• Title/Summary/Keyword: C2F6

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The Characteristics of Residual Films on Silicon Surface $CHF_3/C_2F_6$ Reactive Ion Etching ($CHF_3/C_2F_6$ 플라즈마에 의한 실리콘 표면 잔류막의 특성)

  • 권광호;박형호;이수민;강성준;권오준;김보우;성영권
    • Journal of the Korean Vacuum Society
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    • v.1 no.1
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    • pp.145-152
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    • 1992
  • Si surfaces exposed to CHF3/C2F6 gas plasmas ih reactive ion etching (RIE) have been characterized by X-ray photoelectron spectroscopy (XPS). CHF3/C2F6 gas plasma exposure of Si surface leads to the deposition of residual film containing carbon and fluorine. The narrow scan spectra of C 1s show various bonding states of carbon as C-Si, C-F/H, C-CFx(x $\leq$ 3), C-F, C-F2, and C-F3. The chemical bonding states of fluorine are described with F-Si, F-C and F-O. And the oxygen and silicon are also detected. The effects of parameters for reactive ion etching as CHF3/C2F6 gas ratio, RF power, and pressure are investigated.

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Synthesis and Properties of Anionic Tetrakis(pentafluorophenyl)indium(Ⅲ) Complexes (Tetrakis(pentafluorophenyl)indium(Ⅲ) 음이온 착물의 합성과 특성)

  • Choi, Zel Ho
    • Journal of the Korean Chemical Society
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    • v.43 no.1
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    • pp.52-57
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    • 1999
  • The anionic complexes, [ln($C_6F_5)_4$]-, which are thermal and moisture sensitive, have been prepared by the reaction of In($C_6F_5)_3{\cdot}D(D=CH_3CN$, O($C_2H_5)_2$) with the system ($CH_3)_3SiC_6F_5$/CsF, $C_6F_5$MgBr or Cd($C_6F_5)_2$. The stable anionic indium(III) complexes are obtained through cation exchange with PNPCI ([PNP]= bis(triphenylphosphino)ammonium). The pure substance is obtained by column chromatography. These new anionic complexes are unambiguously identifed by NMR-spectroscopy, IR spectroscopy, molecular weight, DTA/TG and elemental analysis.

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Theoretical study on the dissociation reactions of C4F6 molecules

  • Choe, Hui-Cheol;Park, Yeong-Chun;Lee, Yun-Seop
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.36-36
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    • 2010
  • Low-pressure fluorocarbon plasmas are widely used in microelectronics fabrication for a variety of surface modification purposes. In particular, fluorocarbon plasmas are used for the etching of dielectrics such as silicon dioxide and silicon nitride. Among the various fluorocarbons, this study focuses on C4F6 molecules (C4F6s) which are composed of hexafluorocyclobutene (c-C4F6), hexafluoro-1, 3-butadiene (1, 3-C4F6), and hexafluoro-2-butyne (2-C4F6). We have investigated the dissociation reactions of C4F6s, resulting in CF2, CF3, C2F3, and C3F3 fragments, by using the wB97X-D functional with various basis sets. In this presentation, the geometrical properties, energetics, and dissociation mechanisms of C4F6s will be suggested.

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The Complexes of Fluorobenzene with Halogens and Interhalogens in Carbon Tetrachloride (플루오로벤젠과 할로겐 또는 할로겐間化合物 사이의 錯物에 관한 연구)

  • Choi, Sang-Up;Han, Bong-Joo
    • Journal of the Korean Chemical Society
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    • v.11 no.3
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    • pp.89-93
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    • 1967
  • The interactions of fluorobenzene with iodine monochloride, iodine monobromide, bromine and chlorine in carbon tetrachloride solution have been examined through ultraviolet spectrophotometric measurements. The results indicate the formation of one to one molecular complexes, $C_6H_5F{\cdot}ICl$, $C_6H_5F{\cdot}IBr$, $C_6H_5F{\cdot}Br_2$, and $C_6H_5F{\cdot}Cl_2$ in solution. The equilibrium constants obtained at room temperature for the formation of these four complexes are 0.161, 0.072, 0.045 and 0.035 l $mole^{-1}$, respectively. Comparison of these results with those reported in the literature on other complexes of similar type reveals that the relative stabilities of these complexes decrease in the following orders: ICl>IBr>$I_2$>$Br_2$>$Cl_2$ $C_6H_6$>$C_6H_5Br$>$C_6H_5Cl$>$C_6H_5F$

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Water Repellent Finish of Polyester Fabric Using Glow Discharge Treatment (글로우방전을 이용한 폴리에스테르 직물의 투습방수성 개질)

  • 김태년
    • Journal of the Korean Society of Clothing and Textiles
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    • v.25 no.1
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    • pp.154-161
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    • 2001
  • We have treated polyester fabric with $CF_4,\;C_2F_6,\;SF_6\;and\;C_3F_6$ glow discharge plasmas to develop functional fabrics which preserve moisture transportation and water proofing nature. Modified properties were evaluated by water vapor permeation rate and breakthrough water pressure. The change of surface morphology was observed by SEM. Fiber interstice of the plasma treated fabric was calculated as $0.32{\mu}{\textrm}{m}$, and this value was sufficiently ideal as water repellent material. The moisture transportation of ${CF_4}-treated$ fabric was good as much as untreated fabric, and those of $C_2$F(sub)6-treated, SF(sub)6-treated fabrics were reduced by 1~3%, and that of ${C_3F_6}-treated$ fabric was reduced by 15%. The best treatment condition were 0.06 torr 120 seconds in $CF_4$, 0.05 torr 30 seconds in $SF_6$, 0.08~0.15 torr 90 seconds in $SF_6$ and 0.1 torr 45 seconds in $C_3F_6$ respectively. The grade of moisture transportation effect was $CF_4>C_2F_6>SF_6>>C_3F_6$, and water proofing effect was $C_2F_6{\approx}CF_4>C_3F_6>SF_6$. It was observed by SEM that the thin film was formed on the surface of the treated substrate by the fluorocarbon plasma treatment.

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Effects of $C_2F_{6}$ Gas on Via Etching Characteristics ($C_2F_{6}$ 가스가 Via Etching 특성에 미치는 영향)

  • Ryu, Ji-Hyeong;Park, Jae-Don;Yun, Gi-Wan
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.39 no.1
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    • pp.31-38
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    • 2002
  • In order to improve the 0.35 $mutextrm{m}$-via hole etching process the etching characteristic of the gas $C_2F_{6}$ has been analyzed. The samples were triple-layer films(TEOS/SOG/TEOS) on 8-inch wafers and the orthogonal array matrix technique was used for the process. The equipment for etching was the transformer coupled plasma (TCP) source which is a type of high density plasma(HDP). This experiment showed the etching rate for $C_2F_{6}$ was 0.8 $mutextrm{m}$/min-1.1 $mutextrm{m}$/min and the measured uniformity was under $pm$6.9% in the matrix window. The CD skew comparison between pre and post-etching was under 10% which is an outstanding results in the window of profile in anisotropic etching. There was no problem in C2F6 with the flow rate of 20sccm, but when 14sccm of $C_2F_{6}$ was supplied there was a recess problem on the inner wall of SOG film. Consequently the etching characteristic of $C_2F_{6}$ shows a fast etching rate and a very wide process window in HDP TCP.

Comparison of Fermentation Properties of Winter Kimchi Stored for 6 Months in a Kimchi Refrigerator Under Ripening Mode or Storage Mode (김치냉장고의 숙성 후 저장 및 저온 저장 모드에서 6개월간 저장한 김장 김치의 발효특성 비교)

  • Lee, Eun-Hwa;Lee, Myung-Ju;Song, Yeong Ok
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.41 no.11
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    • pp.1619-1625
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    • 2012
  • The purpose of this study is to determine long-term storage conditions for winter kimchi. Kimchi was stored in a kimchi refrigerator for 6 months with or without fermentation. Four different temperature systems used were as follows: 5 days at $10^{\circ}C$ followed by storage at $-2.5^{\circ}C$ (F1), 1 day at $15^{\circ}C$ followed by storage at $-2.5^{\circ}C$ (F2), storage at $-1^{\circ}C$ (S1), or at $-2.5^{\circ}C$ (S2). Time periods required for F1, F2, S1, or S2 kimchi to reach pH 4.4 and acidity 0.6% were 2, 8, 12, and 22 weeks, respectively. Lactobacillus spp. growth on F1 and F2 kimchi was faster and greater than that on S1 and S2 kimchi, revealing a maximum concentration of 8~9 verses 6.8 log CFU/mL, respectively. However, Leuconostoc spp. were fully grown (8~9 log CFU/mL) on all four kimchi samples regardless of temperature, even at $-2.5^{\circ}C$, although the times required to reach maximum growth were different. Growth of Lactobacillus and Leuconostoc spp. both decreased after reaching maximum levels, except for F1 kimchi. Sensory evaluation results for 3 month storage showed that F1 kimchi was the best among kimchi samples in terms of appearance, acidic taste, carbonated taste, crispiness, and moldy smell. For 6 months of storage, F1 and S1 kimchi were the most highly evaluated among the kimchi samples. Sensory evaluation result for S1 kimchi stored at $-1^{\circ}C$ was comparable to that of F1 kimchi due to fully grown Leuconostoc spp. Acidities of F1 and S1 kimchi after 6 months of storage were 0.8 and 0.7%, respectively. Taken together, fermentation of kimchi at $10^{\circ}C$ for 5 days followed by storage at $-2.5^{\circ}C$ for 6 months was optimal for high quality kimchi. Sensory properties of winter kimchi were significantly influenced by the degree of fermentation.

Reaction Properties of Dinuclear Metallocenes

  • Noh Seok-Kyun;Jeong Eung-Yeong;Qei Duang Huang Dan;Lyoo Won-Seok
    • Proceedings of the Polymer Society of Korea Conference
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    • 2006.10a
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    • pp.224-225
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    • 2006
  • The Ethylene polymerization behavior of a series of polymethylene bridged dinuclear CGC $[Zr({\eta}^{5}:{\eta}^{1}-C_{9}H_{5}SiMe_{2}NCMe_{3})Me_{2}]_{2}[(CH_{2})_{n}]\;[_{n}=6(1),\;9(2),\;12(3)]$ in the cocatalytic activation with $Ph_{3}C^{+}B^{-}(C_{6}F_{5})_{4}\;(B_{1})\;or\;Ph_{3}C^{+}(C_{6}F_{5})_{3}B^{-}C_{6}F_{4}B^{-}(C_{6}F_{5})_{3}Ph_{3}C^{+}\;(B_{2})\;or\;B(C_{6}F_{5})_{3}\;(B_{3})$ were investigated to study the nuclearity effects as well as the counteranion effects. The ethylene polymerization and ethylene/1-hexene copolymerization were conducted at $30^{\circ}C$ It was found that both in ethylene polymerization and ethylene/1-hexene copolymerization, activities increased in the order of 1 < 2 < 3, which indicates the presence of longer bridge between two active sites contributes more efficiently to facilitate the polymerization activity.

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Study on Environmental Hazards of Alternatives for PFOS (PFOS 대체물질의 환경유해성에 관한 연구)

  • Choi, Bong-In;Chung, Seon-Yong;Na, Suk-Hyun;Shin, Dong-Soo;Ryu, Byung-Taek
    • Journal of Korean Society of Environmental Engineers
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    • v.38 no.6
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    • pp.317-322
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    • 2016
  • While PFOS sodium salt ($C_8F_{17}SO_3Na$) was not degraded by microorganisms for 28 days, the 4 alternatives were biodegraded at the rates of 21.6% for $C_{25}F_{17}H_{32}S_3O_{13}Na_3$, 20.5% for $C_{15}F_9H_{21}S_2O_8Na_2$, 15.8% for $C_{23}F_{18}H_{28}S_2O_8Na_2$ and 6.4% for $C_{17}F_9H_{25}S_2O_8Na_2$, respectively. The acute toxicity test using Daphnia magna was conducted for 48 hours, the half effective concentration ($EC_{50}$) of PFOS sodium salt ($C_8F_{17}SO_3Na$) was evaluated in 54.5 mg/L. While the 4 alternatives did not show any effect at 500.0 mg/L. The surface tension of the PFOS salt ($C_8F_{17}SO_3Na$) is 46.2 mN/m at a concentration of 500.0 mg/L. While the surface tension of the 4 alternatives was found to be superior to PFOS sodium salt ($C_8F_{17}SO_3Na$). The surface tension of $C_{23}F_{18}H_{28}S_2O_8Na_2$ (20.9 mN/m) has the lowest, followed by $C_{15}F_9H_{21}S_2O_8Na_2$ (23.4 mN/m), $C_{17}F_9H_{25}S_2O_8Na_2$ (27.3 mN/m), $C_{25}F_{17}H_{32}S_3O_{13}Na_3$ (28.2 mN/m). The four kinds of alternatives ($C_{15}F_9H_{21}S_2O_8Na_2$, $C_{17}F_9H_{25}S_2O_8Na_2$, $C_{23}F_{18}H_{28}S_2O_8Na_2$, $C_{25}F_{17}H_{32}S_3O_{13}Na_3$) were found to be superior to PFOS sodium salt ($C_8F_{17}SO_3Na$) in terms of biodegradation, Daphnia sp. acute toxicity and surface tension, and thus they were considered applicable as PFOS alternatives. Especially biodegradation rate of $C_{15}F_9H_{21}S_2O_8Na_2$, $C_{23}F_{18}H_{28}S_2O_8Na_2$ and $C_{25}F_{17}H_{32}S_3O_{13}Na_3$ was relatively high as 15.8~21.6%, and Daphnia sp. acute toxicity and surface tension were considerably superior (surface tension 39~55%) to PFOS sodium salt. Therefore, these alternatives are considered to be available as an alternative of PFOS.

TWISTED QUADRATIC MOMENTS FOR DIRICHLET L-FUNCTIONS

  • LOUBOUTIN, STEPHANE R.
    • Bulletin of the Korean Mathematical Society
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    • v.52 no.6
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    • pp.2095-2105
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    • 2015
  • Given c, a positive integer, we set. $$M(f,c):=\frac{2}{{\phi}(f)}\sum_{{\chi}{\in}X^-_f}{\chi}(c)|L(1,{\chi})|^2$$, where $X^-_f$ is the set of the $\phi$(f)/2 odd Dirichlet characters mod f > 2, with gcd(f, c) = 1. We point out several mistakes in recently published papers and we give explicit closed formulas for the f's such that their prime divisors are all equal to ${\pm}1$ modulo c. As a Corollary, we obtain closed formulas for M(f, c) for c $\in$ {1, 2, 3, 4, 5, 6, 8, 10}. We also discuss the case of twisted quadratic moments for primitive characters.