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Laser patterning process for a-Si:H single junction module fabrication (레이저 가공에 의한 비정질 실리콘 박막 태양전지 모듈 제조)

  • Lee, Hae-Seok;Eo, Young-Joo;Lee, Heon-Min;Lee, Don-Hee
    • 한국신재생에너지학회:학술대회논문집
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    • 2007.11a
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    • pp.281-284
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    • 2007
  • Recently, we have developed p-i-n a-Si:H single junction thin film solar cells with RF (13.56MHz) plasma enhanced chemical vapor deposition (PECVD) system, and also successfully fabricated the mini modules ($>300cm^2$), using the laser patterning technique to form an integrated series connection. The efficiency of a mini module was 7.4% ($Area=305cm^2$, Isc=0.25A, Voc=14.74V, FF=62%). To fabricate large area modules, it is important to optimise the integrated series connection, without damaging the cell. We have newly installed the laser patterning equipment that consists of two different lasers, $SHG-YVO_4$ (${\lambda}=0.532{\mu}m$) and YAG (${\lambda}=1.064{\mu}m$). The mini-modules are formed through several scribed lines such as pattern-l (front TCO), pattern-2 (PV layers) and pattern-3 (BR/back contact). However, in the case of pattern-3, a high-energy part of laser shot damaged the textured surface of the front TCO, so that the resistance between the each cells decreases due to an incomplete isolation. In this study, the re-deposition of SnOx from the front TCO, Zn (BR layer) and Al (back contact) on the sidewalls of pattern-3 scribed lines was observed. Moreover, re-crystallization of a-Si:H layers due to thermal damage by laser patterning was evaluated. These cause an increase of a leakage current, result in a low efficiency of module. To optimize a-Si:H single junction thin film modules, a laser beam profile was changed, and its effect on isolation of scribed lines is discussed in this paper.

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The Influence of He flow on the Si etching procedure using chlorine gas

  • Kim, J.W.;Park, J.H.;M.Y. Jung;Kim, D.W.;Park, S.S.
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.65-65
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    • 1999
  • Dry etching technique provides more easy controllability on the etch profile such as anisotropic etching than wet etching process and the results of lots of researches on the characterization of various plasmas or ion beams for semiconductor etching have been reported. Chlorine-based plasmas or chlorine ion beam have been often used to etch several semiconductor materials, in particular Si-based materials. We have studied the effect of He flow rate on the Si and SiO2 dry etching using chlorine-based plasma. Experiments were performed using reactive ion etching system. RF power was 300W. Cl2 gas flow rate was fixed at 58.6 sccm, and the He flow rate was varied from 0 to 120 sccm. Fig. 1 presents the etch depth of si layer versus the etching time at various He flow rate. In case of low He flow rate, the etch rate was measured to be negligible for both Si and SiO2. As the He flow increases over 30% of the total inlet gas flow, the plasma state becomes stable and the etch rate starts to increase. In high Ge flow rate (over 60%), the relation between the etch depth and the time was observed to be nearly linear. Fig. 2 presents the variation of the etch rate depending on the He flow rate. The etch rate increases linearly with He flow rate. The results of this preliminary study show that Cl2/He mixture plasma is good candidate for the controllable si dry etching.

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Numerical analysis and horizontal bearing capacity of steel reinforced recycled concrete columns

  • Ma, Hui;Xue, Jianyang;Liu, Yunhe;Dong, Jing
    • Steel and Composite Structures
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    • v.22 no.4
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    • pp.797-820
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    • 2016
  • This paper simulates the hysteretic behavior of steel reinforced recycled concrete (SRRC) columns under cyclic loads using OpenSees software. The effective fiber model and displacement-based beam-column element in OpenSees is applied to each SRRC columns. The Concrete01 material model for recycled aggregate concrete (RAC) and Steel02 material model is proposed to perform the numerical simulation of columns. The constitutive models of RAC, profile steel and rebars in columns were assigned to each fiber element. Based on the modelling method, the analytical models of SRRC columns are established. It shows that the calculated hysteresis loops of most SRRC columns agree well with the test curves. In addition, the parameter studies (i.e., strength grade of RAC, stirrups strength, steel strength and steel ratio) on seismic performance of SRRC columns were also investigated in detail by OpenSees. The calculation results of parameter analysis show that SRRC columns suffered from flexural failure has good seismic performance through the reasonable design. The ductility and bearing capacity of columns increases as the increasing magnitude of steel strength, steel ratio and stirrups strength. Although the bearing capacity of columns increases as the strength grade of RAC increases, the ductility and energy dissipation capacity decreases gradually. Based on the test and numerical results, the flexural failure mechanism of SRRC columns were analysed in detail. The computing theories of the normal section of bearing capacity for the eccentrically loaded columns were adopted to calculate the nominal bending strength of SRRC columns subjected to vertical axial force under lateral cyclic loads. The calculation formulas of horizontal bearing capacity for SRRC columns were proposed based on their nominal bending strength.

Structural Optimization of Active Vehicle Suspension Systems (능동형 차량 현가장치의 성능 향상을 위한 구조 최적화)

  • 김창동;정의봉
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.17 no.6
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    • pp.1381-1388
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    • 1993
  • This paper presents a method for the simultaneous optimal design of structural and control systems. Sensitivities of performance index with respect to structural design variables are analyzed. The structural design variables are optimized to minimize the performance index by use of conjugate gradient method. The method is applied to a half model of an active vehicle suspension system with elastic body moving on a randomly profiled road. The suspension control force of an optimally controlled system in the presence of measurement errors are calculated by use of linear quadratic Gaussian control theory and Kalman filter theory. The performance index contains ride comfort, road holding and working space of suspension. The structural design variables taken are stiffness, daming properties and the position of the suspension system. The random road profile considered as colored noise is shaped from white noise by use of shaping filter. The performance of an optimal simultaneous structure/control system is compared with that of an optimal controlled system.

Design of Variable Optical Attenuators Incorporating Large Core Polymer Waveguides (대형 코어 폴리머 광도파로를 이용한 가변 광감쇠기 설계)

  • Cho, Su-Hong;Oh, Min-Choel
    • Korean Journal of Optics and Photonics
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    • v.16 no.3
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    • pp.254-260
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    • 2005
  • By incorporating large core polymer waveguides, which have been developed for increased alignment tolerance in passive fiber attachment, highly efficient variable optical attenuators are proposed. In order to find optimum device structures, 3-dimensional beam propagation method (BPM) simulations are performed. Heat distribution over the polymer film is calculated to find the 3-dimensional index profile data for the BPM simulation. Due to the small index contrast between the core and cladding materials in the large core waveguide, heat-induced radiation occurs for small heating power. While the ordinary VOA needs the temperature to change over $150^{\circ}C$ for 20 dB attenuation, the large core VOA requires only $70^{\circ}C$. In addition to the merit of passive fiber attachment, the proposed VOA has enhanced attenuation efficiency for the lower temperature change.

A Comparative Study on Structural Performance of Wind Turbine Composite Blades with Room-Temperature and Radiation Curing (상온 및 방사선 경화 복합재 풍력 블레이드의 구조성능 비교)

  • Jeon, Jae Heung;Kim, Sung Jun;Shin, Eui Sup
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.25 no.3
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    • pp.203-209
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    • 2012
  • In this paper, cross-sectional stiffnesses, static stresses, and dynamic natural frequencies are analyzed to examine the structural performance of wind turbine composite blades. The material properties of composite materials are based on room-temperature and radiation curing processes. The cross-sectional stiffnesses of composite blades are calculated by applying a beam theory with solid-profile cross sections. The wind turbine blades are modeled with a finite element program, and static analyses are carried out to check the maximum displacement and stress of the blades. In addition, dynamic analyses are performed to predict the rotating natural frequencies of the composite blades including the effects of centrifugal force. By comparing these analysis results, mainly owing to the material properties of composite materials, an improvement in the structural performance of the blades according to the curing process is investigated.

Surgical approach and orthodontic treatment of mandibular condylar osteochondroma

  • Yang, So Jin;Chung, Nam Hyung;Kim, Jong Ghee;Jeon, Young-Mi
    • The korean journal of orthodontics
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    • v.50 no.3
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    • pp.206-215
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    • 2020
  • Osteochondroma is a common benign tumor of bones, but it is rare in the mandibular condyle. With its outgrowth it manifests clinically as deviation of the mandible limitation of mouth opening, and facial asymmetry. After the tumor is diagnosed on the basis of clinical symptoms and radiographic examination including cone-beam computed tomography (CBCT) analysis, an appropriate surgery and treatment plan should be formulated. Herein, we present the case of a 44-year-old female patient who visited our dental hospital because her chin point had been deviating to the left side slowly but progressively over the last 3 years and she had difficulty masticating. Based on CBCT, she was diagnosed with skeletal Class III malocclusion accompanied by osteochondroma of the right mandibular condyle. Maxillary occlusal cant with the right side down was observed, but it was confirmed to be an extrusion of the molars associated with dental compensation. Therefore, after intrusion of the right molars with the use of temporary anchorage devices, sagittal split ramus osteotomy was used to remove the tumor and perform orthognathic surgery simultaneously. During 6 months after the surgery, continuous bone resorption and remodeling were observed in the condyle of the affected side, which led to a change in occlusion. During the postoperative orthodontic treatment, intrusive force and buccal torque were applied to the molars on the affected side, and a proper buccal overjet was created. After 18 months, CBCT revealed that the rate of bone absorption was continuously reduced, bone corticalization appeared, and good occlusion and a satisfying facial profile were achieved.

Pavement condition assessment through jointly estimated road roughness and vehicle parameters

  • Shereena, O.A.;Rao, B.N.
    • Structural Monitoring and Maintenance
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    • v.6 no.4
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    • pp.317-346
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    • 2019
  • Performance assessment of pavements proves useful, in terms of handling the ride quality, controlling the travel time of vehicles and adequate maintenance of pavements. Roughness profiles provide a good measure of the deteriorating condition of the pavement. For the accurate estimates of pavement roughness from dynamic vehicle responses, vehicle parameters should be known accurately. Information on vehicle parameters is uncertain, due to the wear and tear over time. Hence, condition monitoring of pavement requires the identification of pavement roughness along with vehicle parameters. The present study proposes a scheme which estimates the roughness profile of the pavement with the use of accurate estimates of vehicle parameters computed in parallel. Pavement model used in this study is a two-layer Euler-Bernoulli beam resting on a nonlinear Pasternak foundation. The asphalt topping of the pavement in the top layer is modeled as viscoelastic, and the base course bottom layer is modeled as elastic. The viscoelastic response of the top layer is modeled with the help of the Burgers model. The vehicle model considered in this study is a half car model, fitted with accelerometers at specified points. The identification of the coupled system of vehicle-pavement interaction employs a coupled scheme of an unbiased minimum variance estimator and an optimization scheme. The partitioning of observed noisy quantities to be used in the two schemes is investigated in detail before the analysis. The unbiased minimum variance estimator (MVE) make use of a linear state-space formulation including roughness, to overcome the linearization difficulties as in conventional nonlinear filters. MVE gives estimates for the unknown input and fed into the optimization scheme to yield estimates of vehicle parameters. The issue of ill-posedness of the problem is dealt with by introducing a regularization equivalent term in the objective function, specifically where a large number of parameters are to be estimated. Effect of different objective functions is also studied. The outcome of this research is an overall measure of pavement condition.

The Modification of Magnetic Properties of Co73Pt27-TiO2 Perpendicular Magnetic Recording Media with Ga+ Ion Irradiation (Ga+ 이온 조사를 통한 Co73Pt27-TiO2 수직자기 기록매체의 자기적 특성 변화)

  • Kim, Sung-Dong;Park, Jin-Joo
    • Journal of the Korean Magnetics Society
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    • v.17 no.6
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    • pp.221-225
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    • 2007
  • The effects of $Ga^+$ ion irradiation on the magnetic properties of the $Co_{73}Pt_{27}-TiO_2$ perpendicular magnetic recording media were investigated. As $Ga^+$ ion dose increased from $1\times10^{15}ions/cm^2\;to\;30\times10^{15}ions/cm^2$, the perpendicular magnetic anisotropy was degraded and no longer observed above $20\times10^{15}ions/cm^2$ dose. The deterioration of the perpendicular magnetic anisotropy and ferromagnetic properties can be attributed to the concentration profile change due to Ga+ ion implantation. The magnetic islands of $70\times70nm^2\;and\;100\times100nm^2$ size were successfully fabricated with $Ga^+$ ion irradiation.

고밀도 유도 결합형 플라즈마를 이용한 Mo 건식 식각 특성

  • 성연준;이도행;이용혁;염근영
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.126-126
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    • 1999
  • 본 실험의 목적은 FED의 상부, 하부 전극으로 사용되는 Mo를 건식, 습식 식각함으로써 DED 소자의 공정을 개발하는 것이다. Mo는 $261^{\circ}C$의 높은 융점을 지니고 있으며, 우수한 열적 안정성과 비교적 낮은 비저항을 가지는 재료로써 FED와 같은 전계 방출 소자의 cathod 팁 및 전극물질로 사용되어지는 가장 보편적인 물질이다. FED와 같은 전계방출소자가 갖추어야 할 요건은 전자 방출 영역이 소자 동작시 변형되지 않아야 하고, 기계적 ,화학적, 열적 내구성이 좋아야 함인데 이러한 요건을 충족시킬 수 있고 가장 범용적으로 사용되는 물질이 Mo이다. 실험에서 사용된 Mo는 DC magnetron sputter를 사용하여 Ar 가스를 첨가하여 5mTorr하에서 Si 기판위에 증착속도를 300$\AA$/min로 하여 1.6$\mu\textrm{m}$ 증착하였다. 본 실험의 Mo 식각은 고밀도 플라즈마원인 ICP를 이용하였다. 식각특성은 식각 가스조합, inductive power, bias voltage, 공정 압력의 다양한 공정 변수에 따른 식각특성 변화를 관찰하였다. 식각시 chlorine 가스를 주요 식각 가스로 사용하고 BCl3, O2, Ar을 첨가가스로 사용하였으며, inductive power는 300-600, bias voltage는 120-200V 사용하였고 압력은 15-30mTorr, 기판온도는 7$0^{\circ}C$로 유지하였으며 식각마스크로는 electron-beam evaporator로 1$\mu\textrm{m}$ 증착한 SiO2를 patterning하여 사용하였다. 식각속도는 stylus profiler를 이용하여 측정하였으며 식각후 profile은 scanning electron microscopy (SEM)을 통하여 관찰하였다. 실험 결과 순수한 Cl2 BCl3 가스만을 사용한 경우 보다는 Cl2 가스에 O2를 첨가하였을 때 좋은 선택비를 얻었다. 또한, inductive power와 bias voltage, Mo의 식각속도의 적절한 조절을 통해 SiO2에 대한 선택도를 변화시킬 수 있었다. Cl2:O2비를 1:1로 하고 400W/-150V, 20mTorr의 압력, 7$0^{\circ}C$ 기판온도에서 식각시 200$\AA$/min의 Mo 식각속도, SiO2와의 선택비 8:1을 얻을 수 있었다. 또한 실제 FED 소자 구조형성에 적용한 결과 비등방적인 식각형상을 형성할 수 있었다.

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