• Title/Summary/Keyword: Bulk AlN

Search Result 82, Processing Time 0.038 seconds

Fabrication of GHz-Band FBAR with AIN Film on Mo/SiO2/Si(100) Using MOCVD (Mo/SiO2/Si(100)기판 위에 MOCVD법으로 성장시킨 AIN박막이용 GHz대역의 FBAR제작에 관한 연구)

  • Yang, Chung-Mo;Kim, Seong-Kweon;Cha, Jae-Sang;Park, Ku-Man
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
    • /
    • v.20 no.4
    • /
    • pp.7-11
    • /
    • 2006
  • In this paper, it is reported that film-bulk-acoustic resonator with high c-axis oriented AIN film on $Mo/SiO_2/Si(100)$ using metal-organic-chemical-vapor deposition was fabricated. The resonant frequency and anti-resonant frequency of the fabricated resonator were observed with 3.189[GHz] and 3.224[GHz], respectively. The quality factor and the effective electromechanical coupling coefficient(${k_{eff}}^2$) were measured with 24.7 and 2.65[%], respectively. The conditions of AIN deposition were substrate temperature of $950[^{\circ}C]$, pressure of 20Torr, and V-III ratio of 25000. A high c-axis oriented AIN film with $4{\times}10^{-5}[\Omega{cm}]$ resistivity of Mo bottom electrode and $4[^{\circ}]$ of AIN(0002) full-width at half-maximum(FWHM) on $Mo/SiO_2/Si(100)$ was grown successfully. The FWHM value of deposited AIN film is useful for the RF band pass filter specification for GHz-band wireless local area network.

Effect of Processing Parameters on the Densification of Carbon/Carbon Composite by Isothermal Low-Pressure Chemical Vapor Infiltration (등온 저압화학기상침투법에 의한 탄소/탄소 복합재료의 치밀화에 대한 제조공정변수의 영향)

  • Park, H.D.;Ahn, C.W.;Cho, K.;Yoon, B.Y.;Kim, K.S.
    • Korean Journal of Materials Research
    • /
    • v.4 no.3
    • /
    • pp.259-267
    • /
    • 1994
  • The effect of processing parameters, temperature, gas concentration, gas flow rate and pressure, were studied on the densification of carbon/carbon composites using a Robust design method in isothermal low-pressure chemical vapor infiltration with a gas system of $C_3H_8-N_2$ After one time of isothermal low-pressure chemical vapor infiltrat.ion, the bulk density of carbon/carbon composites in creased up to 1-9% and apparent porosity of the composites decreased down to 20-50%. ANOVA analysis of the experiment.al data revealed that the important parameters of isothermal lowpressure chemical vapor infiltration were temperature, gas concentration and gas flnw rate. 'There was almost no ~ f f e c t on densification by pressure and interaction between each parameters. In t, he present experimental conditions, the highest bulk density was obtained at $1100^{\circ}C$ temperature, 100% $C_3H_8$, concentration, 100 SCCM flow rate and 5 torr pressure.

  • PDF

Characteristics of ZnO thin films by RF magnetron sputtering for FBAR application (RF 마그네트론 스퍼터링을 이용한 FBAR 소자용 ZnO 박막의 특성)

  • Kim, S.Y.;Lee, N.H.;Kim, S.G.;Park, S.H.;Jung, M.G.;Shin, Y.H.;Ji, S.H.;Lee, D.C.
    • Proceedings of the KIEE Conference
    • /
    • 2003.07c
    • /
    • pp.1523-1525
    • /
    • 2003
  • Due to the rapid development of wireless networking system, researches on the communication devices are mainly focus on microwave frequency devices such as filters, resonators, and phase shifters. Among them, Film bulk acoustic resonator (FBAR) has been paid extensive attentions for their high performance. In this research, ZnO thin films were deposited by RF-magnetron sputtering on Al/$SiO_2$/Si wafer and then crystalline properties and surface morphology were examined. To measure crystalline structure and surface morphology X-ray diffraction (XRD) and Scanning Electron Microscope (SEM) were employed. It was showed that crystalline properties of ZnO thin films were strongly dependant on the deposition conditions. As increasing the deposition temperature and the deposition pressures, the peak intensities of ZnO(002) plane were increased until $300^{\circ}C$, then decreased rapidly. At the sputtering conditions of RF power of 213 W and working pressure of 15 m Torr, ZnO film had excellent c-axis orientation, surface morphology, and adhesion to the substrate. In conclusion we optimized smooth surface with very small grains as well as highly c-axis oriented ZnO film for FBAR applications.

  • PDF

Ion Transmittance of Anodic Alumina for Ion Beam Nano-patterning (이온빔 나노 패터닝을 위한 양극산화 알루미나의 이온빔 투과)

  • Shin S. W.;Lee J-H;Lee S. G.;Lee J.;Whang C. N.;Choi I-H;Lee K. H.;Jeung W. Y.;Moon H.-C.;Kim T. G.;Song J. H.
    • Journal of the Korean Vacuum Society
    • /
    • v.15 no.1
    • /
    • pp.97-102
    • /
    • 2006
  • Anodic alumina with self-organized and ordered nano hole arrays can be a good candidate of an irradiation mask to modify the properties of nano-scale region. In order to try using porous anodic alumina as a mask for ion-beam patterning, ion beam transmittance of anodic alumina was tested. 4 Um thick self-standing AAO templates anodized from Al bulk foil with two different aspect ratio, 200:1 and 100:1, were aligned about incident ion beam with finely controllable goniometer. At the best alignment, the transmittance of the AAO with aspect ratio of 200:1 and 100:1 were $10^{-8}\;and\;10^{-4}$, respectively. However transmittance of the thin film AAO with low aspect ratio, 5:1, were remarkably improved to 0.67. The ion beam transmittance of self-standing porous alumina with a thickness larger than $4{\mu}m$ is extremely low owing to high aspect ratio of nano hole and charging effect, even at a precise beam alignment to the direction of nano hole. $SiO_2$ nano dot array was formed by ion irradiation into thin film AAO on $SiO_2$ film. This was confirmed by scanning electron microscopy that the $SiO_2$ nano dot array is similar to AAO hole array.

Geoacoustic characteristics of Quaternary stratigraphic sequences in the mid-eastern Yellow Sea (황해 중동부 제4기 퇴적층의 지음향 특성)

  • Jin, Jae-Hwa;Jang, Seong-Hyeong;Kim, Seong-Pil;Kim, Hyeon-Tae;Lee, Chi-Won;Chang, Jeong-Hae;Choi, Jin-Hyeok;Ryang, Woo-Heon
    • The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
    • /
    • v.6 no.2
    • /
    • pp.81-92
    • /
    • 2001
  • According to analyses of high-resolution seismic profiles (air gun, sparker, and SBP) and a deep-drill core(YSDP 105) in the mid-eastern Yellow Sea, stratigraphic and geoacoustic models have been established and seismo-acoustic modeling has been fulfilled using ray tracing of finite element method. Stratigraphic model reflects seismo-, litho-, and chrono-stratigraphic sequences formed under a significant influence of Quaternary glacio-eustatic sea-level fluctuations. Each sequence consists of terrestrial to very-shallow-marine coarse-grained lowstand systems tract and tidal fine-grained transgressive to highstand systems tract. Based on mean grain-size data (121 samples) of the drill core, bulk density and P-wave velocity of depositional units have been inferred and extrapolated down to a depth of the recovery using the Hamilton's regression equations. As goo-acoustic parameters, the 121 pairs of bulk density and P-wave velocity have been averaged on each unit of the stratigraphic model. As a result of computer ray-tracing simulation of the subsurface strata, we have found that there are complex ray paths and many acoustic-shadow zones owing to the presence of irregular layer boundaries and low-velocity layers.

  • PDF

A Study of the Photoluminescence of ZnO Thin Films Deposited by Radical Beam Assisted Molecular Beam Epitaxy (라디칼 빔 보조 분자선 증착법 (Radical Beam Assisted Molecular Beam Epitaxy) 법에 의해 성장된 ZnO 박막의 발광 특성에 관한 연구)

  • Suh, Hyo-Won;Byun, Dong-jin;Choi, Won-Kook
    • Korean Journal of Materials Research
    • /
    • v.13 no.6
    • /
    • pp.347-351
    • /
    • 2003
  • II-Ⅵ ZnO compound semiconductor thin films were grown on $\alpha$-Al$_2$O$_3$(0001) single crystal substrate by radical beam assisted molecular beam epitaxy and the optical properties were investigated. Zn(6N) was evaporated using Knudsen cell and O radical was assisted at the partial pressure of 1$\times$10$^{4}$ Torr and radical beam source of 250-450 W RF power. In $\theta$-2$\theta$ x-ray diffraction analysis, ZnO thin film with 500 nm thickness showed only ZnO(0002)and ZnO(0004) peaks is believed to be well grown along c-axis orientation. Photoluminescence (PL) measurement using He-Cd ($\lambda$=325 nm) laser is obtained in the temperature range of 9 K-300 K. At 9 K and 300 K, only near band edge (NBE) is observed and the FWHM's of PL peak of the ZnO deposited at 450 RF power are 45 meV and 145 meV respectively. From no observation of any weak deep level peak even at room temperature PL, the ZnO grains are regarded to contain very low defect density and impurity to cause the deep-level defects. The peak position of free exciton showed slightly red-shift as temperature was increased, and from this result the binding energy of free exciton can be experimentally determined as much as $58\pm$0.5 meV, which is very closed to that of ZnO bulk. By van der Pauw 4-point probe measurement, the grown ZnO is proved to be n-type with the electron concentration($n_{e}$ ) $1.69$\times$10^{18}$$cm^3$, mobility($\mu$) $-12.3\textrm{cm}^2$/Vㆍs, and resistivity($\rho$) 0.30 $\Omega$$\cdot$cm.

Gahnite-Sillimanite-Garnet Mineral Assemblage from the Host Rocks of the Cannington Deposit, North Queensland, Australia: Relationship between Metamorphism and Zn-Mineralization (호주 퀸즈랜드 주 캔닝턴 광상 모암의 아연-첨정석-규선석-석류석에 관한 연구 :변성작용과 아연-광화작용에 대해서)

  • Kim Hyeong Soo
    • Journal of the Mineralogical Society of Korea
    • /
    • v.17 no.4
    • /
    • pp.309-325
    • /
    • 2004
  • The Cannington Ag-Pb-Zn deposit, northwest Queensland, Australia developed around the host rocks composing banded and migmatitic gneisses, sillimanite-garnet schist and amphibolite. Three crystal habits of sillimanite, gahnite (Zn-spinel) and garnet porphyroblasts occurred on the host rocks of the Cannington deposit could be used to delineate metamorphism that closely associated with Zn-mineralization in the deposit. Linkages the metamorphism to Zinc-mineralization is determined in four chemical systems, KFMASH (K$_2$O-FeO-MgO-Al$_2$O$_3$-SiO$_2$-$H_2O$), KFMASHTO (K$_2$O-FeO-MgO-Al$_2$O$_3$-SiO$_2$-$H_2O$-TiO$_2$-Fe$_2$O$_3$), NCKFMASH (Na$_2$O-CaO-K$_2$O-FeO-MgO-AlO$_3$-SiO$_2$-$H_2O$) and MnNCK-FMASH (MnO-Na$_2$O-CaO-K$_2$O-FeO-MgO-AlO$_3$-SiO$_2$-$H_2O$), using THERMOCALC program (version 3.1; Powell and Holland 1988). Partial melting in MnNCKFMASH and NCKFMASH systems occurs at lower temperature than in the KFMASH and KFMASHTO systems. The partial melting temperature decreases with increasing of Na/(Na+Ca+K) of the bulk rock compositions in the MnNCKFMASH system. The host rocks have melted ca 15 vol.% in the MnNCKFMASH system at peak metamorphic conditions (634$\pm$62$^{\circ}C$ and 4.8$\pm$1.3 kbar), but partial melting have not occurred in KFMASHTO system. Based on calculations of sillimanite isograd in different systems and sillimanite modal pro-portion, prismatic and rhombic sillimanite and gahnite porphyroblasts including prismatic sillimanite inclusion probably have resulted from pressure and temperature increasing through partial melting (from 550~$600^{\circ}C$, 2.0~3.0 kbar to 700~75$0^{\circ}C$, 5.0~7.0 kbar), furthermore have experienced N-S then W-E crustal shortening during D$_1$ and D$_2$ deformation. Consequently, Zinc mineralization related to gahnite growth occurred during D$_2$ and was redistributed and upgraded by partial melting and retrograde metamorphism into structural and rheological sites during shearing in D$_3$.

Rheological and Debinding Properties of Al2O3/Paraffin Wax/High Density Polyethylen System Mixture by Injection Molding (사출성형에 의한 Al2O3/Paraffin Wax/High Density Polyethylen계 혼합물의 유동성 및 탈지 특성)

  • 김승겸;신대용;한상목;강위수
    • Journal of the Korean Ceramic Society
    • /
    • v.41 no.5
    • /
    • pp.395-400
    • /
    • 2004
  • The effects of compositions of binders on the rheological properties of mixtures and the preparation conditions on the formation of defects and the debinding characteristics of compacts for the injection molding of ceramic powders (65 wt% aluminaㆍ35 wt% feldspar) were studied. Ceramic powders were coated with 2 wt% of stearic acid and then mixed with 15, 20, and 25 wt% of Paraffin Wax (PW) and High Density Polyethylene (HDPE) as binders at $160^{\circ}C$ for 2 h. Rheological properties were investigated by using capillary rheometer. Apparent viscosities of mixtures were 80∼300 Paㆍs at 1,000$s^{-1}$ of a shear rate, it was good for the injection molding and depending on the compositions of binders. Short shot was formed at 15H5P5 (the ratio of HDPE : PW=5 : 5 in 15 wt% of binders) compacts without injection pressures and any noticeable defects were not formed at 45 kgf/$cm^{2}$ in 20H5P5 compacts. PW and HDPE were removed by the solvent extraction and thermal debinding method. Thermal debinding of HDPE at $450^{\circ}C$ for 5 h, which followed the extraction of PW was using n-heptane solvent at $70^{\circ}C$ for 5 h. Continuous pores in compacts, which facilitate the removal of HDPE by the thermal debinding, were found to form in the compacts when PW was removed by the solvent extraction. The optimum composition of binder at which binder was removed by thermal debinding without defects while maintaining the compact strength was 20H5P5. Bulk density, porosity and 3-point bending strength of 20H5P5 compact sintered at 1,30$0^{\circ}C$ for 5 h were 2.8, < 3%, and 2,400 kgf/$cm^{2}$, respectively, and can be used as a structural materials.

THE CERVICAL ISLAND FLAP FOR INTRAORAL RECONSTRUCTION FOLLOWING EXCISION OF ORAL CANCER -REPORT OF 3 CASES- (구강암 적출후 경부 도상 피판을 이용한 구강내 결손부의 재건 -3 치험례-)

  • LEE, Seong-Geun;LIM, Jong-Soo;KIM, Kyung-Hyun;JEON, So-Yeun;CHO, Young-Sung;SHIN, Sang-Hun;CHO, Young-Cheol;SUNG, Iel-Yong;KIM, Uk-Kyu;KIM, Jong-Ryoul;CHUNG, In-Kyo;YANG, Dong-Kyu
    • Maxillofacial Plastic and Reconstructive Surgery
    • /
    • v.20 no.3
    • /
    • pp.263-268
    • /
    • 1998
  • Many myocutaneous flaps have been used for the reconstruction of intraoral defects caused by the excision of oral cancer. Among these myocutaneous flaps, cervical island flap has been introduced by Farr et al. Although different in detail, this flap was designed as the platysma myocutaneous flap by Futrell et al in the supraclavicular site. Since many authors applied this flap to cover intraoral defect, they discussed deeply the blood supply of this flap. To improve further flap survival, it was modified by Tashiro et al. This flap makes its vascularity highly reliable. The amount of tissue needed for reconstruction can be accurately planned. The surgical and reconstruction procedure can be performed simply, rapidly, and effectively. Oral functions including deglutition, speech, and denture fitting are not compromised. With it's minimal deformity, new donor fields is not necessory. Of course, we keep in mind that this flap has limitations in patients where much bulk of tissue defects is needed and more than 3000 rad radiation due to the metastasis of neck lymph node is exposed. In three patients with intraoral squamous cell carcinoma($T_{1-3}N_0M_0$), we performed induction chemotherapy with FP regimen including pepleomycin. Thereafter, we ablated oral cancer and peformed reconstruction of intraoral defects with cervical island flap designed by Tashiro et al. Due to these significant benefits and minimal limitations, we have found that this flap is adequate for reconstruction of most intraoral defects following cancer ablation.

  • PDF

The Evaluation of Usefulness of 99Mo-99mTc Generator Using(n,γ)99Mo Developed by Korea Atomic Energy Research ((n,γ)99Mo를 이용한 99Mo-99mTc발생기의 유용성 평가)

  • Seo, Han Kyung;Kim, Jeong Ho;Shim, Cheol Min;Kim, Byung Cheol;Choi, Do Cheol;Gwon, Yong Ju;Park, Yung Sun;Kim, Dong Yun
    • The Korean Journal of Nuclear Medicine Technology
    • /
    • v.17 no.2
    • /
    • pp.48-52
    • /
    • 2013
  • Purpose: The Molybdenum which is the raw material of $^{99}Mo-^{99m}Tc$ generator is produced from the nuclear reactor. However, output has dwindled as the two nuclear reactors supplying the bulk of radioactive material-one in Chalk River, Ontario and the other in Petten, the Netherlands-have been closed for repairs or maintenance. This resulted in the enhancement of its price. So $^{99}Mo-^{99m}Tc$ generator using$(n,{\gamma})^{99}Mo$ is developed by Korea Atomic Energy Research Institute (KAERI). Medicinal availability of this generator is evaluated in this study. Materials and Methods: The radioactivity of $^{99m}Tc$ eluted in generator 1, 2 and 3 unit developed by KAERI was measured. The quality control test of generator such as appearance test, pH test, LAL test, sterility test, chemical impurity (Al) test and radiochemical purity test were performed. Planar and SPECT/CT image sof SD rat (6 weeks, Female) at 2 hr after injection of $^{99m}Tc-HDP$ (hydroxymethylenediphosphonate) (TechneScan HDP, Malinckrodt Medical, Dutch) and $^{99m}Tc-DPD$ (diphosphono-1, 2-propanedicarboxylicacid) (TECEOS, CIS bio international, France) which were labeled with $^{99m}Tc$ eluted in KAERI and commercial generator (40.5 GBq, Malinckrodt Medical, Dutch) using SPECT/CT camera (Symbia, Siemense, Germany) were obtained respectively. Results: The mean radioactivity of $^{99m}Tc$ elution generator 1unit was 4.18 GBq (113 mCi), generator 2 unit was 4.73 GBq (128 mCi) and generator 3 unit was 3.33 GBq (90 mCi). All quality control tests were within normal limit except pyrogentest. Pyrogen test was positive. Planar and SPECT/CT images of rat injected $^{99m}Tc-HDP$ which was labeled with $^{99m}Tc$ eluted in commercial generator show increased uptake in bone, stomach and bowl. Planar images show increased uptake in liver and bone in case of $^{99m}Tc-DPD$. However, images of rat injected $^{99m}Tc-HDP$ and $^{99m}Tc-DPD$ which were labelled $^{99m}Tc$ eluted in KAERI generator show increased uptake in bone, liver and spleen. Conclusion: If shortcoming is removed such as pyrogen and liver appearance, domestic role as an alternative generator is thought to be able to fill and to secure the national medical service by supplying $^{99m}Tc$ when the supply of $^{99m}Tc$ be comes short.

  • PDF