• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.80-81
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• 2012

Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

• Korean Journal of Materials Research
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• v.5 no.1
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• pp.42-54
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• 1995

$Ta_2O_5$ thin film IS a promising material for the high dielectrics of ULSI DRAM. In this study, $Ta_2O_5$ thin film was grown on p-type( 100) Si wafer by thermal metal organic chemical vapo deposition ( MCCVD) method and the effect of operating varialbles including substrate temperature( $T_s$), bubbler temperature( $T_ \sigma$), reactor pressure( P ) was investigated in detail. $Ta_2O_5$ thin film were analyzed by SEM, XRD, XPS, FT-IR, AES, TEM and AFM. In addition, the effect of various anneal methods was examined and compared. Anneal methods were furnace annealing( FA) and rapid thermal annealing( RTA) in $N_{2}$ or $O_{2}$ ambients. Growth rate was evidently classified into two different regimes. : (1) surface reaction rate-limited reglme in the range of $T_s$=300 ~ $400 ^{\circ}C$ and (2: mass transport-limited regime in the range of $T_s$=400 ~ $450^{\circ}C$.It was found that the effective activation energies were 18.46kcal/mol and 1.9kcal/mol, respectively. As the bubbler temperature increases, the growth rate became maximum at $T_ \sigma$=$140^{\circ}C$. With increasing pressure, the growth rate became maximum at P=3torr but the refractive index which is close to the bulk value of 2.1 was obtained in the range of 0.1 ~ 1 torr. Good step coverage of 85. 71% was obtained at $T_s$=$400 ^{\circ}C$ and sticking coefficient was 0.06 by comparison with Monte Carlo simulation result. From the results of AES, FT-IR and E M , the degree of SiO, formation at the interface between Si and TazO, was larger in the order of FA-$O_{2}$ > RTA-$O_{2}$, FA-$N_{2}$ > RTA-$N_{2}$. However, the $N_{2}$ ambient annealing resulted in more severe Weficiency in the $Ta_2O_5$ thin film than the TEX>$O_{2}$ ambient.

• Korean Journal of Environment and Ecology
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• v.29 no.6
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• pp.923-928
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• 2015

This study was carried out to evaluate the physicochemical properties of different types of topsoil in forest ecosystems by damage pattern and analyse the possibility of using the topsoil as a planting ground construction material. There were 72 samples from 36 sites of 12 damaged areas and 36 sites of 12 non-damaged areas. The results showed that the physicochemical properties of topsoil from non-damaged areas of forest ecosystems were on an average clay loam~sandy loam in soil texture, showing $0.95{\sim}1.10Mg/m^3$ in soil bulk density, $35.7{\sim}44.0m^3/m^3$ in solid phase, 56.0~64.3 in soil porosity, 8.4~35.8% in aggregate stability, 5~13 mm in soil hardness, 5.3~6.1 in pH, 0.14~0.65 dS/m in EC, 0.28~0.42% in T-N, $14{\sim}22cmol^+/kg$ in CEC, $0.15{\sim}0.31cmol^+/kg$ in Ex. $K^+$, $2.07{\sim}2.84cmol^+/kg$ in Ex. $Ca^{2+}$, $0.45{\sim}1.97cmol^+/kg$ in Ex. $Mg^{2+}$, 17~96 mg/kg in Av. $P_2O_5$ and 3.2~5.6% in OM. On the other hand, damaged areas were on an average clay loam~loamy sand in soil texture, showing $1.54{\sim}1.75Mg/m^3$ in soil bulk density, $52.8{\sim}58.0m^3/m^3$ in solid phase, 42.0~47.2 in soil porosity, 4.2~22.5% in aggregate stability, 13~25 mm in soil hardness, 4.8~5.5 in pH, 0.13~0.62 dS/m in EC, 0.02~0.12% in T-N, $5{\sim}15cmol^+/kg$ in CEC, $0.11{\sim}0.18cmol^+/kg$ in Ex. $K^+$, $0.45{\sim}2.36cmol^+/kg$ in Ex. $Ca^{2+}$, $0.39{\sim}0.96cmol^+/kg$ in Ex. $Mg^{2+}$, 15~257 mg/kg in Av. $P_2O_5$ and 0.4~2.2% in OM. After conducting a comparison of physicochemical characteristics of non-damaged forest area and damaged areas, it was found that the physicochemical characteristics of damaged areas were more deteriorated compared to that of non-damaged areas. Therefore, it is judged that it is necessary to establish countermeasures for the conservation and management of the damaged areas for topsoil recycling in the future.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.28 no.1
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• pp.35-42
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• 2018

Objectives: The objectives of this study are to research the usage characteristics of asbestos-containing building materials and to conduct exposure risk assessment by applying no. 2016-230 "Methods of Risk Assessment of Asbestos-Containing Buildings" from the Ministry of Environment. Methods: One hundred buildings located in the Seoul and Gyeonggi-Incheon area were chosen, with 29 in Seoul, 20 in Incheon, and 51 in Gyeonggi-do Province. The year of construction was divided between three buildings in the 1970s, 11 buildings in the 1980s, 42 buildings in the 1990s, and 44 buildings in the 2000s. The bulk samples were analyzed by using a polarizing microscope after a pre-process using a stereomicroscope in a hood with an HEPA filter. This study defined ACMs(asbestos-containing materials) as asbestos when the content percentage was over 1% in the analysis result. Methods and standards of risk assessment of asbestos-containing building materials were conducted by refering to no. 2016-230 "Method of Risk Assessment of Asbestos-Containing Buildings" from the Ministry of Environment. The risk of exposure to ACMs was rated by a score based on three categories(high, middle, low risk of asbestos exposure). Results: In this study, 30 of the 100 buildings and 36 of the 416 bulk samples(8.6%) were found to have had asbestos. Asbestos was detected at a high rate, in 18 out of 42, in buildings constructed in the 1990s and at the lowest rate(7 out of 44) for buildings constructed in the 2000s. As a result of the evaluation according to no. 2016-230 "Method of Risk Assessment of Asbestos-Containing Buildings" of the Ministry of Environment, the risk assessment level of two asbestos-containing building materials was found to be "Medium", and 28 buildings materials were found to be at the "Low" level. Conclusion: As asbestos is regulated by the government, it is required to conduct active management and implemention by introducing methods of risk assessment of asbestos exposure that are supported by data from various situations. In the case of buildings owned by individuals, building owners should be aware of the risk of exposure to asbestos.

• Journal of Bio-Environment Control
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• v.31 no.4
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• pp.497-503
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• 2022

This study was conducted to investigate the horticultural media + decomposed granite + reused rock wool in the following mixing ratio: Control = 100:0, M1 = 80:0:20, M2 = 60:30:10, M3 = 40:30:30, M4 = 30:40:30, M5 = 0:50:50 (reused rockwool : decomposed granite : horticultural media) and develop the physicochemical properties and the growth of 'Sulhyang' strawberry runner plant. In the physical aspect of the horticultural media, statistical differences were recognized that the bulk density and particle density were lower in the control and M1. But the bulk density and particle density were high in the M3, M4, and M5, because it had high mixing ratio between recycled rock wool and decomposed granite. EAW and WBC showed a similar tendency. The air porosity and total porosity were higher in control and M1 than M3, M4, M5. Exchangeable cation (K⁺, Ca²⁺, Na⁺, Mg²⁺) and base replacement capacity (CEC) were higher in control and M1, than M2, M3, M4, and M5. As a result of the cultivation of 'Sulhyang' runner plant, the plant length was long in M2, 32.1 cm and smaller than M5 to 28.4 cm. However, if the crown diameter, which is the growth indicator of the runner plant, all 6 treatments were formed 11.23 mm-12.03 mm, which is considered to be suitable for the growth of the runner plant. There wasn't a statistical difference between the weight and dry weight of the root. As a result, the growth difference of the seedlings by the horticulture media was similar. Therefore, considering the physical properties of the horticultural media, it was judged that the air porosity and total porosity would be improved when the recycled rock wool and the decomposed granite were properly mixed rather than the use of the horticultural media as a single medium, which would be advantageous for irrigation management.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.19 no.1
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• pp.8-15
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• 2009

This study was examined to find out asbestos exposure level the factors which affected the level at asbestos abatement sites. We visited a total of thirteen building demolition sites(3 apartments, 3 schools, 4 stores, and 3 houses) were visited to collect samples and related data from August to November, 2006. The results of this study were as follows 1. The results of an analysis of bulk samples to identify types of asbestos at the asbestos abatement sites showed that the kinds of the asbestos detected were chrysotile by 50.0%, were tremolite by 2.6%, and were the contents of chrysotile by 3 to 20%. 2. The geometric mean concentration of asbestos was 0.007 f/cc(range 0.001-0.34 f/cc) and its geometric standard deviation was 5.83. Of the samples, however, 12 exceeded the Korean Occupational Exposure Limit(0.1f/cc). 3. Of the materials, textile material had the highest concentration with geometric mean of 0.016 f/cc. When asbestos-containing materials were removed using T type tools, the geometric mean concentration of asbestos was 0.061 f/cc. The level by this method was much higher than by other removal methods. In analysis by the type of building, the geometric mean concentration of asbestos in stores was 0.042 f/cc and was higher than in other buildings. 4. The Poisson regression analysis was applied to find out the factors that affect the airborne asbestos concentration. As a result of the analysis, removal using a T type tool was the most important factor affecting the asbestos concentration(p<0.01). In conclusion, the airborne asbestos concentration(geometric mean) in asbestos abatement sites was 0.007 f/cc(0.001~0.34 f/cc), and 12(14.6%) of all samples were over the 0.1 f/cc. These results showed that asbestos abatement workers have been exposed to the high level of airborne asbestos because they have not been keeping asbestos removal rule. In accordance with increases of the number of building demolition sites, the better government regulation on asbestos abatement methods should be made and be performed well at building demolition sites.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.28 no.1
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• pp.9-18
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• 2015

In this paper, we verify the optimal topology design for heat conduction problems in steady stated which is obtained numerically using the adjoint design sensitivity analysis(DSA) method. In adjoint variable method(AVM), the already factorized system matrix is utilized to obtain the adjoint solution so that its computation cost is trivial for the sensitivity. For the topology optimization, the design variables are parameterized into normalized bulk material densities. The objective function and constraint are the thermal compliance of the structure and the allowable volume, respectively. For the experimental validation of the optimal topology design, we compare the results with those that have identical volume but designed intuitively using a thermal imaging camera. To manufacture the optimal design, we apply a simple numerical method to convert it into point cloud data and perform CAD modeling using commercial reverse engineering software. Based on the CAD model, we manufacture the optimal topology design by CNC.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.21 no.2
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• pp.92-97
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• 2011

Landfill is the main treatment method for bottom-ash because it has not only an irregular particle size and ingredients but also not proper recycling treatment. The aim of this study is to raise recycling rate of bottom-ash(nonplasticity pulverulent) and for the purpose of alternatives of clay to investigate the properties of Bottom-ash (B/A)-Hard Clay (H/C) bodies with controlled interfacial chemistry properties. After investigating the sedimentation height of suspensions with controlled pH, it was discovered that there was no hetero-polar aggregation for mixed slips because hard clay and bottom-ash had similar interfacial chemistry properties. Also, bulk density, water absorption, and microstructure properties of each pellet was observed that made by silp casting method and manufactured at $50^{\circ}C$ intervals between $1000{\sim}1250^{\circ}C$. As a result, dispersed slip of clay and bottom ash are possible for slip casting and plastic forming process because they exhibit Bingham plastic behavior. Products that made by slip with dispersed clay and bottom ash are not only suitable for KS L 4201 and KS L 1001 at $1250^{\circ}C$ but it is also possible to apply for ceramic and sanitary ware because specific gravity was about 15 % lighter than general ceramic materials.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.154.2-154.2
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• 2016

In this work, we introduce a solution-processed CdS interlayer for use in inverted bulk heterojunction (BHJ) solar cells, and compare this material to a series of standard organic and inorganic cathode interlayers. Different combinations of solution-processed CdS, ZnO and conjugated polyelectrolyte (CPE) layers were compared as cathode interlayers on ITO substrates to construct inverted solar cells based on $PTB7:PC_{71}BM$ and a $P3HT:PC_{61}BM$ as photoactive layers. Introduction of a CdS interlayer significantly improved the power conversion efficiency (PCE) of inverted $PTB7:PC_{71}BM$ devices from 2.0% to 4.9%, however, this efficiency was still fairly low compared to benchmark ZnO or CPE interlayers due to a low open circuit voltage ($V_{OC}$), stemming from the deep conduction band energy of CdS. The $V_{OC}$ was greatly improved by introducing an interfacial dipole (CPE) layer on top of the CdS layer, yielding outstanding diode characteristics and a PCE of 6.8%. The best performing interlayer, however, was a single CPE layer alone, which yielded a $V_{OC}$ of 0.727 V, a FF of 63.2%, and a PCE of 7.89%. Using $P3HT:PC_{61}BM$ as an active layer, similar trends were observed. Solar cells without the cathode interlayer yielded a PCE of 0.46% with a poor $V_{OC}$ of 0.197 V and FF of 34.3%. In contrast, the use of hybrid ZnO/CPE layer as the cathode interlayer considerably improved the $V_{OC}$ of 0.599 V and FF of 53.3%, resulting the PCE of 2.99%. Our results indicate that the CdS layer yields excellent diode characteristics, however, performs slightly worse than benchmark ZnO and CPE layers in solar cell devices due to parasitic absorption below 550 nm. These results suggest that the hybrid inorganic/organic interlayer materials are promising candidates as cathode interlayers for high efficiency inverted solar cells through the modification of interface contacts.

• Asian-Australasian Journal of Animal Sciences
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• v.29 no.3
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• pp.444-454
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• 2016

This study was designed to examine the characteristics of sawdust and cocopeat bedding materials, including physicochemical properties (Exp. I) and on-farm trial (Exp. II). In Exp. I, the proportion of particle size was in the order of sawdust>cocopeat India>cocopeat Vietnam (p<0.05), and cocopeat contained higher proportion of small particles ($250{\mu}m$+below $250{\mu}m$) than sawdust, causing a dust production problem. Bulk density was cocopeat India>cocopeat Vietnam>sawdust (p<0.05), thus cocopeat treatments showed 4.4 times higher bedding cost than sawdust. The water absorption rates were 702.0% in cocopeat India, 678.3% in cocopeat Vietnam, and 444.0% in sawdust, showing cocopeat had approximately 1.5 times higher water absorption rate than sawdust. Moisture evaporation rates after 12 h of air blowing (2.00 m/s) were higher (p<0.05) in cocopeat Vietnam (80.4%) than sawdust (71.2%) and cocopeat India (72.8%). In vitro ammonia emissions were higher (p<0.05) in sawdust ($2.71mg/m^2/h$) than cocopeat India ($1.59mg/m^2/h$) and Vietnam ($1.22mg/m^2/h$), and total ammonia emissions were higher (p<0.05) in sawdust ($37.02mg/m^2$) than cocopeat India ($22.51mg/m^2$) and Vietnam ($13.60mg/m^2$). In Exp. II, an on-farm trial was conducted with 48 Hanwoo cattle in 16 pens using the same bedding materials as in Exp. I, with fan (blowing 2.00 m/s) and no fan treatments, and feed bunk side (FB) and water supply side (WS) within a pen (4.5 m, $width{\times}9.0m$, length). Beddings were replaced with fresh bedding materials when moisture concentrations were over 65%. No interactions among treatments were detected for moisture concentration and increment rates, and ammonia concentrations, but a significant effect was observed (p<0.01) for each of the treatments. Both concentrations and increment rate of moisture were higher (p<0.01) in the beddings without fan than with fan. Moisture concentrations and increment rate within a pen were also higher (p<0.01) in FB than WS. Thus, the whole no-fan-FB and sawdust-fan-FB were replaced with fresh bedding material between 4 to 5 experimental weeks. The ammonia concentrations and pH of beddings were not significantly different among treatments. Therefore, using cocopeat bedding with a blowing fan can extend twice the bedding utilization period, and WS within a pen showed twice the bedding-life compared to FB. Despite the outstanding characteristics of cocopeat compared with sawdust, using cocopeat as an alternative for sawdust bedding is not recommended for cattle management, considering it has 4.4 times higher bedding cost and a dust production problem.