• 한국자기학회지
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• 제22권6호
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• pp.204-209
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• 2012

본 연구에서는 CoFe/MnIr 이중층 구조의 계면에 존재하는 비상보성 반강자성(AF) 스핀들에 의한 교환 결합 에너지 특성을 강자성 공명(FMR) 측정법을 이용하여 분석하였다. MnIr의 두께가 $t_{AF}$= 0, 3 및 10 nm 재료를 열처리한 한 후 이들 재료의 FMR 신호를 측정하였으며, $t_{AF}$= 0 nm 재료를 기준으로 하여 $t_{AF}$= 3 및 10 nm 재료의 교환 바이어스 자기장($H_{ex}$)과 회전 이방성 자기장($H_{ra}$)을 도출하였다. $300^{\circ}C$에서 열처리한 재료의 경우, $H_{ex}$과 $H_{ra}$의 합은 MnIr의 임계 두께에 무관하게 동일한 값을 보이는데, 이는 비상보성 AF 스핀들이 모두 한 방향으로 정열 되었음을 의미한다. 이들 결과로부터 비상보성 AF 스핀들 중에서 일부분은 CoFe/MnIr의 계면에 고정되어 $H_{ex}$로 발현되어 나타나고, 나머지 부분은 자기장의 방향에 따라서 회전하므로 $H_{ra}$로 발현되고 있음을 알 수 있었다. 따라서 교환 결합 에너지는 교환 바이어스 에너지 및 회전 이방성 에너지의 합으로 표현될 수 있음을 보였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.77-77
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• 2011

These days, a growing demand for memory device is filled up with the flash memory and the dynamic random access memory (DRAM). Although DRAM is a reasonable solution for current demand, the universal novel memory with high density, high speed and nonvolatility, needs to be developed. Among various new memories, the magnetic random access memory (MRAM) device is considered as one of good candidate memories because of excellent features including high density, high speed, low operating power and nonvolatility. The etching of MTJ stack which is composed of magnetic materials and insulator such as MgO is one of the vital process for MRAM. Recently, MgO has attracted great interest in the MTJ stack as tunneling barrier layer for its high tunneling magnetoresistance values. For the successful realization of high density MRAM, the etching process of MgO thin films should be investigated. Until now, there were some works devoted to the investigations on etch characteristics of MgO thin films. Initially, ion milling was applied to the etching of MgO thin films. However, ion milling has many disadvantages such as sidewall redeposition and etching damage. High density plasma etching containing the magnetically enhanced reactive ion etching and high density reactive ion etching have been employed for the improvement of etching process. In this work, inductively coupled plasma reactive ion etching (ICPRIE) system was adopted for the improvement of etching process using MgO thin films and etching gas mixes of $CH_4$/Ar and $CH_4$/$O_2$/Ar have been employed. The etch rates are measured by a surface profilometer and etch profiles are observed using field emission scanning emission microscopy (FESEM). The effects of gas concentration and etch parameters such as coil rf power, dc-bias voltage to substrate, and gas pressure on etch characteristics will be systematically explored.

• E2M - 전기 전자와 첨단 소재
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• 제8권2호
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• pp.229-236
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• 1995

Multimedia has created a system environment that needs a combination of diverse peripherals, faster I/O, and easier configuration. The sheer volume of data one can expect with multimedia hardware and applications storage systems of higher capacity and faster data transfer rate. Unlike the magneto-optical(MO)disk technology which uses bias magnetic field in writing, both the reading and the writing in the phase change (PC) technology are performed only by laser light. In PC optical media, an active layer is reversibly converted between amorphous state and crystalline state by changing irradiation conditions of focused laser beam. Thus, as compared with MO disk, the PC disk has such great advantages that signals can be reproduced by change of reflectance of laser beams in the same manner as the compact disc. The reflectivity of a phase-change spot can be altered in a single pass under the head only through modulation of laser power. The principles and the current status of phase-change optical recording media combined with possible applications are discussed in the present article.

• Journal of Magnetics
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• 제11권3호
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• pp.108-110
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• 2006

We successfully enhanced the performance of a spin valve by inserting an ultra-thin layer of partially oxidized Fe in the pinned and free layers. With the exchange bias field kept large, the spin valve reached a GMR of 12%, which corresponded to a 55% increase in GMR when we compared it with that of spin valves without any inserted layer. The layer of partially oxidized Fe was more effective for improving the properties of the spin valve than the layer of partially oxidized $Co_{90}Fe_{10}$. Considering all the results, we can contribute the significant improvement to the combined effect of the modified local electronic structures at the Fe impurities and theenhanced spin-dependent reflections at the $\alpha-Fe_{2}O_{3} phase in the magnetic layer.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.12-12
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• 2010

By using scanning tunneling microscopy/spectroscopy (STM/S), we can make images of various physical properties in nanometer-scale spatial resolutions. Here, I demonstrate imaging of two electron-correlated subjects; screening and superconductivity by STM/S. The electrostatic potential around a charge is described with the Coulomb potential. When the charge is located in a metal, the potential is modified because of the free electrons in the host. The potential modification, called screening, is one of the fundamental phenomena in the condensed matter physics. Using low-temperature STM we have developed a method to measure electrostatic potential in high spatial and energy resolutions, and observed the potential around external charges screened by two-dimensional surface electronic states. Characteristic potential decay and the Friedel oscillation were clearly observed around the charges [1]. Superconductivity of nano-size materials, whose dimensions are comparable with the coherence length, is quite different from their bulk. We investigated superconductivity of ultra-thin Pb islands by directly measuring the superconducting gaps using STM. The obtained tunneling spectra exhibit a variation of zero bias conductance (ZBC) with a magnetic field, and spatial mappings of ZBC revealed the vortex formation [2]. Size dependence of the vortex formation will be discussed at the presentation.

• 한국자기학회지
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• 제10권2호
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• pp.67-73
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• 2000

6개의 타겟을 가진 직류 마그네트론 방식을 이용하여 스파터링 전력 및 압력을 변화시켜 Si/Ta(50 $\AA$)NiFe(60 $\AA$)/CoFe(20 $\AA$)/Cu(26 $\AA$)/CoFe(40 $\AA$)/FeMn(150 $\AA$)Ta(50 $\AA$) 스핀 밸브 박막을 제조하여 교환자기이방성 및 자기적 특성을 조사하였다. FeMn 층의 증착시 스파터링 전력을 증가시킴으로써 교환이방성을 증가시킬 수 있었으며, X-선 회절 실험결과 스파터링 전력 증가에 따른 교환이방성의 증가는 FeMn (111)면의 우선성장 발달에 기인하는 것으로 판단되었다. 강자성상을 사이에 두고 있는 Cu의 스파터링 압력을 1-5 mTorr 증가시 교환이방성이 급격히 감소하며, 자기저항비 및 자장민감도도 감소하였다. Si/Ta/NiFe/CoFe/Cu(t), 30 W/CoFe, 100 W/FeMn, 100 W/Ta 스핀 밸브에서 Cu 두께를 22-38 $\AA$까지 변화시켜 자기저항비를 조사한 결과 Cu의 두께가 22 $\AA$일 때 자기저항비 6.5%까지 얻을 수 있었으며, Cu 두께를 감소시켜 교환이방성을 증가시킬 수 있었다. 이와 같은 Cu 두께 감소에 따른 교환이방성의 증가는 FM-AFM 스핀-스핀 상호작용에 의하여 설명하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.196-196
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• 2012

Graphene, two-dimensional one-atom-thick planar sheet of carbon atoms densely packed in a honeycomb crystal lattice, has grabbled appreciable attention due to its extraordinary mechanical, thermal, electrical, and optical properties. Based on the graphene's high carrier mobility, high frequency graphene field effect transistors have been developed. Graphene is useful for photonic components as well as for the applications in electronic devices. Graphene's unique optical properties allowed us to develop ultra wide-bandwidth optical modulator, photo-detector, and broadband polarizer. Graphene can support SPP-like surface wave because it is considered as a two-dimensional metal-like systems. The SPPs are associated with the coupling between collective oscillation of free electrons in the metal and electromagnetic waves. The charged free carriers in the graphene contribute to support the surface waves at the graphene-dielectric interface by coupling to the electromagnetic wave. In addition, graphene can control the surface waves because its charge carrier density is tunable by means of a chemical doping method, varying the Fermi level by applying gate bias voltage, and/or applying magnetic field. As an extended application of graphene in photonics, we investigated the characteristics of the graphene-based plasmonic waveguide for optical signal transmission. The graphene strips embedded in a dielectric are served as a high-frequency optical signal guiding medium. The TM polarization wave is transmitted 6 mm-long graphene waveguide with the averaged extinction ratio of 19 dB at the telecom wavelength of $1.31{\mu}m$. 2.5 Gbps data transmission was successfully accomplished with the graphene waveguide. Based on these experimental results, we concluded that the graphene-based plasmonic waveguide can be exploited further for development of next-generation integrated photonic circuits on a chip.

• Journal of Magnetics
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• 제14권1호
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• pp.36-41
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• 2009

Magneto-optical Kerr effect (MOKE) magnetometry was used to investigate magnetization reversal dynamics in 30-nm NiFe/15-nm FeMn, 15-nm FeMn/30-nm CoFe bilayers, and 30-nm NiFe/(2,10)-nm FeMn/30-nm CoFe trilayers. The in-plane magnetization components of each ferromagnetic layer, both parallel and perpendicular to the applied field, were separately determined by measuring the longitudinal and transverse MOKE hysteresis loops from both the front and back sides of the film for an oblique incident s-polarized beam. The magnetization of the FeMn/CoFe bilayer was reversed abruptly and symmetrically through nucleation and domain wall propagation, while that of the NiFe/FeMn bilayer was reversed asymmetrically with a dominant rotation. In the NiFe/FeMn/CoFe trilayers, the magnetic reversal of the two ferromagnetic layers proceeded via nucleation and domain wall propagation for 2-nm FeMn, but via asymmetric rotation for 10-nm FeMn. The exchange-biased ferromagnetic layers showed the magnetization reversal along the same path in the film plane for the decreasing and increasing field branches from transverse MOKE hysteresis loops, which can be qualitatively explained by the theoretical model of the exchange-biased ferromagnetic/antiferromagnetic systems.

• 한국자기학회지
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• 제25권3호
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• pp.67-73
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• 2015

본 연구는 철기(Fe based) $Fe_{73.5}Si_{13.5}B_9Nb_3Cu_1$ 나노결정 합금의 분말코어(powder core)의 연자기적 특성 향상을 위한 기초연구로서, 절연 코팅제의 첨가량 및 분말입도에 따른 투자율, 코어손실 및 DC 바이어스 특성을 주로 조사하였다. 우선 합금조성을 PFC 장치를 이용하여 비정질 합금리본을 제조한 후, 열처리, 미분쇄 및 분급하여 얻어진 합금분말에 절연 코팅제(PEI)의 첨가량을 0.5, 1.0, 2.0, 2.5 wt%로 변화시켜 $16ton/cm^2$으로 압축성형 및 결정화 열처리하여 제조한 토로이달 나노결정 분말코어($OD12.7mm{\times}ID7.62mm{\times}H4.75mm$)는 절연 코팅제 함량이 증가할수록 투자율은 감소하였지만, 코어손실 및 DC 바이어스 특성은 향상됨을 확인하였다. 이러한 이유는 합금분말 절연 코팅제 첨가량이 증가할수록 비정질 합금분말 입자가 적어져 분말코어의 성형밀도가 낮아지기 때문으로 추정되었으며, 절연 코팅제의 함량은 1 wt%가 가장 적합한 것으로 판단되었다. 또한 절연 코팅제 함량을 1 wt%로 고정하고, 합금분말의 입도에 따라 제조한 분말코어의 경우, 실효투자율 및 코어손실은 입도가 클수록 우수하였지만, DC 바이어스 특성은 인가자장이 증가함에 따라 더욱 나빠짐을 확인하였다. 그 이유는 합금분말 표면의 코팅층 두께 차이에 의한 절연효과, 잔류기공 혹은 분말코어의 성형밀도 차이 등에 기인하는 것으로 추정되었다.

• 한국자기학회지
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• 제17권3호
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• pp.120-123
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• 2007

이 연구에서는 Ta 45/Ru 9.5/IrMn 10/CoFe $3/AlO_x$/자유층/$AlO_x$/CoFe 7/IrMn 10/Ru 60(nm) 구조를 갖는 이중장벽 자기터널접합(double-barrier magnetic tunnel junction: DMTJ)를 다루었다. 자유층은 $Ni_{16}Fe_{62}Si_8B_{14}\;7nm$, $Co_{90}Fe_{10}(fcc)$ 7 nm 및 $CoFet_1$/NiFeSiB $t_2$/CoFe $t_1$으로 구성하였으며 두께 $t_1,\;t_2$는 변화시켰다. 즉 TMR비와 RA를 개선하기 위하여 부분적으로 CoFe층을 대체할 수 있는 비정질 NiFeSiB층이 혼합된 자유층 CoFe/NiFeSiB/CoFe을 갖는 DMTJ를 연구하였다. NiFeSiB($t_1=0,\;t_2=7$)만의 자유층을 갖는 DMTJ는 터널자기저항(TMR)비 28%, 면적-저항곱(RA) $86k{\Omega}{\mu}m^2$, 보자력($H_c$) 11 Oe 및 층간 결합장($H_i$) 20 Oe를 나타내었다. $t_1=1.5,\;t_2=4$인 경우의 하이브리드 DMTJ는 TMR비 30%, RA $68k{\Omega}{\mu}m^2$ 및 $H_c\;11\;Oe$를 가졌으나 $H_i$는 37 Oe로 증가하였다. 원자현미경(AFM)과 투과전자현미경(TEM)측정을 통하여 NiFeSiB층 두께가 감소하면 $H_i$가 증가하는 것을 확인하였다. 비정질 NiFeSiB층이 두꺼워지면 보통 계면의 기복을 유도하는 원주형성장(columnar growth)를 지연시키는데 유효하였다. 그러나 NiFeSiB층이 얇으면 표면거칠기는 증가하고 전자기적 Neel 결합 때문에 Hi는 커졌다.