• 대한기계학회논문집A
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• 제29권10호
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• pp.1289-1297
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• 2005

The flow in a microchannel is usually characterized as a low Reynolds number (Re) so that good mixing is quite difficult to be achieved. In this regard, we developed a novel chaotic micromixer, named Serpentine Laminating Micromixer (SLM) in the present study, Part 1. In the SLM, the higher level of chaotic mixing can be achieved by combining two general chaotic mixing mechanisms: splitting/recombination and chaotic advection. The splitting and recombination (in other term, lamination) mechanism is obtained by the successive arrangement of 'F'-shape mixing units in two layers. The chaotic advection is induced by the overall three-dimensional serpentine path of the microchannel. Chaotic mixing performance of the SLM was fully characterized numerically. To compare the mixing performance, a T-type micromixer which has the same width, height and length of the SLM was also designed. The three-dimensional numerical mixing simulations show the superiority of the SLM over the T-type micromixer. From the cross-sectional simulation results of mixing patterns, the chaotic advection effect from the serpentine channel path design acts favorably to realize the ideal lamination of fluid flow as Re increases. Chaotic mixing mechanism, proposed in this study, could be easily integrated in Micro-Total-Analysis-System, Lab-on-a-Chip and so on.

• 대한기계학회논문집A
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• 제29권10호
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• pp.1298-1306
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• 2005

In this paper, Part II, we realized the Serpentine Laminating Micromirer (SLM) which was proposed in the accompanying paper, Part I, by means of the injection molding process in mass production. In the SLM, the higher level of chaotic mixing can be achieved by combining two general chaotic mixing mechanisms of splitting/recombination and chaotic advection by the successive arrangement of 'F'-shape mixing units in two layers. Mold inserts for the injection molding process of the SLM were fabricated by SU-8 photolithography and nickel electroplating. The SLM was realized by injection molding of COC (cyclic olefin copolymer) with the fabricated mold inserts and thermal bonding of two injection molded COC substrates. To compare the mixing performance, a T-type micromixer was also fabricated. Mixing performances of micromixers were experimentally characterized in terms of an average mixing color intensity of a pH indicator, phenolphthalein. Experimental results show that the SLM has much better mixing performance than the I-type micromixer and chaotic mixing was successfully achieved from the SLM over the wide range of Reynolds number (Re). The chaotic micromixer, SLM proposed in this study, could be easily integrated in Micro-Total-Analysis- System , Lab-on-a-Chip and so on.

• Smart Structures and Systems
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• 제8권1호
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• pp.53-67
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• 2011

Human state in human-machine systems highly affects the overall system performance, and should be detected and monitored. Physiological cues are essential indicators of human state and useful for the purpose of monitoring. The study presented in this paper was focused on developing a bio-inspired sensing system, i.e., Nano-Skin, to non-intrusively measure physiological cues on human-machine contact surfaces to detect human state. The paper is presented in three parts. The first part is to analyze the relationship between human state and physiological cues, and to introduce the conceptual design of Nano-Skin. Generally, heart rate, skin conductance, skin temperature, operating force, blood alcohol concentration, sweat rate, and electromyography are closely related with human state. They can be measured through human-machine contact surfaces using Nano-Skin. The second part is to discuss the technologies for skin temperature measurement. The third part is to introduce the design and manufacture of the Nano-Skin for skin temperature measurement. Experiments were performed to verify the performance of the Nano-Skin in temperature measurement. Overall, the study concludes that Nano-Skin is a promising product for measuring physiological cues on human-machine contact surfaces to detect human state.

• 센서학회지
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• 제12권4호
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• pp.156-163
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• 2003

일반적인 표면 마이크로머시닝 공정과 고분자의 중합공정을 결합하여 전도성 고분자인 폴리피롤 액추에이터를 제작하였다. 폴리피롤 액추에이터의 제작 공정을 검증하기 위한 가장 기본적인 구조물은 폴리피롤 캔틸레버이며 이를 이용하여 세포 조작에 응용 가능한 폴리피롤 그리퍼 및 밸브의 기본 구조물들을 제작하였다. 그리퍼는 손가락과 유사한 형태로 뼈에 해당하는 단단한 고분자와 근육에 해당하는 폴리피롤 등으로 구성된다. 밸브는 폴리피롤 캔틸레버에 유로가 결합된 형태로 제작되었다. 제안한 폴리피롤 액추에이터의 제작 공정 및 기본 구조물들은 세포 조작기구와 같은 바이오 관련 응용에 이용될 수 있을 것이다.

• 한국전기전자재료학회논문지
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• 제20권2호
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• pp.156-161
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• 2007

This paper describes the characteristics of polycrystalline ${\beta}$ or 3C (cubic)-SiC (silicon carbide) thin films heteroepitaxailly grown on Si wafers with thermal oxide. In this work, the poly 3C-SiC film was deposited by APCVD (atmospheric pressure chemical vapor deposition) method using HMDS (hexamethyildisilane: $Si_{2}(CH_{3}_{6})$ single precursor. The deposition was performed under various conditions to determine the optimized growth conditions. The crystallinity of the 3C-SiC thin film was analyzed by XPS (X-ray photoelectron spectroscopy), XRD (X-ray diffraction) and FT-IR (fourier transform-infrared spectometers), respectively. The surface morphology was also observed by AFM (atomic force microscopy) and voids or dislocations between SiC and $SiO_{2}$ were measured by SEM (scanning electron microscope). Finally, depth profiling was invesigated by GDS (glow discharge spectrometer) for component ratios analysis of Si and C according to the grown 3C-SiC film thickness. From these results, the grown poly 3C-SiC thin film is very good crystalline quality, surface like mirror and low defect. Therfore, the poly 3C-SiC thin film is suitable for extreme environment, Bio and RF MEMS applications in conjunction with Si micromaching.

• Current Research on Agriculture and Life Sciences
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• 제32권2호
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• pp.79-84
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• 2014

본 논문에서는 저가, 저전력 및 소형의 IMU를 구성하기 위한 MEMS 관성 센서를 이용하여 자세 정보를 제공받는 ARHES에 위의 센서를 사용하기 위해 자이로 센서 및 가속도센서의 데이터 출력 특성을 검증하여 오차 및 정확도를 분석하였다. 센서 실험을 위하여 진자 실험 장치를 제작하였고, 진자 운동에 대한 센서 데이터를 수집하였다. 이론적인 수식을 유추하여 센서 데이터의 정확성 분석을 위한 기준 값으로 설정하였다. 센서값과 이론값을 비교하면 각속도에서 4.32~5.72%, 가속도에서 x-, z-축 방향에 대하여 각각 3.53~6.74% 및 3.91~4.16%의 오차율을 나타냈다. 진자실험 장치를 이용한 센서 검증에서 무인헬리콥터에 사용될 센서로서 적합한 것으로 평가되었으며 이는 짐벌장치 등을 이용한 자세추정 알고리즘을 구성하는데 기초가 되었다. 또한, 더욱 정밀한 실험을 위해서는 온도 등 주변 환경 요인에 대한 보정이 요구된다.

• 소성∙가공
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• 제14권5호
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• pp.473-476
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• 2005

The demand of on-chip total analyzing system with MEMS (micro electro mechanical system) bio/chemical sensor is rapidly increasing. In on-chip total analyzing system, to detect the bio/chemical products with submicron feature size, a filtration system with nano-filter is required. One of the conventional methods to fabricate nano-filter is to use direct patterning or RIE (reactive ion etching). However, those procedures are very costly and are not suitable fur mass production. In this study, we suggested new fabrication method for a nano-filter based on replication process, which is simple and low cost process. After the Si master was fabricated by laser interference lithography and reactive ion etching process, the polymeric mold was replicated by UV-imprint process. Metallic nano-filter was fabricated after removing the polymeric part of metal deposited polymeric mold. Finally, our fabrication method was applied to metallic nano-filter with $1{\mu}m$ pitch size and $0.4{\mu}m$ hole size for bacteria sensor application.

• Korean Journal of Acupuncture
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• 제26권1호
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• pp.51-60
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• 2009

Objectives : It is considered not easy to diagnose the condition of acupoints or meridians. Oriental Medical instruments have rarely complied with Oriental Medical diagnostic/therapeutic theories. The aim of this study was to develop a system which measures meridian electric potential(MEP) in proportion to bio-electric charge for the purpose of Oriental Medical diagnosis. Method : To evaluate a meridian energy measurement system(MEMS), we carried out a performance test. For significance test, we conducted a clinical trial which measured the MEP of ST36(Chok-samni) on Stomach Meridian(ST). Results & Conclusions : We could evaluate the balance or the imbalance of the MEPs on the left/right ST36. Also, through the comparison of MEPs before and after meals, we could identify the correlation between the MEP and the condition of internal organs. Namely, MEP reflects the condition of acupoints/meridians and internal organs, therefore, we propose this new method for measuring and analyzing the condition of meridians and acupoints for Oriental Medical diagnosis.

• JSTS:Journal of Semiconductor Technology and Science
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• 제13권4호
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• pp.355-360
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• 2013

A wireless intraocular (IOP) pressure sensor based on micro electro mechanical system (MEMS) technology is proposed. The proposed IOP sensor uses variable inductance according to the external pressure. The proposed sensor is composed of two flexible membranes: a ferrite bottom part, an inductor, and a capacitor. The inductance of the sensor varies according to the external pressure. The resonance frequency of the sensor is also varied, and this frequency is detected using an external coil. The external coil is designed with an FR-4 printed circuit board. The feasibility of the proposed sensor structure using variable inductance to detect the external pressure is successfully demonstrated.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.1142-1146
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• 2004

The ultra precision linear stage is an essential device in the fields of MEMS and Bio technology. A piezo electric motor is widely used for its better linear characteristics, faster response time, and smaller size than conventional electro-magnetic actuator. We develop a new inchworm type motor to implement an actuator-integrated a long stroke linear stage which can move fast. To implement a servo system, we use a heterodyne interferometer as a position sensor, and we propose a new measurement technique using I/Q demodulator, and we propose a counting method to measure the position of fast moving object with low cost circuitry. The characteristics of the actuator and servo system are evaluated by measuring its displacement with a commercial laser interferometer.