• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.5
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• pp.416-421
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• 2011

Nowadays, the increasing demands upon mobile devices such as wireless sensor networks and the recent advent of low power electrical devices such as MEMS make such renewable power sources attractive. A vibration-driven MEMS lead zirconate titanate $Pb(Zr,Ti)O_3$ (PZT) cantilever device is developed for energy harvesting application. This paper presents a piezoelectric based energy harvester which is suitable for power generating from conventional vibration and has in providing energy for low power electron ic devices. The PZT cantilever is used d33 mode to get the electrical power. The PZT cantilever based energy harvester with the dimension of 7 mm${\times}$3 mm${\times}$0.03 mm is fabricated using micromachining technologies. This PZT cantilever has the mechanical resonance frequency with a 900 Hz. With these conditions, we get experimentally the 37 uW output power from this device with the application of 1g acceleration using the 900 Hz vibration. From this study, we show the feasibility of one of energy harvesting candidates using PZT based structure. This PZT energy harvester could be used for various applications such a batteryless micro sensors and micro power generators.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.8
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• pp.1430-1435
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• 2007

We developed a 440MHz surface acoustic wave (SAW) microsensor integrated with pressure-temperature sensors and ID tag. Two piezoelectric substrates were bonded, in which ${\sim}150\;{\mu}m$ cavity was structured. Four sides were completely sealed by JSR photoresist (PR). Pressure sensor was placed on the top substrate, whereas ill tag and temperature sensor were placed on the bottom substrate. Using network analyzer, the developed microsensor was wirelessly tested. Sharp reflection peaks with high S/N ratio, small signal attenuation, and small spurious peaks were observed. All the reflection peaks were well matched with the coupling of mode (COM) simulation results. With a 10mW RF power from the network analyzer, a ${\sim}1$ meter readout distance was observed. Eight sharp ON reflection peaks were observed for ID tag. Temperature sensor was characterized from $20^{\circ}C$ to $200^{\circ}C$. A large phase shift per unit temperature change was observed. The evaluated sensitivity was ${\sim}10^{\circ}/^{\circ}C$.

• Journal of the Microelectronics and Packaging Society
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• v.12 no.3 s.36
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• pp.267-274
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• 2005

This paper presents the fabrication of surface acoustic wave (SAW)-based pressure sensor for long-term stable mechanical compression force measurement. SAW pressure sensor has many attractive features for practical pressure measurement: no battery requirement, wireless pressure detection especially at hazardous environments, and easy other functionality integrations such as temperature, humidity, and RFID. A $41^{\circ}$ YX $LiNbO_3$ piezoelectric substrate was used because of its high SAW propagation velocity and large values of electromechanical coupling factors $K^2$. A silicon substrate with $\~200{\mu}m$ deep cavity was bonded to the diaphragm with epoxy, in which gold was covered all over the inner cavity in order to confine electromagnetic energy inside the sensor, and provide good isolation of the device from its environment. The reflection coefficient $S_{11}$ was measured using network analyzer. High S/N ratio, sharp reflected peaks, and clear separation between the peaks were observed. As a mechanical compression force was applied to the diaphragm from top with extremely sharp object, the diaphragm was bended, resulting in the phase shifts of the reflected peaks. The phase shifts were modulated depending on the amount of applied mechanical compression force. The measured $S_{11}$ results showed a good agreement with simulated results obtained from equivalent admittance circuit modeling.