• 비파괴검사학회지
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• 제34권6호
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• pp.457-466
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• 2014

This paper presents an analytic and numerical simulation of the generation and propagation of pico-second ultrasound with nano-scale wavelength, enabling the production of bulk waves in thin films. An analytic model of laser-matter interaction and elasto-dynamic wave propagation is introduced to calculate the elastic strain pulse in microstructures. The model includes the laser-pulse absorption on the material surface, heat transfer from a photon to the elastic energy of a phonon, and acoustic wave propagation to formulate the governing equations of ultra-short ultrasound. The excitation and propagation of acoustic pulses produced by ultra-short laser pulses are numerically simulated for an aluminum substrate using the finite-difference method and compared with the analytical solution. Furthermore, Fourier analysis was performed to investigate the frequency spectrum of the simulated elastic wave pulse. It is concluded that a pico-second bulk wave with a very high frequency of up to hundreds of gigahertz is successfully generated in metals using a 100-fs laser pulse and that it can be propagated in the direction of thickness for thickness less than 100 nm.

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2002년도 추계총회 및 연구발표회 초록집
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• pp.98.1-98
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• 2002

• 한국재료학회:학술대회논문집
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• 한국재료학회 2002년도 추계학술발표강연 및 논문개요집
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• pp.92-92
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• 2002

• ETRI Journal
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• 제36권2호
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• pp.317-320
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• 2014

A balanced RF duplexer with low interference in an extremely narrow bandgap is proposed. The Long-Term Evolution band-7 duplexer should be designed to prevent the co-existence problem with the WiFi band, whose fractional bandgap corresponds to only 0.7%. By implementing a hybrid bulk acoustic wave (BAW) structure, the temperature coefficient of frequency (TCF) value of the duplexer is successfully reduced and the suppressed interference for the narrow bandgap is performed. To achieve an RF duplexer with balanced Rx output topology, we also propose a novel balanced BAW Rx topology and RF circuit block. The novel balanced Rx filter is designed with both lattice- and ladder-type configurations to ensure excellent attenuation. The RF circuit block, which is located between the antenna and the Rx filter, is developed to simultaneously function as a balance-tounbalance transformer and a phase shift network. The size of the fabricated duplexer is as small as $2.0mm{\times}1.6mm$. The maximum insertion loss of the duplexer is as low as 2.4 dB in the Tx band, and the minimum attenuation in the WiFi band is as high as 36.8 dB. The TCF value is considerably lowered to $-16.9ppm/^{\circ}C$.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.56-56
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• 2003

최근 정보통신 분야의 급격한 발달로 인하여 무선통신에 사용되는 주파수 영역 또한 계속 높아짐에 따라 대역통과 필터 소자의 삽입 손실, 소비 전력, 크기, MMIC화에 대한 많은 연구가 진행되고 있다 압전 현상을 이용한 박막형 공진기가 이러한 요구를 충족시키고, 현재의 SAW filter를 대체할 소자로 떠오르고 있다. 본 실험에서는 단결정 미세 구조를 만들 수 있고, 압전 효과 또한 우수하며, Surface Micromachining보다 비교적 제조 공정이 간단하고 선택적 에칭이 가능한 Bulk Micromachining을 이용하여 Si$_3$N$_4$ Membrane을 이용한 중심주파수 5.2GHz인 두께 진동모드 Film Bulk Acoustic Wave Resonator(FBAR)를 제작하고 공진기의 고주파 특성을 평가하였다. Membrane구조 형성을 위해 Backside면인 Si$_3$N$_4$, Si은 RIE(Reactive Ion Etching)와 선택적 에칭용액인 KOH로 각각 에칭하여 Membrane을 갖는 구조로 중심주파수 5.2GHz인 두께 진동모드 FBAR를 설계 및 제조하였다. 체적 탄성파 공진 현상은 r.f Magnetron Sputtering법으로 증착한 AIN 압전박막과 Mo전극으로부터 발생 가능하였다. 본 연구에서는 0.9$\mu\textrm{m}$-Si$_3$N$_4$ Membrane을 이용해 FBAR를 제작/평가하고, RIE을 통해 Membrane을 제거해 가면서 공진기의 특성 즉, Quality factor와 유효전기기계결합계수(K$_{eff}$) 및 S parameter특성을 비교 측정해 보았다. 측정해본 결과 Membrane Free일때가 훨씬더 공진 특성이 우수함을 볼 수 있다

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제54권7호
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• pp.308-314
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• 2005

The 2 GHz film bulk acoustic wave resonator(FBAR), one of the most necessary device of the next generation mobile communication system, consisted of solidly mounted resonator(SMR) structure using Brags reflector, was researched in this paper The FBAR applied SiO$_{2}$ and W had large difference of the acoustic impedance to reflector Al to electrode and ZnO to piezoelectric layer. Specially, the FBAR applied the two-step deposition method to improve the c-axis orientation and increase reproducibility of the fabrication device had good performance. The electrical properties of plasma such as impedance, resistance, reactance, $V_{pp},\;I{pp}$, VSWR and phase difference of voltage and current, was analyzed and measured by RF sensor with the variable experiment process factors such as gas ratio, RF power and base vacuum level about concerning the thickness, c-axis orientation, adhesion and roughness. The FBAR device about the optimum condition resulted reflection loss(S$_{11}$) of -17 dB, resonance frequency of 1.93 GHz, electric-mechanical coefficient(k$_{eff}$) of 2.38 $\%$ and Qualify factor of 580. It was seen better qualify than the common dielectric filter at present and expected on business to the filter device of 2 GHz bandwidth with the MMIC technology.

• 비파괴검사학회지
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• 제36권1호
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• pp.9-17
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• 2016

The elastic modulus of a 3D-printed Kelvin foam plate is investigated by measuring the acoustic wave velocity of 1 MHz ultrasound. An isotropic tetrakaidecahedron foam with 3 mm unit cell is designed and printed layer upon layer to fabricate a Kelvin foam plate of 14 mm thickness with a 3D CAD/printer using ABS plastic. The Kelvin foam plate is completely filled with paraffin wax for impedance matching, so that the acoustic wave may propagate through the porous foam plate. The acoustic wave velocity of the foam plate is measured using the time-of-flight (TOF) method and is used to calculate the elastic modulus of the Kelvin foam plate based on acousto-elasticity. Finite element method (FEM) and micromechanics is applied to the Kelvin foam plate to calculate the theoretical elastic modulus using a non-isotropic tetrakaidecahedron model. The predicted elastic modulus of the Kelvin foam plate from FEM and micromechanics model is similar, which is only 3-4% of the bulk material. The experimental value of the elastic modulus from the ultrasonic method is approximately twice as that of the numerical and theoretical methods because of the flexural deformation of the cell edges neglected in the ultrasonic method.

• 한국소음진동공학회논문집
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• 제23권2호
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• pp.167-175
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• 2013

The wave propagation characteristics of an acoustic metamaterial composed of periodically repeated one-dimensional Helmholtz resonator array was investigated considering the effects of dimensional changes of the resonator geometry on the transmission coefficient and band gap. The effective impedance and transmission coefficient of the acoustic metamaterials are obtained based on the acoustic transmission line method. The designed acoustic metamaterials exhibit band gaps and negative bulk modulus that are non-existent properties in the nature. The band gap of the acoustic metamaterial is strongly dependent on the geometry parameters of Helmholtz resonators and lattice spacing. Also, a new type of metamaterial that is periodically constructed with two different resonators was designed to open the local resonance band gap without change of Bragg scattering.

• The Journal of the Acoustical Society of Korea
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• 제25권2E호
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• pp.49-55
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• 2006

Compressional wave velocity (Vp), shear wave velocity (Vs), elastic and physical properties, and electrical resistivity for two core sediments obtained from Southeastern Yellow Sea Mud (SEYSM) were measured and computed. The sediments consist of homogeneous mud (mostly silt and clay) with shells and shell fragments. As a result, the mean grain size is uniform ($7.5-8.5{\Phi}$ throughout the core sediments. However, physical properties such as wet bulk density and porosity show slightly increasing and decreasing patterns with depth, compared to the mean grain size. The compressional (about 1475 m/s in average) and shear wave (about 60 m/s in average) velocities with depth accurately reflect the pattern of wet bulk density and porosity. Electrical resistivity is more closely correlated with compressional wave velocity than physical properties. The computed Vp/Vs and Poisson's ratios are relatively higher (more than 10) and lower (approximately 0.002) than Hamilton's (1979) data, respectively, suggesting the typical characteristics of soft and fully water-saturated marine sediments. Thus, the Vp/Vs ratio in soft and unconsolidated sediments is not likely sufficient to examine lithology and sediment properties. Relationships between the elastic constant and physical properties are correlated well. The elastic constants (Poisson's ratio, bulk modulus, shear modulus) given in this paper can be used to characterize soft marine sediments saturated with seawater.

• 한국결정학회:학술대회논문집
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• 한국결정학회 2007년도 추계학술연구발표회 및 정기총회
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• pp.40-40
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• 2007