• 열처리공학회지
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• 제6권1호
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• pp.9-16
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• 1993

To investigate the properties of diffusion bonding of 7050 Al alloy, the diffusion bonding joints have been produced in self-made diffusion bonding hot-press which admits a defined application of the bonding pressure during the heating phase and also rapid cooling after the bonding process with various bonding condition. The strength of the bond increases with increasing the bonding time and temperature. Shear test at toom temperature showed that high strength up to 70% that of parent metal (320 MPa), 220 MPa for the specimen bonded 14 hr at $560^{\circ}C$, with 3 MPa. In this case, however, there is large deformation more than 20% reduction in thickness. The results were correlated with joint characteristics found by optical microstructure and by fractography by SEM. When the strengths of the bonds are more than 50% that of parent metal, a great deal of dimples stretched along the direction of shear stress are observed over the fractured surface of the bond. On the microstructure of the bond line, initial mophology of the bond line disapeared for the grain boundary migration with increasing the bonding time.

• 한국전기전자재료학회논문지
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• 제16권8호
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• pp.700-704
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• 2003

This paper describes on characteristics of 2" 3C-SiC wafer bonding using PECVD (plasma enhanced chemical vapor deposition) oxide and HF (hydrofluoride acid) for SiCOI (SiC-on-Insulator) structures and MEMS (micro-electro-mechanical system) applications. In this work, insulator layers were formed on a heteroepitaxial 3C-SiC film grown on a Si (001) wafer by thermal wet oxidation and PECVD process, successively. The pre-bonding of two polished PECVD oxide layers made the surface activation in HF and bonded under applied pressure. The bonding characteristics were evaluated by the effect of HF concentration used in the surface treatment on the roughness of the oxide and pre-bonding strength. Hydrophilic character of the oxidized 3C-SiC film surface was investigated by ATR-FTIR (attenuated total reflection Fourier transformed infrared spectroscopy). The root-mean-square suface roughness of the oxidized SiC layers was measured by AFM (atomic force microscope). The strength of the bond was measured by tensile strength meter. The bonded interface was also analyzed by IR camera and SEM (scanning electron microscope), and there are no bubbles or cavities in the bonding interface. The bonding strength initially increases with increasing HF concentration and reaches the maximum value at 2.0 ％ and then decreases. These results indicate that the 3C-SiC wafer direct bonding technique will offers significant advantages in the harsh MEMS applications.ions.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 G
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• pp.3313-3315
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• 1999

Si direct bonding(SDB) technology is very attractive for both Si-on-insulator(SOI) electric devices and MEMS applications because of its stress free structure and stability. This paper presents on pre-bonding according to HF pre-treatment conditions in Si wafer direct bonding. The characteristics of bonded sample were measured under different bonding conditions of HF concentration, and applied pressure. The bonding strength was evaluated by tensile strength method. The bonded interface and the void were analyzed by using SEM and IR camera respectively. A bond characteristic on the interface was analyzed by using IT- IR. Si-F bonds on Si surface after HF pre-treatment are replaced by Si-OH during a DI water rinse. Consequently, hydrophobic wafer was bonded by hydrogen bonding of Si $OH{\cdots}(HOH{\cdots}HOH{\cdots}HOH){\cdots}OH-Si$. The bond strength depends on the HF pre-treatment condition before pre- bonding (Min:$2.4kgf/crn^2{\sim}Max:14.9kgf/crn^2$)

• 열처리공학회지
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• 제31권2호
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• pp.49-55
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• 2018

A T-shape structure was manufactured by the superplastic forming and diffusion bonding process using two Ti-3Al-2.5V alloy tubes. A Ti-3Al-2.5V tube was prepared for the hydroforming in the superplastic condition until it reaches a surface area such as a roof welded in the hole of another Ti-3Al-2.5V tube. Afterward, the superplastic forming process and the diffusion bonding process were carried out simultaneously until the appropriate bonding along the interface area of two Ti-3Al-2.5V tubes was obtained. The bonding qualities were different at each location of the entire interface according to the applied process conditions such as strain, pressure, temperature, holding time, geometries, etc. The microstructures of bonding interface have been observed to understand the characteristics of the applied processes in this study.

• 전자공학회논문지
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• 제50권6호
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• pp.305-310
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• 2013

본 연구는 Si/$SiO_2$/Si-sub 구조의 SDB(silicon-direct-bonding) 웨이퍼를 이용한 고온용 압력센서의 제작 및 특성을 연구한 것이다. 압력센서는 SDB 웨이퍼의 첫 번째 층의 단결정 실리콘을 이용하여 압저항을 제작하기 때문에 감도가 우수하며, 두 번째 층의 산화막으로 압저항과 실리콘 기판을 절연 분리하여, 일반적인 실리콘소자의 사용 온도 한계인 $120^{\circ}C$ 이상의 고온에서도 사용이 가능하다. 제작된 압력센서는 고감도의 압력감도 및 센서 출력의 직선성 및 히스테리시스 특성이 매우 우수함을 알 수 있었다.

• 대한의용생체공학회:의공학회지
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• 제37권5호
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• pp.168-177
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• 2016

In this paper we present an implantable pressure sensor to measure real-time blood pressure by monitoring mechanical movement of artery. Sensor is composed of inductors (L) and capacitors (C) which are formed by microfabrication and direct bonding on two biocompatible substrates (quartz). When electrical potential is applied to the sensor, the inductors and capacitors generates a LC resonance circuit and produce characteristic resonant frequencies. Real-time variation of the resonant frequency is monitored by an external measurement system using inductive coupling. Structural and electrical simulation was performed by Computer Aided Engineering (CAE) programs, ANSYS and HFSS, to optimize geometry of sensor. Ultrafast laser (femto-second) cutting and MEMS process were executed as sensor fabrication methods with consideration of brittleness of the substrate and small radial artery size. After whole fabrication processes, we got sensors of $3mm{\times}15mm{\times}0.5mm$. Resonant frequency of the sensor was around 90 MHz at atmosphere (760 mmHg), and the sensor has good linearity without any hysteresis. Longterm (5 years) stability of the sensor was verified by thermal acceleration testing with Arrhenius model. Moreover, in-vitro cytotoxicity test was done to show biocompatiblity of the sensor and validation of real-time blood pressure measurement was verified with animal test by implant of the sensor. By integration with development of external interrogation system, the proposed sensor system will be a promising method to measure real-time blood pressure.

• 한국자동차공학회논문집
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• 제21권4호
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• pp.113-119
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• 2013

The transient liquid phase (TLP) bonding was used to fabricate autogenous joints in a magnesium alloy AZ31 with the aid of a pure Ni interlayer. A $13{\mu}m$ thick pure Ni foil was used in order to form a Mg-Ni eutectic liquid at the joint interface. The interface of reaction and composition profiles were investigated as a function of bonding time using a pressure of 0.16 MPa and a bonding temperature of $515^{\circ}C$. The quality of the joints produced was examined by metallurgical characterization and the joint microstructure developed across the diffusion bonds was related to changes in mechanical properties as a function of the bonding time.

• 한국군사과학기술학회지
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• 제8권3호
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• pp.51-55
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• 2005

In this paper, a near net shape technology using superplasticity and diffusion bonding characteristics was presented for application to various components of aircraft and missiles. Due to these special characteristics of some aerospace alloys, it is possible to produce complex components to shape very near final dimension with enhanced design freedom, reduced material usage, and overall saving of weight and cost. The high pressure vessel for a space launcher was fabricated with Ti-6Al-4V alloy by superplastic forming and diffusion bonding process and the failure characteristics are compared with conventionally fabricated vessel spin formed and TIG welded. The structural integrity of the superplastic forming and diffusion bonding process was successfully demonstrated.

• 대한치과보철학회지
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• 제31권1호
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• pp.1-10
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• 1993

The purpose of this study was to evlauate the microleakage of 3 dentin bonding agents using different dentin pretreatment method under simulated physilogic pressure in cementing the porcelain laminate veneer. Noncarious 60 human maxillary molars were selected and randomly assigned to 4 groups of 15 each. The group with the margin placed on the enamel was classified as the control and the groups with the margin placed on root surface were subdivided into 3 groups according to the dentin bonding agents used. The group using All Bond 2 was classified as experimental group 1, the group using Scotchbond MP was classified as experimental group 2, and the group using Gluma was classified as experimental group 3. Roots were removed at 3mm below the cementoenamel junction, and reductions of the teeth for the porcelain laminate veneer were done on the mesial 1/2 of the buccal surface of each teeth. The pulp was extirpated and the pulp chamber was cleaned with 37% phosphoric acid for the patency of dentinal tubule. Under simulated physiologic pressure, porcelain laminate veneers were cemented to the teeth using each dentin bonding agent and luting cement. After cementation, all samples were stored at 36t in water for 24 hours and thermocycled for 1500 cycles, then immersed in 0.5% basic fuchsin solution and the teeth were sectioned longitudinally by using diamond saw and the extent of microleakage was measured. The following results were obtained, 1. Microleakage was observed in a few samples of control group but all the samples of experimental groups. 2. The control group showed the less extent of microleakage than the experimental groups. In experimental groups the experimental group 1 & the experimental group 2 showed similiar extent of microleakage and the experimental group 3 showed the greater extent of microleakage than other groups. Conclusively, practicing the porcelain laminate veneers in the clinic, although the margin of the porcelain laminate veneer should be placed on enamel, in the case that it is inevitable to place the margin of the porcelain laminate veneer on the root surface, it is recommened to use dentin bonding agents which use no dentin pretreatment or a dentin pretreatment which can leave the smear plugs.

• 마이크로전자및패키징학회지
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• 제27권3호
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• pp.55-60
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• 2020

최근 참단 반도체 패키징 기술은 고성능 SIP(system in packaging) 구조로 발전해 가고 있고, 이를 실현시키기 위해서 구리 대 구리 접합은 가장 핵심적인 기술로 대두되고 있다. 구리 대 구리 접합 기술은 아직 구리의 산화 특성과 고온 및 고압력 공정 조건, 등 해결해야 할 문제점들이 남아 있다. 본 연구에서는 아르곤과 질소를 이용한 2단계 플라즈마 공정을 이용한 저온 구리 접합 공정의 접합 계면 품질을 정량적 접합 강도 측정을 통하여 확인하였다. 2단계 플라즈마 공정은 구리 표면에 구리 질화막을 형성하여 저온 구리 접합을 가능하게 한다. 구리 접합 후 접합 강도 측정은 4점 굽힘 시험법과 전단 시험법으로 수행하였으며, 평균 접합 전단 강도는 30.40 MPa로 우수한 접합 강도를 보였다.