• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.159-159
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• 2007

In order to reduce a signal delay in ULSI, low resistive metal and intermetal dielectric material of low dielectric constant are required. Ordered mesoporous silica film is proper to intermetal dielectric due to its low dielectric constant and superior mechanical properties. In this study, ordered mesoporous silica films was synthesized using TEOS (tetraethoxysilane) / MTES (methyltriethoxysilane) mixed silica precursor and Brij-$76^{(R)}$ surfactant. These films had the porosity of 40% and dielectric constant of 2.5. To lower dielectric constant, the ordered mesoporous silica films were surface-modified by HMDS (hexamethyldisilazane) treatment. HMDS substituted -OH groups on the surface of silica wall for -Si$(CH_3)_3$ groups. After the HMDS treatment, ordered mesoporous silica films were calcined at various calcination temperatures. Through the investigation, it was concluded that the proper calcination temperature is necessary as aspects of structural, electrical, and mechanical properties.

• Journal of Pharmaceutical Investigation
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• v.41 no.1
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• pp.19-24
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• 2011

In order to enhance the clinical efficacy of 5-aminolevulinic acid-induced photodynamic therapy (ALA-PDT), liposomal formulations using bulk hydrogenated phospholipids from soybean were introduced. Three types of lipids, S75-3, S100-3, and SL80-3 were used for formulating ALA. The pH of all the liposomal ALA is 4.5~5.5 and the size is 50~200 nm. All the liposomal formulations gave better ex vivo ALA skin penetration using nude mice skin in Franz cell than free ALA did. Among them, SL80-3 including 22% of lyso-phosphocholine achieved excellent ALA penetration when compared with those of S75-3 and S100-3 which have only 1~2% of lyso-phospholipids. S100-3 showed a little better results than S75-3 did. Addition of humectants (glycerine, propylene glycol, butylene glycol, betaine) in liposomal ALA formulated with SL80-3 produced little enhancing effect in ALA penetration. On the other hand, addition of surfactants (Tween 20, 60, Brij 72, 76, 78) in same liposomal system produced significant increase in ALA penetration. Among them, transferosomal system of lyso-phospholipid, SL80-3 and the surfactant, Brij76 showed the highest ALA penetration. Furthermore, this system also established the highest in vivo PpIX biosynthesis in hairy mice skin of C57BL/6. These results concluded that the transferosome of SL80-3 and Brij76 produced the best results in both ALA penetration and PpIX biosynthesis, and proved good correlation between them.

• Journal of the Korean Ceramic Society
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• v.45 no.1
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• pp.48-53
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• 2008

In order to reduce signal delay in ULSI, an intermetal material of low dielectric constant is required. Ordered mesoporous silica film is proper to intermetal dielectric due to its low dielectric constant and superior mechanical properties. The ordered mesoporous silica film prepared by TEOS (tetraethoxysilane) / MTES (methyltriethoxysilane) mixed silica precursor and Brij-76 surfactant was surface-modified by HMDS (hexamethyldisilazane) treatment to reduce its dielectric constant. HMDS can substitute $-Si(CH_3)_3$ groups for -OH groups on the surface of silica wall. In order to modify interior silica wall, HMDS was treated by two different processes except the conventional spin coating. One process is that film is dipped and stirred in HMDS/n-hexane solution, and the other process is that film is exposed to evaporated HMDS. Through the investigation with different HMDS treatment, it was concluded that surface modification in evaporated HMDS was more effective to modify interior silica wall of nano-sized pores.