• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.79-79
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• 1999

The varous techniques for fabrication of si or metal tip as a field emission electron source have been reported due to great potential capabilities of flat panel display application. In this report, 240nm thermal oxide was initially grown at the p-type (100) (5-25 ohm-cm) 4 inch Si wafer and 310nm Si3N4 thin layer was deposited using low pressure chemical vapor deposition technique(LPCVD). The 2 micron size dot array was photolithographically patterned. The KOH anisotropic etching of the silicon substrate was utilized to provide V-groove formation. After formation of the V-groove shape, dry oxidation at 100$0^{\circ}C$ for 600 minutes was followed. In this procedure, the orientation dependent oxide growth was performed to have a etch-mask for dry etching. The thicknesses of the grown oxides on the (111) surface and on the (100) etch stop surface were found to be ~330nm and ~90nm, respectively. The reactive ion etching by 100 watt, 9 mtorr, 40 sccm Cl2 feed gas using inductively coupled plasma (ICP) system was performed in order to etch ~90nm SiO layer on the bottom of the etch stop and to etch the Si layer on the bottom. The 300 watt RF power was connected to the substrate in order to supply ~(-500)eV. The negative ion energy would enhance the directional anisotropic etching of the Cl2 RIE. After etching, remaining thickness of the oxide on the (111) was measured to be ~130nm by scanning electron microscopy.

• Journal of Korean Society for Atmospheric Environment
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• v.34 no.1
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• pp.87-100
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• 2018

Fast economic growth and urbanization of China have been causing air pollution not only over its domestic but transboundary atmosphere. Recent high fine particle pollution episodes in China made the government move toward more stringent air pollution control policies - which are mostly fuel switching and emissions control. In this research, we tried to understand characteristics of Chinese emissions and their change by analyzing its emissions inventory by year, sector, and region. From the inter-comparison of existing bottom-up emission inventories, we found relatively good agreements (<20% difference) for $SO_2$ and $NO_x$, but 30% or more discrepancies for some pollutants. Inter-comparison with top-down $NO_x$ emissions estimates also showed 20~50% differences by year. The regional distribution and inter-annual changes of emissions revealed different stages of energy/fuel mix and policy penetration. Early increase of pollutants emissions in the eastern part of China might give strong influences to the Korean peninsular in early 2000s but, more stringent control in that region would help improving air pollution in Korea in near future.

• Journal of the Korean Vacuum Society
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• v.6 no.1
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• pp.85-90
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• 1997

A new ionized sputtering process was developed to fill small trench or via using additional ionizing mechanism of sputtered particles from 32cm $AlCu_x$(x=0.5%) cathode target with rotating magnet, then drawn toward substrate by small negative DC potential. The radial uniformity in RFI magnetron sputtering was studied by plasma diagnosis and appropriate RFI coil design to improve it. Optical emission intensities of excited species. $Ar^{\circ}, \;Ar^+;Al^+, \;Al^{\circ}$ are measured across the radial direction and showed close correlation with deposit's bottom to top thickness ratios in trenches and vias of submicron opening and 1.5 aspect ratio. After increase of the diameter of RF coil from 29 cm to 32 cm and improved the power leading feedthrough symmetry by removal of asymmetric single turn region, there was an increase of uniformity from 7.5% to 1.5% in bottom to top thickness ratio in 0.6 $\mu\textrm{m}$ vias.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.5
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• pp.171-176
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• 2001

Plasma Display Panel(PDP) is a type of flat panel display utilizing the light emission produced by gas discharge. Barrier Ribs of PDP separating each sub-pixel prevents optical and electrical crosstalks from adjacent sub-pixels. Mold for forming barrier ribs has been newly researched to overcome the disadvantages of conventional manufacturing process such as screen printing, sand-blasting and photosensitive glass methods. Mold for PDP barrier ribs have stripes of micro grooves transferring glass-material wall. In this paper, Stripes of grooves of which width 48${\mu}{\textrm}{m}$ and 270${\mu}{\textrm}{m}$, depth 124${\mu}{\textrm}{m}$, pitch 274${\mu}{\textrm}{m}$ was acquired by machining hard and brittle materials of WC, Silicon, Alumina with dicing saw blade. Maximum roughness of the bottom and sidewall of the grooves was respectively 120nm, 287nm in grooving WC. Maximum tilt angle caused by difference between upper-most width and lower-most width was 2$^{\circ}$. Maximum Radius of bottom curvatures was 7.75${\mu}{\textrm}{m}$. This results satisfies the specification for barrier ribs of 50 inch XGA PDP if the groove form of mold was fully transferred to the barrier ribs. Barrier ribs were formed with Silicone rubber mold, which is transferred from grooved hard materials. Silicone rubber mold has elasticity accommodating the waveness of lower glass plate of PDP.

• Journal of Information Technology and Architecture
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• v.9 no.4
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• pp.455-464
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• 2012

Due to the recent data explosion, methods which can meet the requirement of large data analysis has been studying. This paper proposes MRIterativeBUC algorithm which enables efficient computation of large data cube by distributed parallel processing with MapReduce framework. MRIterativeBUC algorithm is developed for efficient iterative operation of the BUC method with MapReduce, and overcomes the limitations about the storage size and processing ability caused by large data cube computation. It employs the idea from the iceberg cube which computes only the interesting aspect of analysts and the distributed parallel process of cube computation by partitioning and sorting. Thus, it reduces data emission so that it can reduce network overload, processing amount on each node, and eventually the cube computation cost. The bottom-up cube computation and iterative algorithm using MapReduce, proposed in this paper, can be expanded in various way, and will make full use of many applications.

• Journal of Sensor Science and Technology
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• v.8 no.3
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• pp.226-231
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• 1999

Pyroelectric infrared sensors have been fabricated using P(VDF/TrFE) film with pyroelectric effect. The weight percent and thickness of the poled P(VDF/TrFE) film are 75/25 percent and $25\;{\mu}m$ respectively. For easier fabrication and connection method new top and bottom electrodes design was adapted for human body detecting pyroelectric infrared sensor. An aluminum infrared absorption electrode and bottom electrode were deposited by thermal evaporator. And the device was mounted in TO-5 housing to detect infrared light of $5.5{\sim}14\;{\mu}m$ wavelength. The responsibility, NEP (noise equivalent power) and specific detectivity $D^*$ of the device were $9.62{\times}10^5\;V/W$, $3.95{\times}10^{-7}\;W$ and $5.06{\times}10^5\;cm/W$ under emission energy of $13\;{\mu}W/cm^2$ respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.311-311
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• 2009

Carbon nanotubes (CNTs) belong to an ideal material for field emitters because of their superior electrical, mechanical, and chemical properties together with unique geometric features. Several applications of CNTs to field emitters have been demonstrated in electron emission devices such as field emission display (FED), backlight unit (BLU), X-ray source, etc. In this study, we fabricated a CNT cathode by using filtration processes. First, an aqueous CNT solution was prepared by ultrasonically dispersing purified single-walled CNTs (SWCNTs) in deionized water with sodium dodecyl sulfate (SDS). The aqueous CNT solution in a milliliter or even several tens of micro-litters was filtered by an alumina membrane through the vacuum filtration, and an ultra-thin CNT film was formed onto the alumina membrane. Thereafter, the alumina membrane was solvated by acetone, and the floating CNT film was easily transferred to indium-tin-oxide (ITO) glass substrate in an area defined as 1 cm with a film mask. The CNT film was subjected to an activation process with an adhesive roller, erecting the CNTs up to serve as electron emitters. In order to measure their luminance characteristics, an ITO-coated glass substrate having phosphor was employed as an anode plate. Our field emitter array (FEA) was fairly transparent unlike conventional FEAs, which enabled light to emit not only through the anode frontside but also through the cathode backside, where luminace on the cathode backside was higher than that on the anode frontside. Futhermore, we added a reflecting metal layer to cathode or anode side to enhance the luminance of light passing through the other side. In one case, the metal layer was formed onto the bottom face of the cathode substrate and reflected the light back so that light passed only through the anode substrate. In the other case, the reflecting layer coated on the anode substrate made all light go only through the cathode substrate. Among the two cases, the latter showed higher luminance than the former. This study will discuss the morphologies and field emission characteristics of CNT emitters according to the experimental parameters in fabricating the lamps emitting light on the both sides or only on the either side.

• Korean Journal of Soil Science and Fertilizer
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• v.39 no.3
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• pp.136-143
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• 2006

The study was carried out to evaluate odor emission during storage time and quality of liquid slurry fertilizer along with three storage container types installed at farmer's fields in Cheorwon. Liquid slurry manure stored in the liquid-circulated or the air-injected tank was very homogeneous in concentration of nutritional elements because of well mixing operation, while nutritional concentration of the manure stored in the non-treated tank was significantly different from top to bottom in the tank, which may bring about partially irregular growth of plant after its application. The potential capacity of offensive odor emitted from liquid slurry manure stored in the liquid-circulated or the air-injected tank was much lower than that emitted from manure stored in the non-treated tank. Low potential capacity may less emit offensive odor after application of piggery liquid slurry on the field. The efficiency in oder to reduce odor emission from liquid manure was slightly higher in the liquid-circulated tank than the air-injected tank

• Journal of Sensor Science and Technology
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• v.10 no.6
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• pp.295-303
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• 2001

White emission thin film electroluminecent device was fabricated with ZnS for phosphor layers and BST ferroelectric thin film for insulating layers. The ZnS:Mn and $ZnS:SmF_3$ layers were used for emission of red color. Also the $ZnS:TbF_3$ and $ZnS:AgF_3$ layers were used to emission of green and blue color, respectively. And the fabrication conditions of the BST insulating layers were followings, that is, the composition ratio of target, substrate temperature, working pressure and operating gas ratio were $Ba_{0.5}Sr_{0.5}Ti_{0.3}$, $400^{\circ}C$, 30 mTorr and 9:1, respectively. The thickness of phosphor were 150 nm for each layers and the insulating layers of upper and bottom were 400 nm and 200 nm, respectively. The luminesence threshold voltage was $75\;V_{rms}$ and the maximum brightness of the thin film electroluminecent device was $3200\;cd/m^2$ at $100\;V_{rms}$.

• Journal of Korea Water Resources Association
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• v.52 no.4
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• pp.235-243
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• 2019

Recently, urban inundation was frequently occurred due to the intensive rainfall exceeding marginal capacity of the flood control facility. Furthermore, needs for the underground storage facilities to mitigate urban flood are increasing according to rapidly accelerating urbanization. Thus, in this study, drainage efficiency in drain tunnel connecting to underground storage was investigated from the air-core measurements in the drop shaft against two types of inlet structure. In case of the spiral inlet, the multi-stage structure is introduced at the bottom of the inlet to improve the vortex induction effect at low inflow discharge (multi-stage spiral inlet). The average cross-sectional area of the air-core in the multi-stage spiral inlet is 10% larger than the tangential inlet, and show the highly air emission effect and the highly inflow efficiency at the high inflow discharge. In case of the tangential inlets, the air emission effect decreased after exceeding the maximum inflow discharge, which is required to maintain the inherent performance of the tangential inlet. From the measurements, the empirical formula for the cross-sectional area of the air-core according to locations inside the drop shaft was proposed in order to provide the experimental data available for the inlet model used in experiments.