• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.178-178
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• 2010

With the scaling down of ULSI(Ultra Large Scale Integration) circuit of CMOS(Complementary Metal Oxide Semiconductor)based electronic devices, the electronic devices become more faster and smaller size that are promising field of semiconductor market. However, very narrow line width has some disadvantages. For example, because of narrow line width, deposition of conformal and thin barrier is difficult. Besides, proportion of barrier width is large, thus resistance is high. Conventional PVD(Physical Vapor Deposition) thin films are not able to gain a good quality and conformal layer. Hence, in order to get over these side effects, deposition of thin layer used of ALD(Atomic Layer Deposition) is important factor. Furthermore, it is essential that copper atomic diffusion into dielectric layer such as silicon oxide and hafnium oxide. If copper line is not surrounded by diffusion barrier, it cause the leakage current and devices degradation. There are some possible methods for improving the these secondary effects. In this study, TaNx, is used of Tertiarybutylimido tris (ethylamethlamino) tantalum (TBITEMAT), was deposited on the 24nm sized trench silicon oxide/silicon bi-layer substrate with good step coverage and high quality film using plasma enhanced atomic layer deposition (PEALD). And then copper was deposited on TaNx barrier using same deposition method. The thickness of TaNx was 4~5 nm. TaNx film was deposited the condition of under $300^{\circ}C$ and copper deposition temperature was under $120^{\circ}C$, and feeding time of TaNx and copper were 5 seconds and 5 seconds, relatively. Purge time of TaNx and copper films were 10 seconds and 6 seconds, relatively. XRD, TEM, AFM, I-V measurement(for testing leakage current and stability) were used to analyze this work. With this work, thin barrier layer(4~5nm) with deposited PEALD has good step coverage and good thermal stability. So the barrier properties of PEALD TaNx film are desirable for copper interconnection.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.257.1-257.1
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• 2014

We investigated characteristics of ITO/Ag-Pd-Cu (APC)/ITO multilayer electrodes prepared by direct current magnetron sputtering for use as an anode in organic solar cells (OSCs). To optimize electrical properties of ITO/APC/ITO multilayer, we fabricated the ITO/APC/ITO multilayer at a fixed ITO thickness of 30 nm as a function of APC thickness. Compare to the surface of Ag layer on ITO, the APC had a smooth surface morphology. At optimized APC thickness of 12 nm, the ITO/APC/ITO multilayer exhibited a sheet resistance of $6{\Omega}/square$ and optical transmittance of 84.15% at a wavelength of 550 nm which is comparable to conventional ITO/Ag/ITO multilayer. However, the APC-based ITO multilayer showed a higher average transmittance in a visible region than the Ag-based ITO multilayer. The higher average transmittance of ITO/APC/ITO multilayer indicated the multilayer is suitable anode for organic solar cells with P3HT:PCBM active layer. OSCs fabricated on the optimized ITO/ACP/ITO multilayer exhibited a better performance with a fill factor of 64.815%, a short circuit current of $8.107mA/cm^2$, an open circuit voltage of 0.59 V, and power conversion efficiency (3.101%) than OSC with ITO/Ag/ITO multilayer (2.8%).

• 한국미생물·생명공학회지
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• 제1권1호
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• pp.37-42
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• 1973

본실험에서 얻어진 결과를 요약하면 다음과 같다. 1) Inulin을 분해하는 효소를 생산하는 Aspergillus속 1주를 선별하였다. 2) 선별된 묘주효소의 E.P차에 의한 침전은 pH8~5에서 효소단백질이 다량 회수되었다. 3) 선별된 묘주가 분비하는 Inulase활성최적 pH는 3.0부근이 었다. 4) 선별된 묘주의 Inulin 분해효소의 활성최적 온도는 $55^{\circ}C$였다. 5) 본 Sample효소의 열에 대한 안정성은 $50^{\circ}C$에서 10분간 열처리 하여도 안정하였다. 6) 본 Sample효소의 안정 pH는 2.5~4.5정도였다. 7) 본 Sample효소의 금속 ion에 대한 영향은 $Mg^{++}$는 Activator였으며 $Sb^{+++}$, $Bi^{+++}$.는 저농도에서는 inhibitor였으나 $10^{-4}$ M~$10^{-4}$ M 농도일때는 촉진시켰으며 더욱 금속 ion농도가 높아짐에 따라 inhibition하였으며 $Ag^{++}$, $Hg^{++}$의 경우에는 저농도($10^{-8}$ M)일 때는 Activation하였고 반면, 농도가 높아짐에 따라 저해효과가 더욱 컸으며 특히 $Hg^{++}$의 경우 $10^{-2}$ M 농도에서 약 80% 저해를 나타내었다.내었다.

• 자원환경지질
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• 제26권4호
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• pp.445-454
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• 1993

The Keumseongsan caldera is composed of the Cretaceous sedimentary rocks of the Gyeonesang Supergroup, volcanic rocks of the Yucheon Group and basic dykes. The Keumseongsan caldera is formed by subsidence of volcanic rocks, and arc fault developed late. Also, synistral strike-slip fault ($N60^{\circ}W$) developed. Volcanic rocks belong to subalkaline rocks and calcalkaline magma series. First tuffaceous breccia erupted before 71.4 Ma and cavity of magma chamber caused subsidence, which formed arc fault. Basaltic lava erupted at 71.4 Ma and residual fluids containing Fe, As, Pb, Zn and Cu metal elements built the Ohto deposits, which are dated to be 70.5 Ma based on K-Ar age for sericite. Tuffaceous breccia and tuff erupted between 70.5 and 67 Ma. When volcanic eruption became weakened, cavity in site of magma chamber brought subsidence. Rhyolite intruded and erupted at 67 Ma, and intrusive rhyolite intruded according to arc faults, also. Hydrothermal fluids containing Fe, As, Pb, Zn, Cu, Sb, Bi, Au and Ag formed the Tohyeon deposits. K-Ar age for sericite from the Tohyeon mine gives 66.0 Ma. Results of field exploration, geochemical analyses of volcanic rocks support mineralization possibility by volcanism. Especially, age of volcanism and mineralization are well in coincidence with results of K-Ar age dating. By these results, Ohto Cu mineralization is regarded to be associcated with basaltic rocks, while Tohyeon Cu mineralization with rhyolitic rocks.

• 한국재료학회지
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• 제8권6호
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• pp.484-492
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• 1998

단결정 Si기판위의 Co/Ti 이중층으로부터 형성된 Co 실리사이드의 에피텍셜 성장기구에 대하여 조사하였다. 실리사이드화 과정중 Ti원자들이 저온상의 CoSi결정구조의 tetrahedral site들을 미리 점유해 있음으로 인하여, $CoSi_{2}$ 결정구조로 바뀌는 과정에서 Si원자들이 나중에 제위치를 차지하기 어렵게 되는 효과 때문이다. 그리고 Ti중간층은 반응의 초기단계에 Co-Ti-O 삼원계 화합물을 형성하는데, 이 화합물은 실리사이드화 과정중 반응 제어층으로 작용하여 에피텍셜 실리사이드 형성에 중요한 역할을 한다. 최종 열처리 층구조 Ti oxide/Co-Ti-Si/epi/$Cosi_{2}$(100) Si 이었다.

• 한국표면공학회지
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• 제39권3호
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• pp.105-109
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• 2006

The effects of negative carbon ion beam energy on the bonding configuration, hardness and surface roughness of DLC film prepared by a direct metal ion beam deposition system were investigated. As the negative carbon ion beam energy increased from 25 to 150 eV, the $sp^3$ fraction of DLC films was increased from 32 to 67%, while the surface roughness was decreased. The films prepared at 150 eV showed the more flat surface morphology of the film than that of the film prepared under another ion beam energy conditions. Surface roughness of DLC film varied from 0.62 to 0.22 nm with depositing carbon ion beam energy. Surface nano-hardness increased from 12 to 57 Gpa when increasing the negative carbon ion beam energy from 25 to 150 eV, and then decreased when increasing the ion beam energy from 150 to 200 eV.

• ETRI Journal
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• 제42권5호
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• pp.781-789
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• 2020

In this study, an E-band low-noise amplifier (LNA) monolithic microwave integrated circuit (MMIC) has been designed using silicon-germanium 130-nm bipolar complementary metal-oxide-semiconductor technology to suppress unwanted signal gain outside operating frequencies and improve the signal gain and noise figures at operating frequencies. The proposed impedance-controllable filter has series (R_s) and parallel (R_p) resistors instead of a conventional inductor-capacitor (L-C) filter without any resistor in an interstage matching circuit. Using the impedance-controllable filter instead of the conventional L-C filter, the unwanted high signal gains of the designed E-band LNA at frequencies of 54 GHz to 57 GHz are suppressed by 8 dB to 12 dB from 24 dB to 26 dB to 12 dB to 18 dB. The small-signal gain S₂₁ at the operating frequencies of 70 GHz to 95 GHz are only decreased by 1.4 dB to 2.4 dB from 21.6 dB to 25.4 dB to 19.2 dB to 24.0 dB. The fabricated E-band LNA MMIC with the proposed filter has a measured S₂₁ of 16 dB to 21 dB, input matching (S₁₁) of -14 dB to -5 dB, and output matching (S₂₂) of -19 dB to -4 dB at E-band operating frequencies of 70 GHz to 95 GHz.

• Journal of Microbiology and Biotechnology
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• 제31권11호
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• pp.1591-1600
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• 2021

Streptomyces coelicolor is a filamentous soil bacterium producing several kinds of antibiotics. S. coelicolor abs8752 is an abs (antibiotic synthesis deficient)-type mutation at the absR locus; it is characterized by an incapacity to produce any of the four antibiotics synthesized by its parental strain J1501. A chromosomal DNA fragment from S. coelicolor J1501, capable of complementing the abs- phenotype of the abs8752 mutant, was cloned and analyzed. DNA sequencing revealed that two complete ORFs (SCO6992 and SCO6993) were present in opposite directions in the clone. Introduction of SCO6992 in the mutant strain resulted in a remarkable increase in the production of two pigmented antibiotics, actinorhodin and undecylprodigiosin, in S. coelicolor J1501 and abs8752. However, introduction of SCO6993 did not show any significant difference compared to the control, suggesting that SCO6992 is primarily involved in stimulating the biosynthesis of antibiotics in S. coelicolor. In silico analysis of SCO6992 (359 aa, 39.5 kDa) revealed that sequences homologous to SCO6992 were all annotated as hypothetical proteins. Although a metalloprotease domain with a conserved metal-binding motif was found in SCO6992, the recombinant rSCO6992 did not show any protease activity. Instead, it showed very strong β-glucuronidase activity in an API ZYM assay and toward two artificial substrates, p-nitrophenyl-β-D-glucuronide and AS-BI-β-D-glucuronide. The binding between rSCO6992 and Zn²⁺ was confirmed by circular dichroism spectroscopy. We report for the first time that SCO6992 is a novel protein with β-glucuronidase activity, that has a distinct primary structure and physiological role from those of previously reported β-glucuronidases.

• 한국수산과학회지
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• 제57권3호
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• pp.203-208
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• 2024

Fifteen cultured frozen abalone Haliotis discus hannai samples were purchased from supermarkets, traditional markets, online markets, and processing factories throughout Korea for the safety assessment of microbiological and chemical hazards. Sanitary-indicative (total viable bacteria, coliforms, and Escherichia coli) and pathogenic (Staphylococcus aureus, Salmonella spp., Listeria monocytogenes, Vibrio parahaemolyticus, Clostridium perfringens, and Enterohemorrhagic E. coli) bacterial contamination levels were assessed quantitatively or qualitatively. Additionally, heavy metal content (lead, cadmium, and total mercury) and radioactivity (¹³⁴CS+¹³⁷CS, ¹³¹I) were quantitatively assessed. The total viable bacterial count was 4.3×10² CFU/g, while coliform count was 50 CFU/g. E. coli was not detected in any of the samples (count < 10 CFU/g). All six pathogenic bacteria tested negative qualitatively. The average lead, cadmium, and total mercury contamination levels in the cultured frozen abalone were 0.100±0.057, 0.145±0.061, and 0.015±0.001 mg/kg, respectively. Moreover, none of the samples were radioactive. According to the results of this study, cultured frozen abalones distributed in all types of markets were safe from all microbiological and chemical hazards.

• 한국작물학회지
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• 제40권1호
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• pp.98-102
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• 1995

튀김옥수수의 popping은 거의 일정한 방향성을 가지고 파열되며 튀김후의 형태도 항상 일정하게 이루어지는 원인을 규명하고자 본 시험을 수행하였다. 시험에 앞서 이와 같은 원인이 과피의 선단부와 기부의 두께 차이에 있기 때문이라는 가정을 설정하고 이를 증명하기 위하여 과피를 각 부위별로 제거처리를 하거나 배를 제거후 popping했을 때 나타낸 반응을 검토한 결과로 얻은 튀김옥수수의 파열방향성 및 튀김후의 형태를 결정하는 요인에 대한 해석은 다음과 같다 1. 기부의 과피는 선단부의 과피보다 유의하게 두꺼웠다. 2. 가열로 종실 내부의 수분압력이 한계에 도달하면 과피가 상대적으로 않은 선단부에서 파열이 이루어지는데, 이때 기부의 과피는 선단부 과피를 끌어당겨주므로（bi-metal 원리） 항상 일정한 파열방향 및 튀김형태로 popping 된다. 3. 기부의 과피를 제기하면 선단부의 과피를 끌어 당겨주는 기부의 중심이 상실되기 때문에 불규칙 한 popping이 이루어 진다. 4. 배를 제거하면 무처리와 같이 일정한파열방향성 및 튀김형태는 유지되나 부피는 적었다. 따라서 배는 기부로 방출되는 수분을 차단하는 역할을 담당하고 있는 것으로 판단되었다. 5. 선단부 과피 및 전과피를 제거하면 모든 수분의 방출이 허용되어 popping이 전혀 이루어지지 않았다. 6. 튀김부피의 변화는 기부과피 제거>무처리>역제거>전과피 제거>선단부 과피제거의 순이었다. 7. 따라서 popping시 일정한 파열방향성 및 튀김형태를 갖게 하는 원인은 선단부와 기부 과피의 두께가 서로 다르기 때문인 것으로 판단되었다.된다.벼 보다는 IR62829A/청청벼 조합이 전당 증가율 및 전분 감소율이 월등히 켰다. 5. 치상후 현미중 a-amylase활성에 있어 1대잡종벼가 양친 및 비교품종보다 활성이 커 잡종강세를 나타내었으며 발아율과 a-amylase 활성과는 고도의 정의 유의상관이 있었다. 6. 파종 10일후 묘의 생육에 있어서도 1대잡종벼가 양친이나 비교품종보다 건물중, 초장 등에서 잡종강세를 나타내었으며 묘의 생육과 a-amylase 활성간에는 유의한 정의상관이 있었다./TEX>, RH 50%)한 벼는 2년반 저장한 벼도 밥맛의 변화가 거의 없었다. 5. 1988년산 및 1989년산 일반계를 10분도와 12분도로 도정하였을 때 도정도에 따른 밥맛의 차이는 없었다.X>$CoO_x$는 $Co_3O_4$로 존재하고, 반응 전의 경우에는 이와는 다른 chemical state를 보여주었다. XRD 및 XPS 결과를 바탕으로, 촉매표면에 존재하는 $Co_3O_4$의 외부표면이 $Co_2TiO_4$와 $CoTiO_3$ 같은 $CoTiO_x$로 encapsulation되어 있는 모델구조를 제안할 수 있고, 이는 반응시간의 함수로 나타나는 촉매활성에 있어서 전이영역의 존재를 잘 설명할 수 있을 뿐만 아니라, XRD와 XPS에서 얻어진 촉매의 물리화학적인 특성을 잘 반영할 수 있다. 나타냈고, 골격근과 눈 조직에서 피루브산에 대한 LDH의 친화력이 상당히 크므로 LDH가 혐기적 조건에서 효율적으로 기능을 하는 것으로 사료된다.5) and