• Transactions on Electrical and Electronic Materials
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• v.8 no.2
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• pp.53-57
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• 2007

In this study, a novel slurry containing ceria as the abrasive particles was analyzed in terms of its frictional, thermal and kinetic attributes for interlayer dielectric (ILD) CMP application. The novel slurry was used to polish 200-mm blanket ILD wafers on an $IC1000_{TM}$ K-groove pad with in-situ conditioning. Polishing pressures ranged from 1 to 5 PSI and the sliding velocity ranged from 0.5 to 1.5 m/s. Shear force and pad temperature were measured in real time during the polishing process. The frictional analysis indicated that boundary lubrication was the dominant tribological mechanism. The measured average pad leading edge temperature increased from 26.4 to $38.4\;^{\circ}C$ with the increase in polishing power. The ILD removal rate also increased with the polishing power, ranging from 400 to 4000 A/min. The ILD removal rate deviated from Prestonian behavior at the highest $p{\times}V$ polishing condition and exhibited a strong correlation with the measured average pad leading edge temperature. A modified two-step Langmuir-Hinshelwood kinetic model was used to simulate the ILD removal rate. In this model, transient flash heating temperature is assumed to dominate the chemical reaction temperature. The model successfully captured the variable removal rate behavior at the highest $p{\times}V$ polishing condition and indicates that the polishing process was mechanical limited in the low $p{\times}V$ polishing region and became chemically and mechanically balanced with increasing polishing power.

• Korean Journal of Materials Research
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• v.23 no.7
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• pp.392-398
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• 2013

A two-pass differential speed rolling(DSR) was applied to a deoxidized low-phosphorous copper alloy sheet in order to form a homogeneous microstructure. Copper alloy with a thickness of 3 mm was rolled to 75 % reduction by two-pass rolling at $150^{\circ}C$ without lubrication at a differential speed ratio of 2.0:1. In order to introduce uniform shear strain into the copper alloy sheet, the second rolling was performed after turning the sample by $180^{\circ}$ on the transverse direction axis. Conventional rolling(CR), in which the rotating speeds of the upper roll and lower roll are identical to each other, was also performed by two-pass rolling under a total rolling reduction of 75 %, for comparison. The shear strain introduced by the conventional rolling showed positive values at positions of the upper roll side and negative values at positions of the lower roll side. However, samples processed by the DSR showed zero or positive values at all positions. {100}//ND texture was primarily developed near the surface and center of thickness for the CR, while {110}//ND texture was primarily developed for the DSR. The difference in misorientation distribution of grain boundary between the upper roll side surface and center regions was very small in the CR, while it was large in the DSR. The grain size was smallest in the upper roll side region for both the CR and the DSR. The hardness showed homogeneous distribution in the thickness direction in both CR and DSR. The average hardness was larger in CR than in DSR.

• Tribology and Lubricants
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• v.32 no.3
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• pp.95-100
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• 2016

As an alternative fuel, biodiesel has excellent lubricating property. Previously, our research group reported that the properties of biodiesels depended on their composed molecular structure. In this study, we investigate lubricity and the mechanism of lubricity improvement of synthesized biodiesel molecules. We synthesize four types of biodiesel components from fatty acid via fisher esterification and soybean biodiesel from soybean oil via transesterification in high yield (92-96%). We analyze the lubricity of the five 5 types of biodiesel using HFRR (high frequency reciprocating rig). We estimate that the mechanism of lubricity is relevant to the molecular structure and structure conversion of biodiesel. The test results indicate that the longer the length of molecules and the higher the content of olefin, the better the lubricity of the biodiesel molecules. However, the wear scar size of the first test samples’ do not show a regular pattern with the wear scar size of the second test samples’. Moreover, we investigated the structure conversion of the biodiesels by using GC-MS for the recovered biodiesel samples from the HFRR test. However, we do not detect structure conversion. Thus, we conclude that the lubricity of biodiesel depends on how effectively solid adsorption and boundary lubrication occurs based on the size of the molecule and the content of olefin in the molecule. In addition, HFRR test condition in not sufficient for Diels-Alder cyclization of biodiesel components.

• Tribology and Lubricants
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• v.31 no.2
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• pp.50-55
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• 2015

This study investigates the effects of a pattern of 200 μm dimples in a hexagonal array on tribological characteristics. A textured surface might reduce the friction coefficient and wear caused by third-body abrasion and thus improve the tribological performance. There are three friction conditions based on the Stribeck curve: boundary friction, mixed friction, and fluid friction conditions. In this experiment, we investigate the friction characteristics by carrying out the friction tests at sliding speeds ranging from 0.06 to 0.34 m/s and normal load ranging from 10 to 100 N. We create dimple surfaces for texturing by using the photolithography method. There are three kinds of specimens with different dimple densities ranging from 10% to 30%. The dimple density on the surface area is the one of the important factors affecting friction characteristics. Friction coefficient generally decreases with an increase in the velocity and load, indicating that the lubrication regime changes depending on the load and velocity. The fluid friction regime is fully developed, as indicated by the duty number graph. Fluid friction occurs at a velocity of 0.14-0.26 m/s. The best performance is seen at 10% dimple density and 200 μm dimple circle in the hexagonal array.

• Tribology and Lubricants
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• v.35 no.1
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• pp.30-36
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• 2019

The tribological properties of paper-based friction materials are crucial to the performance of a wet clutch system. In this work, the friction and wear characteristics of a paper-based friction material in boundary lubrication state was experimentally investigated using a pin-on-reciprocating tribotester under various normal forces and temperatures. It was found that the wear rate of the friction material increased from $5.8{\times}10^{-6}mm^3/N/cycle$ to $5.5{\times}10^{-5}mm^3/N/cycle$ after 1,700 cycles of testing at $80^{\circ}C$ as normal force increased from 2 N to 7 N. The friction coefficient was also found to increase from 0.135 to 0.155 with increasing normal force from 2 N to 7 N. The increase in contact pressure with increasing normal force may be responsible for these results. In addition, as temperature increased from $20^{\circ}C$ to $80^{\circ}C$, the wear rate of the friction materials increased from $2.0{\times}10^{-5}mm^3/N/cycle$ to $3.6{\times}10^{-5}mm^3/N/cycle$ while the friction coefficient decreased from 0.163 to 0.146. This result may be associated with the decrease in the hardness of friction materials with increasing temperature. Furthermore, plastic deformation on the friction materials was mainly observed after the test. The outcome of this work may be useful to gain a better understanding of the tribological properties of friction materials, and therefore can contribute to the development of friction materials with enhanced performance for wet clutch systems.

• Tribology and Lubricants
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• v.38 no.1
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• pp.15-21
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• 2022

Diamond reinforced Cr-based coating has been proposed as wear-resistant materials. In this study, the friction and wear characteristics of diamond reinforced Cr-based coating are experimentally assessed. The experiments are performed using a pin-on-reciprocating plate tribo-tester under various normal forces with boundary lubrication. The stainless-steel ball is used as a counter material. Prior to the experiments, mechanical properties such as elastic modulus and hardness are determined using nanoscale instrumented indentation. The hardness of the specimen is further determined using a Vickers hardness tester. The specimens before and after the experiments are carefully observed using a confocal microscope to understand the wear characteristics. In addition, the wear volume and wear rate of the specimens are determined based on the confocal microscope data. The results show that the friction coefficients are 0.096-0.100 under 20-40 N normal forces. Furthermore, the wear rates of the diamond reinforced Cr-based coating and the stainless steel ball under 20-40 N normal forces are found to be 12.8 × 10^-8 mm³/(Nm)-15.5 × 10^-8 mm³/(Nm) and 1.9 × 10^-8 mm³/(Nm)-3.9 × 10^-8 mm³/(Nm), respectively. However, the effect of the normal force on wear rates is not clearly observed, which may be associated with the flattening of the ball. The results of the study may be useful for the tribological applicability of diamond reinforced Cr-based coating as wear-resistant materials.

• Tribology and Lubricants
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• v.38 no.1
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• pp.8-14
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• 2022

Amorphous carbon (a-C) has excellent wear resistance and, therefore is used as a coating to protect numerous mechanical components to prolong their lifetimes. Among the a-C coatings, diamond-like carbon (DLC) and DLC-containing silicon (Si-DLC) receive extensive attention owing to their enhanced wear resistance and low frictional characteristics. In this study, the friction and wear characteristics of DLC and Si-DLC coatings are analyzed. For comparative analysis, DLC-coated and Si-DLC-coated vanes are utilized with the counterpart of a roller for the friction tests. Since the lubricated mechanical components are generally vulnerable to wear when a lubricant film does not form properly, friction tests are conducted under boundary lubrication conditions to promote wear. A cylinder-on-cylinder type tribometer is used to perform the friction tests with various normal load conditions. After the friction test, a 3D laser confocal microscope is used for quantifying the wear volume to calculate the wear rate of each specimen. Consequently, the DLC-coated specimen shows a lower coefficient of friction (COF) and wear rate than the specimen without the coating, while the Si-DLC coating shows a higher COF than the bare specimen. The results of this study are expected to contribute to improving the efficiency and reliability of compressors.

• Tribology and Lubricants
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• v.39 no.2
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• pp.49-55
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• 2023

Currently, the demand for green technologies toward a sustainable future is rapidly increasing due to growing concern over environmental issues. Methanol is biodegradable and can provide clean combustion to reduce sulfur oxide and nitrogen oxide emissions, and therefore it is a candidate fuel for marine engines. However, the effect of methanol on tribological characteristic degradation should be addressed for methanol-fueled engines. In this study, the methanol addition effects on tribological characteristic degradation is experimentally assessed using a pin-on-disk tribo-tester. Ni-based alloy is used as a target material due to its broad applicability as an engine component material. For a lubricant, engine oil with and without methanol are used. The tests are conducted for up to 10,000 cycles under boundary lubrication while the change in friction force is monitored. Additionally, the wear rate is determined based on laser scanning confocal microscope data. An additional test in which methanol is added at regular intervals is performed with an aim to directly observe its effect on friction. Overall, the friction coefficient increases slightly with increasing methanol concentration. Furthermore, the wear rate of the pin and disk increase significantly with methanol addition. The results also indicate that the friction increases instantaneously with methanol addition at the contacting interface. These findings may be useful for better understanding the methanol effect on the tribological characteristics of Ni-based alloys for methanol-fueled engines with improved performance.