• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.223-227
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• 2003

In this study, ultrasonic rotary motors using a bolted langevin type ultrasonic vibrator were designed and fabricated. The stator vibrator has a longitudinal transducer section composed of two metal blocks and two piezoelectric ceramic elements (thickness-polarized) and a mode conversion metal block section called a torsion coupler. And, three kinds of motors were studied by finite element analysis and experiments. So, as material of torsion coupler which generate mode conversion of vibration copper, brass, and phosphor bronze were used. As a result, speed and torque were changed in proportion to the electrical input Voltage, but it was saturated in high voltage. And bad efficiency which was different from a expectation was measured in this motors. So, various problems should be improved for practical use. Finally, The motor which has 1 [cm] diameter was fabricated to present a possibility of miniaturization of this type motors.