• Title/Summary/Keyword: Bimorph Actuator

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Finite element analysis of the PZT 3203HD bimorph beam actuator based on material non-linear characteristics (박막형 압전재료 3203HD의 재료 비선형성을 고려한 바이모프 보 작동기의 비선형 유한 요소해석)

  • Jang, Sung-Hoon;Kim, Young-Sung;Lee, Sang-Ki;Park, Hoon-Cheol;Yoon, Kwang-Joon
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.32 no.4
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    • pp.18-23
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    • 2004
  • In this paper, material non-linear behavior of PZT wafer(3203HD, CTS) under high electric field and stress is experimentally investigated and the non-linearity of the PZT wafer is numerically simulated. Empirical functions that can represent the non-linear behavior of the PZT wafer have been extracted based on the measured piezo-strain under stress. The functions are implemented in an incremental finite element formulation for material non-linear analysis. New definition of the piezoelectric constant and the incremental strain are incorporated into the finite element formulation for a better reproduction of the non-linear behavior. With the new definition of the in incremental piero-strain the measured non-linear behavior of the PZT wafer has been accurately reproduced even for high electric field. For validation of the measured non-linear characteristics and the proposed approach, a PZT bimorph beam actuator has been numerically and experimentally tested. The predicted actuation displacement, based on the material nonlinear finite element analysis, showed a good agreement with the measured one.

Generation Properties of Bimorph Energy Harvester through Spring Structure (바이몰프 에너지하비스터의 스프링 지지구조에 따른 발전특성)

  • Kim, Chang-Il;Jeong, Young-Hun;Lee, Young-Jin;Paik, Jong-Hoo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.211-211
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    • 2008
  • 태양열, 바람, 지열, 진동 등의 우리주변에서 쉽게 얻을 수 있는 에너지를 모아서 필요로 하는 전자기기의 에너지원으로 사용하는 개념의 에너지하비스팅에 대한 연구가 활발히 진행되고 있다. 기계적인 변경으로 전압이 발생하는 압전체는 오래전 알려져 있었지만 발생전압이 낮아 에너지발전용으로 적용이 힘들었다. 하지만 전자기기의 소형화와 함께 필요로 하는 전력도 수 ${\mu}W$로 낮아짐으로 압전체를 이용한 에너지하비스팅이 주목 받고 있다. 전선으로 연결하여 전원을 공급하기 힘든 위치에 있는 전자기기는 주기적으로 배터리를 교환해 주어야한다. 이는 시간적, 금전적, 인적자원의 낭비이며 반영구적으로 전원을 공급할 장치개발이 필요하다. 구조물은 수~ 수십 Hz로 진동을 하며 이 진동으로 압전체에 변형을 주어 전압을 발생시킨다. 변형이 클 때 발생전압도 크게 되므로 압전체를 칸틸레버형태로 제작했다. 더 큰 전압발생을 위해 메탈을 사이에 두고 양면에 압전체를 둔 바이몰프 형태로 캔틸레버를 제작했다. 이때 진동의 충격을 완화시켜 압전체에 인가되도록 하고 구조물의 고유진동수모다 큰 진동수로 압전체가 진동하도록 하기위해 스프링을 사용하여 제작하였다. 이 스프링 지지구조 및 가진 조건에 따른 발전특성을 알아보았다.

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A study on the piezoelectric vibration device for mobile phone (이동통신 단말기용 압전 진동 장치에 관한 연구)

  • Yoo, J.S.;Kwon, O.D.;Yun, Y.J.;Kang, S.H.;Lim, K.J.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.379-382
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    • 2004
  • In this paper, it is investigated in advance about the PZT-based composition for piezoelectric vibration device. The specimens of piezoelectric ceramics are made of Columbite method. The piezoelectric vibration device by this composition is designed by ATILA(Magsoft) program used FEM(Finite Element Method). The vibration device used for mobile phone must be driven in the frequency of $130{\sim}200Hz$, so the resonant frequency of piezoelectricity must adjust driven frequency bandwidth. The result of analysis by ATILA is appeared dependant property of length, width, thickness and dummy weight about resonant frequency of the piezoelectric vibration device. The size of manufactured actuator is $28{\times}12{\times}0.3mm^3(length {\times}width{\times}thickness)$ and this is bimorph type. The test of manufactured piezoelectric vibration device measure displacement, acceleration and power dissipation. The piezoelectric vibration device has the advantage more than electro-magnetic motor, however the size of manufactured device is larger than electro-magnetic motor.

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A Slim PZT Actuator for Small form Factor Optical Disk Drives (초소형 광디스크 드라이브용 압전형 액츄에이터 제작)

  • Woosung Yang;Lee, Seung-Yop;Park, Young-Phil
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2003.05a
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    • pp.762-769
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    • 2003
  • 본 연구에서는 적층형 압전소자를 이용하여 초소형 및 슬림형 광디스크 드라이브용 광픽업 구동기를 개발하였다. 최근에 휴대용 정보기기의 급격한 발달로 인해 다양한 형태의 초소형 정보저장기기가 사용되고 있으며 착탈식 형태의 초소형 광디스크를 사용하는 ODD가 개발 중에 있다. 적층 형태의 압전소자와 유연 힌지 형태의 변위 확대기구를 사용하여 구동기의 출력 힘과 허용 변위를 증가시키도록 설계하였다. 압전형 구동기의 동특성을 고려한 모델링과 이론적 해석을 통해 목표 변위와 성능을 만족하도록 설계 변수를 최적화하였고 이를 ANSYS를 이용한 해석과 비교하였다. 상용화된 적층형 압전소자를 이용한 prototype 올 제작하여 실험을 수행하였으며 이론적인 예상 값과 잘 일치함을 보였다. 이와 같은 이론적 해석과 실험 결과를 토대로 높이가 2.5mm이며 15V 에서 $\pm$400$\mu\textrm{m}$의 변위를 갖는 슬림형 및 초소형 ODD에 적합한 압전형 구동기를 설계하였다.

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Design and Fabrication of Low-Voltage Twisting-Type Thermal Actuators for Micromirrors (마이크로 거울의 구동을 위한 저전압 비틀림형 열구동기의 설계 및 제작)

  • Kim, Dong-Hyun;Park, Yong-Chul;Park, Seung-Ho;Kwon, Oh-Myoung;Choi, Young-Ki;Lee, Joon-Sik
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.33 no.10
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    • pp.803-810
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    • 2009
  • Micromirrors have a wide range of applications such as optical switches, laser scanners, and digital projection displays. Due to their low performances and high costs, however, practical applications of micromirrors are quite limited. At present micromirrors demand not only a better design but also a simple fabrication process. In this study a twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo-mechanical theories and fabricated through a simple MEMS process. Each actuator consists of $SiO_2$ and gold thin-film layers. Simplified analytical model has been built to optimize the performance of micromirror. Due to unexpected resistance increase of metal film and alignment mismatch during fabrication process, experimental rotation angles of micromirrors are about $11^{\circ}$ at applied voltages less than 0.6V. From numerical simulation and analytical studies, however, the next design can provide rotation angles over $20^{\circ}$ at the same applied voltage.

A Study on the Micro Vapor Compressor based on Microfabrication Process for the Application to the Micro Miniature Refrigeration System (초소형 냉동시스템의 응용을 위한 마이크로 증기 압축기의 개발 및 성능에 관한 연구)

  • Yoon, Jae-Sung;Choi, Jong-Won;Kim, Min-Soo
    • Proceedings of the SAREK Conference
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    • 2006.06a
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    • pp.477-482
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    • 2006
  • In this study, a micro vapor compressor has been designed, fabricated and tested. The micro vapor compressor was made of silicon substrates and fabricated by micromachining process. The compressor is driven by a piezoelectric actuator which is widely used in microfluidic systems because of its strong force and rapid response. The actuator is a bimorph structure which consists of a silicon membrane and a piezoelectric ceramic film. A simulation work was conducted on the performance characteristics of the compressor. The simulation investigated the flow rate variation under various back pressure conditions. Experimental works were carried out on the operation of a compressor and the test results were compared with the simulation results.

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$H{\infty}$-force control of a artificial finger with distributed force sensor and piezoelectric actuator (분포센서를 가진 인공지의 $H{\infty}$-힘제어)

  • ;;;;Seiji Chonan
    • Journal of KSNVE
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    • v.6 no.5
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    • pp.555-565
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    • 1996
  • This paper is concerned with the theoretical and experimental study on the force control of a miniature robotic finger that grasps an object at three other positions with the fingertip. The artificial finger is a uniform flexible cantilever beam equipped with a distributed set of compact grasping force sensors. Control action is applied by a piezoceramic bimorph strip placed at the base of the finger. The mathematical model of the assembled electro- mechanical system is developed. The distributed sensors are described by a set of concentrated mass-spring system. The formulated equations of motion are then applied to a control problem in which the finger is commanded to grasp an object. The H$_{\infty}$-controller is introduced to drive the finger. The usefulness of the proposed control technique is verified by simulation and experiment..

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Effects of Elastic Energy of Thin Films on Bending of a Cantilevered Magnetostrictive Film- Substrate System

  • Si, Ho-Mun;Chongdu Cho;Kim, Chang-Boo
    • Journal of Mechanical Science and Technology
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    • v.18 no.4
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    • pp.622-629
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    • 2004
  • In this paper, effects of elastic energy of magnetostrictive film on the deflection of a cantilevered film-substrate system are investigated. The total energy including the elastic energy of magnetostrictive film is formulated. And it is minimized to give the curvatures and the position of neutral axis of the cantilevered system. To discuss the effects of the elastic energy of film in a measured system, three magnetostrictive unimorph cantilevers and a bimorph cantilever reported elsewhere are reviewed. It is shown that the assumption, since the thickness of film is much smaller than that of substrate the film elastic energy is negligible, can cause considerable error in evaluating magnetostrictive coefficients. Not the ratio of thicknesses but elastic energies between film and substrate is also shown to play important role in making decision whether the assumption is valid or not.

The Characteristics of Piezoelectric Strian Constants on PNN-PZ-PT Ceramics (PNN-PZ-PT계 세라믹스의 압전변위특성)

  • 정수태;남효덕;조상희
    • Journal of the Korean Ceramic Society
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    • v.26 no.6
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    • pp.802-810
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    • 1989
  • The temperature dependence of piezoelectric strain constant and the electric field induced strain are investigated as a function of PT in 0.5[xPT-(1-x)PZ]-0.5PNN ceramics. The piezoelectric strain constant d31 has the highest value(360$\times$10-12m/V) at PT=0.68. The temperature dependence of d31 is improved as Curie temperature of sample is increased, and the electric field dependence of induced strain is decreased with the coercive field increased. This ceramic system shows both piezoelectric effect and electrostrictive effect under the applied electric field. The piezoelectric of tetragonal phase is higher than that of rhombohedral phase, and the magnitude of electrostrictive constant is appeared in the order of morphotropic, rhombohedral and tetragonal phase. The piezoelectric strain constant with applied field must be considered theelectrostrictive effect due to 90$^{\circ}$domain wall displacements, and the displacement of bimorph type actuator agrees with the calulated value well.

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Focal length control of line-focus ultrasonic transducer using bimorph-type bending actuator (바이몰프형 밴딩 엑츄에이터를 이용한 선집속형 초음파 트랜스듀서의 초점 거리 제어)

  • Chae Min-ku;Kim Moo-Joon;Ha Kang-Lyeol
    • Proceedings of the Acoustical Society of Korea Conference
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    • spring
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    • pp.361-364
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    • 2002
  • 의료용 초음파 진단기는 음축 방향 초점거리의 제어를 위해서 각 진동요소의 전기단자에 전기회로를 이용한 가중치를 부가하는 방식을 사용하고 있다. 그러나 본 연구에서는 단일 PVDF로 구성된 트랜스듀서에 바이몰프 타입의 엑츄에이터를 부가하여 진동요소의 배열이나 전기적 가중치의 부가없이 기계적으로 곡률 반경(R.O.C. : Radius Of Curvature)을 제어하는 방법을 제안하였고, 바이몰프 타입 엑츄에이터에 인가한 전압 변화에 따른 트랜스듀서의 곡률 반경 변화를 측정하여 이에 따른 수중에서의 음장 분포 변화를 시뮬레이션 결과와 비교하였다.

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