside the tank. The 4 tubes of each set are combined together and led to the glass tube which protects from inside to outside. And this inside-outside glass tube is connected to the small rubber tube. Also a glass tube is set 4cm below the top of the tank. Paddy loam was filled on sand in each of the tanks in the soil depth of either 15cm or 30cm. The depth of sand was 5cm in the soil depth of 15cm and 10cm in the soil depth of 30cm. (Fig. 1, 2 and 3). The paddy rice was grown in the tank. The percolation of water, the dissolved oxygen and the yield of rice were observed in the tank. And the dissolved oxygen was detected by Winkler method. A sandy paddy field of heavy percolation was selected at the field of the National Agricultural Material Inspection Center in Seoul. It was divided into 9 plots. These plots were given 3 treatments: (A) not hoeing, (B) hoeing one time and (C) hoeing two times. These treatments were replicated 3 times along the latin square design. The paddy rice was grown and sprayed with Stam F-34 in the all plots for the purpose of killing weeds before hoeing. The two types of paddy of field i.e. one for normal percolation and the other for ill drainage were selected at Iri Crop Experiment Station, Jeonla-Bukdo. Each field was divided into 24 plots for 8 treatments. They are: (A) not hoeing; (B) hoeing one time; (C) hoeing two times; (D) not hoeing but treating with herbicide, Pamcon; (E) hoeing one time and weeding two times also treating with herbicide, Pamcon; (F) hoeing two times and weeding one time a], o treating with herbicide, Pamcon; (G) hoeing two times and weeding two times also treating with herbicide, Pamcon, ; (H) usual manner. The labor hours and expenses needed for weeding in the paddy by hoeing were investigated in a farmer at Suwon and the price of herbicide and the yield of rice were taken out at Iri, Jeonla-Bukdo. The results obtained from the above experiments and investigations are as follows: 1. The relationship between percolation and dissolved oxygen shows that a very small amount of oxygen is detected in the soil water under 2cm below surface of earth in the paddy even when percolation is over 4.0cm per 24 hours (Tab. 1). 2. The relationship between percolation and yield of rice shows that the yield of rice increases in the percolation of 0cm and 1.5cm per 24 hours and decreases in the percolation of 2.5cm and 3.4cm in the plot of the 15cm ploughing depth and increases in the percolation of 1.4cm and 3.0cm and decreases in the percolation of 0cm and 4.0cm in the plot of 30cm ploughing depth (Tab. 1 and Fig. 5). 3. The yield of paddy weeded with Stam F-34 in the sandy field of heavy percolation in Seoul was 3.02 tons in the plot of not hoeing, 2.99 tons in hoeing one time and 3.05 tons in hoeing two times per hectare (Tab. 5). 4.1). 4. 1) The yield of rice per 10 ares in the field of normal percolation at Iri was 338kg in not hoeing, 379kg in hoeing one time, 383kg in hoeing two times, 413kg in spraying herbicide, Pamcon, and not hoeing, 433kg in spraying herbicide, Pamcon, and hoeing one time and weeding two times, 399kg in spraying herbicide, Pamcon, and hoeing two times and weeding one time, 420kg in spraying herbicide, Pamcon, and hoeing two times and weeding two times and 418kg in usual manner (Tab. 6-1). 2) The yield of rice per 10 ares in the field of ill drainage at Iri was 323kg in not hoeing, 363kg in hoeing one time, 342kg in hoeing two times, 388kg in spraying herbicide, Pamcon, and not hoeing, 425kg in spraying herbicide, Pamcon, and hoeing one time and weeding two times, 427kg in spraying herbicide, Pamcon, and hoeing two times and weeding one time, 449kg in spraying herbicide, Pamcon, and hoeing two times and weeding two times and 412kg in usual manner (Tab. 6-2). 5. 1) The labor hours for weeding by hoeing was 37.1 hours but 53.5 hours if hours for meal, smoking and so on are included, and the expenses including labor cost needed for weeding by hoeing in the paddy rice was 2, 346 Won per 10 ares at Suwon (Tab. 7). 2) The labor hours for weeding by spraying herbicide with hand sprayer in the paddy rice was about 5 hours per 10 ares at Suwon and the expenses for weeding by spraying herbicide in the paddy rice was 750 Won but 1130 Won if the loss by decrement of rice in the paddy field of ill drainage per 10 ares is calculated in estimation at Iri (Tab. 8). From these observations and investigations it is known that using of some kinds of herbicides Saves labor and expenses of weeding, almost without giving damages to the rice itself, in the field of normal or heavy percolation comparing usual manner of hoeing.

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Optimum Dissolved Oxygen Level for the Growth of Tilapia in the Recirculating Water System (순환여과식사육장치에서 틸라피아의 성장을 위한 최적용존산소량)

  • KIM In-Bae;WOO Young-Bae
    • Journal of Aquaculture
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    • v.1 no.1
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    • pp.67-73
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    • 1988
  • A growth experiment of tilapia (offsprings of the hybrid between Oreochromis niloticus and O. mossambicus) under different dissolved oxygen levels in the recirculating water system was conducted at the Fish Culture Experiment Station of the National Fisheries University of Pusan from February 4 to March 5, 1986. Six tanks with a capacity of $1.8m^3$ of water each were used under the same condition of water parameters except for dissolved oxygen levels which were designated to maintain at 1.5, 2.0, 2.5, 3.0, 3.5 and 4.0 mg/$\iota$. Each tank was stocked with 90 kg of fish each averaging 64 to 69 grams. The average water temperature during the course of the experiment was $22.5^{\circ}C$. The results obtained are summarized as follows: The food conversion efficiencies were very good, being 1.05-1.11 at 3.5, 3.0, 2.5 and 2.0 mg/$\iota$ DO levels without any significant differences among them, but at 4.0 mg/$\iota$ the F. C. was 1.39 and at 1.5 mg/$\iota$ it was 1.61 being very poor compared with the others. The daily growth rate performance was best at 3.5 mg/$\iota$ dissolved oxygen level followed by 3.0 and 2.5 mg/$\iota$ with slight differences while at 4.0 and 2.0 mg/$\iota$ DO levels the growths were significantly poor, and at 1.5 mg/$\iota$ DO level it was extremely poor. In 1.5 mg/$\iota$ group, the fish did not accept feed vigorously and after feeding the fish usually concentrated around the inflow point showing oxygen deficiency response. While at 4.0 mg/$\iota$ high feeding rates tended to waste significant amounts of feed while eating and led to water deterioration, and above these levels the results is considered to lead to a waste of energy with uneconomical performance. On the other hand, at and below 2.0 mg/$\iota$ DO level the tilapia certainly showed a poor growth performance. The experiment indicates that the DO range of 2.5$\~$3.5 mg/$\iota$ is the optimum level for the good growth performance.

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Effects of Prostaglandins on In Vitro Development of Bovine Embryos (소 체외 수정란의 체외 발육에 미치는 Prostaglandins의 영향)

  • Shin, S.O.;Park, S.B.;Park, C.K.
    • Journal of Embryo Transfer
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    • v.22 no.1
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    • pp.27-32
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    • 2007
  • This study was conducted to examine the effects of prostaglandin $F_2{\alpha}(PGF_2{\alpha})$ and prostaglandin $E_2 (PGE_2)$ on the expansion and hatching of bovine embryos. During the in vitro culture, embryos were cultured with the following groups: (1) 0, 1, 10 and 100ng/ml $PGF_2{\alpha}$ (2) 0, 1, 10 and 100 ng/ml $PGF_2{\alpha}$, (3) low concentration of $PGF_2{\alpha}$ ; low concentration of $PGF_2{\alpha}$, (1ng/ml : 1ng/ml), (4) low concentration of $PGF_2{\alpha}$ : high concentration of $PGF_2{\alpha}$ (1ng/ml : 10ng/ml) (5) high concentration of $PGF_2{\alpha}$ : low concentration of $PGE_2$ (10ng/ml 1ng/ml) (6) high concentration of $PGF_2{\alpha}$ : high concentration of $PGE_2$(10 ng/ml : 10ng/ml). In the results of this study, treatment of $PGF_2{\alpha}$ or $PGE_2$ did not affect in vitro development to blastocysts. However, the hatching rates of embryos cultured with 10ng/ml $PGE_2$(10.3%) and 1ng/ml $PGF_2{\alpha}$ 10ng/ml $PGE_2$(22.2%) were significantly (P<0.05) higher than in control (4.3% and 12.7%) and other treatment groups. All groups treated with high concentrations of $PGF_2{\alpha}$ showed decreased hatching rates. Thus, this results suggested that $PGF_2{\alpha}\;and\;PGE_2$ were concerned with the hatching in bovine embryos, and their effects on hatching were different by the concentrations.

MEASUREMENT OF ADHESION OF ROOT CANAL SEALER TO DENTINE AND GUTTA-PERCHA (상아질과 Gutta-Percha에 대한 근관충전용 Sealer의 결합강도의 측정)

  • Her, Mi-Ja;Yu, Mi-Kyung;Lee, Se-Joon;Lee, Kwang-Won
    • Restorative Dentistry and Endodontics
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    • v.28 no.1
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    • pp.89-99
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    • 2003
  • The purpose of this study was to investigate the bonding of resin- based root canal sealer, AH26 when the sealer was applied as a thin layer between dentine and gutta-percha surface. In this study forty non-caries extracted human molars and resin-based root canal sealer(AH 26, DeTrey/Dentsply, Germany) were used. Disks of gutta-percha, 6mm in diameter.6mm thick (Diadent/Dentsply, Korea) for thermoplastic obturation were used and dentin surfaces were treated with 2% NaOCl(Group 1) or 2%NaOCl+17% EDTA(Group 3). Disks of gutta-Percha, 6mm in diameter.6mm thick (Diadent/Dentsply, Korea) for conventional obturation were used and dentin surface were treated with 2% NaOCl(Group 2) or 2%NaOCl+17% EDTA(Group 4). Enamel was removed by a horizontal section 1mm below the deepest portion of the central occlusal groove by using a watercooled low speed diamond saw. A second horizontal section was done around cementoenamel junction. Exposed dentin surface was cut to approximately $8{\times}8{\;}mm$ rectangular shape and was ground against 320, 400, 600 grade silicon carbide abrasive paper serially. After grinding, the dentine surface were soaked in a solution of 2% NaOCl for 30 minutes and twenty of specimens were treated with 17% EDTA solution for 1 minute. The treated specimens were washed and dried, Root canal sealer, AH26 was prepared according to the manufacture's instructions The Gutta-percha and dentin surface were coated with a thin layer of the freshly mixed seal or. The specimens were left overnight at room temperature. After their initial set, they were transferred to an incubator at $37$^{\circ}C$ for 72 h. After 72 hours, resin blocks were made. The resin block was serially sectioned vertically into stick of $1{\cdot}1mm$. Twenty sticks were prepared from each group. After that, tensile bond strength f3r each stick was measured with Microtensile Tester Failure patterns of the specimens at the interface between gutta-percha and dentin were observed under the SEM(x1000) and Stereomicroscope (LEICA M42O, Meyer Inst., TX U.S.A) at 1.25 x25 magnification. The results were statistically analysed by using a One-way ANOVA and Tukey's test. The results were as follows; 1. Tensile bond strengths($mean{\pm}SD$) were expressed with ascending order as follows: Group 1, $3.09{\pm}$ 1.05Mpa : Group 2, $6.23{\pm}1.16MPa$ : Group 3, $7.12{\pm}1.07MPa$ : Group 4, $10.32{\pm}2.06MPa$. 2. Tensile bond strengths of the group 2 and 4 used disks of gutta-percha for conventional obturation were significantly higher than that of the group 1 and 3 used fir thermoplastic obturation. (p < 0.05). 3. Tensile bond strengths of the group 3 and 4 treated with 2% NaOC1+17% EDTA were significantly higher than that of the group 1 and 2 treated with 2% NaOCl. (p < 0.05). 4. In analysis of failure patterns at the interface between sealer and gutta-percha, there were observed 49 (61%)cases of adhesive failure patterns and 31 (39%) cases of mixed failures patterns.

Effect of Long-Term Pyridoxine Depletion on Asparte Aminotransferase and Pyridoxal 5'-Phosphate of Rat Liver Mitochondrial and Cytosolic Fractions (장기간의 Pyridoxine 부족이 쥐 간의 Mitochondria 및 Cytosolic Fraction 에 있는 Aspartate Aminotransferase 및 Pyridoxal 5'- Phoshate에 미치는 영향)

  • 임경숙
    • Journal of Nutrition and Health
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    • v.19 no.4
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    • pp.246-254
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    • 1986
  • Weanling female Sprague Dawley rats were fed d diets containing 22mg pyridoxine. BCI/kg diet (control diet) and l.2mg pyridoxine. BCI/kg diet (deficient diet). One control group and one defi­c dent group were fed their diet throughout growth, g gestation and lactation. After the pups were born and weaned, the deficient group was divided into two groups. One switched to control diet(supple­I mented group) and the other continued the same d deficient diet( deficient group) until 10 week -old. The liver mitochondrial and cytosolic asparate a aminotransferase activity and pyridoxal phosphate content were determined in offspring rats. The aspartate aminotransferase activities in both liver mito$\phi$ondrial and cytosolic fractions of den­d cient group were significantly lower than those of controls, but there were no significant differences between two groups after addition of 1O^{-4}M pyri­d do뼈I phosphate to the medium. By pyridoxine s supplementation after weaning, the reduced aspar­a tate aminotnmsferase activities were only partialy I restored to control levels. The pyridoxal phospha­t te content of deficient group in Iiver mitochondr­ial and cytosoIic fractions were alo significantly different from those of controls, but readily restored by dietary supplementation. These results suggest that there is a quantitative and a qualitative changes of aspartate amino trans­f ferase and pyridoxal phosphate in liver mitochon­d drial and cytosolic fraction by long-term pyrido­x xine deficiency and these reductions can partially recovered by dietary pyridoxine supplementation after weaning.

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GPU Based Feature Profile Simulation for Deep Contact Hole Etching in Fluorocarbon Plasma

  • Im, Yeon-Ho;Chang, Won-Seok;Choi, Kwang-Sung;Yu, Dong-Hun;Cho, Deog-Gyun;Yook, Yeong-Geun;Chun, Poo-Reum;Lee, Se-A;Kim, Jin-Tae;Kwon, Deuk-Chul;Yoon, Jung-Sik;Kim3, Dae-Woong;You, Shin-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.80-81
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    • 2012
  • Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

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Distribution of Cadminum Fractions in Paddy Soils and Their Relation to Cadmium Content in Brown Rice (답토양중(畓土壤中) Cadmium의 형태별(形態別) 분포(分布)와 현미중(玄米中) Cadmium 함량(含量)과의 관계연구(関係硏究))

  • Lim, Sun-Uk;Kim, Sun-Kwan
    • Korean Journal of Soil Science and Fertilizer
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    • v.16 no.1
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    • pp.28-35
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    • 1983
  • The object of this study was to investigate the distribution of Cd fractions in paddy soils in relation to some soil characteristics and to find out the relationships between soil Cd fractions and Cd content in brown rice. Thirty six soils and rice samples were collected from the paddy field adjacent to zinc mining sites at harvest time in 1981. Total Cd content of brown rice samples was analyzed. A sequential extraction procedure was used to fractionate Cd in soils into the designated forms of exchangeable, adsorbed, organically bonded, carbonate, sulfide, and residual Cd. The results obtained were as follows: 1. The distribution of Cd fractions in soil showed a wide difference depending on soil properties. As an average value it was observed that organically bonded Cd amounted 43.7%; residual Cd, 6.5%; and other fractions, 10-15%. 2. With higher soil pH, organically bonded and carbonate Cd fraction tended to be higher but exchangeable fraction lower. Other forms of Cd showed no difference with soil reaction. 3. Organically bonded fraction was positively correlated with soil organic matter content, while others except adsorbed fraction showed an adverse tendency. 4. The relation of fraction distribution to soil C E C was similar to the case of organic matter. 5. Cadmium content in brown rice showed significant possitive correlation with organically bonded Cd content (r = 0.655) and carbonate, Cd content of soil (r = 0.328) but there was no significant correlation with contents of other forms.

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