• 제목/요약/키워드: Break Process

검색결과 423건 처리시간 0.025초

실리콘 웨이퍼 연마에서의 Break-in 모니터링 (Monitoring of Break-in time in Si wafer polishing)

  • 정석훈;박범영;박성민;이상직;이현섭;정해도;배소익;최은석;백경록
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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    • pp.360-361
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    • 2005
  • Rapid progress in IC fabrication technology has strong demand in polishing of silicon wafer to meet the tight specification of nanotopography and surface roughness. One of the important issues in Si CMP is the stabilization of polishing pad. If a polishing pad is not stabilized before main Si wafer polishing process, good polishing result can not be expected. Therefore, new pad must be subjected into break-in process using dummy wafers for a certain period of time to enhance its performance. After the break-in process, the main Si wafer polishing process must be performed. In this study, the characteristics of break-in process were investigated in Si wafer polishing. Viscoelastic behavior, temperature variation of pad and friction were measured to evaluate the break-in phenomenon. Also, it is found that the characteristic of the break-in seems to be related to viscoelastic behavior of pad.

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Robust Unit Root Tests with an Innovation Variance Break

  • Oh, Yu-Jin
    • Communications for Statistical Applications and Methods
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    • 제19권1호
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    • pp.177-182
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    • 2012
  • A structural break in the level as well as in the innovation variance has often been exhibited in economic time series. In this paper we propose robust unit root tests based on a sign-type test statistic when a time series has a shift in its level and the corresponding volatility. The proposed tests are robust to a wide class of partially stationary processes with heavy-tailed errors, and have an exact binomial null distribution. Our tests are not affected by the size or location of the break. We set the structural break under the null and the alternative hypotheses to relieve a possible vagueness in interpreting test results in empirical work. The null hypothesis implies a unit root process with level shifts and the alternative connotes a stationary process with level shifts. The Monte Carlo simulation shows that our tests have stable size than the OLSE based tests.

길들이기에 의한 잔류응력의 형성과 표면파괴 (The Formation of Residual Stresses and the Surface Fracture by the Break-in Process)

  • 김진욱;이영제
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2000년도 제31회 춘계학술대회
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    • pp.159-165
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    • 2000
  • In this paper the residual stresses on lubricated sliding surfaces were measured during break-in procedure and up to scuffing by the X-ray diffraction method. The cylinder-on-disk type tribometer was used with the line-contact geometry. Scuffing tests were done using a constant load. In the break-in procedure the loads were increased from very low values in several steps. It was found that the sliding surfaces with break-in represented relatively higher values of residual compressive stresses than those without break-in. The residual stresses below the surfaces showed the small amount of stress increases. The results of scuffing tests with and without break-in showed the same trends as break-in tests did. However, in case of tests with break-in procedure the stresses below the surfaces showed very large increases in the residual compressive stresses. From the tests of break-in and scuffing, it was found that the increases in scuffing lives were related with the increases of residual stresses on the lubricated sliding surfaces with break-in.

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일본어 TTS의 가변 Break를 이용한 합성단위 선택 방법 (A Unit Selection Methods using Variable Break in a Japanese TTS)

  • 나덕수;배명진
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2008년도 하계종합학술대회
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    • pp.983-984
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    • 2008
  • This paper proposes a variable break that can offset prediction error as well as a pre-selection methods, based on the variable break, for enhanced unit selection. In Japanese, a sentence consists of several APs (Accentual phrases) and MPs (Major phrases), and the breaks between these phrases must predicted to realize text-to-speech systems. An MP also consists of several APs and plays a decisive role in making synthetic speech natural and understandable because short pauses appear at its boundary. The variable break is defined as a break that is able to change easily from an AP to an MP boundary, or from an MP to an AP boundary. Using CART (Classification and Regression Trees), the variable break is modeled stochastically, and then we pre-select candidate units in the unit-selection process. As the experimental results show, it was possible to complement a break prediction error and improve the naturalness of synthetic speech.

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Decision-Tree-Based Markov Model for Phrase Break Prediction

  • Kim, Sang-Hun;Oh, Seung-Shin
    • ETRI Journal
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    • 제29권4호
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    • pp.527-529
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    • 2007
  • In this paper, a decision-tree-based Markov model for phrase break prediction is proposed. The model takes advantage of the non-homogeneous-features-based classification ability of decision tree and temporal break sequence modeling based on the Markov process. For this experiment, a text corpus tagged with parts-of-speech and three break strength levels is prepared and evaluated. The complex feature set, textual conditions, and prior knowledge are utilized; and chunking rules are applied to the search results. The proposed model shows an error reduction rate of about 11.6% compared to the conventional classification model.

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풍력발전기용 쓰러스터 브레이크의 신뢰성 평가 (Reliability Evaluation of Thruster Break for Aerogenerator)

  • 정동수
    • 한국신뢰성학회지:신뢰성응용연구
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    • 제13권3호
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    • pp.165-174
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    • 2013
  • Thruster break for aerogenerator performs a role that is stopping the rotor in case of emergency such as strong wind, system abnormality or maintenance check. In this study, failure analysis and test evaluation on the thruster break for aerogenerator are proposed, and the entire process to improve reliability of the product through design improvement is presented. The typical failure case is fatigue and wear, and failure cause on these are identified and improvement plan is presented. Lastly, reliability improvement is established to analyse test results before after the life test.

제방붕괴조건에 따른 도시하천의 홍수범람 특성 및 홍수지도 작성 - 중랑천 시험유역을 중심으로 - (Characteristics of the Inundation and Process of Making a Flood Map According to the Levee Break Conditions in Urban Stream - Jungrang Experimental Basin -)

  • 이종태;허성철;김정회;한건연
    • 한국수자원학회논문집
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    • 제39권5호
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    • pp.383-394
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    • 2006
  • 도시하천유역에서 집중호우에 따른 제방 범람과 이에 따른 침수 피해규모를 해석하기 위하여 우리나라의 대표적 도시하천인 중랑천의 홍수 및 제방붕괴 특성을 시 공간적으로 다양한 조건에서 연구하였으며 실용적인 GIS 기법의 적용방법에 대하여 비교 분석하였다. 이를 위하여 '98년 실제 홍수상황에 대하여 적용분석하였으며, 100년, 200년, PMP의 빈도별 강우 조건에서 홍수량을 각각 산정하였다. 또한, 제방붕괴 조건별 하천의 부정류 해석 및 제내지의 홍수범람해석을 실시하였다. 제방붕괴의 조건으로서 붕괴시간(10, 30, 60분), 붕괴폭(10, 20, 30m) 및 제방붕괴위치(중상류부, 중류부, 중하류부) 등에 따른 홍수위, 월류량 및 제내지 침수 수위 변화 등을 검토한 결과, 제방붕괴의 위치 및 붕괴폭이 홍수범람규모와 침수피해에 큰 영향을 주는 것으로 분석되었다. 또한 FLDWAV에 의한 산정결과를 이용한 홍수범람지도 작성과정에서 WS와 ArcView 모형의 두 모형을 적용하는 과정을 비교하였다 WMS 모형은 비교적 간략한 절차를 통하여 작성할 수 있었으나 지형자료의 부정확성으로 말미암아 침수면적에 상당한 차이를 나타내었다. ArcView모형은 보다 정밀한 범람도를 형성하여 도시유역 등의 적용에 유용할 것으로 판단되나 WMS 모형을 통한 전처리 과정이 필요하여 처리시간이 보다 긴 단점이 있다. 본 연구에서 제시한 분석절차는 도시하천유역의 EAP(Emergency Action Plan, 비상대처계획)수립을 위한 실용적 수문 수리 및 GIS 분석에 기여할 수 있을 것으로 판단된다.

일본어 합성기에서 유동 Break를 이용한 합성단위 선택 방법 (A Unit Selection Methods using Flexible Break in a Japanese TTS)

  • 송영환;나덕수;김종국;배명진;이종석
    • 한국음향학회지
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    • 제26권8호
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    • pp.403-408
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    • 2007
  • 대용량 코퍼스를 이용하는 합성단위 선택(unit selection) 기반 합성기에서 break는 자연성 및 명료성에 큰 영향을 미치는 파라미터로 unit selection 과정에서 음소 정보와 함께 중요한 특징으로 사용된다. 일본어는 피치의 상대적 높낮이로 표현되는 악센트를 가지는 언어이고, 악센트의 변화에 따라 AP(Accentual Phrase)가 결정되고 AP 경계에서 break가 형성된다. break는 규칙 기반 방식이나 통계적 방식인 J-ToBI를 이용하여 예측 할 수 있으나 다양성으로 인해 정확한 예측이 어렵다. 따라서 본 논문에서는 다양한 운율 정보를 포함하고 있는 대용량 코퍼스의 장점을 이용하기 위해 break를 고정 break와 유동 break로 나누어 합성단위 검색을 수행한다. 실험 결과 제안한 합성단위 선택 방법으로 합성음의 자연성을 향상 시킬 수 있었다.

하천제방붕괴 해석모형의 개발 (Development of Numerical Model to Analyze Levee Break)

  • 박재홍;한건연;안기홍
    • 한국수자원학회논문집
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    • 제42권7호
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    • pp.571-578
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    • 2009
  • 본 연구에서는 하천의 제방붕괴시 제방의 침식 및 세굴이론에 기초한 범람 홍수량 해석, 시간에 따른 제방붕괴폭의 변화, 침수범위 및 침수위의 추정, 침수 예상 피해규모를 예측할 수 있도록 하천의 유량변화를 고려한 제방붕괴 모형을 개발코자 하였다. 하도구간에서는 홍수시 4점 음해 유한차분기법을 이용하여 하천 홍수위를 예측하며, 제방 붕괴해석을 위해서 제방침식을 고려한 토사이동방정식을 도입하여 물리적 이론에 기초한 제방붕괴 모형을 개발하였다. 제방붕괴모형과 하천해석모형을 이용하여 제방붕괴해석모형으로 통합하였고 연구모형을 실제하도 붕괴사례에 본 모형을 적용한 결과 제방붕괴 기간중의 하천수위, 파제기간, 파제폭 등의 인자들을 합리적으로 모의하고 있었고 개발된 모형이 보다 다양한 실제 하천제방 붕괴사례에 도입되어 적용성 및 정확성이 증명된다면 앞으로 정확한 제방붕괴가 발생한 도시하천의 하천수위 해석, 파제유량 계산, 홍수지도 작성 및 침수위 해석 등에 본 모형이 적용될 수 있을 것으로 판단된다.

Phenomena Identification and Ranking Table for the APR-1400 Main Steam Line Break

  • Song, J.H.;Chung, B.D.;Jeong, J.J.;Baek, W.P.;Lee, S.Y.;Choi, C.J.;Lee, C.S.;Lee, S.J.;Um, K.S.;Kim, H.G.;Bang, Y.S.
    • Nuclear Engineering and Technology
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    • 제36권5호
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    • pp.388-402
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    • 2004
  • A phenomena identification and ranking table(PIRT) was developed for a main steam line break (MSLB) event for the Advanced Power Reactor-1400 (APR-1400). The selectee event was a double-ended steam line break at full power, with the reactor coolant pump running. The developmental panel selected the fuel performance as the primary safety criterion during the ranking process. The plant design data, the results of the APR-1400 safety analysis, and the results of an additional best-estimate analysis by the MARS computer code were used in the development of the PIRT. The period of the transient was composed of three phases: pre-trip, rapid cool-down, and safety injection. Based on the relative importance to the primary evaluation criterion, the ranking of each system, component, and phenomenon/process was performed for each time phase. Finally, the knowledge-level for each important process for certain components was ranked in terms of existing knowledge. The PIRT can be used as a guide for planning cost-effective experimental programs and for code development efforts, especially for the quantification of those processes and/or phenomena that are highly important, but not well understood.