• Journal of the Microelectronics and Packaging Society
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• v.25 no.3
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• pp.7-12
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• 2018

The effects of Ru deposition temperature and post-annealing conditions on the interfacial adhesion energies of atomic layer deposited (ALD) Ru diffusion barrier layer and Cu thin films for the advanced Cu interconnects applications were systematically investigated. The initial interfacial adhesion energies were 8.55, 9.37, $8.96J/m^2$ for the sample deposited at 225, 270, and $310^{\circ}C$, respectively, which are closely related to the similar microstructures and resistivities of Ru films for ALD Ru deposition temperature variations. And the interfacial adhesion energies showed the relatively stable high values over $7.59J/m^2$ until 250h during post-annealing at $200^{\circ}C$, while dramatically decreased to $1.40J/m^2$ after 500 h. The X-ray photoelectron spectroscopy Cu 2p peak separation analysis showed that there exists good correlation between the interfacial adhesion energy and the interfacial CuO formation. Therefore, ALD Ru seems to be a promising diffusion barrier candidate with reliable interfacial reliability for advanced Cu interconnects.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.8 no.5
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• pp.38-47
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• 2009

This paper aims to evaluate the freeway traffic management Strategy based on exTMS according to traffic situation of freeway. As freeway user's demands increase, we thus need future-oriented and optimized traffic management. So, through improving the existing system and introducing the advanced system, these systems evaluate for not only preparing the application in real world but also preliminary feasibility. To evaluate effects of the traffic management based on exTMS, in this study, shoulder LCS, advanced VMS(assumption in it is improving next-generation system which it can be offering diverse dynamic traffic information), Ramp-metering system are applicated in simulation. In addition, this study evaluates the effect when all proposed systems are applicated, and compare the individual effect of when independent system is applicated, through considering about traffic condition of V/C=0.5, V/C=0.8, V/C=1.2. The study results show that all assumed cases, the travel speed were improved according to the increasing V/C. Furthermore, the results of evaluated the individual system show that the shoulder LCS was found to be the largest effect, and the effect of VMS(detour rate is 11%) is larger than the other cases.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.135-135
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• 2016

차세대 가스터빈 엔진 및 초음속 항공기 내 고온부의 온도가 증가함에 따라, 기존의 초내열합금 기반 소재를 사용하기 어려워지고 있다. 초고온 세라믹스는 높은 기계적 물성, 화학적 안정성 등 우수한 고온 특성을 가지고 있어 기존의 초고온 소재를 대체 할 수 있는 물질로 부상되고 있다. 하지만 기존의 금속 기반 소재 대비 높은 밀도로 인하여 초고온 세라믹 단일체를 비행체 부품에 적용하기에는 어려움이 있다. 이에 초고온 세라믹스와 탄소섬유를 포함하는 세라믹 복합체(Ceramic Matrix Composite, CMC)를 제작하여 동등한 기계적 물성을 보이면서 무게를 감소시키는 연구들이 진행 중에 있다. 초고온 세라믹스가 함침 된 세라믹 복합체의 경우 우수한 내삭마, 내산화 특성을 보이지만, 장시간 고온에 노출되어 탄소 섬유가 드러나게 되면 급격한 산화로 인해 소재 특성의 열화가 진행되는 단점을 가지고 있다. 따라서, 탄소 섬유가 드러나지 않도록 복합체 표면에 코팅층을 형성하여 세라믹 복합체 모재를 보호하는 방법이 활발히 연구되고 있다. 본 연구에서는 진공 플라즈마 용사 공정을 이용하여 다양한 공정조건 하에서 초고온 세라믹 코팅층을 형성하였다. 수십 마이크론 크기 분포를 갖는 HfC 분말을 Ar 유송 가스를 이용하여 플라즈마 화염 내부로 투입하였다. 플라즈마 화염 가스는 Ar 과 H2를 혼합하여 구성되었으며, 분위기 가스로는 N2를 사용하였다. 코팅에 사용된 모재로는 ZrB2 단일체와 SiC가 미량 포함된 HfC 단일체를 사용하였다. 다양한 공정 조건하에서 형성된 HfC 코팅층의 두께, 미세 조직구조를 SEM을 이용하여 관찰하였으며, XRD를 이용하여 형성된 HfC 코팅층의 결정구조를 분석하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.105-105
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• 1999

차세대 기억소자에서는 집접도의 증가, 고속화, 그리고 미세화에 따라 배선간으 최소선폭이 작아지고, 새로운 다층 배선기술이 요구되는 가운데 층간절연막의 재료와 형성기술은 소자의 특성을 향상시켜주는 중요한 요소로서 열적안정성, 저유전율, 평탄화특성 등에 핵심을 두고 연구되고 있다. 본 연구에서는 5인치 p-Si(100) 위에 FTES와 O2를 precursor로 하고 carrier gas를 Ar gas하여 ICP CVD 방법으로 저유전율의 Fluorocarbonated-SiO2 박막을 형성하였다. 0.1-1kW, 13.56MHz인 rf power를 사용하였으며, 증착은 RT에서 5~10분으로 하였다. 형성된 박막은 FTIR(fourier transform infrared), XPS(x-ray photoelectron spectroscopy), 그리고 ellipsopsometer 등을 이용하여 결합모드와 F농도, 균일도 등을 측정하고, I-V와 C-V 측정장치, 그리고 SERM(scanning electrion microscopy) 등을 이용하여 유전상수, 누설전류, dielectric breakdown voltage, 그리고 박막의 stepcoverage를 측정하였다. 제작된 박막의 신뢰성은 열처리에 따른 전기적 특성으로부터 조사하였다. 형성된 fluorocarbonated 박막 결합모드는 Si-F, Si-O, O-C, C-C와 C-F였고 O2:FTES:Ar 유량을 1sccm:10sccm:6sccm으로 하여 증착한 시료에서 유전율은 2.8이었으며, 누설전류밀도는 8$\times$10-9A/cm2, Breakdown voltage는 10MV/cm 이상, 그리고 stepcoverage는 91%로 측정되었다.

• Electronics and Telecommunications Trends
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• v.30 no.4
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• pp.92-101
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• 2015

미래 전장은 정보 지식 기반의 첨단 전력체계를 확충하기 위해 향후 전력구조를 통합, 지휘통제통신(C4I) 체계와 생존성과 통합성이 향상된 전장의 네트워크중심전(NCW) 수행능력을 향상시킬 것이다. 사이버물리시스템(Cyber-Physical Systems: CPS)은 함정전투체계에 적용되고 있는 DDS를 포함하여 국방 M&S의 근간인 Live, Virture, Constructive(L-V-C) 체계의 큰 축을 형성하고 있다. 사물인터넷(Internet of Things: IoT) 기술은 센서네트워크, 통신, Radio Frequency Identification(RFID), Ubiquitous Sensor Network(USN), Machine to Machine(M2M), D2D 기술 및 상황인지, 지능서비스를 위한 정보수집/가공/융합/분석/예측기술을 포괄적으로 포함한 기술로서 미래산업을 이끌어 갈 차세대 선도 기술이며, 특히 군사적으로도 감시정찰 센서네트워크(USN), 견마형로봇, 경전투로봇과 무인기 기술 및 전술정보통신망체계(TICN) 등 첨단 통신네트워크 기술의 전력화 추세는 IoT 기술의 적용영역을 넓혀주고 있다. 감시정찰체계(Sensor)에서는 감시정찰 분야 영상정보 처리, 표적탐지 등과 관련된 IoT 기술 소요와 지휘통제통신(C4I) 체계의 상호운용성, 데이터링크, 지능형 통신체계 등 C4I 관련 IoT 기술 소요 및 타격체계(Shooter)의 내장형 SW 등 유 무인 무기체계 관련 IoT 기술의 소요가 증대될 것으로 예상된다. 본고는 CPS 및 IoT 기술의 군사적 활용방안 및 획득전략에 대한 적용기술 및 발전방향을 살펴본다.

• Electronics and Telecommunications Trends
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• v.37 no.5
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• pp.11-21
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• 2022

GaN (Gallium-Nitride) is a promising candidate material in various radio frequency applications due to its inherent properties including wide bandgap, high carrier concentration, and high electron mobility/saturation velocity. Notably, AlGaN/GaN heterostructure field effect transistor exhibits high operating voltage and high power-density/power at high frequency. In next-generation radar systems, GaN power transistors and monolithic microwave integrated circuits (MMICs) are significant components of transmitting and receiving modules. In this paper, we introduce technological trends for C-/X-/Ku-band GaN MMICs including power amplifiers, low noise amplifiers and switch MMICs, focusing on the status of GaN MMIC fabrication technology and GaN foundry service. Additionally, we review the research for the localization of C-/X-/Ku-band GaN MMICs using in-house GaN transistor and MMIC fabrication technology. We also discuss the results of C-/X-/Ku-band GaN MMICs developed at Defense Materials and Components Convergence Research Department in ETRI.

• Korean journal of applied entomology
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• v.36 no.1
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• pp.43-47
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• 1997

This study was carried out in the laboratory to clarify effects of different temperature of Protopulvinaria mangiferae(Green) on development, survivorship and reproduction. Developmental period of the mango shieldscale from crawlers to preoviposition adult decreased as temperature increased. The threshold temperature andthermal constants for the development of one generation were 11.7"C and 1000.0 day-degrees, respectively. At25$^{\circ}$C and 30$^{\circ}$C, survival rate from egg to preoviposition adult were 82% and 6096, respectively. Hatchability ofeggs was more than 99% at both condition. The reproductive period overaged 50 days(2SnC) and 33 days(30$^{\circ}$C). After mature adult began to reporduce, and more than 50% of the crawlers emerged during the firsthalf of their life time. The net reproduction rate per generation(R), mean length of a generation0 and intrinsicrate of natural increase(r, ) were higher at 25$^{\circ}$C than at 30"C, and the values measured at 25$^{\circ}$C were 132.6, 76.2 and 0.064/female/day, respectively.

• Journal of Advanced Navigation Technology
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• v.5 no.1
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• pp.37-44
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• 2001

In this paper, the channel environment for next generation ITS/DSRC which is developed for 10Mbps is modeled with ray tracing technique and, we analyzed BER of OFDM which has an advantage over reducing the effect of ISI with multi-carrier and guard time, occuping bandwidth on 6-ray channel environment. Also, we applied the one-tap equalizer to improve the performance of BER. In case only OFDM is applied with 32 sub-carrier, the result of BER is under $10^{-6}$ from 10 to 100m if $E_b/N_0$ is more than 23dB. But in case OFDM and one-tap equalizer are applied with 32 sub-carrier, $E_b/N_0$ is required of about 17dB to achieve BER under $10^{-6}$.

• Journal of Satellite, Information and Communications
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• v.11 no.1
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• pp.6-11
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• 2016

In this paper, we have analyzed the effects of co-channel, adjacent-channel, and the human shield(Body Blockage) for wideband WLAN based on the IEEE802.11n 40MHz channel bandwidth required for high speed digital signage service. Simulation results show that wideband WLAN can be operated with 78 interferers over 63m distance in co- channel, 80 interferer over 61m distance in adjacent channel. By applying the mitigation method for reducing the interference, we have confirmed that protection distance is improved to 51m using beamforming, and 40m using cognitive radio in co-channel interference. Also body blockage interference is reduced using adaptive channel bandwidth, C/I ratio, beamforming, power control mitigation methodology.

• The Journal of Society for e-Business Studies
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• v.12 no.1
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• pp.123-133
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• 2007

With the emergence of Semantic Web and Web 2.0, the paradigm shift of the Web is on resource-centered services. That is, the focus now moves from having just rich resources to the meta-information of describing the resources. The relevant standards, RDF(Resource Description Language) and Topic Maps, of describing the meta-information are defined and adopted by W3C and ISO respectively. Describing meta-information in such a XML form could be burdensome to participants. Semantic Wiki extended from 1)WikiWikiWeb is proposed to deal with the problem. It enables users to generate RDF meta-information about Wiki pages with simple usages of the grammar. We discuss the way of improving interoperability between Topic Maps-based semantic Wiki papges and RDF-based ones. The method proposed by RDFTM task force is present with the usage of high-level Wiki grammar for facilitating low-level transformation.