• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.249-249
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• 1999

GaN과 같은 III-nitride 반도체 관한 식각 기술의 연구는 blue-emitting laser diode(LD)를 위한 경면(mirror facet)의 형성뿐만아니라 새로운 display 용도의 light emitting diodes (LED), 고온에서 작동되는 광전소자 제조 등에도 그 중요성이 증대되고 있다. 최근에는 III-nitride 물질의 높은 식각속도와 미려하고 수직한 식각형상을 이루기 위하여 ECR(Electron Cyclotron Resonance)이나 ICP(Inductively Coupled Plasma)와 같은 고밀도 플라즈마 식각과 CAIBE(Chemically assisted ion beam etching)를 이용한 연구가 진행되고 있다. 현재 제조되어 지고 있는 LED 및 LD와 같은 광소자의 구조의 대부분은 p-GaN/AlGaN/InGaN(Q.W)/AlGaN/n-GaN 와 같은 여러 층의 형태로 이루어져 있다. 이중 InGaN는 광소자나 전자소자의 특성에 영향을 주는 가장 중요한 부분으로써 현재까지 보고된 식각연구는 undoped GaN에 대부분 집중되고 있고 이에 비해 소자 특성에 핵심을 이루는 InGaN의 식각특성에 관한 연구는 미흡한 상황이다. 본 연구에서는 고밀도 플라즈마원인 ICP 장비를 이용하여 InGaN를 식각하였고, 식각에는 Cl2/CH4, Cl2/Ar 플라즈마를 사용하였다. InGaN의 식각특성에 영향을 미치는 플라즈마의 특성을 관찰하기 위하여 quadrupole mass spectrometry(QMS)와 optical emission spectroscopy(PES)를 사용하였다. 기판 온도는 5$0^{\circ}C$, 공정 압력은 5,Torr에서 30mTorr로 변화시켰고 inductive power는 200~800watt, bias voltage는 0~-200voltage로 변화시켰으며 식각마스크로는 SiO2를 patterning 하여 사용하였다. n-GaN, p-GaN 층 이외에 광소자 제조시 필수적인 InGaN 층을 100% Cl2로 식각한 경우에 InGaN의 식각속도가 GaN에 비해 매우 낮은 식각속도를 보였다. Cl2 gas에 소량의 CH4나 Ar gas를 첨가하는 경우와 공정압력을 감소시키는 경우 식각속도는 증가하였고, Cl2/10%Ar 플라즈마에서 공정 압력을 감소시키는 경우 식각속도는 증가하였고, Cl2/10%CHF3 와 Cl2/10%Ar 플라즈마에서 공정압력을 15mTorr로 감소시키는 경우 InGaN과 GaNrks의 선택적인 식각이 가능하였다. InGaN의 식각속도는 Cl2/Ar 플라즈마의 이온에 의한 Cl2/CHF3(CH4) 플라즈마에서의 CHx radical 형성에 의하여 증가하는 것으로 사료되어 진다.

• 한국진공학회지
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• 제12권S1호
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• pp.95-99
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• 2003

We successfully grew InN/GaN single quantum well structures by metal-organic chemical vapor deposition and confirmed their formation by optical and structural measurements. We speculate that relatively high growth temperature ($730^{\circ}C$) of InN layer enhanced the formation of 2-dimensional quantum well structures, presumably due to high adatom mobility. As the growth interruption time increased, the PL emission efficiency from InN layer improved with peak position blue-shifted and the dislocation density decreased by one order of magnitude. The high resolution cross-sectional TEM images clearly showed that the InN layer thickness reduced from 2.5 nm (without GI) to about I urn (with 10 sec GI) and the InN/GaN interface became very flat with 10 sec GI. We suggest that decomposition and mass transport processes on InN during GI is responsible for these phenomena.

• 천문학회보
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• 제35권2호
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• pp.42.1-42.1
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• 2010

We present ultraviolet (UV) photometric properties of dwarf galaxies in Fornax cluster and Ursa Major group in comparison with Virgo cluster using GALEX data. We construct UV color-magnitude relations (CMRs) of dwarf galaxies matching with available optical photometry and SDSS data. Majority of dwarf galaxies in Fornax cluster show sequence in UV CMRs consistent with that of dwarf elliptical (dEs) in Virgo cluster indicating similar age and metallicity properties of dEs in two clusters. The dS0 sequence in Fornax cluster is not distinct as much as that in Virgo cluster. Dwarf galaxies in outer region of the Fornax cluster show more bluer UV colors with a wide scatter in CMRs, which indicates recent star formation activity. We show that the UV colors of dwarf galaxies are related with the distribution and strength of the X-ray emission in the cluster. In contrast to the Fornax cluster, most dwarf galaxies in Ursa Major group are located in the blue cloud showing recent or on-going star formation, and few galaxies show characteristics of dEs. We discuss relationship between UV properties of dwarf galaxies and different environment of cluster.

• 대한전자공학회논문지SD
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• 제37권1호
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• pp.29-35
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• 2000

전자빔 증착 장비를 이용하여 SrS:Cu,X TFEL 소자를 제작한 후, 발광 특성을 분석하였다. 형광체 모체는 SrS 분말을 사용하였고 발광 중심체로는 Cu, $CuF_2,\;Cu_2S$ 또는 CuCl 등의 미분말을 사용하였다. SrS:Cu,X TFEL 소자의 발광 특성은 부활성제에 따라 매우 많은 변화를 나타내었다. SrS:$Cu_2$ TFEL 소자의 휘도($L_{40}$)와 효율 (${\eta}_{20}$)은 각각 1443 cd/$m^2$와 2.44 lm/w를 나타내었고, 녹색 빛의 발광 효율은 ZnS:Tb TFEL 소자보다 높아 새로운 녹색 형광체로의 활용이 기대되었다. SrS:CuCl TFEL 소자의 휘도($L_{40}$)와 효율(${\eta}_{20}$)은 각각 262 cd/$m^2$와 0.26 lm/w를 나타내었고 청색 빛을 방출하여 새로운 청색 형광체로의 활용 가능성을 확인하였다.

• 한국재료학회지
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• 제25권2호
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• pp.95-99
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• 2015

$NiAl_2O_4$ nanoparticle was synthesized by a reverse micelle processing for inorganic pigment. $Ni(NO_3)_2{\cdot}6H_2O$ and $Al(NO_3)_3{\cdot}9H_2O$ were used for the precursor in order to synthesize $NiAl_2O_4$ nanoparticles. The aqueous solution, which consisted of a mixing molar ratio of Ni/Al, was 1:2 and heat treated at $800{\sim}1100^{\circ}C$ for 2h. The average size and distribution of synthesized $NiAl_2O_4$ powders are in the range of 10-20 nm and narrow, respectively. The average size of the synthesized $NiAl_2O_4$ powders increased with an increasing water-to-surfactant molar ratio and heating temperature. The crystallinity of synthesized $NiAl_2O_4$ powder increased with an increasing heating temperature. The synthesized $NiAl_2O_4$ powders were characterized by X-ray diffraction analysis(XRD), a field emission scanning electron microscopy(FE-SEM), and a color spectrophotometer. The properties of synthesized powders were affected as a function such as a molar ratio and heating temperature. Results indicate that synthesis using a reverse miclle processing is a favorable process to obtain $NiAl_2O_4$ spinels at low temperatures. The procedure performed suggests that this new synthesis route for producing these oxides has the advantage of being fast and simple. Colorimetric coordinates indicate that the pigments obtained exhibit blue colors.

• 한국표면공학회지
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• 제47권4호
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• pp.204-209
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• 2014

The electrodeposition of ZnO nanorods was performed on ITO glass. The optimization of two process parameters (solution temperature and growth time) has been studied in order to control the orientation, morphology, density, and growth rate of ZnO nanorods. The structural and optical properties of ZnO nanorods were systematically investigated by using field-emission scanning electron microscopy, X-ray diffractometer, and photoluminescence. Commonly, the results of the structural property show that hexagonal ZnO nanorods with wurtzite crystal structures have a c-axis orientation, and higher intensity for the ZnO (002) diffraction peaks. Furthermore, the nanorods length increased with increasing both the solution temperature and the growth time. The results of the optical property show a strong UV (3.28 eV) peaks and a weak visible (1.9~2.4 eV) bands, the intensity of UV peaks was increased with increasing both the solution temperature and the growth time. Especially, the UV peak for growth of nanorods at $75^{\circ}C$ blue-shift than different temperatures.

• Journal of Korean Vacuum Science & Technology
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• 제4권2호
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• pp.47-49
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• 2000

We report on the fabrication and characterization of InGaN/GaN multiple quantum well light emitting diode (LED) with a highly transparent Pt ohmic contact as a current spreading layer. The value of light transmittance of a Pt thin film with a thickness of 8 m on p-GaN was measured to be 85% at 450nm. The peak wavelength and the full-width at half-maximum (FWHM) of the emission spectrum of the LED at 20 mA were 453 m and 23 m, respectively. Pt-contacted LEDs show good electrical properties and high light-output efficiency compared to Ni/Au-contacted ones. These results suggest that a Pt thin film can be used as an effective current spreading layer with high light-transparency.

• 한국분말재료학회지
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• 제23권2호
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• pp.91-94
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• 2016

High-quality colloidal CdSe/ZnS (core/shell) is synthesized using a continuous microreactor. The particle size of the synthesized quantum dots (QDs) is a function of the precursor flow rate; as the precursor flow rate increases, the size of the QDs decreases and the band gap energy increases. The photoluminescence properties are found to depend strongly on the flow rate of the CdSe precursor owing to the change in the core size. In addition, a gradual shift in the maximum luminescent wave (${\lambda}_{max}$) to shorter wavelengths (blue shift) is found owing to the decrease in the QD size in accordance with the quantum confinement effect. The ZnS shell decreases the surface defect concentration of CdSe. It also lowers the thermal energy dissipation by increasing the concentration of recombination. Thus, a relatively high emission and quantum yield occur because of an increase in the optical energy emitted at equal concentration. In addition, the maximum quantum yield is derived for process conditions of 0.35 ml/min and is related to the optimum thickness of the shell material.

• 한국분말재료학회지
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• 제27권3호
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• pp.233-240
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• 2020

Nano-sized ZnSe particles are successfully synthesized in an aqueous solution at room temperature using sodium borohydride (NaBH₄) and thioglycolic acid (TGA) as the reducing agent and stabilizer, respectively. The effects of the mass ratio of the reducing agent to Se, stabilizer concentration, and stirring time on the synthesis of the ZnSe nanoparticles are evaluated. The light absorption/emission properties of the synthesized nanoparticles are characterized using ultraviolet-visible (UV-vis) spectroscopy, photoluminescence (PL) spectroscopy, and particle size analyzer (PSA) techniques. At least one mass ratio (NaBH4/Se) of the reducing agent should be added to produce ZnSe nanoparticles finer than 10 nm and to absorb UV-vis light shorter than the ZnSe bulk absorption wavelength of 460 nm. As the ratio of the reducing agent increases, the absorption wavelengths in the UV-vis curves are blue-shifted. Stirring in the atmosphere acts as a deterrent to the reduction reaction and formation of nanoparticles, but if not stirred in the atmosphere, the result is on par with synthesis in a nitrogen atmosphere. The stabilizer, TGA, has an impact on the Zn precursor synthesis. The fabricated nanoparticles exhibit excellent photo-absorption/discharge characteristics, suggesting that ZnSe nanoparticles can be alloyed without the need for organic solutions or high-temperature environments.

• 한국우주과학회:학술대회논문집(한국우주과학회보)
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• 한국우주과학회 2009년도 한국우주과학회보 제18권2호
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• pp.34.4-35
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• 2009

We have studied the radial g-r color gradients of early-type galaxies in the Sloan Digital Sky Survey (SDSS) DR6 in the redshift range 0.00 < z < 0.06. The color profiles of ~30 per cent of the galaxies in this sample show positive color gradients (centers being bluer). These positive gradient galaxies often show strong $H\beta$ absorption line strengths or emission line ratios that are consistent with star-forming populations. Combining the optical data with Galaxy Evolution Explorer (GALEX) UV photometry, we find that all positive gradient galaxies show blue UV-optical colors. They also exhibit a tendency of having a lower stellar velocity dispersion. Positive gradient galaxies tend to live in lower density regions than negative gradient galaxies and are likely to have a late-type companion galaxy. On the other hand, massive early-type galaxies show negative color gradients. A simplistic population analysis shows that these positive color gradients are visible only for half a billion years after a star burst. Although the effective radius decreases and mean surface brightness increases due to this centrally concentrated star formation, the positions of the positive gradient galaxies on the fundamental plane cannot be reproduced by any amount of recent star formation. Instead it required a lower velocity dispersion.